| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/25/2006 | US7034377 Semiconductor device and method of manufacturing the device |
| 04/25/2006 | US7034376 Schottky barrier diode semiconductor device |
| 04/25/2006 | US7034369 Semiconductor device and method for manufacturing the same |
| 04/25/2006 | US7034368 Semiconductor memory device and fabrication method thereof using damascene gate and epitaxial growth |
| 04/25/2006 | US7034367 Semiconductor device having an STI structure and a dummy pattern with a rectangular shape |
| 04/25/2006 | US7034366 Semiconductor device, manufacturing method thereof, and CMOS integrated circuit device |
| 04/25/2006 | US7034365 Integrated circuit devices having contact holes exposing gate electrodes in active regions |
| 04/25/2006 | US7034362 Double silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) structures |
| 04/25/2006 | US7034360 High voltage transistor and method of manufacturing the same |
| 04/25/2006 | US7034359 Vertical MOS transistor |
| 04/25/2006 | US7034358 Vertical transistor, and a method for producing a vertical transistor |
| 04/25/2006 | US7034356 Non-volatile semiconductor memory device and process for fabricating the same |
| 04/25/2006 | US7034355 Nonvolatile semiconductor storage and its manufacturing method |
| 04/25/2006 | US7034354 Semiconductor structure with lining layer partially etched on sidewall of the gate |
| 04/25/2006 | US7034353 Methods for enhancing capacitors having roughened features to increase charge-storage capacity |
| 04/25/2006 | US7034352 DRAM with very shallow trench isolation |
| 04/25/2006 | US7034351 Memory cell and method for forming the same |
| 04/25/2006 | US7034350 Capacitors including a cavity containing a buried layer |
| 04/25/2006 | US7034348 Magnetoresistive effect element and magnetic memory device |
| 04/25/2006 | US7034346 Semiconductor device and method for manufacturing the same |
| 04/25/2006 | US7034344 Integrated semiconductor power device for multiple battery systems |
| 04/25/2006 | US7034337 Semiconductor device and method of manufacturing the same |
| 04/25/2006 | US7034336 Capacitorless 1-transistor DRAM cell and fabrication method |
| 04/25/2006 | US7034335 ITO film contact structure, TFT substrate and manufacture thereof |
| 04/25/2006 | US7034332 Nanometer-scale memory device utilizing self-aligned rectifying elements and method of making |
| 04/25/2006 | US7034330 Group-III nitride semiconductor device, production method thereof and light-emitting diode |
| 04/25/2006 | US7034329 Semiconductor device including band-engineered superlattice having 3/1-5/1 germanium layer structure |
| 04/25/2006 | US7034328 Vertical geometry InGaN LED |
| 04/25/2006 | US7034321 Electron beam exposure apparatus and electron beam measurement module |
| 04/25/2006 | US7034318 Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask |
| 04/25/2006 | US7034314 Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatus |
| 04/25/2006 | US7034308 Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/25/2006 | US7034298 Inspection method and apparatus using an electron beam |
| 04/25/2006 | US7034285 Beam source and beam processing apparatus |
| 04/25/2006 | US7034255 Light irradiation type thermal processing apparatus |
| 04/25/2006 | US7033978 Post-planarization clean-up |
| 04/25/2006 | US7033962 Methods for manufacturing silicon wafer and silicone epitaxial wafer, and silicon epitaxial wafer |
| 04/25/2006 | US7033961 Epitaxy/substrate release layer |
| 04/25/2006 | US7033960 Multi-chamber deposition of silicon oxynitride film for patterning |
| 04/25/2006 | US7033959 Method for manufacturing organic semiconductor systems |
| 04/25/2006 | US7033958 Semiconductor device and process for producing the same |
| 04/25/2006 | US7033957 ONO fabrication process for increasing oxygen content at bottom oxide-substrate interface in flash memory devices |
| 04/25/2006 | US7033956 Semiconductor memory devices and methods for making the same |
| 04/25/2006 | US7033955 Method for fabricating a semiconductor device |
| 04/25/2006 | US7033954 Etching of high aspect ration structures |
| 04/25/2006 | US7033952 Apparatus and method using a remote RF energized plasma for processing semiconductor wafers |
| 04/25/2006 | US7033951 Process for forming pattern and method for producing liquid crystal display apparatus |
| 04/25/2006 | US7033950 Graded junction termination extensions for electronic devices |
| 04/25/2006 | US7033949 Structure and manufacturing method for nitride-based light-emitting diodes |
| 04/25/2006 | US7033948 Method for reducing dimensions between patterns on a photoresist |
| 04/25/2006 | US7033947 Dual trench alternating phase shift mask fabrication |
| 04/25/2006 | US7033946 Plasmaless dry contact cleaning method using interhalogen compounds |
| 04/25/2006 | US7033945 Gap filling with a composite layer |
| 04/25/2006 | US7033944 Dual damascene process |
| 04/25/2006 | US7033943 Etching solution, etching method and method for manufacturing semiconductor device |
| 04/25/2006 | US7033942 Chemical mechanical polishing composition and process |
| 04/25/2006 | US7033941 Method of producing semiconductor devices using chemical mechanical polishing |
| 04/25/2006 | US7033940 Method of forming composite barrier layers with controlled copper interface surface roughness |
| 04/25/2006 | US7033939 Chemistry for chemical vapor deposition of titanium containing films |
| 04/25/2006 | US7033938 Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region |
| 04/25/2006 | US7033937 Apparatus and method for use in manufacturing a semiconductor device |
| 04/25/2006 | US7033936 Process for making island arrays |
| 04/25/2006 | US7033935 Semiconductor device and method for manufacturing the same |
| 04/25/2006 | US7033934 Method of production of semiconductor package |
| 04/25/2006 | US7033933 Manufacturing method of semiconductor device |
| 04/25/2006 | US7033932 Method for fabricating a semiconductor device having salicide |
| 04/25/2006 | US7033931 Temperature optimization of a physical vapor deposition process to prevent extrusion into openings |
| 04/25/2006 | US7033930 Interconnect structures in a semiconductor device and processes of formation |
| 04/25/2006 | US7033929 Dual damascene interconnect structure with improved electro migration lifetimes |
| 04/25/2006 | US7033928 Method of fabricating semiconductor device |
| 04/25/2006 | US7033927 Apparatus and method for thermal isolation, circuit cooling and electromagnetic shielding of a wafer |
| 04/25/2006 | US7033926 Strip conductor arrangement and method for producing a strip conductor arrangement |
| 04/25/2006 | US7033925 Pattern transfer mask related to formation of dual damascene structure and method of forming dual damascene structure |
| 04/25/2006 | US7033924 Versatile system for diffusion limiting void formation |
| 04/25/2006 | US7033923 Method of forming segmented ball limiting metallurgy |
| 04/25/2006 | US7033922 Method and system for controlling the presence of fluorine in refractory metal layers |
| 04/25/2006 | US7033921 Method and device for depositing crystalline layers on crystalline substrates |
| 04/25/2006 | US7033920 Method for fabricating a silicon carbide interconnect for semiconductor components |
| 04/25/2006 | US7033919 Fabrication of dual work-function metal gate structure for complementary field effect transistors |
| 04/25/2006 | US7033918 Semiconductor device including p-channel type transistor, and production method for manufacturing such semiconductor device |
| 04/25/2006 | US7033917 Packaging substrate without plating bar and a method of forming the same |
| 04/25/2006 | US7033916 Shallow junction semiconductor and method for the fabrication thereof |
| 04/25/2006 | US7033915 Method for crystallizing amorphous silicon film |
| 04/25/2006 | US7033914 Method of making a package structure by dicing a wafer from the backside surface thereof |
| 04/25/2006 | US7033913 Semiconductor device and method of manufacturing the same |
| 04/25/2006 | US7033912 Silicon carbide on diamond substrates and related devices and methods |
| 04/25/2006 | US7033911 Adhesive of folded package |
| 04/25/2006 | US7033910 Method of fabricating multi layer MEMS and microfluidic devices |
| 04/25/2006 | US7033909 Method of forming trench isolations |
| 04/25/2006 | US7033908 Methods of forming integrated circuit devices including insulation layers |
| 04/25/2006 | US7033907 Method for forming isolation layer of semiconductor device |
| 04/25/2006 | US7033906 Airdome enclosure for components |
| 04/25/2006 | US7033905 Recycling of a wafer comprising a buffer layer after having separated a thin layer therefrom by mechanical means |
| 04/25/2006 | US7033904 Semiconductor device, semiconductor substrate and fabrication process of a semiconductor device |
| 04/25/2006 | US7033903 Method and apparatus for forming patterned photoresist layer |
| 04/25/2006 | US7033902 Method for making thin film transistors with lightly doped regions |
| 04/25/2006 | US7033901 Buried power buss utilized as a ground strap for high current, high power semiconductor devices and a method for providing the same |
| 04/25/2006 | US7033900 Protection of integrated circuit gates during metallization processes |
| 04/25/2006 | US7033899 Method of making semiconductor devices |
| 04/25/2006 | US7033898 Method for fabricating a self-aligned bipolar transistor having recessed spacers |