Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2007
01/04/2007US20070004064 Electroluminescent device comprising porous silicon
01/04/2007US20070004063 Technique for evaluating a fabrication of a die and wafer
01/04/2007US20070004062 Display panel, display panel inspection method, and display panel manufacturing method
01/04/2007US20070004061 Method for detecting an end-point for polishing a material
01/04/2007US20070004060 System and method for matching chip and package terminals
01/04/2007US20070004059 Method of measuring alignment of measurement pattern
01/04/2007US20070004058 Semiconductor manufacturing device with transfer robot
01/04/2007US20070004057 Substrate processing method
01/04/2007US20070004056 Systems and methods for direct silicon epitaxy thickness measuring
01/04/2007US20070004055 Method for regulating temperature and circuit therefor
01/04/2007US20070004054 MOSFET temperature sensing
01/04/2007US20070004053 Tunable alignment geometry
01/04/2007US20070004052 Processing schedule creaitng method, coating and developing apparatus, pattern forming apparatus and processing system
01/04/2007US20070004051 Processing method and device
01/04/2007US20070004050 Method of regenerating substrate
01/04/2007US20070004049 Semiconductor device having ferroelectric film as gate insulating film and manufacturing method thereof
01/04/2007US20070004048 Method for producing mgb2 superconductor
01/04/2007US20070004047 Methods and apparatus for molecular data storage, retrieval and analysis
01/04/2007US20070004042 Compositions and methods for helper-free production of recombinant adeno-associated viruses
01/04/2007US20070003859 Carboxyl group-containing acidic compound, basic alkanolamines or quaternary ammonium hydroxides, water, a sulfur-containing corrosion inhibitor and acidic ph; corrosion protection of copper, aluminum wirings with efficient stripping of photoresist, never damages interlevel films
01/04/2007US20070003842 Software sequencer to dynamically adjust wafer transfer decision
01/04/2007US20070003841 Forms first and second patterns on a cell region and a peripheral circuit region of a wafer; The double exposure method uses the single photomask together with different illuminating systems, exposure time so there is a decrease in exposure time and the exposure numbers; simplification
01/04/2007US20070003758 Dicing die bonding film
01/04/2007US20070003698 Enhanced copper growth with ultrathin barrier layer for high performance interconnects
01/04/2007US20070003696 Formation of thin semiconductor layers by low-energy plasma enhanced chemical vapor deposition and semiconductor heterostructure devices
01/04/2007US20070003127 Semiconductor device pattern creation method, pattern data processing method, pattern data processing program, and semiconductor device manufacturing method
01/04/2007US20070002785 Exposure apparatus and method, and mask stage therefor
01/04/2007US20070002691 Buried strap contact for a storage capacitor and method for fabricating it
01/04/2007US20070002516 Container and method of transporting substrate using the same
01/04/2007US20070002515 Plasma processing apparatus and method for manufacturing thereof
01/04/2007US20070002474 Apparatus for evalulating EUV light source, and evaluation method using the same
01/04/2007US20070002308 Method of and apparatus for in-situ monitoring of crystallization state
01/04/2007US20070002268 Apparatus and method for fabricating liquid crystal display device
01/04/2007US20070002254 Liquid crystal display device
01/04/2007US20070002212 Interconnect structure for tft-array substrate and method for fabricating the same
01/04/2007US20070002203 Apparatuses and methods for forming assemblies
01/04/2007US20070001949 Protective circuit for a thin film transistor and a liquid crystal display device
01/04/2007US20070001542 Versatile system for restricting movement of MEMS structures
01/04/2007US20070001326 Vaporizer
01/04/2007US20070001321 Semiconductor devices at least partially covered by a composite coating including particles dispersed through photopolymer material
01/04/2007US20070001317 Semiconductor device
01/04/2007US20070001313 Method of interconnecting terminals and method for mounting semiconductor device
01/04/2007US20070001305 Method for forming a semiconductor product and semiconductor product
01/04/2007US20070001302 Semiconductor device and manufacturing method of the same
01/04/2007US20070001298 Semiconductor device with built-in capacitor, and method of producing the same
01/04/2007US20070001283 Arrangement for electrically connecting semiconductor circuit arrangements to an external contact device and method for producing the same
01/04/2007US20070001278 Semiconductor die package and method for making the same
01/04/2007US20070001276 Semiconductor device and portable apparatus and electronic apparatus comprising the same
01/04/2007US20070001275 Semiconductor device and package, and method of manufacturer therefor
01/04/2007US20070001271 Lead frame and method of manufacturing the lead frame
01/04/2007US20070001267 Methods of forming oxide masks with submicron openings and microstructures formed thereby
01/04/2007US20070001266 Integrated circuit die containing particle-filled through-silicon metal vias with reduced thermal expansion
01/04/2007US20070001260 Reducing parasitic mutual capacitances
01/04/2007US20070001250 Micromachine and method of fabricating the same
01/04/2007US20070001246 Gate electrode with double diffusion barrier and fabrication method of semiconductor device including the same
01/04/2007US20070001245 Semiconductor device and method of fabricating the same
01/04/2007US20070001244 Semiconductor device and manufacturing method thereof
01/04/2007US20070001243 Selective laser annealing of semiconductor material
01/04/2007US20070001239 Mis transistor with self-aligned gate and method for making same
01/04/2007US20070001233 Technique for forming contact insulation layers and silicide regions with different characteristics
01/04/2007US20070001228 Semiconductor device and method of manufacturing the same
01/04/2007US20070001225 Semiconductor device and manufacturing method of the same
01/04/2007US20070001224 Minute structure, micromachine, organic transistor, electric appliance, and manufacturing method thereof
01/04/2007US20070001214 Method of manufacturing flash memory device
01/04/2007US20070001212 NAND-type memory devices including recessed source/drain regions and related methods
01/04/2007US20070001211 Flash Memory Device
01/04/2007US20070001209 Method of forming a storage electrode of a semiconductor device
01/04/2007US20070001208 DRAM having carbon stack capacitor
01/04/2007US20070001207 Double sided container capacitor for a semiconductor device and method for forming same
01/04/2007US20070001206 Capacitors having a capacitor dielectric layer comprising a metal oxide having multiple different metals bonded with oxygen
01/04/2007US20070001197 Semiconductor device, semiconductor device design method, semiconductor device design method recording medium, and semiconductor device design support system
01/04/2007US20070001196 Semiconductor integrated circuit, method of manufacturing semiconductor integrated circuit, charge pump circuit, layout designing apparatus, and layout designing program
01/04/2007US20070001192 Nitride-based semiconductor element and method of forming nitride-based semiconductor
01/04/2007US20070001189 Method of fabricating substrate for package of semiconductor light-emitting device
01/04/2007US20070001188 Semiconductor device for emitting light and method for fabricating the same
01/04/2007US20070001186 (Al, Ga, In)N and ZnO direct wafer bonded structure for optoelectronic applications, and its fabrication method
01/04/2007US20070001184 Light-emitting device with built-in microlens and method of forming the same
01/04/2007US20070001181 Light emitting diode and method for improving luminescence efficiency thereof
01/04/2007US20070001175 Silicon carbide epitaxial wafer, method for producing such wafer, and semiconductor device formed on such wafer
01/04/2007US20070001172 Liquid crystal display device and fabrication method thereof
01/04/2007US20070001171 Semiconductor device and manufacturing method thereof
01/04/2007US20070001167 Storage device and semiconductor device
01/04/2007US20070001099 Method and apparatus for inspecting solid-state image pick-up device
01/04/2007US20070000897 Multi-step anneal of thin films for film densification and improved gap-fill
01/04/2007US20070000874 Method and apparatus for polishing a substrate
01/04/2007US20070000873 Substrate processing method and semiconductor device manufacturing method
01/04/2007US20070000872 Method for chemically mechanically polishing organic film, method of manufacturing semiconductor device, and program therefor
01/04/2007US20070000870 Plasma processing method
01/04/2007US20070000869 Etching method in a semiconductor processing and etching system for performing the same
01/04/2007US20070000868 Dry etching method
01/04/2007US20070000866 Patterning and alteration of molecules
01/04/2007US20070000864 Piezoelectric material working method
01/04/2007US20070000863 Method for dry etching fluid feed slots in a silicon substrate
01/04/2007US20070000614 Method and apparatus for reducing substrate backside deposition during processing
01/04/2007US20070000612 Substrate processing device
01/04/2007US20070000611 Plasma control using dual cathode frequency mixing
01/04/2007US20070000610 Etching method in a semiconductor processing and etching system for performing the same
01/04/2007US20070000595 Adhesive substrate and method for using
01/04/2007US20070000516 Device and method for cleaning the edges of substrates
01/04/2007US20070000435 Method of manufacturing a wafer