H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/05/2006	WO2006104100A1 Water purge agent, and method for resist pattern formation using the same
10/05/2006	WO2006104072A1 Heat treatment device and substrate manufacturing method
10/05/2006	WO2006104069A1 Gate insulating film, organic transistor, method for manufacturing organic el display, and display
10/05/2006	WO2006104068A1 Gate insulating film, organic transistor, method for manufacturing organic el display, and display
10/05/2006	WO2006104064A1 Substrate for growing gallium nitride and method for producing same
10/05/2006	WO2006104043A1 Method of surface treatment and surface-treated article
10/05/2006	WO2006104018A1 Substrate processing apparatus and substrate processing system
10/05/2006	WO2006104011A1 Shot shape measuring method, mask
10/05/2006	WO2006104002A1 Magnetic random access memory
10/05/2006	WO2006103997A1 Semiconductor device
10/05/2006	WO2006103978A1 Substrate treating apparatus and semiconductor device manufacturing method
10/05/2006	WO2006103966A1 METHOD FOR FORMING In-Ga-Zn-O FILM AND SOLAR CELL
10/05/2006	WO2006103962A1 Semiconductor device, resin composition for buffer coating, resin composition for die bonding, and resin composition for encapsulation
10/05/2006	WO2006103949A1 Flip chip mounting method and method for connecting substrates
10/05/2006	WO2006103948A1 Flip chip mounting method and bump forming method
10/05/2006	WO2006103918A1 Flip chip mounting body, flip chip mounting method and flip chip mounting apparatus
10/05/2006	WO2006103908A1 Organic ligands for semiconductor nanocrystals
10/05/2006	WO2006103897A1 Semiconductor device
10/05/2006	WO2006103882A1 Paste composition, electrode and solar cell device comprising same
10/05/2006	WO2006103859A1 Method and apparatus for cleaning substrate
10/05/2006	WO2006103858A1 Abrasive for semiconductor integrated circuit device, method of polishing therewith and process for producing semiconductor integrated circuit device
10/05/2006	WO2006103854A1 Suction apparatus, polishing apparatus, semiconductor device and semiconductor device manufacturing method
10/05/2006	WO2006103853A1 Semiconductor device using titanium dioxide as active layer and method for manufacturing same
10/05/2006	WO2006103845A1 Substrate processing method
10/05/2006	WO2006103839A1 Apparatus and method for mounting electronic component
10/05/2006	WO2006103837A1 Process for producing silicon single-crystal, annealed wafer and process for producing annealed wafer
10/05/2006	WO2006103836A1 Method and device of crystallizing thin film material
10/05/2006	WO2006103833A1 Deep-pot-shaped copper sputtering target and process for producing the same
10/05/2006	WO2006103832A1 Method for evaluating semiconductor wafer dopant contamination
10/05/2006	WO2006103825A1 Semiconductor device and method for manufacturing same
10/05/2006	WO2006103773A1 Spin processing method and apparatus
10/05/2006	WO2006103766A1 Ball capturing device, solder ball arrangement device, ball capturing method, and solder ball arranging method
10/05/2006	WO2006103751A1 Copper etchant and method of etching
10/05/2006	WO2006103634A2 Asymmetric high voltage mos device and method of fabrication
10/05/2006	WO2006103491A1 Hybrid fully soi-type multilayer structure
10/05/2006	WO2006103321A1 Strained-channel pmos transistor and corresponding production method
10/05/2006	WO2006103256A1 Substrate production method and substrate
10/05/2006	WO2006103158A2 Integration scheme for fully silicided gate
10/05/2006	WO2006103134A1 Method for producing a polycrystalline ceramic film on a substrate, capacitor structure having a ceramic film and use of said capacitor structure
10/05/2006	WO2006103055A1 A method of making a semiconductor device having an arched structure strained semiconductor layer
10/05/2006	WO2006102926A1 Semiconductor wafer with low-k dielectric layer and process for fabrication thereof
10/05/2006	WO2006102805A1 A mos field effect transistor having isolation structure and methods of manufacturing the same
10/05/2006	WO2006102801A1 A packaging method of spot gluing liquid resin
10/05/2006	WO2006085917A3 A method of fabricating a nano-wire
10/05/2006	WO2006071406A3 Method for sequencing substrates
10/05/2006	WO2006066658A3 Semiconductor substrate comprising a pn-junction and method for producing said substrate
10/05/2006	WO2006053338A3 System and method for improved dopant profiles in cmos transistors
10/05/2006	WO2006047025A3 Method of forming a component having dielectric sub-layers
10/05/2006	WO2006007141A3 Lead solder indicator and method
10/05/2006	WO2005124859A3 Methods and apparatuses for depositing uniform layers
10/05/2006	WO2005122245A3 Formation of metal-insulator metal capacitor using a hardmask
10/05/2006	WO2005112104A3 Cmos transistor using high stress liner layer
10/05/2006	WO2005081813A3 Surface plasmon light emitter structure and method of manufacture
10/05/2006	WO2005079318A3 Methods of forming doped and un-doped strained semiconductor and semiconductor films by gas-cluster ion irradiation
10/05/2006	WO2005050711A3 A method for fabricating semiconductor devices using strained silicon bearing material
10/05/2006	WO2004013661A3 Methods and apparatus for preparing specimens for microscopy
10/05/2006	US20060225162 Method of making a substrate structure with enhanced surface area
10/05/2006	US20060224347 Semiconductor device test method using an evaluation LSI
10/05/2006	US20060224276 Method for monitoring the position of a semiconductor processing robot
10/05/2006	US20060224269 Exposure apparatus and parameter editing method
10/05/2006	US20060224265 Substrate processing apparatus, history information recording method, history information recording program, and history information recording system
10/05/2006	US20060223425 Semiconductor processing methods of removing conductive material
10/05/2006	US20060223421 Polishing apparatus
10/05/2006	US20060223340 Manufacturing managing method of semiconductor devices and a semiconductor substrate
10/05/2006	US20060223339 Ald metal oxide deposition process using direct oxidation
10/05/2006	US20060223338 Film formation method and recording medium
10/05/2006	US20060223337 Atomic layer deposited titanium silicon oxide films
10/05/2006	US20060223336 Method for forming a resist film on a substrate having non-uniform topography
10/05/2006	US20060223335 Method of forming a semiconductor device having asymmetric dielectric regions and structure thereof
10/05/2006	US20060223334 System for controlling a plurality of lot processes, method for controlling a plurality of lot processes and method for manufacturing a semiconductor device
10/05/2006	US20060223333 Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon
10/05/2006	US20060223332 Method of manufacturing semiconductor device
10/05/2006	US20060223331 Method of forming sheet having foreign material portions used for forming multi-layer wiring board and sheet having foreign portions
10/05/2006	US20060223330 Nitride semiconductor device and manufacturing method thereof
10/05/2006	US20060223329 Vapor HF etch process mask and method
10/05/2006	US20060223328 Apparatus and method for manufacturing semiconductor device, and electronic apparatus
10/05/2006	US20060223327 Etch with photoresist mask
10/05/2006	US20060223326 Fabrication method of semiconductor device
10/05/2006	US20060223325 Semiconductor device and method for fabricating the same
10/05/2006	US20060223324 Method of fabricating semiconductor device
10/05/2006	US20060223323 Method of forming an interconnect structure
10/05/2006	US20060223322 Method of forming a trench structure
10/05/2006	US20060223321 High-density plasma (HDP) chemical vapor deposition (CVD) methods and methods of fabricating semiconductor devices employing the same
10/05/2006	US20060223319 Chemical mechanical polishing method for manufacturing semiconductor device
10/05/2006	US20060223318 Semiconductor device manufacturing method for preventing patterns from inclining in drying process
10/05/2006	US20060223317 Plasma processing method and plasma processing apparatus
10/05/2006	US20060223316 Surface treatment method, circuit lines formation method, circuit lines formation apparatus, and printed circuit board formed thereby
10/05/2006	US20060223315 Thermal oxidation of silicon using ozone
10/05/2006	US20060223314 Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
10/05/2006	US20060223313 Copper interconnect post for connecting a semiconductor chip to a substrate and method of fabricating the same
10/05/2006	US20060223312 Method and apparatus for selective deposition of materials to surfaces and substrates
10/05/2006	US20060223311 Technique for forming interconnect structures with reduced electro and stress migration and/or resistivity
10/05/2006	US20060223310 Method for forming a barrier/seed layer for copper metallization
10/05/2006	US20060223309 Dual-damascene process for manufacturing semiconductor devices
10/05/2006	US20060223308 Apparatus for manufacturing a semiconductor device and method of forming the same
10/05/2006	US20060223307 Process for producing electornic component and electronic component
10/05/2006	US20060223306 Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system
10/05/2006	US20060223305 Etch process for CD reduction of arc material
10/05/2006	US20060223304 Semiconductor device and pattern generating method
10/05/2006	US20060223303 Semiconductor device and method of manufacturing the same

1 ... 3262 3263 3264 3265 3266 3267 3268 3269 3270 3271 3272 3273 3274 3275 3276 3277 3278 3279 3280 3281 3282 ... 6590