| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/11/2006 | US7026183 Long-wavelength semiconductor light emitting device and its manufacturing method |
| 04/11/2006 | US7026182 Semiconductor device, semiconductor laser, their manufacturing methods and etching methods |
| 04/11/2006 | US7026181 Method for forming LED by a substrate removal process |
| 04/11/2006 | US7026180 Screen-printing metal mask plate and method of resin-sealing vibrating part |
| 04/11/2006 | US7026179 Method of manufacturing a semiconductor light emitting device utilizing a nitride III-V compound semiconductor substrate |
| 04/11/2006 | US7026178 Method for fabricating a VCSEL with ion-implanted current-confinement structure |
| 04/11/2006 | US7026177 Electron multiplier with enhanced ion conversion |
| 04/11/2006 | US7026176 Mold making method for wafer scale caps |
| 04/11/2006 | US7026175 High throughput measurement of via defects in interconnects |
| 04/11/2006 | US7026174 Method for reducing wafer arcing |
| 04/11/2006 | US7026173 Method and apparatus for detecting end point |
| 04/11/2006 | US7026172 Reduced thickness variation in a material layer deposited in narrow and wide integrated circuit trenches |
| 04/11/2006 | US7026171 Rapid thermal annealing process |
| 04/11/2006 | US7026170 Methods of controlling optical properties of a capping insulating layer on memory devices, and system for performing same |
| 04/11/2006 | US7026169 Method of forming PZT ferroelectric film |
| 04/11/2006 | US7026106 Exposure method for the contact hole |
| 04/11/2006 | US7026102 Plasma deposited selective wetting material |
| 04/11/2006 | US7026101 Antireflective coating compositions |
| 04/11/2006 | US7026100 Active matrix substrate having column spacers integral with protective layer and process for fabrication thereof |
| 04/11/2006 | US7026099 Coating multilayer films comprising photoresists and radiation sensitive compounds on substrates, then exposing and developing; masking |
| 04/11/2006 | US7026094 oxime sulfonates, e.g., 2-[Cyano-(5-n-propanesulfonyloxyimino-5H-thiophen-2-ylidene)-methyl]-benzoic acid methyl ester with high stability and good solubility in the field of chemically amplified photoresists. |
| 04/11/2006 | US7026082 Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby |
| 04/11/2006 | US7026081 Optical proximity correction method utilizing phase-edges as sub-resolution assist features |
| 04/11/2006 | US7026077 Forming pattern on radiation transparent substrate; sputtering in helium environment; heating |
| 04/11/2006 | US7026076 Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC |
| 04/11/2006 | US7026053 Irradiation film of organosilicon compound with electron beams ; forming silicon carbide; controlling thickness of film; high strength; hydophilic |
| 04/11/2006 | US7026052 Porous low k(<2.0) thin film derived from homo-transport-polymerization |
| 04/11/2006 | US7026032 Controlling particle size; interpenetrating polymer nertwork; thin film, high speed digital circuits |
| 04/11/2006 | US7025905 Black composite particles for semiconductor sealing material, and semiconductor sealing material using the same |
| 04/11/2006 | US7025896 Process for treating solid surface and substrate surface |
| 04/11/2006 | US7025891 Method of polishing C4 molybdenum masks to remove molybdenum peaks |
| 04/11/2006 | US7025866 Depositing conductive material on a workpiece to form an electroconductive contact layer that conforms to submicron recesses in the workpiece, depositing a second conductive layer and forming a contact region |
| 04/11/2006 | US7025863 Vacuum system with separable work piece support |
| 04/11/2006 | US7025862 An apparatus for providing an electrical bias to a substrate in a processing system is described. The apparatus generally includes a conductive annular body defining a central opening. The conductive annular body may have a substrate seating |
| 04/11/2006 | US7025861 Contact plating apparatus |
| 04/11/2006 | US7025860 Method and apparatus for the electrochemical deposition and removal of a material on a workpiece surface |
| 04/11/2006 | US7025858 Apparatus for supporting wafer in semiconductor process |
| 04/11/2006 | US7025857 Plasma treatment apparatus, matching box, impedance matching device, and coupler |
| 04/11/2006 | US7025856 Processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
| 04/11/2006 | US7025855 Insulation-film etching system |
| 04/11/2006 | US7025854 Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system |
| 04/11/2006 | US7025852 Connecting material and mounting method which uses same |
| 04/11/2006 | US7025848 Heat sink for chip package and bonding method thereof |
| 04/11/2006 | US7025845 Surface mounted device type package using coaxial cable |
| 04/11/2006 | US7025831 Apparatus for surface conditioning |
| 04/11/2006 | US7025664 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
| 04/11/2006 | US7025663 Chemical mechanical polishing apparatus having conditioning cleaning device |
| 04/11/2006 | US7025662 Arrangement of a chemical-mechanical polishing tool and method of chemical-mechanical polishing using such a chemical-mechanical polishing tool |
| 04/11/2006 | US7025615 Fabrication method, varactor, and integrated circuit |
| 04/11/2006 | US7025554 Vacuum process system |
| 04/11/2006 | US7025514 Development apparatus for manufacturing semiconductor device |
| 04/11/2006 | US7025498 System and method of measuring thermal expansion |
| 04/11/2006 | US7025493 Chemical supply system and chemical mixing apparatus |
| 04/11/2006 | US7025288 Edge remover having a gas sprayer to prevent a chemical solvent from splashing |
| 04/11/2006 | US7025247 Wire bonding method |
| 04/11/2006 | US7025005 Stage device and angle detecting device |
| 04/11/2006 | US7024950 Method for intelligent sampling of particulates in exhaust lines |
| 04/11/2006 | US7024798 Low-pressure dryer and low-pressure drying method |
| 04/11/2006 | CA2398377C Light emitting diode and semiconductor laser |
| 04/11/2006 | CA2276335C Nitride semiconductor device |
| 04/06/2006 | WO2006037058A2 Preparation operator flex-station for carrier preparation |
| 04/06/2006 | WO2006036992A2 System and method for active array temperature sensing and cooling |
| 04/06/2006 | WO2006036865A2 Deposition of ruthenium metal layers in a thermal chemical vapor deposition process |
| 04/06/2006 | WO2006036821A2 Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage |
| 04/06/2006 | WO2006036671A1 A metal gate electrode semiconductor device |
| 04/06/2006 | WO2006036644A2 Lamp array for thermal processing exhibiting improved radial uniformity |
| 04/06/2006 | WO2006036629A1 U-gate transistors and methods of fabrication |
| 04/06/2006 | WO2006036505A1 Underfill material to reduce ball limiting metallurgy delamination and cracking potential in semiconductor devices |
| 04/06/2006 | WO2006036453A2 Non-volatile nand memory with asymmetrical doping profile |
| 04/06/2006 | WO2006036446A2 White, single or multi-color light emitting diodes by recycling guided modes |
| 04/06/2006 | WO2006036435A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 04/06/2006 | WO2006036334A2 Programming and erasing structure for a floating gate memory cell and method of making |
| 04/06/2006 | WO2006036315A2 Method and apparatus for high temperature operation of electronics |
| 04/06/2006 | WO2006036245A2 Iso/nested cascading trim control with model feedback updates |
| 04/06/2006 | WO2006036037A1 Deflashing apparatus and method for semiconductor packages |
| 04/06/2006 | WO2006036000A1 Semiconductor device and fabrication process thereof |
| 04/06/2006 | WO2006035963A1 Method of grinding multilayer body and method of manufacturing solid state image pickup device |
| 04/06/2006 | WO2006035943A1 Magnetic memory |
| 04/06/2006 | WO2006035932A1 Application device and method of preventing application head clogging |
| 04/06/2006 | WO2006035925A1 Measurement method, exposure method, and device manufacturing method |
| 04/06/2006 | WO2006035905A1 Wire bump material |
| 04/06/2006 | WO2006035894A1 Member for supporting thin film coated board, container for storing thin film coated board, mask blank storing body, transfer mask storing body and method for transporting thin film coated board |
| 04/06/2006 | WO2006035879A1 Heat treatment device and method of manufacturing substrate |
| 04/06/2006 | WO2006035877A1 Semiconductor device |
| 04/06/2006 | WO2006035865A1 Semiconductor wafer manufacturing method and semiconductor wafer |
| 04/06/2006 | WO2006035864A1 Soi wafer cleaning method |
| 04/06/2006 | WO2006035859A1 Method of patterning self-organizing material, patterned substrate of self-organizing material and method of producing the same, and phosomask using patterned substrate of self-organizing material |
| 04/06/2006 | WO2006035835A1 Magnetic field generation device, electromagnetic actuator, stage device, exposure device, and device manufacturing method |
| 04/06/2006 | WO2006035803A1 Au ALLOY BONDING WIRE |
| 04/06/2006 | WO2006035790A1 Copolymer and upper film-forming composition |
| 04/06/2006 | WO2006035787A1 Semiconductor device |
| 04/06/2006 | WO2006035784A1 Process for formation of copper-containing film |
| 04/06/2006 | WO2006035779A1 Cmp polishing compound and method for polishing substrate |
| 04/06/2006 | WO2006035771A1 Cmp polishing agent and method for polishing substrate |
| 04/06/2006 | WO2006035748A1 Euv generator |
| 04/06/2006 | WO2006035711A1 D/a conversion circuit, display panel drive circuit, and display |
| 04/06/2006 | WO2006035629A1 Plasma processing apparatus |
| 04/06/2006 | WO2006035628A1 Plasma processing system |
| 04/06/2006 | WO2006035624A1 Substrate cleaning apparatus and method for determining timing of replacement of cleaning member |
| 04/06/2006 | WO2006035610A1 Function element, storage element, magnetic recording element, solar cell, photoelectric conversion element, light emitting element, catalyst reaction device, and clean unit |