H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/04/2006	CN1841719A Multilayer wiring board and its manufacturing method
10/04/2006	CN1841718A Semiconductor device and manufacturing method of the same
10/04/2006	CN1841717A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof
10/04/2006	CN1841711A Method for forming difference strained active area and its strained active area
10/04/2006	CN1841710A IC and its manufacturing method
10/04/2006	CN1841709A Semiconductor memory device and method for manufacturing same
10/04/2006	CN1841708A Method of fabricating flash memory device
10/04/2006	CN1841707A Method of forming memory device
10/04/2006	CN1841706A Method of manufacturing semiconductor device
10/04/2006	CN1841705A Method of manufacturing a semiconductor memory device
10/04/2006	CN1841704A Semiconductor device and manufacturing method of the same
10/04/2006	CN1841703A Method of manufacturing organic electroluminescent device and method of manufacturing device
10/04/2006	CN1841702A Wafer cutting method and device thereof
10/04/2006	CN1841701A Method of making a plug
10/04/2006	CN1841700A Method of manufacturing semiconductor device
10/04/2006	CN1841699A Method for forming semiconductor device
10/04/2006	CN1841698A Method for fabricating semiconductor device
10/04/2006	CN1841697A Substrate feed chamber and substrate processing apparatus
10/04/2006	CN1841696A Apparatus for processing substrate
10/04/2006	CN1841695A Substrate processing device and method
10/04/2006	CN1841694A Wafer transfer box
10/04/2006	CN1841693A Testing device and testing method of a semiconductor device
10/04/2006	CN1841692A Single plate temperature circulation aging device and its aging method
10/04/2006	CN1841691A Method and apparatus for bonding electronic components
10/04/2006	CN1841690A Manufacturing method for physical quantity sensor using lead frame and bonding device therefor
10/04/2006	CN1841689A Semiconductor device and semiconductor-device manufacturing method
10/04/2006	CN1841688A Method of manufacturing stack-type semiconductor device and method of manufacturing stack-type electronic component
10/04/2006	CN1841687A Sensor semiconductor device and its making method
10/04/2006	CN1841686A Method for producing flexible printed wiring board, and flexible printed wiring board
10/04/2006	CN1841685A Method of manufacturing semiconductor device and semiconductor device
10/04/2006	CN1841684A Method of manufacturing semiconductor device
10/04/2006	CN1841683A Method of manufacturing a memory device
10/04/2006	CN1841682A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof
10/04/2006	CN1841681A Semiconductor device and method for fabricating the same
10/04/2006	CN1841680A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof
10/04/2006	CN1841679A Nano material and application in FET nanometer component
10/04/2006	CN1841678A Schottky diode and method of manufacture
10/04/2006	CN1841677A Schottky diode and method of manufacture
10/04/2006	CN1841676A Formation of silicon nitride film by using atomic layer deposition method
10/04/2006	CN1841675A Method for fabricating semiconductor device
10/04/2006	CN1841674A Method for treatment of silicon-based target object to be processed, apparatus for treatment and method of manufacturing semiconductor device
10/04/2006	CN1841673A Method for etching dielectric material in semiconductor component
10/04/2006	CN1841672A Selective etching to increase trench surface area
10/04/2006	CN1841671A Fabrication process of semiconductor device and polishing method and polishing device
10/04/2006	CN1841670A Wafer cleaning and drying apparatus
10/04/2006	CN1841669A Wafer drying method
10/04/2006	CN1841668A Semiconductor-device manufacturing method
10/04/2006	CN1841667A Method for manufacturing metal coupling
10/04/2006	CN1841666A Substitution grid preparation method
10/04/2006	CN1841665A Implanting a substrate using an ion beam
10/04/2006	CN1841664A Nano-component doping method, method for making FET and nanometer tube FET
10/04/2006	CN1841663A Semiconductor manufacturing apparatus
10/04/2006	CN1841662A Method of manufacturing a semiconductor device
10/04/2006	CN1841661A Semiconductor manufacture method
10/04/2006	CN1841660A Method of manufacturing patterned ferroelectric media
10/04/2006	CN1841659A Silicon nano wires, semiconductor device including the same, and method of manufacturing the silicon nano wires
10/04/2006	CN1841658A Method to control interfacial properties for capacitors using a metal flash layer
10/04/2006	CN1841657A Protective tape separating method and apparatus using the same
10/04/2006	CN1841656A Protective tape cutting method and apparatus using the same
10/04/2006	CN1841655A Substrate processing apparatus
10/04/2006	CN1841654A Device and method for controlling temperature of a mounting table, a program therefor, and a processing apparatus including same
10/04/2006	CN1841653A Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
10/04/2006	CN1841652A Load fixing device, processing system and method
10/04/2006	CN1841651A Semiconductor device manufacturing method
10/04/2006	CN1841650A Substrate processing apparatus and substrate processing method
10/04/2006	CN1841649A Manufacturing managing method of semiconductor devices and a semiconductor substrate
10/04/2006	CN1841648A Processing chamber and processing device
10/04/2006	CN1841647A Semiconductor device and manufacturing method of the same
10/04/2006	CN1841388A Method for manufacturing photomask and method for manufacturing semiconductor device using photomask
10/04/2006	CN1841214A Methods of removing resist from substrates in resist stripping chambers
10/04/2006	CN1841213A Developing method and method of manufacturing a semiconductor device
10/04/2006	CN1841212A Lithographic device, device manufacturing method and device manufactured thereby
10/04/2006	CN1841211A Lithographic apparatus and device manufacturing method utilizing data filtering
10/04/2006	CN1841210A Optical element and light irradiation apparatus
10/04/2006	CN1841209A Optical element, exposure apparatus, and device manufacturing method
10/04/2006	CN1841208A Lithographic apparatus, wet dipping type projection device and device manufacturing method
10/04/2006	CN1841207A Dedicated metrology stage for lithography applications
10/04/2006	CN1841206A Method for semiconductor manufacturing using a negative photoresist with thermal flow properties
10/04/2006	CN1841205A Integrated optical metrology and lithographic process system for dynamic critical dimension control
10/04/2006	CN1841204A External exposure device
10/04/2006	CN1841201A Salt suitable for acid generator and chemical amplifying type corrosion-resistant composition containing the same
10/04/2006	CN1841200A Salt suitable for acid generator and chemical amplifying type corrosion-resistant composition containing the same
10/04/2006	CN1841169A Liquid crystal display device and method of fabricating the same
10/04/2006	CN1841149A Passivation protection method for silicon-based liquid crystal aluminium reflection electrode
10/04/2006	CN1841098A Multi-layer spectral purity filter and lithographic apparatus, device manufacturing method, and device
10/04/2006	CN1841054A Defect inspection method
10/04/2006	CN1841050A Inspecting apparatus, image pickup apparatus, and inspecting method
10/04/2006	CN1840997A Substrate treatment device
10/04/2006	CN1840747A Method for growing single-crystal zinc oxide film by using zinc oxide buffer layer
10/04/2006	CN1840624A Polymer remover
10/04/2006	CN1840602A Method for preparing a polishing slurry having high dispersion stability
10/04/2006	CN1840466A Unidimensional nano material device and method for manufacturing same
10/04/2006	CN1840465A Method for manufacturing unidimensional nano material device
10/04/2006	CN1840290A Polishing apparatus
10/04/2006	CN1840279A Wafer laser processing method and laser processing device
10/04/2006	CN1840276A Conductive ball mounting method, and apparatus therefor
10/04/2006	CN1840248A Cleaning method and cleaning apparatus
10/04/2006	CN1840247A Cleaning device and cleaning method
10/04/2006	CN1278594C Component fitting device and method thereof
10/04/2006	CN1278490C 晶体管电路 Transistor circuit

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