Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2006
04/13/2006US20060079016 Method of forming a seal between a housing and a diaphragm of a capacitance sensor
04/13/2006US20060079015 Manufacturing method of pickup device
04/13/2006US20060079014 Method of manufacturing an LED
04/13/2006US20060079013 Point source light-emitting diode and manufacturing method thereof
04/13/2006US20060079012 Method of manufacturing carbon nanotube field emission device
04/13/2006US20060079011 Methods for marking a bare semiconductor die
04/13/2006US20060079010 Transfer base substrate and method of semiconductor device
04/13/2006US20060079009 Fine-pitch electronic socket for temporary or permanent attachments
04/13/2006US20060079008 Inspection method of bonded status of ball in wire bonding
04/13/2006US20060079007 System, method, and medium for an endpoint detection scheme for copper low-dielectric damascene structures for improved dielectric and copper loss
04/13/2006US20060079006 Method for forming polarization reversal
04/13/2006US20060079005 Method for making a semiconductor device having a high-k gate dielectric
04/13/2006US20060079004 Method for electrical doping a semiconductor material with cesium
04/13/2006US20060078839 Heat treatment jig for semiconductor wafer
04/13/2006US20060078827 Method to restore hydrophobicity in dielectric films and materials
04/13/2006US20060078818 Near-field exposure photoresist and fine pattern forming method using the same
04/13/2006US20060078808 Method for measuring overlay and overlay mark used therefor
04/13/2006US20060078715 Bonding structure of device packaging
04/13/2006US20060078679 Vapor deposition using metal halide; removal by-products; using scavenger
04/13/2006US20060078407 System and method for reticle protection and transport
04/13/2006US20060078012 Optical element, optical system, laser device, exposure device, mask testing device and high polymer crystal processing device
04/13/2006US20060077749 Memory card structure and manufacturing method thereof
04/13/2006US20060077728 Method for fabricating flash memory device and structure thereof
04/13/2006US20060077712 Non-volatile semiconductor memory device, electronic card using the same and electronic apparatus
04/13/2006US20060077387 Apparatus, method and program for generating a recipe for an inspection tool
04/13/2006US20060077374 Step and repeat imprint lithography systems
04/13/2006US20060077365 Exposure method and apparatus
04/13/2006US20060077363 Correcting device, exposure apparatus, device production method, and device produced by the device production method
04/13/2006US20060077362 Exposure apparatus and device manufacturing method
04/13/2006US20060077336 Semiconductor device and method of manufacturing the same
04/13/2006US20060077274 Solid state image pickup device and its driving method
04/13/2006US20060076966 Probe card and contactor of the same
04/13/2006US20060076695 Semiconductor package with flash-absorbing mechanism and fabrication method thereof
04/13/2006US20060076689 Damascene processes for forming conductive structures
04/13/2006US20060076688 Semiconductor device having improved contact hole structure and method for fabricating the same
04/13/2006US20060076686 Method for manufacturing an electronic module, and an electronic module
04/13/2006US20060076685 Patterned copper structures wherein the copper is in contact with a liner material; formed by selectively capping the copper employing selective etching and/or selective electroplating
04/13/2006US20060076684 Post passivation interconnection schemes on top of the IC chips
04/13/2006US20060076680 Submicron contact fill using a CVD TiN barrier and high temperature PVD aluminum alloy deposition
04/13/2006US20060076678 Thick metal layer integrated process flow to improve power delivery and mechanical buffering
04/13/2006US20060076674 Semiconductor device
04/13/2006US20060076671 Semiconductor chip mounting wiring board, manufacturing method for same, and semiconductor module
04/13/2006US20060076659 Chip package structure, package substrate and manufacturing method thereof
04/13/2006US20060076657 Die attach paddle for mounting integrated circuit die
04/13/2006US20060076652 Method of forming a field effect transistor comprising a stressed channel region
04/13/2006US20060076651 Electronic device and method for fabricating the same
04/13/2006US20060076649 Substrate for stressed systems and method of making same
04/13/2006US20060076648 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
04/13/2006US20060076646 Apparatus and method for visible imaging using Darlington phototransistors
04/13/2006US20060076644 Nanowire filament
04/13/2006US20060076641 Methods of fabricating phase changeable semiconductor memory devices including multi-plug conductive structures and related devices
04/13/2006US20060076640 Semiconductor device
04/13/2006US20060076639 Schottky diodes and methods of making the same
04/13/2006US20060076637 Method and system for packaging a display
04/13/2006US20060076635 Magnetoresistive memory device assemblies, and methods of forming magnetoresistive memory device assemblies
04/13/2006US20060076634 Method and system for packaging MEMS devices with incorporated getter
04/13/2006US20060076630 Integrated Transistor devices
04/13/2006US20060076628 Integrated circuit with bulk and soi devices connected with an epitaxial region
04/13/2006US20060076624 Semiconductor substrate, method of manufacturing the same, semiconductor device, and method of manufacturing the same
04/13/2006US20060076623 High mobility plane CMOS SOI
04/13/2006US20060076620 Semiconductor device
04/13/2006US20060076619 Dielectric plug in mosfets to suppress short-channel effects
04/13/2006US20060076611 Semiconductor device and method of manufacturing the same
04/13/2006US20060076610 Semiconductor integrated circuit device with reduced leakage current
04/13/2006US20060076609 Electronic device including an array and process for forming the same
04/13/2006US20060076608 Cell structure of non-volatile memory device and method for fabricating the same
04/13/2006US20060076606 Method for simultaneous fabrication of a nanocrystal and non-nanocrystal device
04/13/2006US20060076604 Virtual ground memory array and method therefor
04/13/2006US20060076602 Dram cell pair and dram memory cell array
04/13/2006US20060076601 Dynamic random access memory structure
04/13/2006US20060076599 Semiconductor memory devices including offset active regions
04/13/2006US20060076597 Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers
04/13/2006US20060076593 Method to sputter deposit metal on a ferroelectric polymer
04/13/2006US20060076592 Integratable polarization rotator
04/13/2006US20060076591 Solid state image pickup element and method of manufacturing solid state image pickup element
04/13/2006US20060076586 Virtual ground memory array and method therefor
04/13/2006US20060076582 Solid-state imaging device, method for manufacturing the same and interline transfer CCD image sensor
04/13/2006US20060076579 Semiconductor transistor having structural elements of differing materials
04/13/2006US20060076578 Recycling a wafer comprising a buffer layer, after having separated a thin layer therefrom
04/13/2006US20060076576 High electron mobility epitaxial substrate
04/13/2006US20060076573 Structure of chip carrier for semiconductor optical device, optical module, and optical transmitter and receiver
04/13/2006US20060076568 Side-emitting optical coupling device
04/13/2006US20060076561 Active matrix type display device and method of manufacturing the same
04/13/2006US20060076559 Method of fabricating an epitaxially grown layer
04/13/2006US20060076558 Semiconductor device and manufacturing method thereof
04/13/2006US20060076512 Ion implantation apparatus
04/13/2006US20060076491 Mask inspection apparatus, mask inspection method, and electron beam exposure system
04/13/2006US20060076490 Inspection method and inspection apparatus using electron beam
04/13/2006US20060076454 Carrier reel, carriage method using the carrier reel, and method for manufacturing electronic device
04/13/2006US20060076422 Conductive pattern and method of making
04/13/2006US20060076317 CMP composition with a polymer additive for polishing noble metals
04/13/2006US20060076316 Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes
04/13/2006US20060076314 Method for forming a pattern
04/13/2006US20060076244 Barrier enhancement process for copper interconnects
04/13/2006US20060076109 Method and apparatus for controlling temperature of a substrate
04/13/2006US20060076108 Method and apparatus for controlling temperature of a substrate
04/13/2006US20060076040 Semiconductive substrate cleaning systems
04/13/2006US20060076034 Cleaning method and cleaning apparatus for performing the same
04/13/2006US20060075972 Substrate processing apparatus and substrate processing method
04/13/2006US20060075968 Leak detector and process gas monitor