Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2006
04/06/2006US20060070885 Chip interconnect and packaging deposition methods and structures
04/06/2006US20060070702 Substrate processing system for performing exposure process in gas atmosphere
04/06/2006US20060070639 Fluid delivery ring and methods for making and implementing the same
04/06/2006US20060070522 Desublimator for aluminum chloride
04/06/2006US20060070494 Reoxidization of reduced fine particles is suppressed; reduced fine particles (FeO fine particles) are formed by embedding metal oxide fine particles (Fe2O3 fine particles) fixed on a p type silicon semiconductor substrate into a silicon oxidized film, and carrying out a heat treatment in a reducing gas
04/06/2006US20060070444 Semiconductor acceleration sensor and manufacturing method thereof
04/06/2006US20060070441 Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof
04/06/2006DE4230648B4 Ladungsverschiebeelement und Verfahren zu dessen Herstellung Charge transfer element and process for its preparation
04/06/2006DE4026121B4 Leitfähigkeitsmodulations-MOSFET A conductivity modulation type MOSFET
04/06/2006DE19964099B4 Verfahren zur Herstellung dreidimensional angeordneter Leit- und Verbindungsstrukturen für Volumen- und Energieströme A process for producing three-dimensionally arranged leading and connecting structures for volume and energy flows
04/06/2006DE19505947B4 Halbleitervorrichtung mit verbesserter Barrierenmetallschicht in einer Elektrode oder Verdrahtungsschicht A semiconductor device with improved barrier metal layer in an electrode or wiring layer
04/06/2006DE112004000699T5 Verfahren zur Herstellung einer Metallgatestruktur durch Abgleichen einer Austrittsarbeitsfunktion durch Siliziumeinbau A method of manufacturing a metal gate structure by adjusting a work function by silicon installation
04/06/2006DE102005046480A1 Vertical MOS transistor manufacturing method for switching converter, involves structuring auxiliary layer to form trench having side walls and extending to substrate, and fabricating insulated gate electrode on walls and substrate
04/06/2006DE102005046426A1 MRAM und Verfahren zu dessen Herstellung MRAM and methods for its preparation
04/06/2006DE102005046425A1 Array resistiver Speicherzellen und Verfahren zum Erfassen von Widerstandswerten solcher Zellen Array of resistive memory cells and method for detecting resistance values ​​of such cells
04/06/2006DE102005043913A1 Fabrication of doped semiconductor zone in semiconductor body for forming emitter or contact of vertical power semiconductor component, comprises introducing dopant particles to side of semiconductor body, irradiation and thermal treatment
04/06/2006DE102005005229A1 Electronic component e.g. CMOS-transistor, producing process, involves isolating dielectric layer from another layer on basis of oxide-containing material and etching former layer with etching solution from aqueous sulfuric acid
04/06/2006DE102004063690A1 Non-volatile memory device e.g. flash memory for mobile communication system and memory card for storing music, comprises pair of conductive sidewall spacers for trapping/detrapping charges formed, on pair of sidewall spacers
04/06/2006DE102004060669A1 Formation of wall oxide films in flash memory device by performing oxidation process in gas atmosphere comprising hydrogen and oxygen in in-situ steam generation oxidation mode
04/06/2006DE102004050476B3 Making wiring circuit panel, employs structured masking layers to define through-contact locations, with selective use of protective layers when depositing conductor structures
04/06/2006DE102004049246A1 Lateraler DMOS-Transistor und Verfahren zu seiner Herstellung A lateral DMOS transistor and method for its preparation
04/06/2006DE102004048332A1 Verfahren zur Herstellung einer Halbleiteranordnung, Halbleiteranordnung und Hochfrequenzschaltung A process for producing a semiconductor device, semiconductor device and high-frequency circuit
04/06/2006DE102004048202A1 Verfahren zur Vereinzelung von oberflächenmontierbaren Halbleiterbauteilen und zur Bestückung derselben mit Außenkontakten A process for the separation of surface mount semiconductor devices, and for fitting the same to external contacts
04/06/2006DE102004047730A1 Ein Verfahren zum Dünnen von Halbleitersubstraten zur Herstellung von dünnen Halbleiterplättchen A process for thinning of semiconductor substrates for the production of thin semiconductor wafers
04/06/2006DE102004047631A1 Verfahren zum Ausbilden eines Feldeffekttransistors mit einem verspannten Kanalgebiet A method of forming a field effect transistor with a strained channel region
04/06/2006DE102004047522B3 Halbleiterchip mit einer Metallbeschichtungsstruktur und Verfahren zur Herstellung desselben The same semiconductor chip with a metal coating structure and methods for preparing
04/06/2006DE102004047357A1 Elektrische Anordnung und Verfahren zum Herstellen einer elektrischen Anordnung Electrical arrangement and method for manufacturing an electrical assembly
04/06/2006DE102004047305A1 Dielectric production for condenser of memory cell in ferroelectric RAM, involves depositing growing up lead zirconium titanium trioxide-layer of nucleation layer, where base area of nucleation layer has specific length and breath
04/06/2006DE102004046697A1 Hochspannungsfestes Halbleiterbauelement mit vertikal leitenden Halbleiterkörperbereichen und einer Grabenstruktur sowie Verfahren zur Herstellung desselben Of the same high-voltage resistant semiconductor device having vertical type semiconductor areas of the body and a grave structure and methods for preparing
04/06/2006DE102004046483A1 Laminated structure production for capacitor, involves fabricating two layers from same metallic conductive layer on dielectric layer, and converting material of one layer into dielectric material by chemical reaction of gaseous phase
04/06/2006DE102004045956A1 Etching holder for use in etching system, has fixing unit that is adjustable, so that substrate is inserted into holder to form etching medium free area, and integrated radiation guidance beginning/ending at upper surface that limits area
04/06/2006DE102004045768A1 Semiconductor device`s e.g. diode, edge structure producing method, involves producing phosphorus zone in edge region of semiconductor body, and etching body in edge region to produce structure, where zone produces phosphorous concentration
04/06/2006DE102004045575A1 Ultraschalltransducer mit einem in der Lagerung angeordneten Sensor Ultrasonic transducer with a sensor disposed in the storage
04/06/2006DE102004021633B4 Verfahren zum Verbinden eines Halbleiterchips mit einem Chipträger und Anordnung mit einem Halbleiterchip und einem Chipträger A method of connecting a semiconductor chip with a chip carrier assembly and having a semiconductor chip and a chip carrier
04/06/2006DE10197037B4 Anordnung und Verfahren zum Anbringen eines Trägerfilms an einem Polierkopf Arrangement and method for attaching a carrier film to a polishing head
04/06/2006DE10145686B4 Vorrichtung zum berührungslosen Fördern eines Gegenstandes aus Glas oder Glaskeramik A device for the contactless conveyance of an article of glass or glass ceramic
04/06/2006DE10138659B4 Verfahren zur Herstellung einer Anordnung aus einem Halbleiterchip und einer damit verbundenen Leiterbahnstruktur A process for preparing an assembly of a semiconductor chip and an associated conductor track structure
04/06/2006DE10104267B4 Elektronisches Bauteil mit mindestens einer Isolationslage Electronic component with at least one layer of insulation
04/06/2006DE10030696B4 Integrierte Schaltungsanordnung mit zumindest einem vergrabenen Schaltungselement und einer Isolationsschicht sowie Verfahren zu deren Herstellung Integrated circuit arrangement with at least one circuit element and a buried insulating layer as well as processes for their preparation
04/06/2006CA2581670A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device
04/06/2006CA2581626A1 Method and apparatus for growing a group (iii) metal nitride film and a group (iii) metal nitride film
04/05/2006EP1643817A1 Etching solution, method of etching and printed wiring board
04/05/2006EP1643566A1 Process for producing light-emitting diode element emitting white light
04/05/2006EP1643560A1 Semiconductor device and method for manufacturing same
04/05/2006EP1643559A2 MOS-gated semiconductor device with top drain
04/05/2006EP1643558A1 Vertical power semiconductor device and method of making the same
04/05/2006EP1643555A2 Ferroelectric capacitor and its manufacturing method, and ferroelectric memory device
04/05/2006EP1643549A1 Method for producing vertical bipolar transistors and integrated circuit with vertical bipolar transistors
04/05/2006EP1643548A2 Method of detecting un-annealed ion implants
04/05/2006EP1643547A1 Preparation of group 12 and 13 metal compounds having low levels of oxygenated impurities
04/05/2006EP1643546A2 Method for manufacturing a nanostructure
04/05/2006EP1643545A1 Method of processing silicon wafer
04/05/2006EP1643544A1 Method for producing silicon epitaxial wafer and silicon epitaxial wafer
04/05/2006EP1643541A2 Apparatus and method for processing a substrate
04/05/2006EP1643306A1 Resist composition, multilayer body, and method for forming resist pattern
04/05/2006EP1643301A1 Partition-wall structure for forming a conductive pattern by ink jet printing
04/05/2006EP1643300A1 Barrier structure for forming a conductive pattern by ink jet printing
04/05/2006EP1643298A1 Method of manufacturing a liquid crystal display and a mask for use in same
04/05/2006EP1643257A1 Scan test design method, scan test circuit, scan test circuit insertion cad program, large-scale integrated circuit, and mobile digital device
04/05/2006EP1643232A1 Thin piece specimen preparing method and composite charged particle beam device
04/05/2006EP1643004A1 Treating device using raw material gas and reactive gas
04/05/2006EP1643000A1 Seed layer processes for MOCVD of ferroelectric thin films on high-K gate oxides
04/05/2006EP1642949A1 Polishing composition and method of polishing with the same
04/05/2006EP1642876A1 Aluminum nitride conjugate body and method of producing the same
04/05/2006EP1642679A1 Polishing apparatus
04/05/2006EP1642344A1 Back-contacted solar cells with integral conductive vias and method of making
04/05/2006EP1642339A1 Semiconductor device
04/05/2006EP1642336A1 Method for interconnecting active and passive components, and a resulting thin heterogeneous component
04/05/2006EP1642335A1 Integrated coolant circuit arrangement, operating method and production method
04/05/2006EP1642332A1 Die bonding
04/05/2006EP1642331A1 Integrated circuit arrangement with low-resistance contacts and method for production thereof
04/05/2006EP1642330A1 Planar magnetic tunnel junction substrate having recessed alignment marks
04/05/2006EP1642329A1 Process for producing low-k dielectric films
04/05/2006EP1642327A2 METHOD FOR GROWING SINGLE CRYSTAL GaN ON SILICON
04/05/2006EP1642326A2 Method for efficiently producing removable peripheral cards
04/05/2006EP1642325A2 Method and system for high volume transfer of dies to substrates
04/05/2006EP1642323A2 Wafer inspection device
04/05/2006EP1642174A2 Exposure method and apparatus, exposure mask, and device manufacturing method
04/05/2006EP1642171A1 Exposure mask, method of designing and manufacturing the same, exposure method and apparatus, pattern forming method, and device manufacturing method
04/05/2006EP1642162A2 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
04/05/2006EP1641958A2 Methods of forming a phosphorus doped silicon dioxide layer
04/05/2006EP1641957A2 Composite refractory metal carbide coating on a substrate and method for making thereof
04/05/2006EP1641908A1 Cleaning composition, method of cleaning semiconductor substrate, and method of forming wiring on semiconductor substrate
04/05/2006EP1641710A2 Micromechanical apparatus and method of forming a micromechanical device layer
04/05/2006EP1641597A1 Substrate polishing apparatus
04/05/2006EP1641558A2 Method and apparatus for increasing bulk conductivity of a ferroelectric material
04/05/2006EP1522090A4 Thermal processing system and configurable vertical chamber
04/05/2006EP1502288A4 Lithography laser with beam delivery and beam pointing control
04/05/2006EP1465636A4 Compositions and methods for enhancing corticosteriod delivery
04/05/2006EP1410436A4 Parallel, individually addressable probes for nanolithography
04/05/2006EP1397835B1 Method of controlling the crystal orientation of a composite structure
04/05/2006EP1392093B1 Method for manufacturing ceramic multilayered board
04/05/2006EP1342259A4 Semiconductor wafer processing to increase the usable planar surface area
04/05/2006EP1218688B1 Method and apparatus for three dimensional inspection of electronic components
04/05/2006EP0935816B1 Method of manufacturing a semiconductor device with a schottky junction
04/05/2006EP0896734B1 All-metal, giant magnetoresistive, solid-state component
04/05/2006CN2770286Y Halogen lamp assembly with integrated radiator
04/05/2006CN2770096Y Semiconductor substrate structure
04/05/2006CN2770088Y Silicon germanium/silicon three-dimensional integrated circuit active layer
04/05/2006CN2770087Y Device with gas adsorbing function