H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/11/2006	CN1279577C Method for carrying out thermally processing for substrate
10/11/2006	CN1279576C Semiconductor equipment and making method thereof
10/11/2006	CN1279573C Target tray oblique scanning moving mechanism in ion implantaton apparatus
10/11/2006	CN1279406C Corrosion-proof agent stripper
10/11/2006	CN1279405C Chemical-enlarging etchant material and patterning method using same
10/11/2006	CN1279404C Photoetching device, component manufacturing method and component therefrom
10/11/2006	CN1279403C Method for producing photoetching equipment and device
10/11/2006	CN1279400C Driving apparatus, exposuring apparatus and device producing method
10/11/2006	CN1279329C Checking device and method for integrated circuit pattern
10/11/2006	CN1279221C Method of depositing big grain polycrystalline silicon thin film on ceramic substrate
10/11/2006	CN1279218C Anodization device and anodization method
10/11/2006	CN1279210C Monophyletic mixture of metal oxygen silicide
10/11/2006	CN1278975C Compositions for removing etching residue and use thereof
10/11/2006	CN1278946C Waste slushing compound exfoliative liquid regenerating apparatus and method
10/11/2006	CN1278858C Semiconductor device for liquid ejection head, liquid ejection head, and liquid ejection apparatus
10/11/2006	CN1278842C Method and mold for making thermoplastic resin container
10/11/2006	CN1278814C Welding head possessing polymer coating
10/11/2006	CN1278789C Ultrasonic wave cleaning assembly and ultrasonic wave cleaning method
10/11/2006	CN1278786C Liquid spraying method and device, producing method for electrooptical device and basilar plate
10/10/2006	US7120891 Master slice semiconductor integrated circuit
10/10/2006	US7120886 Device for determining the mask version utilized for each metal layer of an integrated circuit
10/10/2006	US7120882 Method of setting process parameter and method of setting process parameter and/or design rule
10/10/2006	US7120571 Resource board for emulation system
10/10/2006	US7120551 Method for estimating EMI in a semiconductor device
10/10/2006	US7120287 Non-lot based method for assembling integrated circuit devices
10/10/2006	US7120285 Method for evaluation of reticle image using aerial image simulator
10/10/2006	US7120177 Laser element, method of producing the laser element, and a laser module employing the laser element
10/10/2006	US7120086 Semiconductor circuit
10/10/2006	US7120080 Dual port semiconductor memory device
10/10/2006	US7120071 Test method for a semiconductor memory
10/10/2006	US7120057 Semiconductor memory device with a stacked gate including a floating gate and a control gate
10/10/2006	US7120047 Device selection circuitry constructed with nanotube technology
10/10/2006	US7120035 Inverter controller
10/10/2006	US7119952 Optical instrument, exposure apparatus, and device manufacturing method
10/10/2006	US7119908 Method and apparatus for measuring thickness of thin film and device manufacturing method using same
10/10/2006	US7119886 Lithographic apparatus, device manufacturing method, and angular encoder
10/10/2006	US7119885 Lithographic apparatus and device manufacturing method
10/10/2006	US7119884 Lithographic apparatus and device manufacturing method
10/10/2006	US7119882 Apparatus and method for projection exposure
10/10/2006	US7119881 Lithographic apparatus and device manufacturing method
10/10/2006	US7119880 Projection optical system, exposure apparatus, and device manufacturing method
10/10/2006	US7119879 Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method
10/10/2006	US7119878 Exposure apparatus and method of cleaning optical element of the same
10/10/2006	US7119875 Apparatus for forming pattern
10/10/2006	US7119874 Lithographic apparatus and device manufacturing method
10/10/2006	US7119857 Apparatus and manufacture method for flat display
10/10/2006	US7119777 Pixel structure of active organic light emitting diode
10/10/2006	US7119657 Polysilicon resistor semiconductor device
10/10/2006	US7119656 Method for trimming resistors
10/10/2006	US7119650 Integrated transformer
10/10/2006	US7119566 Test probe alignment apparatus
10/10/2006	US7119564 Method and system for compensating thermally induced motion of probe cards
10/10/2006	US7119560 Probe apparatus
10/10/2006	US7119557 Hollow microprobe using a MEMS technique and a method of manufacturing the same
10/10/2006	US7119523 Semiconductor chip
10/10/2006	US7119489 Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode
10/10/2006	US7119446 Semiconductor device
10/10/2006	US7119443 Titanium nitride film formed over substrate and containing halogen element; chemical vapor deposited second conductive film using material gas with halogen-free element; chemical mechanical polishing or sputtering
10/10/2006	US7119442 Semiconductor device
10/10/2006	US7119441 Semiconductor interconnect structure
10/10/2006	US7119440 Dielectric over tungsten, metal silicide, copper, or aluminum-copper intermetallic; sputtering aluminum-copper alloy or intermetallic to fill via opening; photolithographically patterning and dry etching to form interconnect line; semiconductors; electrical resistance
10/10/2006	US7119439 Semiconductor device and method for manufacturing the same
10/10/2006	US7119438 Method of arranging microspheres with liquid, microsphere arranging device, and semiconductor device
10/10/2006	US7119435 Semiconductor device with source/drain extension layer
10/10/2006	US7119433 Packaging for enhanced thermal and structural performance of electronic chip modules
10/10/2006	US7119432 Method and apparatus for establishing improved thermal communication between a die and a heatspreader in a semiconductor package
10/10/2006	US7119428 Semiconductor device
10/10/2006	US7119426 Semiconductor device and manufacturing method of same
10/10/2006	US7119424 Semiconductor device and method for manufacturing the same
10/10/2006	US7119423 Semiconductor device and method of manufacturing the same, electronic module, and electronic instrument
10/10/2006	US7119421 Quad flat non-leaded package comprising a semiconductor device
10/10/2006	US7119419 Detailed description of the presently preferred embodiments
10/10/2006	US7119418 Supercritical fluid-assisted deposition of materials on semiconductor substrates
10/10/2006	US7119417 Underlayer directly underlying channel layer contains germanium; silicide layer forming part of source and drain electrodes has lower concentration of germanium; low-resistance silicide phase
10/10/2006	US7119416 Bipolar transistor structure with self-aligned raised extrinsic base and methods
10/10/2006	US7119415 Monolithically integrated circuit comprising a thin film resistor, and fabrication method thereof
10/10/2006	US7119414 Fuse layout and method trimming
10/10/2006	US7119411 Interconnect structure for TFT-array substrate and method for fabricating the same
10/10/2006	US7119410 Magneto-resistive effect element and magnetic memory
10/10/2006	US7119408 Semiconductor device and method for fabricating the same
10/10/2006	US7119407 Semiconductor device and manufacturing method thereof
10/10/2006	US7119406 Semiconductor integrated circuit device having deposited layer for gate insulation
10/10/2006	US7119404 High performance strained channel MOSFETs by coupled stress effects
10/10/2006	US7119403 High performance strained CMOS devices
10/10/2006	US7119402 Field effect transistor and manufacturing method thereof
10/10/2006	US7119401 Tunable semiconductor diodes
10/10/2006	US7119400 Isotopically pure silicon-on-insulator wafers and method of making same
10/10/2006	US7119399 LDMOS transistor
10/10/2006	US7119397 Double blanket ion implant method and structure
10/10/2006	US7119395 Memory cell with nanocrystals or nanodots
10/10/2006	US7119394 Nonvolatile memory device and method for fabricating the same
10/10/2006	US7119392 Storage electrode of a semiconductor device and method of forming the same
10/10/2006	US7119391 System and method of manufacturing a substrate device
10/10/2006	US7119390 Dynamic random access memory and fabrication thereof
10/10/2006	US7119389 Dynamic random access memory cells having laterally offset storage nodes
10/10/2006	US7119388 MRAM device fabricated using chemical mechanical polishing
10/10/2006	US7119386 Versatile system for triple-gated transistors with engineered corners
10/10/2006	US7119385 Semiconductor apparatus having first and second gate electrodes
10/10/2006	US7119384 Field effect transistor and method for fabricating it
10/10/2006	US7119383 Arrangement of wiring lines including power source lines and channel wirings of a semiconductor integrated circuit having plural cells

1 ... 3259 3260 3261 3262 3263 3264 3265 3266 3267 3268 3269 3270 3271 3272 3273 3274 3275 3276 3277 3278 3279 ... 6590