| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/03/2006 | US7115498 Method of ultra-low energy ion implantation to form alloy layers in copper |
| 10/03/2006 | US7115497 Method for forming storage node contact plug of DRAM (dynamic random access memory) |
| 10/03/2006 | US7115496 Method for protecting the redistribution layer on wafers/chips |
| 10/03/2006 | US7115495 Methods of making projected contact structures for engaging bumped semiconductor devices |
| 10/03/2006 | US7115494 Method and system for controlling the presence of fluorine in refractory metal layers |
| 10/03/2006 | US7115493 Antifuse structures, methods, and applications |
| 10/03/2006 | US7115492 Technique for elimination of pitting on silicon substrate during gate stack etch using material in a non-annealed state |
| 10/03/2006 | US7115491 Method for forming self-aligned contact in semiconductor device |
| 10/03/2006 | US7115490 Apparatus and method for interlocking a power supply to ion implantation equipment, method and apparatus for generating an interlocking signal, method and apparatus for interrupting an ion implantation process, and an interlocking system |
| 10/03/2006 | US7115489 Methods of growing epitaxial silicon |
| 10/03/2006 | US7115488 Method of manufacturing semiconductor device |
| 10/03/2006 | US7115487 Crystalline thin film and process for production thereof, element employing crystalline thin film, circuit employing element, and device employing element or circuit |
| 10/03/2006 | US7115486 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method |
| 10/03/2006 | US7115485 Method for processing wafer |
| 10/03/2006 | US7115484 Method of dicing a wafer |
| 10/03/2006 | US7115483 Stacked chip package having upper chip provided with trenches and method of manufacturing the same |
| 10/03/2006 | US7115482 Method of manufacturing semiconductor device |
| 10/03/2006 | US7115481 Method for concurrently producing at least a pair of semiconductor structures that each include at least one useful layer on a substrate |
| 10/03/2006 | US7115480 Micromechanical strained semiconductor by wafer bonding |
| 10/03/2006 | US7115479 Sacrificial annealing layer for a semiconductor device and a method of fabrication |
| 10/03/2006 | US7115478 Method of fabricating a semiconductor device and a method of generating a mask pattern |
| 10/03/2006 | US7115477 Gate with dual gate dielectric layer and method of fabricating the same |
| 10/03/2006 | US7115476 Semiconductor manufacturing method and semiconductor device |
| 10/03/2006 | US7115475 Method of manufacturing semiconductor device |
| 10/03/2006 | US7115474 Nonvolatile semiconductor memory and method of manufacturing the same |
| 10/03/2006 | US7115473 Method of fabrication of non-volatile memory |
| 10/03/2006 | US7115472 Process for manufacturing a dual charge storage location memory cell |
| 10/03/2006 | US7115471 Method of manufacturing semiconductor device including nonvolatile memory |
| 10/03/2006 | US7115470 Methods of fabricating flash memory cell having split-gate structure using spacer oxidation process |
| 10/03/2006 | US7115469 Integrated ONO processing for semiconductor devices using in-situ steam generation (ISSG) process |
| 10/03/2006 | US7115468 Semiconductor device and method for fabricating the same |
| 10/03/2006 | US7115467 Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect |
| 10/03/2006 | US7115466 Bipolar transistor with graded base layer |
| 10/03/2006 | US7115465 Method for manufacturing a bipolar transistor |
| 10/03/2006 | US7115464 Semiconductor device having different metal-semiconductor portions formed in a semiconductor region and a method for fabricating the semiconductor device |
| 10/03/2006 | US7115463 Patterning SOI with silicon mask to create box at different depths |
| 10/03/2006 | US7115462 Processes providing high and low threshold p-type and n-type transistors |
| 10/03/2006 | US7115461 High permittivity silicate gate dielectric |
| 10/03/2006 | US7115460 Standard cell back bias architecture |
| 10/03/2006 | US7115459 Method of fabricating SiGe Bi-CMOS device |
| 10/03/2006 | US7115458 Gate coupling in floating-gate memory cells |
| 10/03/2006 | US7115457 Method for crystallizing semiconductor with laser beams |
| 10/03/2006 | US7115456 Sequential lateral solidification device and method of crystallizing silicon using the same |
| 10/03/2006 | US7115455 Method of fabricating polysilicon film |
| 10/03/2006 | US7115454 Thin film semiconductor device, polycrystalline semiconductor thin film production and process and production apparatus |
| 10/03/2006 | US7115453 Semiconductor device and manufacturing method of the same |
| 10/03/2006 | US7115452 Method of making semiconductor device |
| 10/03/2006 | US7115451 Methods of forming semiconductor circuitry |
| 10/03/2006 | US7115450 Approach to improve line end shortening including simultaneous trimming of photosensitive layer and hardmask |
| 10/03/2006 | US7115449 Method for fabrication of polycrystalline silicon thin film transistors |
| 10/03/2006 | US7115448 Thin film transistor, liquid crystal display device and method of fabricating the thin film transistor |
| 10/03/2006 | US7115447 Manufacturing semiconductor device including forming LDD region using conductive layer as mask |
| 10/03/2006 | US7115446 Flip chip bonding method for enhancing adhesion force in flip chip packaging process and metal layer-built structure of substrate for the same |
| 10/03/2006 | US7115445 Semiconductor package having reduced thickness |
| 10/03/2006 | US7115444 Semiconductor device with improved heat dissipation, and a method of making semiconductor device |
| 10/03/2006 | US7115443 Method and apparatus for manufacturing a packaged semiconductor device, packaged semiconductor device obtained with such a method and metal carrier suitable for use in such a method |
| 10/03/2006 | US7115442 Ball grid array package with stacked center pad chips and method for manufacturing the same |
| 10/03/2006 | US7115441 Semiconductor package with semiconductor chips stacked therein and method of making the package |
| 10/03/2006 | US7115440 SO2 treatment of oxidized CuO for copper sulfide formation of memory element growth |
| 10/03/2006 | US7115439 High photosensitivity CMOS image sensor pixel architecture |
| 10/03/2006 | US7115438 Method for manufacturing a complementary metal-oxide semiconductor sensor |
| 10/03/2006 | US7115437 Micromachined device having electrically isolated components and a method for making the same |
| 10/03/2006 | US7115436 Integrated getter area for wafer level encapsulated microelectromechanical systems |
| 10/03/2006 | US7115435 Manufacturing method for wiring substrates |
| 10/03/2006 | US7115434 Method for precisely forming light emitting layers in a semiconductor device |
| 10/03/2006 | US7115433 Contact structure of wiring and a method for manufacturing the same |
| 10/03/2006 | US7115432 Base pattern forming material for electrode and wiring material absorption, electrode and wiring forming method, and method of manufacturing image forming apparatus |
| 10/03/2006 | US7115431 Method of fabricating reflective liquid crystal display integrated with driving circuit |
| 10/03/2006 | US7115430 Layer of an electroluminescent organic material dispersed in a matrix of a non-electroluminescent organic polymer and an electroluminescent organic material with electrodes |
| 10/03/2006 | US7115429 Method of fabricating image display unit |
| 10/03/2006 | US7115428 Method for fabricating light-emitting devices utilizing a photo-curable epoxy |
| 10/03/2006 | US7115427 Red light-emitting device and method for preparing the same |
| 10/03/2006 | US7115426 Method and apparatus for addressing thickness variations of a trench floor formed in a semiconductor substrate |
| 10/03/2006 | US7115425 Integrated circuit process monitoring and metrology system |
| 10/03/2006 | US7115424 Method for manufacturing semiconductor device |
| 10/03/2006 | US7115355 Positioning deformable photoresist on substrate; masking; using hydrophilic stamp to print waveguides; polydimethylsiloxane |
| 10/03/2006 | US7115344 Photomask and pattern forming method employing the same |
| 10/03/2006 | US7115214 Method of forming barrier layer |
| 10/03/2006 | US7115211 Endpoint detection using laser interferometry |
| 10/03/2006 | US7115207 For an integrated circuit chip interconnect solder bump; simultaneously etching both sides of a very thick molybdenum foil coated on each side by a photoresist using a very low etchant spray pressure, and undercutting said photoresist adjacent to opening to form an unsupported edge |
| 10/03/2006 | US7115196 Coating or coppering substrates such as semiconductor wafers in electrolytic cells to form electroconductive layers that are readily annealed at low temperatures; electrical and electronic apparatus |
| 10/03/2006 | US7115194 Magnetron sputtering apparatus |
| 10/03/2006 | US7115186 Liquid material evaporation apparatus for semiconductor manufacturing |
| 10/03/2006 | US7115184 Plasma processing device |
| 10/03/2006 | US7115182 Anodic bonding process for ceramics |
| 10/03/2006 | US7115167 Method of growing a semiconductor multi-layer structure |
| 10/03/2006 | US7115166 Systems and methods for forming strontium- and/or barium-containing layers |
| 10/03/2006 | US7115047 Golf club head with customizable center of gravity |
| 10/03/2006 | US7115026 Polishing apparatus |
| 10/03/2006 | US7115021 Abrasive, method of polishing target member and process for producing semiconductor device |
| 10/03/2006 | US7114939 Encapsulating brittle substrates using transfer molding |
| 10/03/2006 | US7114938 Lithographic apparatus for molding ultrafine features |
| 10/03/2006 | US7114907 Transfer robot |
| 10/03/2006 | US7114903 Apparatuses and method for transferring and/or pre-processing microelectronic workpieces |
| 10/03/2006 | US7114802 Pattern formation method and substrate manufacturing apparatus |
| 10/03/2006 | US7114693 Stable cell platform |
| 10/03/2006 | US7114669 Vaporizer includes nozzle with liquid exit and inlet; actuating seal adapted to engage liquid inlet to regulate a flow; andactuating a positive shut-off valve; carrier gas inlet coupled to body and a plurality of peltier cells coupled to the body |
| 10/03/2006 | US7114532 Liner for use in processing chamber |
| 10/03/2006 | US7114424 Wire sawing device |
| 10/03/2006 | US7114404 System and method for detecting flow in a mass flow controller |