H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/13/2006	CN1290176C Method for forming contact of semiconductor device
12/13/2006	CN1290175C Producing method for complementary metallic oxide semiconductor image sensor
12/13/2006	CN1290174C Method for forming multiple wire connection by using photoresist layer
12/13/2006	CN1290173C Manufacturing method of inlaid metal
12/13/2006	CN1290172C Method for producing bit line contact window plug with mosaic structure
12/13/2006	CN1290171C Method for forming self aligning float grid multicrystal silicone layer relative to active area for fast electric eraseable, programable read-only memory unit
12/13/2006	CN1290170C Method for testing probe board and semiconductor chip, capacitor and mfg. method thereof
12/13/2006	CN1290169C Contactor having contact electrode formed by laser
12/13/2006	CN1290168C System and method of providing mask defect printablity analysis
12/13/2006	CN1290167C Lithography method for forming semiconductor devices on wafer and apparatus
12/13/2006	CN1290166C Correction of overlay offset between inspection layers in interated circuits
12/13/2006	CN1290165C Method for manufacturing semiconductor device
12/13/2006	CN1290164C Ruthenium silicide wet etch
12/13/2006	CN1290163C Method for manufacturing semiconductor integrated circuit device
12/13/2006	CN1290162C Polishing compound and method for polishing substrate
12/13/2006	CN1290161C 液体处理装置 Liquid treatment apparatus
12/13/2006	CN1290160C Metallization method for producing integrated circuit copper interconnecting wire by separating bipolar acid chemical plating
12/13/2006	CN1290159C Gate manufacture and structure of embedded memory
12/13/2006	CN1290158C Method for forming self-aligning contact window structure
12/13/2006	CN1290157C CVD device and method of cleaning CVD device
12/13/2006	CN1290156C Dry developing method
12/13/2006	CN1290155C Exposure device, surface position regulating unit and method for making mask and device
12/13/2006	CN1290154C Laser crystallization system and method for controlling quasi-molecular laser annealing energy density
12/13/2006	CN1290153C Nitride semiconductor element mfg. method and nitride semiconductor element
12/13/2006	CN1290120C Conductive paste and conductive film, plating method and production method for fine metal component
12/13/2006	CN1289970C Development treating method
12/13/2006	CN1289969C Lithographic apparatus, device manufacturing method
12/13/2006	CN1289968C Photoetching mask, its making method and making appts.
12/13/2006	CN1289967C Photoetching projection device and method for fabricating same
12/13/2006	CN1289966C Positive photoetching gum composition and method for forming photoetching gum pattern using the same
12/13/2006	CN1289965C Anti-corrosion layer on objective lens for liquid immersion lithography applications
12/13/2006	CN1289963C Pellicle for lithography
12/13/2006	CN1289958C Manufacturing method of liquid crystal display device and manufacturing method of its array baseplate
12/13/2006	CN1289949C Bistable state surface-stable cholesterol type liquid crystal display device
12/13/2006	CN1289946C 软膜结构 Soft membrane structure
12/13/2006	CN1289874C Ultra clean room for semiconductor device
12/13/2006	CN1289720C Silicon wafer with controlled defect distribution and making method thereof
12/13/2006	CN1289712C Anode assembly depositing planar metal through enhancing electrolyte mixing and process for supplying electrolyte
12/13/2006	CN1289627C Silica and silica-based slurry
12/13/2006	CN1289626C Cerium-based polish and cerium-based polish slurry
12/13/2006	CN1289621C Cationic polymerizable adhesive composition and anisotropically electroconductive adhesive composition
12/13/2006	CN1289620C Paste used for polishing copper base metal
12/13/2006	CN1289619C Silica-based slurry
12/13/2006	CN1289614C Substance for forming electrically-conducting film and electrically-conducting film and its manufacturing method
12/13/2006	CN1289364C Horizontal cassette
12/13/2006	CN1289263C Fixed abrasive article for use in modifying semiconductor wafer and apparatus and modification method
12/13/2006	CN1289258C Cling table and basement machining apparatus
12/13/2006	CN1289225C Method for making pathway pattern and use thereof
12/13/2006	CN1289218C Ultraviolet radiation light cleaning machine
12/13/2006	CN1289207C Interchangeable microdeposition head apparatus and method
12/13/2006	CN1289171C System and method for monitoring contamination
12/12/2006	USRE39426 Thermally enhanced flip chip package and method of forming
12/12/2006	US7149667 Method and program for calculating ion distribution
12/12/2006	US7149643 Integrated process condition sensing wafer and data analysis system
12/12/2006	US7149341 Wafer inspection apparatus
12/12/2006	US7149235 Multi-beam semiconductor laser device
12/12/2006	US7149126 Process for making and programming and operating a dual-bit multi-level ballistic MONOS memory
12/12/2006	US7149120 Combination nonvolatile memory using unified technology with byte, page and block write and simultaneous read and write operations
12/12/2006	US7149113 Semiconductor integrated circuit device
12/12/2006	US7149112 Semiconductor memory device with signal lines arranged across memory cell array thereof
12/12/2006	US7149109 Single transistor vertical memory gain cell
12/12/2006	US7149108 Memory array of a non-volatile RAM
12/12/2006	US7149091 Electronic circuit device
12/12/2006	US7149070 Holding device, in particular for fixing a semiconductor wafer in a plasma etching device, and method for supplying heat to or dissipating heat from a substrate
12/12/2006	US7149069 Overtemperature detection device and semiconductor integrated circuit device
12/12/2006	US7149024 Optical modulator module
12/12/2006	US7148973 Position detecting method and apparatus, exposure apparatus and device manufacturing method
12/12/2006	US7148959 Test pattern, inspection method, and device manufacturing method
12/12/2006	US7148956 Exposure method
12/12/2006	US7148955 Temperature adjusting system and exposure apparatus incorporating the same
12/12/2006	US7148952 Lithographic apparatus and device manufacturing method
12/12/2006	US7148950 Lithographic apparatus and device manufacturing method
12/12/2006	US7148949 Lithographic apparatus and device manufacturing method
12/12/2006	US7148948 Scanning exposure apparatus, and device manufacturing method
12/12/2006	US7148740 Boost circuit and semiconductor integrated circuit
12/12/2006	US7148718 Articles of manufacture and wafer processing apparatuses
12/12/2006	US7148714 POGO probe card for low current measurements
12/12/2006	US7148705 Charging voltage measuring device for substrate and ion beam irradiating device
12/12/2006	US7148619 Electronic device containing a carbon nanotube
12/12/2006	US7148578 Semiconductor multi-chip package
12/12/2006	US7148577 Materials for electronic devices
12/12/2006	US7148576 Semiconductor device and method of fabricating the same
12/12/2006	US7148575 Semiconductor device having bonding pad above low-k dielectric film
12/12/2006	US7148573 Semiconductor integrated circuit
12/12/2006	US7148572 Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation
12/12/2006	US7148571 Semiconductor device and method of manufacturing the same
12/12/2006	US7148570 Low resistivity titanium silicide on heavily doped semiconductor
12/12/2006	US7148567 Semiconductor integrated circuit device
12/12/2006	US7148566 Method and structure for an organic package with improved BGA life
12/12/2006	US7148565 Etch stop layer for silicon (Si) via etch in three-dimensional (3-D) wafer-to-wafer vertical stack
12/12/2006	US7148564 Dual-sided substrate integrated circuit package including a leadframe having leads with increased thickness
12/12/2006	US7148559 Substrate engineering for optimum CMOS device performance
12/12/2006	US7148558 Versatile system for limiting mobile charge ingress in SOI semiconductor structures
12/12/2006	US7148557 Bipolar transistor and method for fabricating the same
12/12/2006	US7148555 Method for enhancing electrode surface area in DRAM cell capacitors
12/12/2006	US7148553 Semiconductor device with inductive component and method of making
12/12/2006	US7148552 High voltage transistor having side-wall width different from side-wall width of a low voltage transistor
12/12/2006	US7148550 Semiconductor device and semiconductor device data write method having magneto-resistance effect element
12/12/2006	US7148547 Semiconductor contact device
12/12/2006	US7148546 MOS transistor gates with doped silicide and methods for making the same

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