H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/27/2006	CN1883859A Method of working nitride semiconductor crystal
12/27/2006	CN1292628C Method for forming induction and through-hole in single chip circuit
12/27/2006	CN1292627C Circuit substrate
12/27/2006	CN1292623C Plasma source coil for generating plasma and plasma chamber using the same
12/27/2006	CN1292496C Pattern formation of device
12/27/2006	CN1292495C Method for thinning scribing of sapphire group nitride chip
12/27/2006	CN1292489C Semiconductor device and manufacturing method thereof
12/27/2006	CN1292488C Transistor device and producing method thereof
12/27/2006	CN1292487C Organic LED device and mfg. method thereof
12/27/2006	CN1292483C Semiconductor device and method of manufacturing the same
12/27/2006	CN1292482C Semiconductor memory unit and its mfg. method
12/27/2006	CN1292481C System combined semiconductor device
12/27/2006	CN1292480C Nonvolatile semiconductor storage device, its mfg. method and semiconductor integrated circuit and system
12/27/2006	CN1292479C Capacitor for semiconductor device, its producing method and electronic device using it
12/27/2006	CN1292478C Semiconductor integrated circuit apparatus
12/27/2006	CN1292477C Semiconductor device and mfg method thereof
12/27/2006	CN1292475C Semiconductor package and making method thereof
12/27/2006	CN1292473C Hybrid planar and FinFET CMOS devices
12/27/2006	CN1292472C Structure and method to regulate carrier moving rate in semiconductor device
12/27/2006	CN1292471C Method of forming planar Cu interconnects without chemical mechanical polishing
12/27/2006	CN1292470C Method of forming opening in low dielectric constant material layer
12/27/2006	CN1292469C Semiconductor device and its manufacture method
12/27/2006	CN1292468C Methods of simultaneously fabricating isolation structures having varying dimensions
12/27/2006	CN1292467C Flattening method of insulating layer or interlayer medium layer in semiconductor device
12/27/2006	CN1292466C Method of heat-peeling chip cut piexes from heat peel type adhesive sheet, electronic part, and circuit board
12/27/2006	CN1292465C Method for testing high speed data transmission rate
12/27/2006	CN1292464C Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
12/27/2006	CN1292463C Eutectic welding pasting method on semiconductor chip back side
12/27/2006	CN1292462C Multi-layer circuit board and mfg method, electronic device and electronic apparatus
12/27/2006	CN1292461C Automatic system and method for controlling laser energy
12/27/2006	CN1292460C Slurry for CMP, polishing method and method of manufacturing semiconductor device
12/27/2006	CN1292459C Method for forming transparent electrode membrane
12/27/2006	CN1292458C Nitride semiconductor growth method, nitride semiconductor substrate and device
12/27/2006	CN1292457C Temperature calibration method for heating processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus
12/27/2006	CN1292456C Photomask group of forming multilayer interlconnection line and semiconductor device made by such photomask
12/27/2006	CN1292455C Semiconductor device and its manufacturing method
12/27/2006	CN1292454C Plasma processing method and apparatus
12/27/2006	CN1292453C Stripping method and appts. for semiconductor wafer and mfg. method for semiconductor chip
12/27/2006	CN1292447C MEMS device having a trilayered beam
12/27/2006	CN1292438C Thin film magnet memory having magnetic tunnel junction
12/27/2006	CN1292312C Patten drawing device
12/27/2006	CN1292311C Aligning method, aligning substrate, photoetching device and component manufacturing method
12/27/2006	CN1292310C Method of forming optical images, diffraction element for use with this method, apparatus for carrying out this method
12/27/2006	CN1292308C Resin composition, process for producing resin composition, and method of forming resin film
12/27/2006	CN1292306C Vacuum negative pressure nanometer press printing device
12/27/2006	CN1292301C Liquid crystal display device with homogeneous shared voltage and producing method thereof
12/27/2006	CN1292300C Electronic apparatus and antistatic discharge method thereof
12/27/2006	CN1292280C Optical device and its making method, optical module and optical transmission system
12/27/2006	CN1292260C Device and method for inspection
12/27/2006	CN1292099C Apparatus for plating treatment
12/27/2006	CN1292091C Sputtering machine table and its sputtering carrying table
12/27/2006	CN1292034C Polishing composition containing conducting polymer
12/27/2006	CN1292033C Methanol-containing silica-based CMP compositions
12/27/2006	CN1291972C Novel alkaline earth metal complexes and use thereof
12/27/2006	CN1291901C Substrate carrier
12/27/2006	CN1291834C Method for producing a ceramic substrate and ceramic substrate
12/27/2006	CA2551209A1 Semiconductor devices and methods of making same
12/26/2006	US7155699 Streamlined IC mask layout optical and process correction through correction reuse
12/26/2006	US7155686 Placement and routing method to reduce Joule heating
12/26/2006	US7155685 Optimizing designing apparatus of integrated circuit, optimizing designing method of integrated circuit, and storing medium in which program for carrying out optimizing designing method of integrated circuit is stored
12/26/2006	US7155684 Integrated circuit device and method for forming the same
12/26/2006	US7155366 Apparatus and method for inspecting patterns on wafers
12/26/2006	US7155357 Method and apparatus for detecting an unused state in a semiconductor circuit
12/26/2006	US7155301 Method and system for dynamic modeling and recipe optimization of semiconductor etch processes
12/26/2006	US7155188 Integrated circuit and receiving device
12/26/2006	US7155052 Method for pattern inspection
12/26/2006	US7154922 Laser beam source control method and unit, exposure method and apparatus, and device manufacturing method
12/26/2006	US7154783 Combination nonvolatile memory using unified technology with byte, page and block write and simultaneous read and write operations
12/26/2006	US7154779 Non-volatile memory cell using high-k material inter-gate programming
12/26/2006	US7154777 Memory device capable of stable data writing
12/26/2006	US7154775 Magnetic random access memory
12/26/2006	US7154767 Method for manufacture of semiconductor device
12/26/2006	US7154751 Interface module-mounted LSI package
12/26/2006	US7154717 Magnetoresistance effect film, magnetoresistance effect head and solid state memory
12/26/2006	US7154678 Projection objective having adjacently mounted aspheric lens surfaces
12/26/2006	US7154677 Projection objective for microlithography
12/26/2006	US7154674 Imaging method
12/26/2006	US7154673 Light irradiator
12/26/2006	US7154669 Method and system for correction of intrinsic birefringence in UV microlithography
12/26/2006	US7154666 Narrow-band spectral filter and the use thereof
12/26/2006	US7154611 Spin etcher with thickness measuring system
12/26/2006	US7154597 Method for inspecting surface and apparatus for inspecting it
12/26/2006	US7154588 Alignment apparatus and exposure apparatus
12/26/2006	US7154587 Spatial light modulator, lithographic apparatus and device manufacturing method
12/26/2006	US7154585 Projection optical system, exposure apparatus, and device production method
12/26/2006	US7154582 Exposure apparatus and method
12/26/2006	US7154581 Scanning exposure apparatus, manufacturing method thereof, and device manufacturing method
12/26/2006	US7154537 Camera system, control method thereof, device manufacturing apparatus, exposure apparatus, and device manufacturing method
12/26/2006	US7154524 Exposure apparatus including a controller configured to read electrical signals from an array of photoelectric converters
12/26/2006	US7154350 Semiconductor device
12/26/2006	US7154292 Method of detecting defects in TFT-arrays and a TFT-array testing system incorporating the same
12/26/2006	US7154242 Moving member mechanism and control method therefor
12/26/2006	US7154206 Surface acoustic wave device and method for manufacturing same
12/26/2006	US7154189 Semiconductor device and method for fabricating the same
12/26/2006	US7154188 Semiconductor chip, semiconductor device, circuit board, and electronic instrument
12/26/2006	US7154187 Semiconductor chip and semiconductor device, and method for manufacturing semiconductor device
12/26/2006	US7154186 Multi-flip chip on lead frame on over molded IC package and method of assembly
12/26/2006	US7154185 Encapsulation method for SBGA
12/26/2006	US7154184 Interconnection structure of semiconductor device
12/26/2006	US7154183 Semiconductor device having multilevel interconnection

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