| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/20/2006 | US7063603 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 06/20/2006 | US7063600 Polishing apparatus |
| 06/20/2006 | US7063598 Substrate delivery mechanism |
| 06/20/2006 | US7063597 Polishing processes for shallow trench isolation substrates |
| 06/20/2006 | US7063499 Conveyor system |
| 06/20/2006 | US7063478 Crystallization apparatus and crystallization method |
| 06/20/2006 | US7063455 Chemical dilution system for semiconductor device processing system |
| 06/20/2006 | US7063301 Facilities connection bucket for pre-facilitation of wafer fabrication equipment |
| 06/20/2006 | US7063246 Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus |
| 06/20/2006 | US7063192 Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus |
| 06/20/2006 | US7063097 In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
| 06/20/2006 | US7063094 Substrate processing apparatus |
| 06/20/2006 | US7063091 Method for cleaning the surface of a substrate |
| 06/20/2006 | US7062850 Forming a row of aligned windows in a planar surface; depositing an electromigration-inhibiting/electrically conductive material over the planar surface and through the windows to fill; removing portions |
| 06/20/2006 | CA2307231C Silicon based conductive material and process for production thereof |
| 06/20/2006 | CA2297058C Electrode means, with or without functional elements and an electrode device formed of said means |
| 06/15/2006 | WO2006063353A2 Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step |
| 06/15/2006 | WO2006063272A2 Alloyed underlayer for microelectronic interconnects |
| 06/15/2006 | WO2006063269A2 A method for making a semiconductor device with a high-k gate dielectric and a metal gate electrode |
| 06/15/2006 | WO2006063259A1 Wafer bonded mos decoupling capacitor |
| 06/15/2006 | WO2006063170A2 Methodology for recovery of hot carrier induced degradation in bipolar devices |
| 06/15/2006 | WO2006063145A2 A method for manufacturing a silicided gate electrode using a buffer layer |
| 06/15/2006 | WO2006063102A2 Method of correction for wafer crystal cut error in semiconductor processing |
| 06/15/2006 | WO2006063098A1 Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers |
| 06/15/2006 | WO2006063070A2 All surface data for use in substrate inspection |
| 06/15/2006 | WO2006063060A2 Device having enhanced stress state and related methods |
| 06/15/2006 | WO2006063046A2 Charged particle implantation for transistor symmetry |
| 06/15/2006 | WO2006063044A2 Method and device for wafer scale packaging of optical devices using a scribe and break process |
| 06/15/2006 | WO2006063007A2 Method and system for providing a highly textured magnetoresistance element and magnetic memory |
| 06/15/2006 | WO2006062869A1 Strained silicon, gate engineered fermi-fets |
| 06/15/2006 | WO2006062823A2 Systems and methods for solder bonding |
| 06/15/2006 | WO2006062536A2 Formation of ultra-shallow junctions by gas-cluster ion irridation |
| 06/15/2006 | WO2006062534A1 Non-aqueous, non-corrosive microelectronic cleaning compositions |
| 06/15/2006 | WO2006062332A1 Saddle type flash memory device and method of fabricating the same |
| 06/15/2006 | WO2006062307A1 Scrap elimination apparatus |
| 06/15/2006 | WO2006062303A1 Method for designing block placement and power distribution of semiconductor integrated circuit |
| 06/15/2006 | WO2006062232A1 Substrate holding device and polishing apparatus |
| 06/15/2006 | WO2006062195A1 Semiconductor package substrate |
| 06/15/2006 | WO2006062188A1 Exposure apparatus, exposure method and device manufacturing method |
| 06/15/2006 | WO2006062183A1 Transfer robot and transfer apparatus |
| 06/15/2006 | WO2006062180A1 Display device |
| 06/15/2006 | WO2006062158A1 Polishing pad |
| 06/15/2006 | WO2006062150A1 Magnetic random access memory |
| 06/15/2006 | WO2006062145A1 Image exposing method and apparatus |
| 06/15/2006 | WO2006062099A1 Reflective photomask blank, reflective photomask, and method for manufacturing semiconductor device using same |
| 06/15/2006 | WO2006062096A1 Exposure apparatus and method for manufacturing device |
| 06/15/2006 | WO2006062091A1 Component mounting apparatus and component mounting method |
| 06/15/2006 | WO2006062085A1 Dry etching method and dry etching apparatus |
| 06/15/2006 | WO2006062074A1 Substrate processing method, exposure method, exposure apparatus, and method for manufacturing device |
| 06/15/2006 | WO2006062065A1 Maintenance method, maintenance apparatus, exposure apparatus and device manufacturing method |
| 06/15/2006 | WO2006062017A1 Division starting poin forming method in body to be divided, dividing method for body to be divided, and method of processing work by pulse laser beam |
| 06/15/2006 | WO2006062005A1 Cleaning liquid for lithography and method for resist pattern formation |
| 06/15/2006 | WO2006061975A1 Method for forming resist pattern |
| 06/15/2006 | WO2006061942A1 Bidirectional field-effect transistor and matrix converter |
| 06/15/2006 | WO2006061875A1 Semiconductor device manufacturing method |
| 06/15/2006 | WO2006061871A1 Semiconductor device |
| 06/15/2006 | WO2006061830A2 Automated monitoring of analog guages |
| 06/15/2006 | WO2006061764A1 Method of manufacturing a semiconductor device and semiconductor device obtained by using such a method |
| 06/15/2006 | WO2006061731A1 Method of producing an epitaxial layer on a semiconductor substrate and device produced with such a method |
| 06/15/2006 | WO2006061673A1 Semiconductor package having at least two semiconductor chips and method of assembling the semiconductor package |
| 06/15/2006 | WO2006061589A1 Electronic devices |
| 06/15/2006 | WO2006061439A1 Vertical bipolar transistor |
| 06/15/2006 | WO2006061371A1 Cmos transistor and method of manufacture thereof |
| 06/15/2006 | WO2006061369A1 Semiconductor device and method of manufacture thereof |
| 06/15/2006 | WO2006061350A1 Thermode unit for semiconductor components |
| 06/15/2006 | WO2006061318A1 Integrated circuit dielectric having oriented cylindrical voids |
| 06/15/2006 | WO2006061277A1 Semiconductor device and method for production thereof |
| 06/15/2006 | WO2006061205A2 Method and device for etching substrates received in an etching solution |
| 06/15/2006 | WO2006060981A1 Semiconductor component and method for producing a semiconductor component |
| 06/15/2006 | WO2006060978A1 Wide band-gap, high relative permittivity material |
| 06/15/2006 | WO2006060976A1 Method for applying an adhesive layer to thinly ground semiconductor chips of a semiconductor wafer |
| 06/15/2006 | WO2006060913A1 Wire bonder for ball bonding insulated wire and method of using same |
| 06/15/2006 | WO2006047326B1 Sacrificial substrate for etching |
| 06/15/2006 | WO2006047215A3 Method and system for transferring a patterned material |
| 06/15/2006 | WO2006028942A3 Thermally controlled self-assembly method and support |
| 06/15/2006 | WO2006005317A3 Method for the production of an electric component and component |
| 06/15/2006 | WO2005117125A3 Yield improvement in silicon-germanium epitaxial growth |
| 06/15/2006 | WO2005117089A3 Decoupled complementary mask patterning transfer method |
| 06/15/2006 | WO2005114742A3 Silicon on insulator read-write non-volatile memory comprising lateral thyristor and trapping layer |
| 06/15/2006 | WO2005114720A3 Parylene-based flexible multi-electrode arrays for neuronal stimulation and recording and methods for manufacturing the same |
| 06/15/2006 | WO2005098976A3 Semiconductor light emitting devices including a luminescent conversion element and methods for packaging the same |
| 06/15/2006 | WO2005024904A3 Reduction of feature critical dimensions |
| 06/15/2006 | US20060129967 System, method and program for generating mask data, exposure mask and semiconductor device in consideration of optical proximity effects |
| 06/15/2006 | US20060129264 Method for controlling semiconductor processing apparatus |
| 06/15/2006 | US20060128914 Monomers selected from1-trifluoro-2-trifluoromethyl-2-hydroxy-(4 or 5)-pentyl (meth)acrylate or 2-{[5-(1',1',1'-trifluoro-2'-trifluoromethyl-2'-hydroxy)propyl]norbornyl]}(meth)acrylate |
| 06/15/2006 | US20060128834 Microelectronic devices having underfill materials with improved fluxing agents |
| 06/15/2006 | US20060128286 Polishing apparatus |
| 06/15/2006 | US20060128277 Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure |
| 06/15/2006 | US20060128276 Carrier for double side polishing |
| 06/15/2006 | US20060128271 Polishing pad for semiconductor wafer and laminated body for polishing of semiconductor wafer equipped with the same as well as method for polishing of semiconductor wafer |
| 06/15/2006 | US20060128250 Method of integrating organic light emitting diode and organic field effect transistor |
| 06/15/2006 | US20060128211 Holding device for holding a tested electronic module |
| 06/15/2006 | US20060128168 Atomic layer deposited lanthanum hafnium oxide dielectrics |
| 06/15/2006 | US20060128167 Semiconductor device fabrication method |
| 06/15/2006 | US20060128166 Semiconductor device fabrication method |
| 06/15/2006 | US20060128165 Method for patterning surface modification |
| 06/15/2006 | US20060128164 Chemical treatment of semiconductor substrates |
| 06/15/2006 | US20060128163 Surface treatment of post-rie-damaged p-osg and other damaged materials |
| 06/15/2006 | US20060128162 Process for fabricating a semiconductor device having an RTCVD layer |
| 06/15/2006 | US20060128161 Film formation method and apparatus for semiconductor process |