Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2006
06/07/2006EP1667218A1 Soi wafer and its manufacturing method
06/07/2006EP1667216A2 Dielectric etch method with high density and low bombardment energy plasma providing high etch rates
06/07/2006EP1667215A1 Dry etching process and method for manufacturing magnetic memory device
06/07/2006EP1667214A1 Multilayer substrate cleaning method, substrate bonding method, and bonded wafer manufacturing method
06/07/2006EP1667213A1 Method for formation of thin film transistors on plastic substrates
06/07/2006EP1667212A1 Impurity introducing method, impurity introducing apparatus, and electronic device produced by using those
06/07/2006EP1667211A1 Projection exposure apparatus, cleaning and maintenance methods of projection exposure apparatus, and method of producing device
06/07/2006EP1667210A1 Exposure apparatus and device producing method
06/07/2006EP1667209A1 Soi wafer and its manufacturing method
06/07/2006EP1667208A1 Method for producing bonded wafer
06/07/2006EP1667207A1 Bonded wafer and its manufacturing method
06/07/2006EP1667206A1 Thick-film capacitors and methods of making them
06/07/2006EP1667090A1 Electrode wiring substrate and display device
06/07/2006EP1666972A1 Polyamide acid-containing composition for forming antireflective film
06/07/2006EP1666971A1 Positive resist composition and resist laminate for low-acceleration electron beam and method of pattern formation
06/07/2006EP1666970A1 Compound for resist and radiation-sensitive composition
06/07/2006EP1666969A1 Photosensitive insulating resin composition and cured product thereof
06/07/2006EP1666949A1 Laser irradiation apparatus, laser irradiation method and method for manufacturing semiconductor device
06/07/2006EP1666865A1 Illuminant distribution evaluating method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
06/07/2006EP1666645A1 Silicon carbide product, method for producing same, and method for cleaning silicon carbide product
06/07/2006EP1666632A2 Porous low dielectric constant compositions and methods for making and using same
06/07/2006EP1666408A1 Metal nanoparticle and method for producing same, liquid dispersion of metal nanoparticle and method for producing same, metal thin line, metal film and method for producing same
06/07/2006EP1666388A1 Conveyor belt cleaner scraper blade with sensor and control system therefor
06/07/2006EP1666202A1 Polishing cloth, polishing cloth processing method, and substrate manufacturing method using same
06/07/2006EP1665915A1 High reliability multilayer circuit substrates and methods for their formation
06/07/2006EP1665898A1 Highly efficient organic light emitting device using substrate having nanosized hemispherical recesses and method for preparing the same
06/07/2006EP1665408A2 Method for producing electronic components
06/07/2006EP1665406A1 Process for laminating a dielectric layer onto a semiconductor
06/07/2006EP1665405A1 Methods of forming thin film transistors and related systems
06/07/2006EP1665394A1 Adjustment of masks by re-flow
06/07/2006EP1665389A2 Method of filling structures for forming via-first dual damascene interconnects
06/07/2006EP1665386A1 Method of fabricating a double gate field effect transistor device, and such a double gate field effect transistor device
06/07/2006EP1665378A1 Chip on flex tape with dimension retention pattern
06/07/2006EP1665376A1 SOLVENT-MODIFIED RESIN SYSTEM CONTAINING FILLER THAT HAS HIGH Tg, TRANSPARENCY AND GOOD RELIABILITY IN WAFER LEVEL UNDERFILL APPLICATIONS
06/07/2006EP1665375A1 Solvent-modified resin compositions and methods of use thereof
06/07/2006EP1665373A2 Manufacture of a non-volatile memory device with a single access gate and differently doped source and drain
06/07/2006EP1665372A2 Support for vertically-oriented capacitors during the formation of a semiconductor device
06/07/2006EP1665371A1 Method for producing a multifunctional dielectric layer on a substrate
06/07/2006EP1665370A1 Interconnection structure with low dielectric constant
06/07/2006EP1665369A1 Method of forming a through-substrate interconnect
06/07/2006EP1665368A1 Process for manufacturing a multilayer structure made from semiconducting materials
06/07/2006EP1665367A2 Method of manufacturing a multilayer semiconductor structure with reduced ohmic losses
06/07/2006EP1665366A2 Clamping and de-clamping semiconductor wafers on a j-r electrostatic chuck
06/07/2006EP1665365A1 Clamping of semiconductor wafers to an electrostatic chuck
06/07/2006EP1665364A2 Apparatus and method for removing semiconductor chip
06/07/2006EP1665363A2 Wafer-level moat structures
06/07/2006EP1665362A2 Technique for evaluating a fabrication of a semiconductor component and wafer
06/07/2006EP1665361A2 Connector
06/07/2006EP1665360A2 Processes for fabricating conductive patterns using nanolithography as a patterning tool
06/07/2006EP1665359A2 Method of forming a bond pad
06/07/2006EP1665358A2 Fabrication of single or multiple gate field plates
06/07/2006EP1665357A1 Field-effect transistors with weakly coupled layered inorganic semiconductors
06/07/2006EP1665356A2 Method of making nonvolatile transistor pairs with shared control gate
06/07/2006EP1665355A2 Electronic devices
06/07/2006EP1665354A2 Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition
06/07/2006EP1665353A1 Improved method of etching silicon
06/07/2006EP1665352A2 Monitoring system comprising infrared thermopile detector
06/07/2006EP1665351A2 Multiple zone structure capable of light radiation annealing and method using said structure
06/07/2006EP1665350A1 Method for treating heteroepitaxially grown semi-conductor layers on semi-conductor substrates, semi-conductor substrate comprising a treated semi-conductor layer and semi-conductor component made of said type of semi-conductor substrate
06/07/2006EP1665349A2 Semiconductor channel on insulator structure
06/07/2006EP1665348A1 Method and device
06/07/2006EP1665347A1 Techniques for patterning features in semiconductor devices
06/07/2006EP1665346A1 Improved method of forming openings in an organic resin material
06/07/2006EP1665345A2 Improved copper bath for electroplating fine circuitry on semiconductor chips
06/07/2006EP1665343A2 METHOD TO REDUCE STACKING FAULT NUCLEATION SITES AND REDUCE V sb f /sb DRIFT IN BIPOLAR DEVICES
06/07/2006EP1665340A2 Formation of a silicon germanium-on-insulator structure by oxidation of a buried porous silicon layer
06/07/2006EP1665339A2 High-purity crystal growth
06/07/2006EP1665337A2 Doped alloys for electrical interconnects, methods of production and uses thereof
06/07/2006EP1665335A1 Eddy current system for in-situ profile measurement
06/07/2006EP1665334A2 Method to produce transistor having reduced gate height
06/07/2006EP1665290A2 Production of electronic devices
06/07/2006EP1665285A2 Methods for identifying non-volatile memory elements with poor subthreshold slope or weak transconductance
06/07/2006EP1665283A1 Nonvolatile semiconductor memory device having protection function for each memory block
06/07/2006EP1665278A2 Nanotube-based switching elements with multiple controls and circuits made from same
06/07/2006EP1665274A2 Fowler-nordheim block alterable eeprom memory cell
06/07/2006EP1665076A2 Method and system of diagnosing a processing system using adaptive multivariate analysis
06/07/2006EP1665049A2 A system and method for testing and configuring semiconductor functional circuits
06/07/2006EP1664935A1 Stripping and cleaning compositions for microelectronics
06/07/2006EP1664928A2 Positive photoresist composition and resist pattern formation
06/07/2006EP1664924A2 Method for high-resolution processing of thin layers with electron beams
06/07/2006EP1664396A1 A method of fabricating an epitaxially grown layer
06/07/2006EP1664393A2 Methods of processing of gallium nitride
06/07/2006EP1664381A1 Apparatus and method of detecting the electroless deposition endpoint
06/07/2006EP1664192A1 No-flow underfill material having low coefficient of thermal expansion and good solder ball fluxing performance
06/07/2006EP1663867A1 Method for producing tetrafluorosilane
06/07/2006EP1663853A2 Methods, devices and compositions for depositing and orienting nanostructures
06/07/2006EP1663852A1 Method for the production of etched holes and/or etched trenches, and membrane sensor unit
06/07/2006EP1663576A1 Polished state monitoring apparatus and polishing apparatus using the same
06/07/2006EP1663534A1 Acoustic diffusers for acoustic field uniformity
06/07/2006EP1663513A2 Deposition and patterning process
06/07/2006EP1584108A4 High performance embedded dram technology with strained silicon
06/07/2006EP1573745A4 Programmable interconnect cell for configuring a field programmable gate array
06/07/2006EP1567288A4 ANTI-REFLECTIVE COATING COMPOSITIONS FOR USE WITH LOW k DIELECTRIC MATERIALS
06/07/2006EP1485944A4 Laser assisted direct imprint lithography
06/07/2006EP1446826B1 Storage device
06/07/2006EP1444556A4 Semiconductor run-to-run control system with state and model parameter estimation
06/07/2006EP1407477A4 Improved connection assembly for integrated circuit sensors
06/07/2006EP1392508A4 Anti-reflective coating composition with improved spin bowl compatibility
06/07/2006EP1364393A4 Flash memory with ultra thin vertical body transistors
06/07/2006EP1356511A4 Use of protective caps as masks at a wafer scale