Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/05/2006US20060223199 Semiconductor device and manufacturing method thereof
10/05/2006US20060223198 Semiconductor device and fabricating method of the same
10/05/2006US20060223167 Biochip support comprising thin layers of sol-gel material and production method thereof
10/05/2006US20060223008 Composition for forming antireflection film, laminate, and method for forming resist pattern
10/05/2006US20060222964 Method for manufacturing photomask and method for manufacturing semiconductor device using photomask
10/05/2006US20060222899 Magnetic recording media
10/05/2006US20060222771 Methods for the reduction and elimination of particulate contamination with cvd of amorphous carbon
10/05/2006US20060222760 Process for producing a multifunctional dielectric layer on a substrate
10/05/2006US20060222481 Method of supporting a substrate in a gas cushion susceptor system
10/05/2006US20060222477 High speed substrate aligner apparatus
10/05/2006US20060222235 Defect inspection method
10/05/2006US20060222233 Pattern defect inspection method and apparatus using image correction technique
10/05/2006US20060221688 Semiconductor integrated circuit and nonvolatile memory element
10/05/2006US20060221555 Solid electrolyte memory element and method for fabricating such a memory element
10/05/2006US20060221219 Solid-state imaging device and manufacture therof
10/05/2006US20060221101 Color image display device, method of driving the same, and electronic equipment
10/05/2006US20060220672 Boundary scan controller, semiconductor device, method for identifying semiconductor circuit chip of semiconductor device, and method for controlling semiconductor circuit chip of semiconductor device
10/05/2006US20060220669 Semiconductor integrated circuit device
10/05/2006US20060220666 Microcontactor probe assembly
10/05/2006US20060220525 Group III-nitride layers with patterned surfaces
10/05/2006US20060220500 Method for manufacturing surface acoustic wave device
10/05/2006US20060220254 Semiconductor device which prevents peeling of low-permittivity film by using multilevel interconnection
10/05/2006US20060220253 Porous film, composition and manufacturing method, interlayer dielectric film, and semiconductor device
10/05/2006US20060220249 Nobel metal barrier and seed layer for semiconductors
10/05/2006US20060220248 Low-temperature chemical vapor deposition of low-resistivity ruthenium layers
10/05/2006US20060220247 Semiconductor device and manufacturing method therefor
10/05/2006US20060220243 Electronic device package
10/05/2006US20060220227 High density integrated circuit having multiple chips and employing a ball grid array (BGA) and method for making same
10/05/2006US20060220222 Chip embedded package structure and fabrication method thereof
10/05/2006US20060220211 Method for manufacturing semiconductor apparatus, and semiconductor apparatus and electric appliance
10/05/2006US20060220195 Structure and method to control underfill
10/05/2006US20060220193 Manufacturing method for magnetic sensor and lead frame therefor
10/05/2006US20060220187 Heatsink moldlocks
10/05/2006US20060220184 Antireflective coating for use during the manufacture of a semiconductor device
10/05/2006US20060220183 Semiconductor wafer having multiple semiconductor elements and method for dicing the same
10/05/2006US20060220177 Reduced porosity high-k thin film mixed grains for thin film capacitor applications
10/05/2006US20060220176 High-k thin film grain size control
10/05/2006US20060220173 Wafer level package including a device wafer integrated with a passive component
10/05/2006US20060220169 Device having conductive material disposed in a cavity formed in an isolation oxide disposed in a trench
10/05/2006US20060220167 IC package with prefabricated film capacitor
10/05/2006US20060220165 Semiconductor device
10/05/2006US20060220164 Thermopile-based gas sensor
10/05/2006US20060220162 Spin tunnel transistor
10/05/2006US20060220160 Structure of a structure release and a method for manufacturing the same
10/05/2006US20060220157 Transitional dielectric layer to improve reliability and performance of high dielectric constant transistors
10/05/2006US20060220153 Method of fabricating a field effect transistor structure with abrupt source/drain junctions
10/05/2006US20060220152 MOSFET structure with ultra-low K spacer
10/05/2006US20060220151 Semiconductor device having enhanced performance and method
10/05/2006US20060220147 Isolation structure configurations for modifying stresses in semiconductor devices
10/05/2006US20060220141 Low contact resistance cmos circuits and methods for their fabrication
10/05/2006US20060220133 Doping of semiconductor fin devices
10/05/2006US20060220132 Semiconductor substrate, semiconductor device, method of manufacturing semiconductor substrate, and method of manufacturing semiconductor device
10/05/2006US20060220131 Fin-type channel transistor and method of manufacturing the same
10/05/2006US20060220127 Method for producing a tensioned layer on a substrate, and a layer structure
10/05/2006US20060220123 Chip scale surface mounted device and process of manufacture
10/05/2006US20060220115 Semiconductor device
10/05/2006US20060220114 Semiconductor device and manufacturing method thereof
10/05/2006US20060220110 Integrated circuit with protected implantation profiles and method for the formation thereof
10/05/2006US20060220109 Selectively doped trench device isolation
10/05/2006US20060220105 Self-aligned split-gate nonvolatile memory structure and a method of making the same
10/05/2006US20060220100 Semicondudctor device
10/05/2006US20060220093 Non-volatile memory cell and method of fabrication
10/05/2006US20060220092 Titanium oxide extended gate field effect transistor
10/05/2006US20060220091 Semiconductor device and method for fabricating the same
10/05/2006US20060220087 Method of forming a contact structure including a vertical barrier structure and two barrier layers
10/05/2006US20060220085 Single transistor floating body DRAM cell having recess channel transistor structure and method of fabricating the same
10/05/2006US20060220075 Methods of fabricating self-aligned source of flash memory device
10/05/2006US20060220056 Light emitting display and method of manufacturing the same
10/05/2006US20060220047 Phosphor and manufacturing method of the same, and light emitting device using the phosphor
10/05/2006US20060220042 Semiconductor device and fabrication method of the same
10/05/2006US20060220039 Semiconductor device, method of manufacturing the same, and substrate for manufacturing the same
10/05/2006US20060220029 Light-emitting device and method for manufacturing light-emitting device
10/05/2006US20060220027 Silicon carbide semiconductor device and process for producing the same
10/05/2006US20060220026 Semiconductor element
10/05/2006US20060220021 Method of manufacturing a semiconductor device
10/05/2006US20060220020 Thin film transistor, flat panel display device, and method of fabricating the same
10/05/2006US20060219949 Fib milling of copper over organic dielectrics
10/05/2006US20060219931 Lithographic apparatus, device manufacturing method, and device manufactured thereby
10/05/2006US20060219917 Scanning electron microscope with measurement function
10/05/2006US20060219909 Detecting apparatus and device manufacturing method
10/05/2006US20060219900 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
10/05/2006US20060219678 Wafer characteristics via reflectometry and wafer processing apparatus and method
10/05/2006US20060219664 Core leaching
10/05/2006US20060219663 Metal CMP process on one or more polishing stations using slurries with oxidizers
10/05/2006US20060219662 Fabrication process of semiconductor device and polishing method
10/05/2006US20060219660 Etching method
10/05/2006US20060219659 Method for treatment of silicon-based target object to be processed, apparatus for treatment and method of manufacturing semiconductor device
10/05/2006US20060219658 Method of measuring semiconductor wafers with an oxide enhanced probe
10/05/2006US20060219657 Etching method and apparatus, computer program and computer readable storage medium
10/05/2006US20060219655 Ferroelectric thin-film production method, voltage-application etching apparatus, ferroelectric crystal thin-film substrate, and ferroelectric crystal wafer
10/05/2006US20060219654 Silicon substrate comprising positive etching profiles with a defined slope angle, and production method
10/05/2006US20060219591 Wafer pod with working sheet holder
10/05/2006US20060219573 Apparatus with conductive pad for electroprocessing
10/05/2006US20060219362 Gas injector and apparatus including the same
10/05/2006US20060219361 High strip rate downstream chamber
10/05/2006US20060219351 Wafer strength reinforcement system for ultra thin wafer thinning
10/05/2006US20060219277 Substrate-treating apparatus
10/05/2006US20060219275 Device for cleaning wafers after a cmp process
10/05/2006US20060219267 System, method and apparatus for self-cleaning dry etch
10/05/2006US20060219179 Substrate gripping apparatus