Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2006
09/28/2006DE202004021017U1 Probe calibrating substrate for electronic application, has two conductive units interconnected with two respective ground paths of probes, where resistive material extends certain percentage of distance between units
09/28/2006DE19860061B4 System zur Prüfung der kombinatorischen Äquivalenz System for testing of combinatorial equivalence
09/28/2006DE19837893B4 Herstellungsverfahren für ein Halbleiterelement mit einem Wolframsilizid enthaltenden Gatestapel Manufacturing method of a semiconductor element with a tungsten silicide gate stack containing
09/28/2006DE19520768B4 Verfahren zur Herstellung einer Halbleitervorrichtung mit Dünnfilmwiderstand A method of manufacturing a semiconductor device having thin film resistor
09/28/2006DE112004002072T5 Lösbares, am Paket angeordnetes Spannungsregelungsmodul Detachable, arranged on the pack voltage regulation module
09/28/2006DE112004001735T5 Vorrichtung zur schnellen Plasmawärmebehandlung mit verbessertem Zufuhrstutzen der Radikalquelle An apparatus for plasma rapid thermal process with an improved supply port of the free radical source
09/28/2006DE112004001044T5 Elektrostatische Aufspannvorrichtung mit Heizvorrichtung An electrostatic chuck with heater
09/28/2006DE10323394B4 Verfahren zum Erzeugen einer elektrischen Kontaktierung zwischen zwei Halbleiterstücken und Verfahren zum Herstellen einer Anordnung von Halbleiterstücken A method of producing an electrical contact between two semiconductor pieces and methods of making an array of semiconductor pieces
09/28/2006DE10306550B4 Verfahren und Vorrichtung zum Bilden einer Halbleiterdünnschicht Method and apparatus for forming a semiconductor thin film
09/28/2006DE10256973B4 Integrierter Halbleiterspeicher mit einem an einem Steg ausgebildeten Auswahltransistor Integrated semiconductor memory with a selection transistor formed on a web
09/28/2006DE10234601B4 Halbleiterbauelement mit SOI-Substrat und Herstellungsverfahren hierfür A semiconductor device comprising an SOI substrate and manufacturing method thereof
09/28/2006DE10220922B4 Flash-Speicherzelle, Anordnung von Flash-Speicherzellen und Verfahren zur Herstellung von Flash-Speicherzellen Flash memory cell array of flash memory cells and methods for the production of flash memory cells
09/28/2006DE102006012445A1 Verfahren zur Aufbewahrung eines Siliciumsubstrats mit einem darauf erzeugten Siliciumoxidfilm A method of storing a silicon substrate with a silicon oxide film formed thereon
09/28/2006DE102006012007A1 Power semiconductor module, has insulation layer covering upper and edge sides of chip, and inner housing section under release of source and gate contact surfaces of chip and contact terminal surfaces on source and gate outer contacts
09/28/2006DE102006008734A1 Verfahren zum Herstellen eines transparenten Maskenrohlingsubstrats, Verfahren zum Herstellen eines Maskenrohlings und Verfahren zum Herstellen einer Belichtungsmaske A method for producing a transparent mask blank substrate, method of manufacturing a mask blank and process for producing an exposure mask
09/28/2006DE102005063117A1 Simulating resistance of semiconductor integrated circuit for variations in length, width and voltage, comprises calculating voltage coefficient of resistance of resistors expressed as linear function of voltage using measured resistances
09/28/2006DE102005062444A1 Gate commutated thyristor semiconductor device, has cathode connection connected with cathode post electrode by cathode flange, whereby cathode post electrode directly contacts cathode fin electrode
09/28/2006DE102005043557A1 Semiconductor device for electronic device, has through contact arranged in prefabricated through contact flat rod, which is positioned in end region of device and exhibits through opening which is filled with metal
09/28/2006DE102005036324A1 Semiconductor device for use as digital memory device, has semiconductor chip comprising bond wire guiding unit in edge area of top side of chip, where guiding unit has structures for guiding bond wire
09/28/2006DE102005032740B3 Microelectronic arrangement manufacture involves arranging components of microelectronic arrangement in assembly position, connecting components using bonding wires and setting components to final position deforming bonding wires
09/28/2006DE102005028641A1 Verfahren zur Herstellung eines Flash-Speicherbauelements A method for producing a flash memory device
09/28/2006DE102005022840B3 Contact structure manufacture for dynamic random access memory, by forming contact openings on isolation layer on top of semiconductor substrate, annealing semiconductor substrate and filing contact openings with conductive material
09/28/2006DE102005014427A1 Encapsulation of semiconductor component with chip on substrate in mould tool of top and bottom half after fitting elastic cover over chip
09/28/2006DE102005013783A1 Verfahren zum Trennen von spröden Materialien mittels Laser mit unsymmetrischer Strahlungsdichteverteilung A method for separating brittle materials by means of laser radiation with asymmetrical density distribution
09/28/2006DE102004060171B4 Charge-trapping-Speicherzelle und deren Herstellungsverfahren Charge-trapping memory cell and its manufacturing method
09/28/2006DE102004038874B4 1-Bit-SONOS-Speicherzelle und Herstellungsverfahren 1-bit SONOS memory cell, and manufacturing method
09/28/2006DE102004033149B4 Verfahren zum Herstellen eines Doppel-Gate-Transistors, einer Speicherzelle, eines Vertikaltransistors sowie vergrabenen Wort- bzw. Bitleitungen jeweils unter Verwendung einer vergrabenen Ätzstoppschicht A method of making a double-gate transistor, a memory cell of a vertical transistor and buried word or bit lines in each case using a buried etch stop layer
09/28/2006DE102004005774B4 Verfahren zur Herstellung von Gateelektroden in einem Feldplattentrench-Transistor sowie Feldplattentrench-Transistor A process for the production of gate electrodes in a field plate trench transistor and trench field plate transistor
09/28/2006DE10153763B4 Überwachung der Void-Bildung in einem Damascence-Prozess Monitoring of the Void formation in a Damascence process
09/28/2006DE10147890B4 Verfahren zur Herstellung eines Substrats aus Keramikmaterial mit einer strukturierten Metallschicht und derartiges Substrat A method of manufacturing a substrate made of ceramic material having a structured metal layer and such a substrate
09/28/2006DE10122136B4 Grenzflächenhohlraumüberwachung in einem Damaszener-Prozess Interfacial cavity monitoring in a damascene process
09/28/2006DE10032279B4 Elektrische Passivierung der Randgebiete von Solarzellen Electrical passivation of the peripheral areas of solar cells
09/28/2006CA2595402A1 Multilayer circuit devices and manufacturing methods using electroplated sacrificial structures
09/28/2006CA2564424A1 Group iii nitride semiconductor device and epitaxial substrate
09/27/2006EP1705974A2 Low moisture absorptive circuitized substrate with reduced thermal expansion, method of making same, electrical assembly utilizing same, and information handling system utilizing same
09/27/2006EP1705971A2 Electronic component disposing device and electronic component disposing method
09/27/2006EP1705715A1 Semiconductor device
09/27/2006EP1705714A2 Field effect transistor and method of manufacturing the same
09/27/2006EP1705713A2 Field-effect transistor
09/27/2006EP1705710A1 Bipolar transistor and method of manufacturing this transistor
09/27/2006EP1705705A1 Method for measuring amount of strain of bonded strained wafer
09/27/2006EP1705704A1 Process for producing soi wafer
09/27/2006EP1705703A2 Cellular and Wi-Fi communication devices integrated with a thin-film passive-component filter on an insulating substrate
09/27/2006EP1705702A2 Hybrid semiconductor apparatus, print head and image forming apparatus
09/27/2006EP1705701A2 Chemical and mechanical polishing method and polishing liquid used therefor
09/27/2006EP1705700A1 Lead zirconate titanate niobate film, lead zirconate titanate niobate laminate and method of manufacturing the same, surface acoustic wave device, frequency filter, oscillator, electronic circuit, and electronic instrument
09/27/2006EP1705699A1 Film forming device and film forming method
09/27/2006EP1705698A2 Method of fabricating strained silicon on an SOI substrate
09/27/2006EP1705697A1 Composition graded layer structure and method for forming the same
09/27/2006EP1705696A2 SiC semiconductor device
09/27/2006EP1705695A1 Exposure apparatus and device producing method
09/27/2006EP1705694A1 Exposure method and apparatus, and device producing method
09/27/2006EP1705693A2 Semiconductor device having stacked transistors and decoupling capacitors
09/27/2006EP1705692A2 Method of manufacturing a semiconductor device
09/27/2006EP1705489A2 Sensor design and process
09/27/2006EP1705258A2 Composition, methods and devices for high temperature lead-free solder
09/27/2006EP1705208A1 Composition for forming insulating film, method for producing same, silica insulating film and method for forming same
09/27/2006EP1705207A1 Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
09/27/2006EP1705206A1 Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film
09/27/2006EP1705150A2 Materials and methods for creating imaging layers
09/27/2006EP1704606A1 Organic transistor comprising a self-adjusting gate electrode, and method for the production thereof
09/27/2006EP1704598A1 Transistor with quantum dots in its tunnelling layer
09/27/2006EP1704597A1 Nitride-based transistors with a protective layer and a low-damage recess and methods of fabrication thereof
09/27/2006EP1704595A2 Bridge field-effect transistor storage cell, device comprising said cells and method for producing a bridge field-effect transistor storage cell
09/27/2006EP1704594A1 Various structure/height bumps for wafer level-chip scale package
09/27/2006EP1704592A1 Chip-sized filp-chip semiconductor package and method for making the same
09/27/2006EP1704591A1 Dicing/die bonding film and method of manufacturing the same
09/27/2006EP1704590A1 Tri-gate transistors and mehtods to fabricate same
09/27/2006EP1704588A1 A method for forming rectangular-shape spacers for semiconductor devices
09/27/2006EP1704587A1 N-channel transistor
09/27/2006EP1704586A1 System and method for selective etching of silicon nitride during substrate processing
09/27/2006EP1704585A2 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography
09/27/2006EP1704584A1 Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids
09/27/2006EP1704583A1 Capacitor
09/27/2006EP1648242A4 Emulsions
09/27/2006EP1454349B1 Trilayered beam mems device and related methods
09/27/2006EP1438315B1 Improved precursors for chemical vapour deposition
09/27/2006EP1415374B1 Separation of integrated optical modules and structures formed thereby
09/27/2006EP1360348A4 Method and apparatus for controlling thickness uniformity of electroplated layer
09/27/2006EP1295312A4 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
09/27/2006EP1292980B1 Method to etch poly si gate stacks on raised sti structure
09/27/2006EP1236275A4 Variable load switchable impedance matching system
09/27/2006EP1214734B1 Holder for a substrate cassette and device provided with such a holder
09/27/2006EP1194731A4 Interferometric apparatus and method that compensate refractive index fluctuations
09/27/2006EP1190607B1 Integrated circuits with copper metallization for interconnections
09/27/2006EP1177571B1 Method for transferring wafers and ring
09/27/2006EP1157598A4 Method and apparatus for deposition of diamond-like carbon coatings from a hall-current ion source
09/27/2006EP1155446B1 Method for producing a dram cell with a trench capacitor
09/27/2006EP1145313B1 Methods for forming co-axial interconnect lines in a cmos process
09/27/2006EP1062683B1 Holding method and apparatus for a wafer
09/27/2006EP0970519B1 Integration of low-k polymers into interlevel dielectrics using controlled electron-beam radiation
09/27/2006EP0929909B1 Method of manufacturing a semiconductor device
09/27/2006EP0873343B1 Metal complex source reagents for chemical vapor deposition
09/27/2006CN2821868Y Mos field effect transisitor with isolation structure
09/27/2006CN2821862Y Base plate bearing box
09/27/2006CN1839670A Part mounting device and part mounting method
09/27/2006CN1839491A Method for sealing thin film transistors
09/27/2006CN1839483A High-density FINFET integration scheme
09/27/2006CN1839482A Vertical nanotransistor, method for producing the same and memory assembly
09/27/2006CN1839481A Vertical nanotransistor, method for producing the same and memory assembly