| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/25/2006 | US7033897 Encapsulated spacer with low dielectric constant material to reduce the parasitic capacitance between gate and drain in CMOS technology |
| 04/25/2006 | US7033896 Field effect transistor with a high breakdown voltage and method of manufacturing the same |
| 04/25/2006 | US7033895 Method of fabricating a MOS transistor with elevated source/drain structure using a selective epitaxial growth process |
| 04/25/2006 | US7033894 Method for modulating flatband voltage of devices having high-k gate dielectrics by post-deposition annealing |
| 04/25/2006 | US7033893 CMOS devices with balanced drive currents based on SiGe |
| 04/25/2006 | US7033892 Trench power MOSFET in silicon carbide and method of making the same |
| 04/25/2006 | US7033891 Trench gate laterally diffused MOSFET devices and methods for making such devices |
| 04/25/2006 | US7033890 ONO formation method |
| 04/25/2006 | US7033889 Trenched semiconductor devices and their manufacture |
| 04/25/2006 | US7033888 Engineered metal gate electrode |
| 04/25/2006 | US7033887 Process for producing an integrated electronic circuit that includes a capacitor |
| 04/25/2006 | US7033886 Partial vertical memory cell and method of fabricating the same |
| 04/25/2006 | US7033885 Deep trench structure manufacturing process |
| 04/25/2006 | US7033884 Methods of forming capacitor constructions |
| 04/25/2006 | US7033883 Placement method for decoupling capacitors |
| 04/25/2006 | US7033882 Method of forming on-chip decoupling capacitor by selectively etching grain boundaries in electrode |
| 04/25/2006 | US7033881 Method for fabricating magnetic field concentrators as liners around conductive wires in microelectronic devices |
| 04/25/2006 | US7033880 Inductor for semiconductor device and method of making same |
| 04/25/2006 | US7033879 Semiconductor device having optimized shallow junction geometries and method for fabrication thereof |
| 04/25/2006 | US7033877 Vertical replacement-gate junction field-effect transistor |
| 04/25/2006 | US7033876 Trench MIS device having implanted drain-drift region and thick bottom oxide and process for manufacturing the same |
| 04/25/2006 | US7033875 MOS transistor and fabrication method thereof |
| 04/25/2006 | US7033874 Method of forming insulating film and method of fabricating semiconductor device including plasma bias for forming a second insulating film |
| 04/25/2006 | US7033873 Methods of controlling gate electrode doping, and systems for accomplishing same |
| 04/25/2006 | US7033872 Thin film transistor and method of fabricating the same |
| 04/25/2006 | US7033871 Method of manufacturing semiconductor device |
| 04/25/2006 | US7033870 Semiconductor transistors with reduced gate-source/drain capacitances |
| 04/25/2006 | US7033869 Strained silicon semiconductor on insulator MOSFET |
| 04/25/2006 | US7033868 Semiconductor device and method of manufacturing same |
| 04/25/2006 | US7033867 Shallow trench antifuse and methods of making and using same |
| 04/25/2006 | US7033865 Thermally conductive substrate, thermally conductive substrate manufacturing method and power module |
| 04/25/2006 | US7033864 Grooved substrates for uniform underfilling solder ball assembled electronic devices |
| 04/25/2006 | US7033863 Semiconductor device and manufacturing method for the same |
| 04/25/2006 | US7033862 Method of embedding semiconductor element in carrier and embedded structure thereof |
| 04/25/2006 | US7033861 Stacked module systems and method |
| 04/25/2006 | US7033860 Process for manufacturing semiconductor device |
| 04/25/2006 | US7033859 Flip chip interconnection structure |
| 04/25/2006 | US7033858 Method for making Group III nitride devices and devices produced thereby |
| 04/25/2006 | US7033857 Method of manufacturing a semiconductor device |
| 04/25/2006 | US7033856 Spacer chalcogenide memory method |
| 04/25/2006 | US7033855 Optical component and method of manufacturing the same |
| 04/25/2006 | US7033854 Method of crystallizing a nitride III-V compound semiconductor layer on a sapphire substrate |
| 04/25/2006 | US7033853 Method for producing a vertically emitting laser |
| 04/25/2006 | US7033852 Method and device for passivation of the resonator end faces of semiconductor lasers based on III-V semiconductor material |
| 04/25/2006 | US7033851 Bump structure of a scattering reflective board and method for manufacturing the bump structure |
| 04/25/2006 | US7033850 Roll-to-sheet manufacture of OLED materials |
| 04/25/2006 | US7033849 Method of adjusting or locally modifying a magnetization in a layer of a magnetoresistive layer system, heat stamp for heating the magnetoresistive layer system, and use of same |
| 04/25/2006 | US7033848 Light emitting device and method of manufacturing the same |
| 04/25/2006 | US7033846 Method for manufacturing semiconductor devices by monitoring nitrogen bearing species in gate oxide layer |
| 04/25/2006 | US7033845 Phase control of megasonic RF generator for optimum operation |
| 04/25/2006 | US7033844 Wafer including an In-containing-compound semiconductor surface layer, and method for profiling its carrier concentration |
| 04/25/2006 | US7033843 Semiconductor manufacturing method and semiconductor manufacturing apparatus |
| 04/25/2006 | US7033842 Electronic component mounting apparatus and electronic component mounting method |
| 04/25/2006 | US7033738 Process of forming a micro-pattern of a metal or a metal oxide |
| 04/25/2006 | US7033731 Multilayered body for photolithographic patterning |
| 04/25/2006 | US7033727 Photosensitive composition and acid generator |
| 04/25/2006 | US7033726 an acrylic ester copolymer with a monomer unit having a 2,6-dioxabicyclo[3.3.0]octane ring and two other monomers having different bridged bicyclic or tricyclic lactones and a photosensitive acid generator; semiconductors; dry etch resistance; well balanced solubility |
| 04/25/2006 | US7033709 masking; selectively coding the spaced regions to define a masked read only memory (ROM) structure that causes optical interference; illumination; development; improved circuit density and reliability; miniaturization; integrated circuits |
| 04/25/2006 | US7033642 feeding TiCl4 to a substrate in vapor deposition chamber; then feeding both TiCl4 and a silane, directly depositing a titanium silicide layer onto doped silicon wafer without using underlying silicon |
| 04/25/2006 | US7033560 Vapor deposition |
| 04/25/2006 | US7033554 Catalytic oxidation of ammonia forming pure water |
| 04/25/2006 | US7033518 Method and system for processing multi-layer films |
| 04/25/2006 | US7033515 Method for manufacturing microstructure |
| 04/25/2006 | US7033514 Method and apparatus for micromachining using a magnetic field and plasma etching |
| 04/25/2006 | US7033464 Apparatus for electrochemically depositing a material onto a workpiece surface |
| 04/25/2006 | US7033463 Substrate plating method and apparatus |
| 04/25/2006 | US7033461 Thin film forming apparatus and method |
| 04/25/2006 | US7033445 Gridded susceptor |
| 04/25/2006 | US7033444 Plasma processing apparatus, and electrode structure and table structure of processing apparatus |
| 04/25/2006 | US7033443 Gas-cooled clamp for RTP |
| 04/25/2006 | US7033442 System and method for ventilation in the fabrication of integrated circuits |
| 04/25/2006 | US7033439 Apparatus for fabricating a III-V nitride film and a method for fabricating the same |
| 04/25/2006 | US7033438 Growth of a single-crystal region of a III-V compound on a single-crystal silicon substrate |
| 04/25/2006 | US7033437 Method for making semiconductor device including band-engineered superlattice |
| 04/25/2006 | US7033436 Crystal growth method for nitride semiconductor and formation method for semiconductor device |
| 04/25/2006 | US7033435 Process for preparing p-n junctions having a p-type ZnO film |
| 04/25/2006 | US7033434 Mask for crystallizing, method of crystallizing amorphous silicon and method of manufacturing array substrate using the same |
| 04/25/2006 | US7033409 Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
| 04/25/2006 | US7033250 Method for chemical mechanical planarization |
| 04/25/2006 | US7033126 Method and apparatus for loading a batch of wafers into a wafer boat |
| 04/25/2006 | US7033089 Method of developing a resist film and a resist development processor |
| 04/25/2006 | US7033068 Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
| 04/25/2006 | US7032758 Workpiece holder for clean container |
| 04/25/2006 | US7032739 Intermediate product carrying apparatus, and intermediate product carrying method |
| 04/25/2006 | US7032614 Protective device for semiconductors; isolation of connector |
| 04/25/2006 | US7032392 Method and apparatus for cooling an integrated circuit package using a cooling fluid |
| 04/25/2006 | US7032311 Stabilized wire bonded electrical connections and method of making same |
| 04/25/2006 | US7032307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus |
| 04/25/2006 | US7032269 Brush scrubbing-high frequency resonating substrate processing system |
| 04/25/2006 | CA2264908C Method for anisotropic etching of structures in conducting materials |
| 04/20/2006 | WO2006042273A1 Substrate processing apparatus |
| 04/20/2006 | WO2006041889A2 Conductive pad design modification for better wafer-pad contact |
| 04/20/2006 | WO2006041798A1 Low noise field effect transistor |
| 04/20/2006 | WO2006041633A2 Virtual ground memory array and method therefor |
| 04/20/2006 | WO2006041632A2 A virtual ground memory array and method therefor |
| 04/20/2006 | WO2006041630A2 Low temperature selective epitaxial growth of silicon germanium layers |
| 04/20/2006 | WO2006041580A1 3d interconnect with protruding contacts |
| 04/20/2006 | WO2006041535A2 Capillary lithography of nanofiber arrays |
| 04/20/2006 | WO2006041530A2 Work-piece processing system |
| 04/20/2006 | WO2006041248A1 Loading device for chemical mechanical polisher of semiconductor wafer |