Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2006
06/14/2006CN1787176A Tech. for etching capable of controlling grid structural length
06/14/2006CN1787175A Method for reducing pattern line distance
06/14/2006CN1787174A Method for protecting self aligncing silicon compound barrier layer
06/14/2006CN1787173A Slot type capacitor and its mfg. tech.
06/14/2006CN1787172A Method for adhering piece in working procedure for reducing thin of sapphire substrate
06/14/2006CN1787171A Method for enhancing metal-medium-metal structural capacity performance
06/14/2006CN1787170A Gas supply unit, substrate processing apparatus, and supply gas setting method
06/14/2006CN1787169A Method of thermal adherend release and apparatus for thermal adherend release
06/14/2006CN1787168A Method for mfg. silicon film on silicon base substrate with deep slot pattern
06/14/2006CN1787040A Tape carrier package on reel and plasma display device using the same
06/14/2006CN1786969A Data generating system, patterning data generating apparatus, method of generating patterning data and storage medium carrying patterning data
06/14/2006CN1786854A Method for ingelligent optimizing procedure of semiconductor packing producing line
06/14/2006CN1786833A Substrate placement in immersion lithography
06/14/2006CN1786832A Lithographic apparatus and device manufacturing method
06/14/2006CN1786831A Lithographic projection apparatus and actuator
06/14/2006CN1786830A Method of forming a photoresist pattern
06/14/2006CN1786829A Substrate processing apparatus
06/14/2006CN1786828A Substrate processing apparatus and substrate processing method
06/14/2006CN1786827A Substrate processing apparatus
06/14/2006CN1786826A Lithographic apparatus, reticle exchange unit and device manufacturing method
06/14/2006CN1786822A Method and system for imaging interference photoetching adopting white laser
06/14/2006CN1786801A Thin film transistor array panel and method for manufacturing the same
06/14/2006CN1786800A Film crystal tube printing mfg. method
06/14/2006CN1786657A Thickness measuring method for organic coating film on metal surface
06/14/2006CN1786263A Plasma reaction chamber
06/14/2006CN1785593A Sapphire supporting base grinding method
06/14/2006CN1785578A 激光束加工机 Laser beam processing machine
06/14/2006CN1259735C Lighting diode
06/14/2006CN1259734C Nitride semiconductor, production method therefor and nitride semiconductor element
06/14/2006CN1259731C Method for producing low-temperature polysilicon thin film transistor
06/14/2006CN1259730C Semiconductor device and producing method thereof
06/14/2006CN1259729C Semiconductor device and manufacture method thereof
06/14/2006CN1259728C Semiconductor device and its mfg. method
06/14/2006CN1259727C Semiconductor device and apparatus for communication system
06/14/2006CN1259726C Charge transferring device and charge transferring method which can reduce floating diffusion capacitance
06/14/2006CN1259724C Substrate device and mfg method thereof, electrooptical device and electronic apparatus
06/14/2006CN1259723C Structure of flash memory and its operation method
06/14/2006CN1259722C Structure of mask ROM and method for manufacturing the same
06/14/2006CN1259721C Structure of storage device and its making method
06/14/2006CN1259720C Separate-gate flash memory unit and its making process
06/14/2006CN1259719C IC device and its manufacture method
06/14/2006CN1259718C Electrooptical device and semiconductor device
06/14/2006CN1259717C Power semiconductor module
06/14/2006CN1259716C Method for erasing non-volatile memory
06/14/2006CN1259715C Initialization method for P-type silicon nitride ROM device
06/14/2006CN1259714C Method for making non-volatile memory with shallow junction
06/14/2006CN1259713C Method for making silicon nitride ROM module
06/14/2006CN1259712C Mixed mode producing process
06/14/2006CN1259711C Method for evaluating inner connecting structure layout and sheet metal resistor thereof
06/14/2006CN1259710C Method for forming barrier layer between low dielectric material layer and inner connecting wire
06/14/2006CN1259709C Method for integral manufacturing integrated circuit device and micro electro-mechanical component
06/14/2006CN1259708C Antistatic IC element testing system
06/14/2006CN1259707C Method for detecting deposition temperature in chemical vapour deposition chamber
06/14/2006CN1259706C Method for making shallow trench isolation zone
06/14/2006CN1259705C Bare chip mounting method and mounting system
06/14/2006CN1259704C Circuit board manufacturing method and device
06/14/2006CN1259703C Manufacturing method of semiconductor assembly capable of improving lattice defect in silicon epitaxial layer
06/14/2006CN1259702C Method of forming light doped drain electrode using side wall polymer grid structure
06/14/2006CN1259701C Process for preparing MOS transistor
06/14/2006CN1259700C Method for flattening dielectric layer
06/14/2006CN1259699C Nitrogen gate containing silicon oxide layer structure of semiconductor device and preparation technique
06/14/2006CN1259698C Semiconductor device and method for producing semiconductor device
06/14/2006CN1259697C Forming method of flute grid electrode profile
06/14/2006CN1259696C Source/drain ion injecting method for lowering defect on substrate
06/14/2006CN1259695C Technique for growing silicide by high resistance silicide target
06/14/2006CN1259694C Production method for semiconductor substrate, semiconductor substrate and semiconductor device
06/14/2006CN1259693C Method for preparing low temperature polysilicon thin film and transistor of low temperature polysilicon thin film
06/14/2006CN1259692C Method for mfg. insulating layer coating substrate for strain semiconductor
06/14/2006CN1259691C Continuous scanning synchronous control method and system for step scanning photoetching machine
06/14/2006CN1259690C Chip process equipment capable of mapping chips
06/14/2006CN1259689C Controlling process of condition type remaking production flow
06/14/2006CN1259596C Exposure method and device
06/14/2006CN1259573C 探针卡 Probe Card
06/14/2006CN1259562C Metering device of insulating fluid, pureness controller, mixture controller
06/14/2006CN1259524C Method and system for treating exhaust gas
06/14/2006CN1259460C Method for preventing thin membrane deposited by electroplating depositing copper device from generating cavity
06/14/2006CN1259450C Chemical vapour deposition device and method
06/14/2006CN1259448C Sputtering equipment and film forming method
06/14/2006CN1259384C Ultraviolet curing pressure sensitive contact adhesive composition and piece
06/14/2006CN1259024C Semiconductor device for fingerprint identification
06/13/2006USRE39126 Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs
06/13/2006USRE39124 Integrated circuit having capacitive elements
06/13/2006US7062748 System and method of correcting mask rule violations after optical proximity correction
06/13/2006US7062732 Semiconductor device, method of generating pattern for semiconductor device, method of manufacturing semiconductor device and device for generating pattern used for semiconductor device
06/13/2006US7062728 Method of designing a logic circuit utilizing an algorithm based in C language
06/13/2006US7062725 Computer aided design system and computer-readable medium storing a program for designing clock gated logic circuits and gated clock circuit
06/13/2006US7062724 Method for designing a system LSI
06/13/2006US7062691 Method and apparatus for displaying test results and recording medium
06/13/2006US7062411 Method for process control of semiconductor manufacturing equipment
06/13/2006US7062409 System for, method of and computer program product for detecting failure of manufacturing apparatuses
06/13/2006US7062396 Apparatus for optical proximity correction, method for optical proximity correction, and computer program product for optical proximity correction
06/13/2006US7062347 Maintenance method and system for plasma processing apparatus
06/13/2006US7062346 Method for manufacturing multi-kind and small quantity semiconductor products in a mass-production line and system thereof
06/13/2006US7062344 Fabrication system and fabrication method
06/13/2006US7062161 Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor
06/13/2006US7062081 Method and system for analyzing circuit pattern defects
06/13/2006US7062010 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus
06/13/2006US7061959 Laser thin film poly-silicon annealing system
06/13/2006US7061814 Semiconductor device realized by using partial SOI technology
06/13/2006US7061808 Semiconductor memory device, driving method thereof, and portable electronic apparatus