H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/20/2006	CN1291474C Shallow junction shield groove technique for protecting active region area
12/20/2006	CN1291473C Device for temporariily loading, keeping and unloading a container
12/20/2006	CN1291472C Electrostatic chuck for preventing arc
12/20/2006	CN1291471C Device test apparatus and test method
12/20/2006	CN1291470C Method and apparatus for measuring vector distance on lead wire connector
12/20/2006	CN1291469C Manufacturing method of semiconductor device
12/20/2006	CN1291468C Method and apparatus for manufacturing interconnect structure
12/20/2006	CN1291467C Method for manufacturing electronic device
12/20/2006	CN1291466C Semiconductor package method with heat sink
12/20/2006	CN1291465C Method for forming light doped drain
12/20/2006	CN1291464C Method for enhancing surface condition of a semiconductor and structure made by the method
12/20/2006	CN1291463C Method for etching metal wire
12/20/2006	CN1291462C Slurry for chemical-mechanical polishing method and system and its use
12/20/2006	CN1291461C Dielectric film, semiconductor device and manufacture methods thereof
12/20/2006	CN1291460C Plasma processing method and apparatus
12/20/2006	CN1291459C Chemical mechanical polishing method and related washing/flushing method
12/20/2006	CN1291458C A method for cleaning surface of semiconductor wafer
12/20/2006	CN1291457C Method for producing semiconductor diode electrode
12/20/2006	CN1291456C Semiconductor device and method for manufacturing the same, circuit board, electrooptical device and electronic instrument
12/20/2006	CN1291455C Method for mfg. semiconductor device
12/20/2006	CN1291454C Method for improving sheet resistance measuring value stibility under low energy ion implanting
12/20/2006	CN1291453C N and In codoping process in preparing hole type zinc oxide film
12/20/2006	CN1291452C Polysilicon crystallization method, thin film transistor and manufacture method of liquid crystal display thereof
12/20/2006	CN1291451C Device and method for processing plasma
12/20/2006	CN1291450C Semiconductor producing method and equipment
12/20/2006	CN1291449C Method for remaking etching suspension layer
12/20/2006	CN1291448C Temperature-controlled chuck and method for controlling temperature of substantially flat object
12/20/2006	CN1291445C Target disc angle controlling and scanning motion mechanism of ion implantation apparatus
12/20/2006	CN1291346C System for providing an open-cavity low profile encapsulated semiconductor package
12/20/2006	CN1291281C Detergent used in photolithography and a method for treating substrate therewith
12/20/2006	CN1291278C Radiation-sensitive resin composition
12/20/2006	CN1291276C Method for fabricating thin film transistors
12/20/2006	CN1291273C Electrooptical device and electronic appliance
12/20/2006	CN1291270C Method for preparing semi-transparent and semi-reflective thin-film transistor liquid-crystal display
12/20/2006	CN1291268C Mask, substrate with light reflection film, method for making light-reflection film, display device and electric appliance
12/20/2006	CN1291235C Socket for electronic component test and electronic component test apparatus using the socket
12/20/2006	CN1291180C Lift valve with heater
12/20/2006	CN1291069C Technology for electrolyzing and manufacturing micro-gap counter-assembled welding projects
12/20/2006	CN1291059C Method for deposition of thin film on substrate, substrate, and diamond film made thereby
12/20/2006	CN1290961C Aqueous dispersion body for chemically mechanical polishing and semiconductor device production method
12/20/2006	CN1290881C Light sensitive polymer containing adamantane alkyl vinyl ether and optical retardent composition containing same
12/20/2006	CN1290701C Liquid drop blowing-out device and method, electro-optical device and manufacturing method thereof
12/20/2006	CN1290628C Probe cleaning device
12/19/2006	US7152215 Dummy fill for integrated circuits
12/19/2006	US7152195 Scan test circuit
12/19/2006	US7151981 Methods and apparatus for positioning a substrate relative to a support stage
12/19/2006	US7151980 Transport management system and method thereof
12/19/2006	US7151974 Controlling method for manufacturing process comprising determining a priority of manufacturing process needing recovery in response to degree of risk
12/19/2006	US7151855 Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program
12/19/2006	US7151785 Optoelectronic devices and methods of production
12/19/2006	US7151706 CMIS semiconductor nonvolatile storage circuit
12/19/2006	US7151693 Method of writing data to a non-volatile semiconductor memory
12/19/2006	US7151690 6F2 3-Transistor DRAM gain cell
12/19/2006	US7151686 Semiconductor memory device and electric device with the same
12/19/2006	US7151685 Semiconductor memory device capable of realizing a chip with high operation reliability and high yield
12/19/2006	US7151674 Mold-type electronic control unit
12/19/2006	US7151659 Gapped-plate capacitor
12/19/2006	US7151658 High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer
12/19/2006	US7151594 Test pattern, inspection method, and device manufacturing method
12/19/2006	US7151590 Transport system for a lithographic apparatus and device manufacturing method
12/19/2006	US7151588 Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
12/19/2006	US7151587 Liquid crystal display device and method of fabricating the same
12/19/2006	US7151579 Thin film transistor array substrate and repairing method of the same
12/19/2006	US7151384 Probe device and display substrate testing apparatus using same
12/19/2006	US7151366 Integrated process condition sensing wafer and data analysis system
12/19/2006	US7151318 Semiconductor component and method for contacting said semiconductor component
12/19/2006	US7151316 Semiconductor device
12/19/2006	US7151315 Method of a non-metal barrier copper damascene integration
12/19/2006	US7151313 Method of forming wirings for tile-shaped elements, structures of wirings for tile-shaped elements, and electronic equipment
12/19/2006	US7151312 Semiconductor device and method of manufacturing the same
12/19/2006	US7151311 Mold resin-sealed power semiconductor device having insulating resin layer fixed on bottom surface of heat sink and metal layer on the resin layer
12/19/2006	US7151306 Electronic part, and electronic part mounting element and an process for manufacturing such the articles
12/19/2006	US7151303 Fully-depleted (FD) (SOI) MOSFET access transistor
12/19/2006	US7151300 Phase-change memory device and method for manufacturing the same
12/19/2006	US7151299 Semiconductor device and its manufacturing method
12/19/2006	US7151295 Non-volatile semiconductor memory device and process of manufacturing the same
12/19/2006	US7151291 Capacitor structures, DRAM cell structures, and integrated circuitry, and methods of forming capacitor structures, integrated circuitry and DRAM cell structures
12/19/2006	US7151290 Semiconductor memory device and method of manufacturing the same
12/19/2006	US7151289 Ferroelectric capacitor and semiconductor device having a ferroelectric capacitor
12/19/2006	US7151288 Semiconductor device and method of manufacturing the same
12/19/2006	US7151286 Photodiode having three doped regions, photodetector incorporating such a photodiode and method of operating such a photodetector
12/19/2006	US7151280 Semiconductor device
12/19/2006	US7151279 Thin film transistor array panel and manufacturing method thereof
12/19/2006	US7151277 Selective etching of silicon carbide films
12/19/2006	US7151275 Reducing the contact resistance in organic field-effect transistors with palladium contacts by using nitriles and isonitriles
12/19/2006	US7151273 Silver-selenide/chalcogenide glass stack for resistance variable memory
12/19/2006	US7151271 System and method for passing high energy particles through a mask
12/19/2006	US7151239 Heat treating apparatus and heat treating method
12/19/2006	US7151209 Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
12/19/2006	US7151061 Method of selective post-growth tuning of an optical bandgap of a semi-conductor heterostructure and products produced thereof
12/19/2006	US7151060 Device and method for thermally treating semiconductor wafers
12/19/2006	US7151059 MOS transistor and method of manufacture
12/19/2006	US7151058 Etchant for etching nitride and method for removing a nitride layer using the same
12/19/2006	US7151057 Flexible MEMS transducer manufacturing method
12/19/2006	US7151056 Method and apparatus for forming a planarizing pad having a film and texture elements for planarization of microelectronic substrates
12/19/2006	US7151055 Technique for forming a gate electrode by using a hard mask
12/19/2006	US7151054 Semiconductor processing methods of forming and utilizing antireflective material layers, and methods of forming transistor gate stacks
12/19/2006	US7151053 Method of depositing dielectric materials including oxygen-doped silicon carbide in damascene applications
12/19/2006	US7151052 Multiple etch-stop layer deposition scheme and materials
12/19/2006	US7151051 Interconnect structure for an integrated circuit and method of fabrication

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