| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/18/2006 | US7030957 Monitoring apparatus and method particularly useful in photolithographically processing substrates |
| 04/18/2006 | US7030728 Layout and method to improve mixed-mode resistor performance |
| 04/18/2006 | US7030725 Semiconductor device with electrically coupled spiral inductors |
| 04/18/2006 | US7030698 High-frequency power amplifier |
| 04/18/2006 | US7030684 High voltage switch circuit of semiconductor device |
| 04/18/2006 | US7030681 Semiconductor device with multiple power sources |
| 04/18/2006 | US7030639 Semiconductor apparatus including a switch element and resistance element connected in series |
| 04/18/2006 | US7030518 Position-control stage with onboard linear motor |
| 04/18/2006 | US7030508 Substrate for semiconductor package and wire bonding method using thereof |
| 04/18/2006 | US7030507 Test pattern of semiconductor device |
| 04/18/2006 | US7030506 Mask and method for using the mask in lithographic processing |
| 04/18/2006 | US7030505 Heat spreading; encapsulated in molding materials |
| 04/18/2006 | US7030504 Sectional molding system |
| 04/18/2006 | US7030503 Semiconductor device |
| 04/18/2006 | US7030500 Package substrate manufactured using electrolytic leadless plating process, and method for manufacturing the same |
| 04/18/2006 | US7030499 Semiconductor constructions |
| 04/18/2006 | US7030498 Semiconductor device with copper wirings having improved negative bias temperature instability (NBTI) |
| 04/18/2006 | US7030497 Localized slots for stress relieve in copper |
| 04/18/2006 | US7030496 Semiconductor device having aluminum and metal electrodes and method for manufacturing the same |
| 04/18/2006 | US7030495 Method for fabricating a self-aligned nanocolumnar airbridge and structure produced thereby |
| 04/18/2006 | US7030494 Semiconductor package having built-in micro electric mechanical system and manufacturing method thereof |
| 04/18/2006 | US7030490 Structure of multi-tier wire bonding for high frequency integrated circuit |
| 04/18/2006 | US7030480 Multilayer board and a semiconductor device |
| 04/18/2006 | US7030478 Semiconductor device |
| 04/18/2006 | US7030475 Method and apparatus for forming a thin film |
| 04/18/2006 | US7030469 Method of forming a semiconductor package and structure thereof |
| 04/18/2006 | US7030468 Low k and ultra low k SiCOH dielectric films and methods to form the same |
| 04/18/2006 | US7030467 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern |
| 04/18/2006 | US7030465 Semiconductor device that can increase the carrier mobility and method for fabricating the same |
| 04/18/2006 | US7030464 Semiconductor device and method of manufacturing the same |
| 04/18/2006 | US7030462 Heterojunction bipolar transistor having specified lattice constants |
| 04/18/2006 | US7030459 Three-dimensional memory structure and manufacturing method thereof |
| 04/18/2006 | US7030457 Capacitor and method for producing a capacitor |
| 04/18/2006 | US7030456 Resistance-changing function body, memory element, manufacturing method therefor, memory device, semiconductor device and electronic equipment |
| 04/18/2006 | US7030455 Integrated electromagnetic shielding device |
| 04/18/2006 | US7030454 Semiconductor devices and methods of forming a trench in a semiconductor device |
| 04/18/2006 | US7030452 Atomic-scale contacts and gaps are useful as a variety of nanosensors including chemical sensors, biosensors, hydrogen ion sensors, heavy metal ion sensors, magnetoresistive sensors, and molecular switches |
| 04/18/2006 | US7030451 Made by fabricating an integrated circuit components and a silicon substrate; doping nitrogen into the processed substrate; depositing nickel onto the processed substrate; annealing the processed substrate so as to form nickel mono-silicide; removing the unreacted nickel |
| 04/18/2006 | US7030450 Precursor for hafnium oxide layer and method for forming halnium oxide film using the precursor |
| 04/18/2006 | US7030449 Semiconductor integrated circuit device having capacitor element |
| 04/18/2006 | US7030448 Mask ROM and the method of forming the same and the scheme of reading the device |
| 04/18/2006 | US7030446 Semiconductor switching devices |
| 04/18/2006 | US7030445 Power MOSFET, power MOSFET packaged device, and method of manufacturing power MOSFET |
| 04/18/2006 | US7030444 Space process to prevent the reverse tunneling in split gate flash |
| 04/18/2006 | US7030443 MIM capacitor |
| 04/18/2006 | US7030442 Stack-film trench capacitor and method for manufacturing the same |
| 04/18/2006 | US7030441 Capacitor dielectric structure of a DRAM cell and method for forming thereof |
| 04/18/2006 | US7030440 Single poly-si process for DRAM by deep N-well (NW) plate |
| 04/18/2006 | US7030439 DRAM memory cell and method of manufacturing the same |
| 04/18/2006 | US7030438 Semiconductor integrated circuit |
| 04/18/2006 | US7030437 Semiconductor device having sense amplifier including paired transistors |
| 04/18/2006 | US7030435 Single transistor rare earth manganite ferroelectric nonvolatile memory cell |
| 04/18/2006 | US7030431 Metal gate with composite film stack |
| 04/18/2006 | US7030430 Transition metal alloys for use as a gate electrode and devices incorporating these alloys |
| 04/18/2006 | US7030429 Hetero-junction bipolar transistor and the method for producing the same |
| 04/18/2006 | US7030428 Strain balanced nitride heterojunction transistors |
| 04/18/2006 | US7030421 Semiconductor light emitting device and fabrication method thereof |
| 04/18/2006 | US7030419 Thin film for optical applications, light-emitting structure using the same and the fabrication method thereof |
| 04/18/2006 | US7030417 Semiconductor light emitting device and fabrication method thereof |
| 04/18/2006 | US7030414 III group nitride compound semiconductor luminescent element |
| 04/18/2006 | US7030409 Organic semiconductor polymer for organic thin film transistor containing quinoxaline ring in the backbone chain |
| 04/18/2006 | US7030405 Method and apparatus for resistance variable material cells |
| 04/18/2006 | US7030401 Modular substrate measurement system |
| 04/18/2006 | US7030335 overhead electrode has a reactance that forms a resonance with the plasma at an electrode-plasma resonant frequency which is at or near frequency of generator |
| 04/18/2006 | US7030271 Multifunctional linker molecules for tuning electronic charge transport through organic-inorganic composite structures and uses thereof |
| 04/18/2006 | US7030168 Supercritical fluid-assisted deposition of materials on semiconductor substrates |
| 04/18/2006 | US7030167 Nanoporous structures produced from self-assembling molecules |
| 04/18/2006 | US7030067 For phosphate ester hydraulic fluids used in conditions under which hydrocarbon surfactants would degrade |
| 04/18/2006 | US7030045 Method of fabricating oxides with low defect densities |
| 04/18/2006 | US7030044 Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric |
| 04/18/2006 | US7030043 Process for deposition of a thin layer on an oxidized layer of a substrate |
| 04/18/2006 | US7030042 Systems and methods for forming tantalum oxide layers and tantalum precursor compounds |
| 04/18/2006 | US7030041 Adhesion improvement for low k dielectrics |
| 04/18/2006 | US7030040 Selectively growing a polymeric material on a semiconductor substrate |
| 04/18/2006 | US7030039 Method of uniformly coating a substrate |
| 04/18/2006 | US7030038 Low temperature method for forming a thin, uniform oxide |
| 04/18/2006 | US7030037 Atomic layer deposition apparatus and method |
| 04/18/2006 | US7030036 Method of forming oxide layer in semiconductor device |
| 04/18/2006 | US7030035 Prevention of electrostatic wafer sticking in plasma deposition/etch tools |
| 04/18/2006 | US7030034 Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum |
| 04/18/2006 | US7030033 Method for manufacturing circuit devices |
| 04/18/2006 | US7030032 Photodiode passivation technique |
| 04/18/2006 | US7030031 Method for forming damascene structure utilizing planarizing material coupled with diffusion barrier material |
| 04/18/2006 | US7030030 Method of manufacturing a semiconductor integrated circuit device having a plurality of wiring layers and mask-pattern generation method |
| 04/18/2006 | US7030029 Method of high selectivity SAC etching |
| 04/18/2006 | US7030028 Etching method |
| 04/18/2006 | US7030027 Etching methods and apparatus for producing semiconductor devices |
| 04/18/2006 | US7030026 Semiconductor device fabrication method |
| 04/18/2006 | US7030025 Method of manufacturing flotox type eeprom |
| 04/18/2006 | US7030024 Dual-gate structure and method of fabricating integrated circuits having dual-gate structures |
| 04/18/2006 | US7030023 Method for simultaneous degas and baking in copper damascene process |
| 04/18/2006 | US7030022 Method of manufacturing semiconductor device having metal interconnections of different thickness |
| 04/18/2006 | US7030021 Depositing metal layer over substrates; etching; patterning; forming pads , then dielectric with via holes |
| 04/18/2006 | US7030020 Method to shrink cell size in a split gate flash |
| 04/18/2006 | US7030019 Semiconductor device fabrication method |
| 04/18/2006 | US7030018 Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool |
| 04/18/2006 | US7030017 Method for the planarization of a semiconductor structure |
| 04/18/2006 | US7030016 Post ECP multi-step anneal/H2 treatment to reduce film impurity |
| 04/18/2006 | US7030015 Method for forming a titanium nitride layer |
| 04/18/2006 | US7030014 Semiconductor constructions and electronic systems comprising metal silicide |