| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/04/2006 | US7022608 Method and composition for the removal of residual materials during substrate planarization |
| 04/04/2006 | US7022607 Mask and its manufacturing method, and method for manufacturing semiconductor device |
| 04/04/2006 | US7022606 Underlayer film for copper, and a semiconductor device including the underlayer film |
| 04/04/2006 | US7022605 Atomic layer deposition methods |
| 04/04/2006 | US7022604 Method of forming spatial regions of a second material in a first material |
| 04/04/2006 | US7022603 Method for fabricating semiconductor device having stacked-gate structure |
| 04/04/2006 | US7022602 Nitrogen-enriched low-k barrier layer for a copper metallization layer |
| 04/04/2006 | US7022601 Method of manufacturing a semiconductor device |
| 04/04/2006 | US7022600 Method of forming dual damascene interconnection using low-k dielectric material |
| 04/04/2006 | US7022599 Method of manufacturing semiconductor devices |
| 04/04/2006 | US7022598 Method of producing multilayer interconnection structure |
| 04/04/2006 | US7022597 Method for manufacturing gallium nitride based transparent conductive oxidized film ohmic electrodes |
| 04/04/2006 | US7022596 Method for forming rectangular-shaped spacers for semiconductor devices |
| 04/04/2006 | US7022595 Method for the selective formation of a silicide on a wafer using an implantation residue layer |
| 04/04/2006 | US7022594 Manufacturing method which prevents abnormal gate oxidation |
| 04/04/2006 | US7022593 SiGe rectification process |
| 04/04/2006 | US7022592 Ammonia-treated polysilicon semiconductor device |
| 04/04/2006 | US7022591 Method of fabricating a polysilicon thin film |
| 04/04/2006 | US7022590 Method for forming a semiconductor device using crystals of crystal growth |
| 04/04/2006 | US7022589 Thermal treatment equipment and method for heat-treating |
| 04/04/2006 | US7022588 Method of manufacturing an electronic component and electronic component obtained by means of said method |
| 04/04/2006 | US7022587 Method for producing chips from wafers of low thickness |
| 04/04/2006 | US7022586 Method for recycling a substrate |
| 04/04/2006 | US7022585 Method for making thin film devices intended for solar cells or silicon-on-insulator (SOI) applications |
| 04/04/2006 | US7022584 Method of manufacturing a shallow trench isolation structure |
| 04/04/2006 | US7022583 Method of forming a shallow trench isolation device to prevent kick effect |
| 04/04/2006 | US7022582 Microelectronic process and structure |
| 04/04/2006 | US7022581 Interdigitaded capacitors |
| 04/04/2006 | US7022580 Semiconductor device and method for manufacturing the same |
| 04/04/2006 | US7022579 Method for filling via with metal |
| 04/04/2006 | US7022578 Heterojunction bipolar transistor using reverse emitter window |
| 04/04/2006 | US7022577 Method of forming ultra shallow junctions |
| 04/04/2006 | US7022576 Method of manufacturing a semiconductor device |
| 04/04/2006 | US7022575 Manufacturing method of semiconductor device |
| 04/04/2006 | US7022574 Multi-voltage level semiconductor device and its manufacture |
| 04/04/2006 | US7022573 Stack gate with tip vertical memory and method for fabricating the same |
| 04/04/2006 | US7022572 Manufacturing method for integrated circuit having disturb-free programming of passive element memory cells |
| 04/04/2006 | US7022571 Quantum structure and forming method of the same |
| 04/04/2006 | US7022570 Methods of forming hemispherical grained silicon on a template on a semiconductor work object |
| 04/04/2006 | US7022569 Lower electrode contact structure and method of forming the same |
| 04/04/2006 | US7022568 Semiconductor integrated circuit device and process for manufacturing the same |
| 04/04/2006 | US7022567 Method of fabricating self-aligned contact structures |
| 04/04/2006 | US7022566 Integrated radio frequency circuits |
| 04/04/2006 | US7022565 Method of fabricating a trench capacitor of a mixed mode integrated circuit |
| 04/04/2006 | US7022564 Method of forming a low thermal resistance device and structure |
| 04/04/2006 | US7022563 Semiconductor integrated circuit device and a method of manufacturing the same |
| 04/04/2006 | US7022562 Field-effect transistor with horizontal self-aligned gates and the production method therefor |
| 04/04/2006 | US7022561 CMOS device |
| 04/04/2006 | US7022560 Method to manufacture high voltage MOS transistor by ion implantation |
| 04/04/2006 | US7022559 MOSFET gate electrodes having performance tuned work functions and methods of making same |
| 04/04/2006 | US7022558 Method of manufacturing an active matrix substrate and an image display device using the same |
| 04/04/2006 | US7022557 Thin film transistor array substrate and manufacturing method thereof |
| 04/04/2006 | US7022556 Exposure device, exposure method and method of manufacturing semiconductor device |
| 04/04/2006 | US7022555 Methods of forming a semiconductor memory device |
| 04/04/2006 | US7022554 Method for fabricating circuit module |
| 04/04/2006 | US7022553 Compact system module with built-in thermoelectric cooling |
| 04/04/2006 | US7022552 Semiconductor device and method for fabricating semiconductor device |
| 04/04/2006 | US7022551 Quad flat flip chip packaging process and leadframe therefor |
| 04/04/2006 | US7022550 Methods for forming aluminum-containing p-contacts for group III-nitride light emitting diodes |
| 04/04/2006 | US7022549 Method for connecting an integrated circuit to a substrate and corresponding arrangement |
| 04/04/2006 | US7022548 Method for making a semiconductor die package |
| 04/04/2006 | US7022546 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 04/04/2006 | US7022545 Production method of SiC monitor wafer |
| 04/04/2006 | US7022544 High speed photodiode with a barrier layer for blocking or eliminating slow photonic carriers and method for forming same |
| 04/04/2006 | US7022542 Manufacturing method of a microelectromechanical switch |
| 04/04/2006 | US7022541 Patterned growth of single-walled carbon nanotubes from elevated wafer structures |
| 04/04/2006 | US7022540 Cantilever sensor and fabrication method thereof |
| 04/04/2006 | US7022538 Display device and manufacturing method for the same |
| 04/04/2006 | US7022537 Liquid crystal display device and fabricating method thereof, and reworking method of alignment film using the same |
| 04/04/2006 | US7022536 Thin film transistor-liquid crystal display and manufacturing method therefor |
| 04/04/2006 | US7022535 Thin film forming device, method of forming a thin film, and self-light-emitting device |
| 04/04/2006 | US7022534 Optimal bank height for inkjet printing |
| 04/04/2006 | US7022533 Substrate mapping |
| 04/04/2006 | US7022532 Method of making spin-injection devices on silicon material for conventional BiCMOS technology |
| 04/04/2006 | US7022531 Semiconductor memory device and method of fabricating the same |
| 04/04/2006 | US7022530 Semiconductor device and method for fabricating the same |
| 04/04/2006 | US7022519 Process control; culture product |
| 04/04/2006 | US7022495 Method for sorting antifungal molecules acting on the glucanosyltransferase activity |
| 04/04/2006 | US7022466 Performing pattern exposure by selectively irradiating resist film with extreme UV of a wavelength of a 1 nm through 30 nm band at exposure energy of 5 mJ/cm2 or less; forming a resist pattern by developing resist film after pattern exposure |
| 04/04/2006 | US7022465 Method in connection with the production of a template and the template thus produced |
| 04/04/2006 | US7022463 Near-field exposure photoresist and fine pattern forming method using the same |
| 04/04/2006 | US7022457 Photoresists with hydroxylated, photoacid-cleavable groups |
| 04/04/2006 | US7022456 For producing semiconductor integrated- circuit elements, masks for integrated circuit production, printed wiring boards, liquid-crystal panels |
| 04/04/2006 | US7022455 Photoacid-labile polymers and photoresists comprising same |
| 04/04/2006 | US7022454 Binders; resolution of relief image |
| 04/04/2006 | US7022440 Plurality of non-straight lines that are inwardly arched and are formed from plural segments of plural ellipses that are arranged to surround the pattern; for forming a storage electrode of a capacitor of a semiconductor device |
| 04/04/2006 | US7022438 Fine contact aperture; overcoating transparent substrate with opaque pattern; phase shifting; photolithography |
| 04/04/2006 | US7022437 for use in a photolithographic apparatus includes a blank layer, a layer of patterned opaque material on a surface of the blank layer and a pellicle of perfluoropolyether (PFPE) liquid that covers the surface |
| 04/04/2006 | US7022436 alternating and attenuating phase shift masks that provide improved resolution of a photolithographic projection apparatus |
| 04/04/2006 | US7022418 Fabrication of stacked microelectronic devices |
| 04/04/2006 | US7022410 Combinations of resin compositions and methods of use thereof |
| 04/04/2006 | US7022399 Semiconductor device integrated multilayer wiring board |
| 04/04/2006 | US7022378 Annealing nitrided oxide layer in oxygen-free environment |
| 04/04/2006 | US7022261 Forming an aqueous solution containing soluble precursors of a sulfur-containing phosphor; generating an aerosol of droplets from above solution, heating droplets to form a particulate intermediate compound capable of being post-treated to form said sulfur-containing phosphor powder |
| 04/04/2006 | US7022255 Chemical-mechanical planarization composition with nitrogen containing polymer and method for use |
| 04/04/2006 | US7022249 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 04/04/2006 | US7022247 Process to form fine features using photolithography and plasma etching |
| 04/04/2006 | US7022246 Method of fabrication of MIMCAP and resistor at same level |
| 04/04/2006 | US7022244 Supplying fine drops; machining; atomizing liquids; heating with carrier gas; drying; distillation; aqueous solution of hydrogen fluoride for etching silica |
| 04/04/2006 | US7022216 Selectively removing a layer of electrolytically dissoluble metal such as copper overplate from a substrate such as a low-k dielectric interconnect |