H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/26/2006	US7153733 Method of fabricating fin field effect transistor using isotropic etching technique
12/26/2006	US7153732 Methods of fabricating transistors in semiconductor devices
12/26/2006	US7153731 Method of forming a field effect transistor with halo implant regions
12/26/2006	US7153730 Pulse width method for controlling lateral growth in crystallized silicon films
12/26/2006	US7153729 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
12/26/2006	US7153728 Estimation of remaining film thickness distribution, correction of patterning and insulation film removing masks with remaining film thickness distribution, and production of semiconductor device with corrected patterning and insulation film removing masks
12/26/2006	US7153727 Semiconductor device and method of manufacturing the same
12/26/2006	US7153726 Semiconductor device with magnetically permeable heat sink
12/26/2006	US7153725 Strip-fabricated flip chip in package and flip chip in system heat spreader assemblies and fabrication methods therefor
12/26/2006	US7153724 Method of fabricating no-lead package for semiconductor die with half-etched leadframe
12/26/2006	US7153723 Method of forming a ball grid array device
12/26/2006	US7153722 Method and apparatus for manufacturing photovoltaic device
12/26/2006	US7153721 Resistance variable memory elements based on polarized silver-selenide network growth
12/26/2006	US7153720 CMOS image sensor
12/26/2006	US7153719 Method of fabricating a storage gate pixel design
12/26/2006	US7153718 Micromechanical component as well as a method for producing a micromechanical component
12/26/2006	US7153717 Encapsulation of MEMS devices using pillar-supported caps
12/26/2006	US7153716 Method of manufacturing a micro-electrical-mechanical system
12/26/2006	US7153715 Semiconductor device and method for fabricating the same
12/26/2006	US7153714 Method of manufacturing flat panel displays
12/26/2006	US7153713 Method for manufacturing high efficiency light-emitting diodes
12/26/2006	US7153712 Electrically-programmable integrated circuit fuses and sensing circuits
12/26/2006	US7153711 Method for improving a drive current for semiconductor devices on a wafer-by-wafer basis
12/26/2006	US7153710 Etching method, method of manufacturing semiconductor device, and semiconductor device
12/26/2006	US7153709 Method and apparatus for calibrating degradable components using process state data
12/26/2006	US7153708 Seed layer processes for MOCVD of ferroelectric thin films on high-k gate oxides
12/26/2006	US7153707 Method for forming a storage cell capacitor compatible with high dielectric constant materials
12/26/2006	US7153706 Ferroelectric capacitor having a substantially planar dielectric layer and a method of manufacture therefor
12/26/2006	US7153705 Electronic device with electrode and its manufacture
12/26/2006	US7153704 Method of fabricating a ferroelectric capacitor having a ferroelectric film and a paraelectric film
12/26/2006	US7153690 Real-time component monitoring and replenishment system for multicomponent fluids
12/26/2006	US7153634 Dual layer workpiece masking and manufacturing process
12/26/2006	US7153631 Pattern-forming process using photosensitive resin composition
12/26/2006	US7153614 Mask for photolithography, method of forming thin film, liquid crystal display device, and method of producing the liquid crystal display device
12/26/2006	US7153612 A mask for use in a lithographic projection apparatus contains three brackets arranged on the circumference of the mask provide with grooves directed to a common imaginary point intend to cooperate with three pins of a gripper
12/26/2006	US7153589 Composed of 20 to 95% of tungsten and balance of molybdenum and inevitable impurities by atomic percentage; low resistivity and high workability; liquid crystal display
12/26/2006	US7153580 Low κ dielectric inorganic/organic hybrid films and method of making
12/26/2006	US7153542 Assembly line processing method
12/26/2006	US7153462 Injection casting system for encapsulating semiconductor devices and method of use
12/26/2006	US7153444 Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor
12/26/2006	US7153443 Microelectromechanical structure and a method for making the same
12/26/2006	US7153442 Method of manufacturing an ink jet print head
12/26/2006	US7153410 Alternating current, direct current power sources; switches
12/26/2006	US7153400 Apparatus and method for depositing and planarizing thin films of semiconductor wafers
12/26/2006	US7153388 Chamber for high-pressure wafer processing and method for making the same
12/26/2006	US7153387 Plasma processing apparatus and method of plasma processing
12/26/2006	US7153372 Method for removing particles from elements installed in a vacuum chamber
12/26/2006	US7153370 Method of cleaning semiconductor wafer
12/26/2006	US7153369 Method of chemical mechanical polishing
12/26/2006	US7153368 Susceptor with epitaxial growth control devices and epitaxial reactor using the same
12/26/2006	US7153367 Drive mechanism for a vacuum treatment apparatus
12/26/2006	US7153365 Tray for substrate
12/26/2006	US7153363 Atomic layer deposition
12/26/2006	US7153362 System and method for real time deposition process control based on resulting product detection
12/26/2006	US7153359 Crystalline semiconductor film and production method thereof, and semiconductor device and production method thereof
12/26/2006	US7153355 Coating solution for forming silica film
12/26/2006	US7153335 Tunable composition and method for chemical-mechanical planarization with aspartic acid/tolyltriazole
12/26/2006	US7153197 Method for achieving uniform CU CMP polishing
12/26/2006	US7153196 Method of polishing using a polishing agent
12/26/2006	US7153186 Jet singulation
12/26/2006	US7153164 Method and apparatus for forming modular sockets using flexible interconnects and resulting structures
12/26/2006	US7153116 Resin molding machine
12/26/2006	US7153088 Method and apparatus for transferring a semiconductor substrate
12/26/2006	US7153087 Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method
12/26/2006	US7153083 Material handling and transport process
12/26/2006	US7153079 Automated guided vehicle
12/26/2006	US7152488 System operating unit
12/26/2006	US7152461 Method and apparatus for determination of the depth of depressions which are formed in a mount substrate
12/26/2006	US7152331 Positioning apparatus
12/26/2006	US7152316 Hybrid integrated circuit device and method of manufacturing the same
12/26/2006	US7152311 Enhancements in framed sheet processing
12/26/2006	US7152308 Wirebonder to bond an IC chip to a substrate
12/21/2006	WO2006135861A2 Power semiconductor device
12/21/2006	WO2006135761A1 Apparatus and method for mixing fluids, comprising mixing of at least one fluid with a near-critical or super-critical carrier fluid
12/21/2006	WO2006135746A2 Charge balance field effect transistor
12/21/2006	WO2006135688A2 Polar surface preparation of nitride substrates
12/21/2006	WO2006135682A2 Wafer level bumpless method of making a flip chip mounted semiconductor device package
12/21/2006	WO2006135663A1 Method and apparatus for applying external coating to grid array packages for increased reliability and performance
12/21/2006	WO2006135548A2 Method of forming an interlayer dielectric
12/21/2006	WO2006135505A2 Capacitorless dram over localized soi
12/21/2006	WO2006135489A1 A raised source and drain process with disposable spacers
12/21/2006	WO2006135476A1 Low basal plane dislocation bulk grown sic wafers
12/21/2006	WO2006135464A1 Linear vacuum deposition system
12/21/2006	WO2006135458A2 Enhanced routing grid system and method
12/21/2006	WO2006135420A2 Method for simultaneous fabrication of a nanocrystal and non-nanocrystal device
12/21/2006	WO2006135377A2 Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
12/21/2006	WO2006135369A1 Ultraviolet assisted propgen removal and/or curing processes for forming porous low k dielectrics
12/21/2006	WO2006135246A1 A method in the fabrication of a ferroelectric memory device
12/21/2006	WO2006135208A1 Apparatus for recycling the disposed sludge produced in the manufacturing process of the silicon wafer
12/21/2006	WO2006135170A1 Imprinting apparatus for forming pattern at uniform contact by additional constant pressure
12/21/2006	WO2006135062A1 Semiconductor device, power supply device, and information processing device
12/21/2006	WO2006135043A1 Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure
12/21/2006	WO2006135039A1 Semiconductor device
12/21/2006	WO2006135007A1 Film-forming and cleaning method
12/21/2006	WO2006134967A1 Positive resist composition and method for forming resist pattern
12/21/2006	WO2006134953A1 Semiconductor device bonding apparatus and method for bonding semiconductor device using the same
12/21/2006	WO2006134930A1 Process for production of semiconductor device and apparatus for treatment of substrate
12/21/2006	WO2006134910A1 Optical element, optical element holding apparatus, exposure apparatus and device manufacturing method
12/21/2006	WO2006134902A1 Photoresist developer and process for producing substrate with the use of the developer
12/21/2006	WO2006134899A1 Thin film transistor, wiring board and electronic device manufacturing method

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