| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/26/2006 | US7154182 Localized slots for stress relieve in copper |
| 12/26/2006 | US7154181 Semiconductor device and method of manufacturing the same |
| 12/26/2006 | US7154180 Electronic device, method of manufacture of the same, and sputtering target |
| 12/26/2006 | US7154179 Semiconductor device |
| 12/26/2006 | US7154178 Multilayer diffusion barrier for copper interconnections |
| 12/26/2006 | US7154176 Conductive bumps with non-conductive juxtaposed sidewalls |
| 12/26/2006 | US7154173 Semiconductor device and manufacturing method of the same |
| 12/26/2006 | US7154172 Integrated circuit carrier |
| 12/26/2006 | US7154168 Flip chip in leaded molded package and method of manufacture thereof |
| 12/26/2006 | US7154166 Low profile ball-grid array package for high power |
| 12/26/2006 | US7154164 Semiconductor integrated circuit device and process for manufacturing the same |
| 12/26/2006 | US7154163 Epitaxial structure of gallium nitride series semiconductor device utilizing two buffer layers |
| 12/26/2006 | US7154162 Integrated circuit capacitor structure |
| 12/26/2006 | US7154161 Composite ground shield for passive components in a semiconductor die |
| 12/26/2006 | US7154160 Semiconductor fuse box and method for fabricating the same |
| 12/26/2006 | US7154159 Trench isolation structure and method of forming the same |
| 12/26/2006 | US7154158 Semiconductor device having MIM structure resistor |
| 12/26/2006 | US7154154 MOS transistors having inverted T-shaped gate electrodes |
| 12/26/2006 | US7154153 Memory device |
| 12/26/2006 | US7154152 Semiconductor device |
| 12/26/2006 | US7154151 Semiconductor device |
| 12/26/2006 | US7154148 Hybrid circuit and electronic device using same |
| 12/26/2006 | US7154146 Dielectric plug in mosfets to suppress short-channel effects |
| 12/26/2006 | US7154145 Insulated gate transistor incorporating diode |
| 12/26/2006 | US7154144 Self-aligned inner gate recess channel transistor and method of forming the same |
| 12/26/2006 | US7154143 Non-volatile memory devices and methods of fabricating the same |
| 12/26/2006 | US7154142 Non-volatile memory device and manufacturing method and operating method thereof |
| 12/26/2006 | US7154139 Embedded capacitors using conductor filled vias |
| 12/26/2006 | US7154138 Transistor-arrangement, method for operating a transistor arrangement as a data storage element and method for producing a transistor-arrangement |
| 12/26/2006 | US7154135 Double-gated transistor circuit |
| 12/26/2006 | US7154133 Semiconductor device and method of manufacture |
| 12/26/2006 | US7154132 Semiconductor device with dummy electrode |
| 12/26/2006 | US7154131 Nitride semiconductor substrate and method of producing same |
| 12/26/2006 | US7154130 Semiconductor device provided by silicon carbide substrate and method for manufacturing the same |
| 12/26/2006 | US7154128 Nitride semiconductor growth method, nitride semiconductor substrate, and nitride semiconductor device |
| 12/26/2006 | US7154125 Nitride-based semiconductor light-emitting device and manufacturing method thereof |
| 12/26/2006 | US7154120 Light emitting device and fabrication method thereof |
| 12/26/2006 | US7154119 Thin film transistor with plural channels and corresponding plural overlapping electrodes |
| 12/26/2006 | US7154118 Bulk non-planar transistor having strained enhanced mobility and methods of fabrication |
| 12/26/2006 | US7154113 Techniques for wafer prealignment and sensing edge position |
| 12/26/2006 | US7154106 Composite system of scanning electron microscope and focused ion beam |
| 12/26/2006 | US7154105 Method of exposing using electron beam |
| 12/26/2006 | US7154090 Method for controlling charged particle beam, and charged particle beam apparatus |
| 12/26/2006 | US7154048 Common electrode wire for plating |
| 12/26/2006 | US7154047 Via structure of packages for high frequency semiconductor devices |
| 12/26/2006 | US7153788 Method and apparatus for attaching a workpiece to a workpiece support |
| 12/26/2006 | US7153787 CVD plasma assisted lower dielectric constant SICOH film |
| 12/26/2006 | US7153786 Method of fabricating lanthanum oxide layer and method of fabricating MOSFET and capacitor using the same |
| 12/26/2006 | US7153785 Method of producing annealed wafer and annealed wafer |
| 12/26/2006 | US7153784 Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode |
| 12/26/2006 | US7153783 Materials with enhanced properties for shallow trench isolation/premetal dielectric applications |
| 12/26/2006 | US7153782 Effective solution and process to wet-etch metal-alloy films in semiconductor processing |
| 12/26/2006 | US7153781 Method to etch poly Si gate stacks with raised STI structure |
| 12/26/2006 | US7153780 Method and apparatus for self-aligned MOS patterning |
| 12/26/2006 | US7153779 Method to eliminate striations and surface roughness caused by dry etch |
| 12/26/2006 | US7153778 Methods of forming openings, and methods of forming container capacitors |
| 12/26/2006 | US7153777 Methods and apparatuses for electrochemical-mechanical polishing |
| 12/26/2006 | US7153776 Method for reducing amine based contaminants |
| 12/26/2006 | US7153775 Conductive material patterning methods |
| 12/26/2006 | US7153774 Method of making a semiconductor device that has copper damascene interconnects with enhanced electromigration reliability |
| 12/26/2006 | US7153773 TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system |
| 12/26/2006 | US7153772 Methods of forming silicide films in semiconductor devices |
| 12/26/2006 | US7153771 Method for forming metal contact in semiconductor device |
| 12/26/2006 | US7153770 Method of manufacturing semiconductor device and semiconductor device manufactured using the same |
| 12/26/2006 | US7153769 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon |
| 12/26/2006 | US7153768 Backside coating for MEMS wafer |
| 12/26/2006 | US7153767 Chemical mechanical polishing stopper film, process for producing the same, and method of chemical mechanical polishing |
| 12/26/2006 | US7153766 Metal barrier cap fabrication by polymer lift-off |
| 12/26/2006 | US7153765 Method of assembling soldered packages utilizing selective solder deposition by self-assembly of nano-sized solder particles |
| 12/26/2006 | US7153764 Method of manufacturing a semiconductor device including a bump forming process |
| 12/26/2006 | US7153763 Method for making a semiconductor device including band-engineered superlattice using intermediate annealing |
| 12/26/2006 | US7153762 Method of fabricating polycrystalline silicon thin film for improving crystallization characteristics and method of fabricating liquid crystal display device using the same |
| 12/26/2006 | US7153761 Method of transferring a thin crystalline semiconductor layer |
| 12/26/2006 | US7153760 Using acoustic energy including two lasers to activate implanted species |
| 12/26/2006 | US7153759 Method of fabricating microelectromechanical system structures |
| 12/26/2006 | US7153758 Anodic bonding method and electronic device having anodic bonding structure |
| 12/26/2006 | US7153757 Method for direct bonding two silicon wafers for minimising interfacial oxide and stresses at the bond interface, and an SOI structure |
| 12/26/2006 | US7153756 Bonded SOI with buried interconnect to handle or device wafer |
| 12/26/2006 | US7153755 Process to improve programming of memory cells |
| 12/26/2006 | US7153754 Forming a layer of organic polymer on a semiconductor device structure;polymerizing the organic polymer to form solid matrix; forming voids in the organic polymer, includingembedding microcapsule, exposing the semiconductor device structure to a catalyst to substantially remove the filler |
| 12/26/2006 | US7153753 Strained Si/SiGe/SOI islands and processes of making same |
| 12/26/2006 | US7153752 Methods for forming capacitors and contact holes of semiconductor devices simultaneously |
| 12/26/2006 | US7153751 Method of forming a capacitor |
| 12/26/2006 | US7153750 Methods of forming capacitors of semiconductor devices including silicon-germanium and metallic electrodes |
| 12/26/2006 | US7153749 Method of tuning threshold voltages of interdiffusible structures |
| 12/26/2006 | US7153748 Semiconductor devices and methods for fabricating the same |
| 12/26/2006 | US7153747 Method for making a transistor on a SiGe/SOI substrate |
| 12/26/2006 | US7153746 Capacitors, methods of forming capacitors, and methods of forming capacitor dielectric layers |
| 12/26/2006 | US7153745 Recessed gate transistor structure and method of forming the same |
| 12/26/2006 | US7153744 Method of forming self-aligned poly for embedded flash |
| 12/26/2006 | US7153743 Methods of fabricating non-volatile memory devices |
| 12/26/2006 | US7153742 Method for fabricating flash memory device |
| 12/26/2006 | US7153741 Use of selective epitaxial silicon growth in formation of floating gates |
| 12/26/2006 | US7153740 Fabrication of lean-free stacked capacitors |
| 12/26/2006 | US7153739 Method for manufacturing a capacitor of a semiconductor device |
| 12/26/2006 | US7153738 Method for making a trench memory cell |
| 12/26/2006 | US7153737 Self-aligned, silicided, trench-based, DRAM/EDRAM processes with improved retention |
| 12/26/2006 | US7153736 Methods of forming capacitors and methods of forming capacitor dielectric layers |
| 12/26/2006 | US7153735 Method of manufacturing semiconductor device |
| 12/26/2006 | US7153734 CMOS device with metal and silicide gate electrodes and a method for making it |