H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2006
11/28/2006	US7141798 Spectrum measuring apparatus and method
11/28/2006	US7141765 Heat treating device
11/28/2006	US7141763 Method and apparatus for rapid temperature change and control
11/28/2006	US7141756 Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method
11/28/2006	US7141739 Sealing device and apparatus
11/28/2006	US7141576 4-quinazolineamine derivatives; antineoplastic agents; inhibitors of erb family tyrosine kinases and/or epidermal growth factor receptors
11/28/2006	US7141517 Method of repairing and apparatus for repairing multi-color organic light-emitting display device
11/28/2006	US7141516 High frequency plasma generator and high frequency plasma generating method
11/28/2006	US7141515 Method for manufacturing device
11/28/2006	US7141514 Selective plasma re-oxidation process using pulsed RF source power
11/28/2006	US7141513 Integrated ashing and implant annealing method using ozone
11/28/2006	US7141512 Method of cleaning semiconductor device fabrication apparatus
11/28/2006	US7141511 Method and apparatus for fabricating a memory device with a dielectric etch stop layer
11/28/2006	US7141510 Plasma processing method
11/28/2006	US7141509 Method for fabricating a circuit device
11/28/2006	US7141508 Magnetoresistive effect thin-film magnetic head and manufacturing method of magnetoresistive effect thin-film magnetic head
11/28/2006	US7141507 Method for production of a semiconductor structure
11/28/2006	US7141506 Method for evaluating dependence of properties of semiconductor substrate on plane orientation and semiconductor device using the same
11/28/2006	US7141505 Method for bilayer resist plasma etch
11/28/2006	US7141504 Method and apparatus for anisotropic etching
11/28/2006	US7141503 Methods for manufacturing a soft error and defect resistant pre-metal dielectric layer
11/28/2006	US7141502 Slurry-less polishing for removal of excess interconnect material during fabrication of a silicon integrated circuit
11/28/2006	US7141501 Polishing method, polishing apparatus, and method of manufacturing semiconductor device
11/28/2006	US7141500 Methods for forming aluminum containing films utilizing amino aluminum precursors
11/28/2006	US7141499 Apparatus and method for growth of a thin film
11/28/2006	US7141498 Method of forming an ohmic contact in wide band semiconductor
11/28/2006	US7141497 MOCVD apparatus and method
11/28/2006	US7141496 Method of treating microelectronic substrates
11/28/2006	US7141495 Methods and forming structures, structures and apparatuses for forming structures
11/28/2006	US7141494 Method for reducing tungsten film roughness and improving step coverage
11/28/2006	US7141493 Semiconductor device, method of manufacturing three-dimensional stacking type semiconductor device, circuit board, and electronic instrument
11/28/2006	US7141492 Method for forming thin-film, apparatus for forming thin-film, method for manufacturing semiconductor device, electro-optical unit, and electronic apparatus
11/28/2006	US7141491 Method for fabricating a semiconductor device
11/28/2006	US7141490 Method of fabricating a semiconductor device
11/28/2006	US7141489 Fabrication of p-type group II-VI semiconductors
11/28/2006	US7141488 conveying germanium compounds in vapor phase to deposition chambers containing substrates, then decomposing the compounds and to form coatings on the substrates; metal organic chemical vapor deposition
11/28/2006	US7141487 Method for ultra thinning bumped wafers for flip chip
11/28/2006	US7141486 Shallow trench isolation structures comprising a graded doped sacrificial silicon dioxide material and a method for forming shallow trench isolation structures
11/28/2006	US7141485 Shallow trench isolation structure with low sidewall capacitance for high speed integrated circuits
11/28/2006	US7141484 Electrostatic discharge protection circuit of non-gated diode and fabrication method thereof
11/28/2006	US7141483 Nitrous oxide anneal of TEOS/ozone CVD for improved gapfill
11/28/2006	US7141482 Method of making a memory cell
11/28/2006	US7141481 Method of fabricating nano-scale resistance cross-point memory array
11/28/2006	US7141480 Tri-gate low power device and method for manufacturing the same
11/28/2006	US7141479 Bipolar transistor and method for producing the same
11/28/2006	US7141478 Multi-stage EPI process for forming semiconductor devices, and resulting device
11/28/2006	US7141477 Semiconductor device and method for fabricating the same
11/28/2006	US7141476 Method of forming a transistor with a bottom gate
11/28/2006	US7141475 Non-volatile semiconductor memory and method of making same, and semiconductor device and method of making device
11/28/2006	US7141474 Fabrication method of a nonvolatile semiconductor memory
11/28/2006	US7141473 Self-aligned 1 bit local SONOS memory cell and method of fabricating the same
11/28/2006	US7141472 Semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry
11/28/2006	US7141471 Method of producing semiconductor integrated circuit device and semiconductor integrated circuit device
11/28/2006	US7141470 Low voltage CMOS structure with dynamic threshold voltage
11/28/2006	US7141469 Method of forming poly insulator poly capacitors by using a self-aligned salicide process
11/28/2006	US7141468 Application of different isolation schemes for logic and embedded memory
11/28/2006	US7141467 Semiconductor device having metal silicide films formed on source and drain regions and method for manufacturing the same
11/28/2006	US7141466 Method of fabricating semiconductor device having gate insulating film comprising a silicate nitride film with interface insulating film
11/28/2006	US7141465 Method of manufacturing a semiconductor device having a channel layer, a first semiconductor layer and a second semiconductor layer with a conductive impurity region
11/28/2006	US7141464 Method of fabricating T-type gate
11/28/2006	US7141462 Substrate of semiconductor device and fabrication method thereof as well as semiconductor device and fabrication method thereof
11/28/2006	US7141461 Method for manufacturing a semiconductor device
11/28/2006	US7141460 Method of forming trenches in a substrate by etching and trimming both hard mask and a photosensitive layers
11/28/2006	US7141459 Silicon-on-insulator ULSI devices with multiple silicon film thicknesses
11/28/2006	US7141458 Semiconductor device and method of manufacturing the same
11/28/2006	US7141457 Method to form Si-containing SOI and underlying substrate with different orientations
11/28/2006	US7141456 Methods of fabricating Fin-field effect transistors (Fin-FETs) having protection layers
11/28/2006	US7141455 Method to manufacture LDMOS transistors with improved threshold voltage control
11/28/2006	US7141454 Wire-bonded package with electrically insulating wire encapsulant and thermally conductive overmold
11/28/2006	US7141453 Method of mounting wafer on printed wiring substrate
11/28/2006	US7141452 Methods of reducing bleed-out of underfill and adhesive materials
11/28/2006	US7141451 Wireless communication medium and method of manufacturing the same
11/28/2006	US7141450 Flip-chip alignment method
11/28/2006	US7141449 Method of fabricating a compound semiconductor thin-layer solar cell
11/28/2006	US7141448 Controlled collapse chip connection (C4) integrated circuit package which has two dissimilar underfill materials
11/28/2006	US7141447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor
11/28/2006	US7141446 Optically- and electrically-addressable concentrators of biological and chemical materials
11/28/2006	US7141445 Semiconductor light emitting device and method for manufacturing same
11/28/2006	US7141444 Production method of III nitride compound semiconductor and III nitride compound semiconductor element
11/28/2006	US7141443 Semiconductor wafer dividing method utilizing laser beam
11/28/2006	US7141442 Method for manufacturing a light emitting device
11/28/2006	US7141441 Surface emitting semiconductor laser and manufacturing method thereof
11/28/2006	US7141440 Apparatus and method for measuring a property of a layer in a multilayered structure
11/28/2006	US7141439 Transistor-level signal cutting method and structure
11/28/2006	US7141438 Magnetic tunnel junction structure having an oxidized buffer layer and method of fabricating the same
11/28/2006	US7141355 Radiation-sensitive resin composition
11/28/2006	US7141352 Basic compound, resist composition and patterning process
11/28/2006	US7141351 Basic compound, resist composition and patterning process
11/28/2006	US7141340 Structure has individually addressable pixels selectively configurable to modulate both of an amplitude and a phase of radiation that is incident on the pixel and at least one of which has a layer of solid state electrooptical material with a birefringence that varies according to an applied voltage
11/28/2006	US7141339 Process for manufacturing half-tone phase shifting mask blanks
11/28/2006	US7141300 Adhesive sheet for dicing
11/28/2006	US7141278 Thin film forming method
11/28/2006	US7141274 Batch processing method for processing a number of substrates simultaneously; substrate holders which have heating medium flow passages regulate the temperature of the holding portions as a whole; for embedding interconnects in the surface of a substrate like a semiconductor
11/28/2006	US7141269 Molding technique for copper interconnecting wires by electrochemical displacement deposition on the pre-shaped metal layer
11/28/2006	US7141188 Organic compositions
11/28/2006	US7141180 Etchant for wire, method of manufacturing wire using etchant, thin film transistor array panel including wire and manufacturing method thereof
11/28/2006	US7141178 Plasma etching method
11/28/2006	US7141177 Etching method and composition for forming etching protective layer
11/28/2006	US7141176 Methods and apparatuses for assembling elements onto a substrate
11/28/2006	US7141138 Gas delivery system for semiconductor processing

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