H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/19/2006	US7151050 Method for fabricating electrical connection structure of circuit board
12/19/2006	US7151049 Electroplating compositions and methods
12/19/2006	US7151048 Poly/silicide stack and method of forming the same
12/19/2006	US7151046 Semiconductor thin film decomposing method, decomposed semiconductor thin film, decomposed semiconductor thin film evaluation method, thin film transistor made of decomposed semiconductor thin film, and image display device having circuit constituted of thin film transistors
12/19/2006	US7151045 Method for separating sapphire wafer into chips using dry-etching
12/19/2006	US7151044 Thin film transistor type display device, method of manufacturing thin film element, thin film transistor circuit board, electro-optical device, and electronic apparatus
12/19/2006	US7151043 Method of manufacturing a semiconductor device
12/19/2006	US7151042 Method of improving flash memory performance
12/19/2006	US7151041 Methods of forming semiconductor circuitry
12/19/2006	US7151040 Methods for increasing photo alignment margins
12/19/2006	US7151039 Method of forming oxide layer using atomic layer deposition method and method of forming capacitor of semiconductor device using the same
12/19/2006	US7151038 Semiconductor device having an integral resistance element
12/19/2006	US7151037 Processes of forming stacked resistor constructions
12/19/2006	US7151036 Precision high-frequency capacitor formed on semiconductor substrate
12/19/2006	US7151035 Semiconductor device and manufacturing method thereof
12/19/2006	US7151034 Semiconductor device and method for manufacturing the same
12/19/2006	US7151033 Method for manufacturing a semiconductor device having a low junction leakage current
12/19/2006	US7151032 Methods of fabricating semiconductor devices
12/19/2006	US7151031 Methods of fabricating semiconductor devices having gate insulating layers with differing thicknesses
12/19/2006	US7151030 Horizontal memory devices with vertical gates
12/19/2006	US7151029 Memory device and method of making the same
12/19/2006	US7151028 Memory cell with plasma-grown oxide spacer for reduced DIBL and Vss resistance and increased reliability
12/19/2006	US7151027 Method and device for reducing interface area of a memory device
12/19/2006	US7151026 Semiconductor processing methods
12/19/2006	US7151025 Method of manufacturing a semiconductor device with self-aligned contacts
12/19/2006	US7151024 Long retention time single transistor vertical memory gain cell
12/19/2006	US7151023 Metal gate MOSFET by full semiconductor metal alloy conversion
12/19/2006	US7151022 Methods for forming shallow trench isolation
12/19/2006	US7151021 Bi-directional read/program non-volatile floating gate memory cell and array thereof, and method of formation
12/19/2006	US7151020 Conversion of transition metal to silicide through back end processing in integrated circuit technology
12/19/2006	US7151019 Method of manufacturing a semiconductor device with different lattice properties
12/19/2006	US7151018 Method and apparatus for transistor sidewall salicidation
12/19/2006	US7151017 Method of manufacturing semiconductor device
12/19/2006	US7151016 Method of manufacturing a semiconductor device that includes a hydrogen concentration depth profile
12/19/2006	US7151015 Semiconductor device and manufacturing method thereof
12/19/2006	US7151014 Underfilling process in a molded matrix array package using flow front modifying solder resist
12/19/2006	US7151013 Semiconductor package having exposed heat dissipating surface and method of fabrication
12/19/2006	US7151012 Redistribution layer of wafer and the fabricating method thereof
12/19/2006	US7151011 Integrated circuit die having an interference shield
12/19/2006	US7151010 Methods for assembling a stack package for high density integrated circuits
12/19/2006	US7151009 Method for manufacturing wafer level chip stack package
12/19/2006	US7151008 Fabrication method for phase change diode memory cells
12/19/2006	US7151006 Process to reduce the dark current in semiconducting films
12/19/2006	US7151005 Electrifying method and manufacturing method of electron-source substrate
12/19/2006	US7151003 Semiconductor wafer test system
12/19/2006	US7151001 Fabrication method of self-aligned ferroelectric gate transistor using buffer layer of high etching selectivity
12/19/2006	US7150961 dioxylithocholates, e.g., 3 alpha -acetyl tert-butyl lithocholate and alpha ,10 alpha -diacetyl tert-butyl lithocholate; added to a mixture of a photoacid generator, solvent and a photoresist polymer; contact hole formation
12/19/2006	US7150948 Faster wafer fabrication without wasting exposure area; simultaneous evaluation
12/19/2006	US7150910 Nanocrystal structures
12/19/2006	US7150811 Ion beam for target recovery
12/19/2006	US7150810 Sputtering target and method for fabricating the same
12/19/2006	US7150805 Plasma process device
12/19/2006	US7150789 Atomic layer deposition methods
12/19/2006	US7150628 Single-wafer type heat treatment apparatus for semiconductor processing system
12/19/2006	US7150569 Optical device mounted substrate assembly
12/19/2006	US7150418 Nozzle plate member for supplying fluids in dispersed manner and manufacturing method of the same
12/19/2006	US7150390 Flip chip dip coating encapsulant
12/19/2006	US7150096 Universal tool for uniformly applying a force to a plurality of components on a circuit board
12/19/2006	CA2492335C Wafer level integration of multiple optical elements
12/19/2006	CA2341548C Method of removing organic materials from substrates
12/14/2006	WO2006133318A1 Carbon nanotube interconnect contacts
12/14/2006	WO2006133208A2 Hydrodynamic capture and release mechanisms for particle manipulation
12/14/2006	WO2006133132A2 Combinations of plasma production devices and method and rf driver circuits with adjustable duty cycle
12/14/2006	WO2006133129A2 Nano-scale self assembly in spinels induced by jahn-teller distortion
12/14/2006	WO2006133123A2 Shadow mask deposition of materials using reconfigurable shadow masks
12/14/2006	WO2006133039A2 Workpiece handling alignment system
12/14/2006	WO2006132989A2 Cleaning method and solution for cleaning a wafer in a single wafer process
12/14/2006	WO2006132905A2 Polishing composition and method for defect improvement by reduced particle stiction on copper surface
12/14/2006	WO2006132903A2 Non-volatile memory cells without diffusion junctions
12/14/2006	WO2006132822A2 Method for making electronic devices
12/14/2006	WO2006132789A2 Methods of etching nickel silicide and cobalt silicide and methods of forming conductive lines
12/14/2006	WO2006132751A2 High efficiency trap for deposition process
12/14/2006	WO2006132711A1 Methods for manufacturing integrated circuits
12/14/2006	WO2006132698A2 System for inspecting wafers in a laser marking system with an illumination system illuminating a surface of the wafer at angle between 45° and 70° with respect to this surface
12/14/2006	WO2006132697A2 System and method for aligning a wafer processing system in a laser marking system
12/14/2006	WO2006132662A2 Self assembled nanostructures and methods for preparing the same
12/14/2006	WO2006132655A1 Ultraviolet curing process for low k dielectric films
12/14/2006	WO2006132489A1 Method for classifying semiconductor device
12/14/2006	WO2006132485A1 Method for inspecting semiconductor device
12/14/2006	WO2006132484A1 Method and apparatus for inspecting marking of semiconductor package
12/14/2006	WO2006132455A1 Vacuum gate valve
12/14/2006	WO2006132453A1 Light-modulating nano/micro scale aperture array device having immersion layer and high speed nano scale pattern recording system using the same
12/14/2006	WO2006132419A1 Field effect transistor
12/14/2006	WO2006132418A1 Field effect transistor
12/14/2006	WO2006132386A1 Functional film containing structure and method of manufacturing functional film
12/14/2006	WO2006132381A2 Functional film containing structure and method of manufacturing functional film
12/14/2006	WO2006132380A2 Functional film containing structure and method of manufacturing functional film
12/14/2006	WO2006132379A2 Structure for functional film pattern formation and method of manufacturing functional film
12/14/2006	WO2006132318A1 Valve element, valve, selector valve, and trap device
12/14/2006	WO2006132284A1 Trench-type mosfet and method for manufacturing same
12/14/2006	WO2006132274A1 Sealing structure of vacuum device
12/14/2006	WO2006132269A1 Trench mosfet and method for manufacturing same
12/14/2006	WO2006132262A1 Plasma nitriding method, method for manufacturing semiconductor device and plasma processing apparatus
12/14/2006	WO2006132243A1 Inspection device
12/14/2006	WO2006132172A1 Fin type field effect transistor, semiconductor device and production method thereof
12/14/2006	WO2006132165A1 Adhesive composition for semiconductor, semiconductor device making use of the same and process for producing semiconductor device
12/14/2006	WO2006132161A1 Integrated device
12/14/2006	WO2006132158A1 Nonvolatile semiconductor storage device and method for manufacturing same
12/14/2006	WO2006132139A1 Compound for resist and resist composition
12/14/2006	WO2006132130A1 Semiconductor device, substrate and semiconductor device manufacturing method

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