| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/13/2006 | US7061015 Contact portion of semiconductor device, and thin film transistor array panel for display device including the contact portion |
| 06/13/2006 | US7061014 Natural-superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
| 06/13/2006 | US7061008 Single molecule array on silicon substrate for quantum computer |
| 06/13/2006 | US7061006 Light emission from semiconductor integrated circuits |
| 06/13/2006 | US7060996 Mask, method of producing mask, and method of producing semiconductor device |
| 06/13/2006 | US7060994 Exposure apparatus and method |
| 06/13/2006 | US7060993 Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements |
| 06/13/2006 | US7060990 Stage base, substrate processing apparatus, and maintenance method for stage |
| 06/13/2006 | US7060985 Multipole field-producing apparatus in charged-particle optical system and aberration corrector |
| 06/13/2006 | US7060984 Multi-charged beam lens and charged beam exposure apparatus using the same |
| 06/13/2006 | US7060960 Solid-state imaging device and method of manufacturing the same |
| 06/13/2006 | US7060945 Substrate heater and fabrication method for the same |
| 06/13/2006 | US7060944 Heat treatment device and heat treatment method |
| 06/13/2006 | US7060939 Substrate heating method, substrate heating system, and applying developing system |
| 06/13/2006 | US7060931 Neutral beam source having electromagnet used for etching semiconductor device |
| 06/13/2006 | US7060909 Composition for forming low dielectric constant insulating film, method of forming insulating film using the composition and electronic parts having the insulating film produced thereby |
| 06/13/2006 | US7060786 Heat resistant resin composition and adhesive film |
| 06/13/2006 | US7060638 Method of forming low dielectric constant porous films |
| 06/13/2006 | US7060637 Methods of forming intermediate semiconductor device structures using spin-on, photopatternable, interlayer dielectric materials |
| 06/13/2006 | US7060636 Tunable dielectric device and process relating thereto |
| 06/13/2006 | US7060635 Method of manufacturing semiconductor device and method of forming pattern |
| 06/13/2006 | US7060634 Materials and methods for forming hybrid organic-inorganic dielectric materials for integrated circuit applications |
| 06/13/2006 | US7060633 Planarization for integrated circuits |
| 06/13/2006 | US7060632 Methods for fabricating strained layers on semiconductor substrates |
| 06/13/2006 | US7060631 exposing a base surface with exposed copper of a substrate having an opening extending through 2 layers of insulation to a cleaning solution formed from hydrochloric acid, nitric acid and hydrofluoric acid; less than 5 Angstroms of the insulation from sidewalls of the opening are removed |
| 06/13/2006 | US7060630 Method of forming isolation film of semiconductor device |
| 06/13/2006 | US7060629 Etch of silicon nitride selective to silicon and silicon dioxide useful during the formation of a semiconductor device |
| 06/13/2006 | US7060628 Method for fabricating a hard mask polysilicon gate |
| 06/13/2006 | US7060627 Method of decreasing charging effects in oxide-nitride-oxide (ONO) memory arrays |
| 06/13/2006 | US7060626 Multi-run selective pattern and etch wafer process |
| 06/13/2006 | US7060625 Imprint stamp |
| 06/13/2006 | US7060624 Deep filled vias |
| 06/13/2006 | US7060623 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern |
| 06/13/2006 | US7060622 Method of forming dummy wafer |
| 06/13/2006 | US7060621 Slurry for CMP, polishing method and method of manufacturing semiconductor device |
| 06/13/2006 | US7060620 Method of preparing a surface of a semiconductor wafer to make it epiready |
| 06/13/2006 | US7060619 Reduction of the shear stress in copper via's in organic interlayer dielectric material |
| 06/13/2006 | US7060618 Semiconductor device, method for manufacturing the same, and plating solution |
| 06/13/2006 | US7060617 Method of protecting a seed layer for electroplating |
| 06/13/2006 | US7060616 Method of manufacturing semiconductor device |
| 06/13/2006 | US7060615 Methods of forming roughened layers of platinum |
| 06/13/2006 | US7060614 Method for forming film |
| 06/13/2006 | US7060613 Method of copper/copper surface bonding using a conducting polymer for application in IC chip bonding |
| 06/13/2006 | US7060612 Method of adjusting resistors post silicide process |
| 06/13/2006 | US7060611 Method for manufacturing electric device for signal transmission |
| 06/13/2006 | US7060610 Method for forming contact in semiconductor device |
| 06/13/2006 | US7060609 Method of manufacturing a semiconductor device |
| 06/13/2006 | US7060608 System and method for filling openings in semiconductor products |
| 06/13/2006 | US7060607 Circuit method integrating the power distribution functions of the circuits and leadframes into the chip surface |
| 06/13/2006 | US7060606 Method and apparatus for chemical mechanical polishing of semiconductor substrates |
| 06/13/2006 | US7060605 Methods for making dual-damascene dielectric structures |
| 06/13/2006 | US7060604 Multilayer wiring substrate, and method of producing same |
| 06/13/2006 | US7060603 Methods of forming metal wiring of semiconductor devices including sintering the wiring layers and forming a via hole with a barrier metal |
| 06/13/2006 | US7060602 Method of manufacturing electronic part and mounting electronic part |
| 06/13/2006 | US7060601 Packaging substrates for integrated circuits and soldering methods |
| 06/13/2006 | US7060600 Semiconductor capacitor and MOSFET fitted therewith |
| 06/13/2006 | US7060599 Method of forming shallow doped junctions having a variable profile gradation of dopants |
| 06/13/2006 | US7060598 Method for implanting ions into semiconductor substrate |
| 06/13/2006 | US7060597 Manufacturing method for a silicon substrate having strained layer |
| 06/13/2006 | US7060596 Process for fabricating a single-crystal substrate and integrated circuit comprising such a substrate |
| 06/13/2006 | US7060595 Circuit substrate and fabrication method thereof |
| 06/13/2006 | US7060594 Memory device and method of manufacturing including deuterated oxynitride charge trapping structure |
| 06/13/2006 | US7060593 Method of and mechanism for peeling adhesive tape bonded to segmented semiconductor wafer |
| 06/13/2006 | US7060592 Image sensor and fabricating method thereof |
| 06/13/2006 | US7060591 Method for fabricating a semiconductor device by transferring a layer to a support with curvature |
| 06/13/2006 | US7060590 Layer transfer method |
| 06/13/2006 | US7060589 Method for manufacturing a semiconductor integrated circuit device that includes covering the bottom of an isolation trench with spin-on glass and etching back the spin-on glass to a predetermined depth |
| 06/13/2006 | US7060588 Semiconductor device using shallow trench isolation and method of fabricating the same |
| 06/13/2006 | US7060587 Method for forming macropores in a layer and products obtained thereof |
| 06/13/2006 | US7060586 PCMO thin film with resistance random access memory (RRAM) characteristics |
| 06/13/2006 | US7060585 Hybrid orientation substrates by in-place bonding and amorphization/templated recrystallization |
| 06/13/2006 | US7060584 Process to improve high performance capacitor properties in integrated MOS technology |
| 06/13/2006 | US7060583 Method for manufacturing a bipolar transistor having a polysilicon emitter |
| 06/13/2006 | US7060582 Adjusting the germanium concentration of a semiconductor layer for equal thermal expansion for a hetero-junction bipolar transistor device |
| 06/13/2006 | US7060581 Method for manufacturing a semiconductor device |
| 06/13/2006 | US7060580 Field effect transistor and method of fabricating the same |
| 06/13/2006 | US7060579 Increased drive current by isotropic recess etch |
| 06/13/2006 | US7060578 Semiconductor device and method of fabricating the same |
| 06/13/2006 | US7060577 Method for forming metal silicide layer in active area of semiconductor device |
| 06/13/2006 | US7060576 Epitaxially deposited source/drain |
| 06/13/2006 | US7060575 Semiconductor device having transistor and method of manufacturing the same |
| 06/13/2006 | US7060574 Buried channel type transistor having a trench gate and method of manufacturing the same |
| 06/13/2006 | US7060573 Extended poly buffer STI scheme |
| 06/13/2006 | US7060572 MOSFET with short channel structure and formation method thereof |
| 06/13/2006 | US7060571 Semiconductor device with metal gate and high-k tantalum oxide or tantalum oxynitride gate dielectric |
| 06/13/2006 | US7060570 Methods of fabricating multiple sets of field effect transistors |
| 06/13/2006 | US7060569 Methods of fabricating multiple sets of field effect transistors |
| 06/13/2006 | US7060568 Using different gate dielectrics with NMOS and PMOS transistors of a complementary metal oxide semiconductor integrated circuit |
| 06/13/2006 | US7060567 Method for fabricating trench power MOSFET |
| 06/13/2006 | US7060566 Standby current reduction over a process window with a trimmable well bias |
| 06/13/2006 | US7060565 Fabrication of dielectric for a nonvolatile memory cell having multiple floating gates |
| 06/13/2006 | US7060564 Memory device and method of simultaneous fabrication of core and periphery of same |
| 06/13/2006 | US7060563 Local SONOS-type structure having two-piece gate and self-aligned ONO and method for manufacturing the same |
| 06/13/2006 | US7060562 Method for fabricating gate electrodes in a field plate trench transistor, and field plate trench transistor |
| 06/13/2006 | US7060561 Method for fabricating memory device |
| 06/13/2006 | US7060560 Method of manufacturing non-volatile memory cell |
| 06/13/2006 | US7060559 Method of manufacturing a nonvolatile semiconductor memory device |
| 06/13/2006 | US7060558 Method for fabricating a field-effect transistor having a floating gate |
| 06/13/2006 | US7060557 Fabrication of high-density capacitors for mixed signal/RF circuits |
| 06/13/2006 | US7060556 Drain extended MOS transistors with multiple capacitors and methods of fabrication |