Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2006
10/10/2006US7119382 Heterobipolar transistor and method of fabricating the same
10/10/2006US7119381 Complementary metal-oxide-semiconductor field effect transistor structure having ion implant in only one of the complementary devices
10/10/2006US7119379 Semiconductor device
10/10/2006US7119369 FET having epitaxial silicon growth
10/10/2006US7119368 Thin film transistor array panel and manufacturing method thereof
10/10/2006US7119367 Display apparatus
10/10/2006US7119365 Semiconductor device and manufacturing method thereof, SOI substrate and display device using the same, and manufacturing method of the SOI substrate
10/10/2006US7119364 Semiconductor device and manufacturing method thereof
10/10/2006US7119363 Thin film transistor formed on a transparent substrate
10/10/2006US7119362 Method of manufacturing semiconductor apparatus
10/10/2006US7119355 Lateral phase change memory and method therefor
10/10/2006US7119354 Composition for forming porous film, porous film and method for forming the same, interlevel insulator film
10/10/2006US7119351 Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system
10/10/2006US7119348 Charged beam writing apparatus and writing method
10/10/2006US7119347 Ion implantation apparatus and method
10/10/2006US7119346 Lithographic apparatus and device manufacturing method
10/10/2006US7119343 Mechanical oscillator for wafer scan with spot beam
10/10/2006US7119321 Optical channels for multi-level metal optical imagers
10/10/2006US7119319 Solid-state image sensing element and its design support method, and image sensing device
10/10/2006US7119271 Wide-bandgap, lattice-mismatched window layer for a solar conversion device
10/10/2006US7119052 Mixture of supercritical fluid and adjuvant; removal of combustion residues
10/10/2006US7119035 Method using specific contact angle for immersion lithography
10/10/2006US7119034 Atomic layer deposition method of forming an oxide comprising layer on a substrate
10/10/2006US7119033 Ion-assisted oxidation methods and the resulting structures
10/10/2006US7119032 Producing and protecting interiors of semiconductors and reactors with damage etching and cleaning multilayer element with corrosion resistant coating for protection
10/10/2006US7119031 Methods of forming patterned photoresist layers over semiconductor substrates
10/10/2006US7119030 Process for lining a surface using an organic film
10/10/2006US7119029 Method of oxidizing a silicon substrate and method of forming an oxide layer using the same
10/10/2006US7119028 Substrate with structured layer and film with photoabsorbed conjugated polymer including polybutylthiophene applied on substrate
10/10/2006US7119027 Method for manufacturing display device that includes supplying solution to the underside of a glass substrate
10/10/2006US7119026 Basic material for patterning and patterning method
10/10/2006US7119025 Methods of eliminating pattern collapse on photoresist patterns
10/10/2006US7119024 Method and structure for a self-aligned silicided word line and polysilicon plug during the formation of a semiconductor device
10/10/2006US7119023 Process integration of SOI FETs with active layer spacer
10/10/2006US7119022 Manufacturing method of semiconductor device
10/10/2006US7119021 Ferroelectric capacitor devices and a method for compensating for damage to a capacitor caused by etching
10/10/2006US7119020 Method for fabricating semiconductor device
10/10/2006US7119019 Capping of copper structures in hydrophobic ILD using aqueous electro-less bath
10/10/2006US7119018 Copper conductor
10/10/2006US7119017 Method for improving interlevel dielectric gap filling over semiconductor structures having high aspect ratios
10/10/2006US7119016 Deposition of carbon and nitrogen doped poly silicon films, and retarded boron diffusion and improved poly depletion
10/10/2006US7119015 Method for forming polysilicon plug of semiconductor device
10/10/2006US7119014 Method for fabricating a semiconductor device having a tapered-mesa side-wall film
10/10/2006US7119013 Method for fabricating semiconductor device with fine patterns
10/10/2006US7119012 Stabilization of Ni monosilicide thin films in CMOS devices using implantation of ions before silicidation
10/10/2006US7119011 Semiconductor device and manufacturing method thereof
10/10/2006US7119010 Integrated circuit with self-aligned line and via and manufacturing method therefor
10/10/2006US7119009 Semiconductor device with dual damascene wiring
10/10/2006US7119008 Integrating metal layers with ultra low-K dielectrics
10/10/2006US7119007 Production method of semiconductor device
10/10/2006US7119006 Via formation for damascene metal conductors in an integrated circuit
10/10/2006US7119005 Semiconductor local interconnect and contact
10/10/2006US7119004 Semiconductor device, its manufacturing method, and ratio communication device
10/10/2006US7119003 Extension of fatigue life for C4 solder ball to chip connection
10/10/2006US7119002 Solder bump composition for flip chip
10/10/2006US7119001 Semiconductor chip packages and methods for fabricating the same
10/10/2006US7119000 Method of manufacturing semiconductor device
10/10/2006US7118999 Method and apparatus to increase strain effect in a transistor channel
10/10/2006US7118998 Method of forming a conductive structure
10/10/2006US7118997 Implantation of gate regions in semiconductor device fabrication
10/10/2006US7118996 Apparatus and method for doping
10/10/2006US7118995 Yield improvement in silicon-germanium epitaxial growth
10/10/2006US7118994 Semiconductor device and method for manufacturing same
10/10/2006US7118992 Wafer thinning using magnetic mirror plasma
10/10/2006US7118991 Encapsulation wafer process
10/10/2006US7118990 Methods for making large dimension, flexible piezoelectric ceramic tapes
10/10/2006US7118989 Method of forming vias on a wafer stack using laser ablation
10/10/2006US7118988 Vertically wired integrated circuit and method of fabrication
10/10/2006US7118987 Method of achieving improved STI gap fill with reduced stress
10/10/2006US7118986 STI formation in semiconductor device including SOI and bulk silicon regions
10/10/2006US7118985 Method of forming a metal-insulator-metal capacitor in an interconnect cavity
10/10/2006US7118984 Method for fabricating semiconductor component
10/10/2006US7118983 Method of fabricating semiconductor device
10/10/2006US7118982 Emitter and method of making
10/10/2006US7118981 Method of fabricating an integrated silicon-germanium heterobipolar transistor and an integrated silicon-germanium heterobipolar transistor
10/10/2006US7118980 Solid phase epitaxy recrystallization by laser annealing
10/10/2006US7118979 Method of manufacturing transistor having germanium implant region on the sidewalls of the polysilicon gate electrode
10/10/2006US7118978 Semiconductor device and method for producing the same
10/10/2006US7118977 System and method for improved dopant profiles in CMOS transistors
10/10/2006US7118976 Methods of manufacturing MOSFETs in semiconductor devices
10/10/2006US7118975 Method for manufacturing a semiconductor device
10/10/2006US7118974 Method of generating multiple oxides by plasma nitridation on oxide
10/10/2006US7118973 Method of forming a transistor with a channel region in a layer of composite material
10/10/2006US7118972 Method of manufacture of a semiconductor device
10/10/2006US7118971 Method for fabricating trench power device
10/10/2006US7118970 Methods of fabricating silicon carbide devices with hybrid well regions
10/10/2006US7118969 Method of manufacturing a floating gate and method of manufacturing a non-volatile semiconductor memory device comprising the same
10/10/2006US7118968 Method for manufacturing interpoly dielectric
10/10/2006US7118967 Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing
10/10/2006US7118966 Methods of forming conductive lines
10/10/2006US7118965 Methods of fabricating nonvolatile memory device
10/10/2006US7118963 Semiconductor memory integrated circuit and its manufacturing method
10/10/2006US7118962 Nonvolatile memory device and method for manufacturing the same
10/10/2006US7118961 Stitch and select implementation in twin MONOS array
10/10/2006US7118960 Selective polysilicon stud growth
10/10/2006US7118959 Integrated circuit capacitor having antireflective dielectric
10/10/2006US7118958 Method of manufacturing a metal-insulator-metal capacitor using an etchback process
10/10/2006US7118957 Semiconductor integrated circuit including a DRAM and an analog circuit
10/10/2006US7118956 Trench capacitor and a method for manufacturing the same
10/10/2006US7118955 Method for the production of a semiconductor substrate comprising a plurality of gate stacks on a semiconductor substrate, and corresponding semiconductor structure