H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2006
12/28/2006	WO2006138404A2 Short channel semiconductor device fabrication
12/28/2006	WO2006138381A2 Tack & fuse chip bonding
12/28/2006	WO2006138378A1 Silicon cmos and algan/gan wideband amplifiers integrated on engineered substrates and method of manufacturing the same
12/28/2006	WO2006138370A2 Memory using hole trapping in high-k dielectrics
12/28/2006	WO2006138240A1 Prevention of copper delamination in semiconductor device
12/28/2006	WO2006138235A2 Compositions and methods for selective removal of metal or metal alloy after metal silicide formation
12/28/2006	WO2006138199A1 Process change detection through the use of evolutionary algorithms
12/28/2006	WO2006138169A1 Word lines in a flash memory array
12/28/2006	WO2006138134A2 Junction leakage suppression in non-volatile memory devices by implanting phosphorous and arsenic into source and drain regions
12/28/2006	WO2006138131A1 Method for silicon nitride chemical vapor deposition
12/28/2006	WO2006138126A2 Antistiction mems substrate and method of manufacture
12/28/2006	WO2006138103A2 Method for silicon based dielectric chemical vapor deposition
12/28/2006	WO2006138072A1 Thin film transistors comprising zinc-oxide-based semiconductor materials
12/28/2006	WO2006138071A1 Thin film transistors comprising zinc-oxide-based semiconductor materials
12/28/2006	WO2006138024A1 Bond head link assembly for a wire bonding machine
12/28/2006	WO2006137963A1 Method of forming a semiconductor device having an epitaxial layer and device thereof
12/28/2006	WO2006137932A2 Homogeneous analyte detection
12/28/2006	WO2006137903A2 Bismuth flouride based nanocomposites as electrode materials
12/28/2006	WO2006137896A2 Metalized elastomeric probe structure
12/28/2006	WO2006137841A2 Asymetric layout structures for transistors and methods of fabricating the same
12/28/2006	WO2006137719A1 Cvd apparatus which has rotation type heater and the control method
12/28/2006	WO2006137653A1 Electrodes for dry etching of wafer and dry etching chamber
12/28/2006	WO2006137608A1 Carrier tape for loading flexible printed circuits
12/28/2006	WO2006137582A1 Exposure method and apparatus
12/28/2006	WO2006137573A1 Semiconductor device and wireless communication system
12/28/2006	WO2006137541A1 Constitutional member for semiconductor processing apparatus and method for producing same
12/28/2006	WO2006137523A1 Electronic control unit and manufacturing method thereof
12/28/2006	WO2006137512A1 Organic semiconductor film forming method, organic semiconductor film and organic thin film transistor
12/28/2006	WO2006137504A1 Electronic component thermo-compression tool, and electronic component mounting apparatus and mounting method
12/28/2006	WO2006137497A1 Etching composition for metal material and method for manufacturing semiconductor device by using same
12/28/2006	WO2006137476A1 Position correcting device, vacuum processing equipment, and position correcting method
12/28/2006	WO2006137440A1 Measuring apparatus, exposure apparatus, and device manufacturing method
12/28/2006	WO2006137439A1 Heat treating device
12/28/2006	WO2006137437A1 Semiconductor device and manufacturing method thereof
12/28/2006	WO2006137415A1 Semiconductor failure analyzing apparatus, semiconductor failure analyzing method, semiconductor failure analyzing program and semiconductor failure analyzing system
12/28/2006	WO2006137410A1 Exposure apparatus, exposure method, maintenance method and device manufacturing method
12/28/2006	WO2006137407A1 Work receiving device and work receiving method
12/28/2006	WO2006137401A1 Diamond semiconductor element and method for manufacturing same
12/28/2006	WO2006137396A1 Exposing method and device
12/28/2006	WO2006137391A1 Semiconductor defect analyzing device, defect analyzing method, and defect analyzing program
12/28/2006	WO2006137384A1 Interlayer insulating film and wiring structure, and process for producing the same
12/28/2006	WO2006137371A1 Semiconductor device
12/28/2006	WO2006137370A1 Substrate transfer robot and processing apparatus
12/28/2006	WO2006137366A1 Electrode patterning layer comprising polyamic acid or polyimide and electronic device using the same
12/28/2006	WO2006137349A1 Catadioptric projection optical system, and exposure apparatus having the same
12/28/2006	WO2006137342A1 Pattern coating material and pattern forming method
12/28/2006	WO2006137340A1 Negative resist composition and method of forming resist pattern
12/28/2006	WO2006137336A1 Positive resist composition and method of forming resist pattern
12/28/2006	WO2006137330A1 Substrate processing apparatus and substrate processing method
12/28/2006	WO2006137326A1 2-dimensional image display device, illumination light source, and exposure illumination device
12/28/2006	WO2006137287A1 Method for fabricating semiconductor device and equipment for processing substrate
12/28/2006	WO2006137257A1 Colored alkali-developable photosensitive resin composition and color filters made by using the same
12/28/2006	WO2006137249A1 Work transfer system
12/28/2006	WO2006137241A1 Patterning method
12/28/2006	WO2006137237A1 Semiconductor device and method for manufacturing same
12/28/2006	WO2006137233A1 Method for organic semiconductor material thin film formation and process for producing organic thin film transistor
12/28/2006	WO2006137202A1 Substrate processing method and substrate processing apparatus
12/28/2006	WO2006137197A1 Semiconductor integrated circuit device and regulator using the same
12/28/2006	WO2006137196A1 Method of forming interlayer insulation film, precursor solution for forming of interlayer insulation film, cvd material for forming of interlayer insulation film, and raw material for production of siloxane oligomer
12/28/2006	WO2006137194A1 Method and apparatus for removing organic film on substrate surface
12/28/2006	WO2006137146A1 Field effect transistor and fabrication method thereof
12/28/2006	WO2006137119A1 Floor plan device, floor plan program, and computer-readable recording medium having the same program recorded
12/28/2006	WO2006136741A1 Method for forming a dielectric film and novel precursors for implementing said method
12/28/2006	WO2006136603A1 Method and device for the permanent connection of integrated circuit to a substrate
12/28/2006	WO2006136584A1 Method of forming a high dielectric constant film and method of forming a semiconductor device
12/28/2006	WO2006136224A1 Method and device for cleaning or drying pot-like hollow bodies, particularly transport containers for semiconductor wafers
12/28/2006	WO2006111617A8 Reactor
12/28/2006	WO2006094487A3 Method for producing a component
12/28/2006	WO2006091593A3 Direct tool loading
12/28/2006	WO2006090947A8 Probe and method for manufacturing the same
12/28/2006	WO2006081287A3 Semiconductor device having dislocation loop located within boundary created by source/drain regions and method of manufacture
12/28/2006	WO2006076044A3 Nanostructure-based transistor
12/28/2006	WO2006074165A3 HIGH TEMPERATURE, STABLE SiC DEVICE INTERCONNECTS AND PACKAGES HAVING LOW THERMAL RESISTANCE
12/28/2006	WO2006052576A3 Encapsulated wafer processing device and process for making thereof
12/28/2006	WO2005122249A3 Semiconductor device module with flip chip devices on a common lead frame
12/28/2006	WO2005118291A3 Bonded assemblies
12/28/2006	WO2005112123A3 Fabrication of nonpolar indium gallium nitride thin films, heterostructures and devices by metalorganic chemical vapor deposition
12/28/2006	WO2005107345A3 Microelectronic connection components having bondable wires
12/28/2006	WO2003102540A3 Micro machined polymer beam structure method and resulting device for spring applications
12/28/2006	US20060294008 Method And System For Designing A Probe Card
12/28/2006	US20060293781 Method of optimizing seasoning recipe for etch process
12/28/2006	US20060293775 Method for manufacturing product formed with a plurality of parts and method for combining parts
12/28/2006	US20060293199 Removing agent composition and removing/cleaning method using same
12/28/2006	US20060292967 Polishing apparatus
12/28/2006	US20060292896 Heater for heating a wafer and method for preventing contamination of the heater
12/28/2006	US20060292895 Method for thermal processing a semiconductor wafer
12/28/2006	US20060292894 Gapfill using deposition-etch sequence
12/28/2006	US20060292893 Masking without photolithography during the formation of a semiconductor device
12/28/2006	US20060292892 Sacrificial benzocyclobutene copolymers for making air gap semiconductor devices
12/28/2006	US20060292891 Cascade source and a method for controlling the cascade source
12/28/2006	US20060292890 Method and device for the production of a silicon single crystal, silicon single crystal, and silicon semiconductor wafers with determined defect distributions
12/28/2006	US20060292889 FINFET Including a Superlattice
12/28/2006	US20060292888 Etchant, method for fabricating interconnection line using the etchant, and method for fabricating thin film transistor substrate using the etchant
12/28/2006	US20060292887 Manufacturing method for a semiconductor device
12/28/2006	US20060292886 Method for fabricating semiconductor device
12/28/2006	US20060292885 Layout modification to eliminate line bending caused by line material shrinkage
12/28/2006	US20060292884 Method for fabricating semiconductor device
12/28/2006	US20060292883 Etching of silicon nitride with improved nitride-to-oxide selectivity utilizing halogen bromide/chlorine plasma
12/28/2006	US20060292882 Method for fabricating semiconductor device
12/28/2006	US20060292881 Method of encapsulating an assembly with a low temperature silicone rubber compound

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