Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2007
06/12/2007US7230275 Silicon carbide semiconductor device having junction field effect transistor and method for manufacturing the same
06/12/2007US7230274 Reduction of carrot defects in silicon carbide epitaxy
06/12/2007US7230269 Organic photosensitive cells having a reciprocal-carrier exciton blocking layer
06/12/2007US7230268 Attachment of organic molecules to group III, IV or V substrates
06/12/2007US7230264 Semiconductor transistor having structural elements of differing materials
06/12/2007US7230257 Electron beam exposure apparatus
06/12/2007US7230256 Ion doping system, ion doping method and semiconductor device
06/12/2007US7230254 Movable carriage for a lithographic apparatus and device manufacturing method
06/12/2007US7230241 Method for matching two measurement methods for measuring structure widths on a substrate
06/12/2007US7230239 Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same
06/12/2007US7230204 Method and system for temperature control of a substrate
06/12/2007US7229936 Method to reduce photoresist pattern collapse by controlled surface microroughening
06/12/2007US7229935 Method of forming a thin film by plasma CVD of a silicon-containing source gas
06/12/2007US7229934 Porous organosilicates with improved mechanical properties
06/12/2007US7229933 Embossing processes for substrate imprinting, structures made thereby, and polymers used therefor
06/12/2007US7229932 Method and structure for fabricating a halftone mask for the manufacture of semiconductor wafers
06/12/2007US7229931 Oxygen plasma treatment for enhanced HDP-CVD gapfill
06/12/2007US7229930 Selective etching of low-k dielectrics
06/12/2007US7229929 Multi-layer gate stack
06/12/2007US7229928 Method for processing a layered stack in the production of a semiconductor device
06/12/2007US7229927 Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics
06/12/2007US7229926 Method of manufacturing nitride substrate for semiconductors, and nitride semiconductor substrate
06/12/2007US7229925 Methods of forming a pattern for a semiconductor device
06/12/2007US7229924 Surface barriers for copper and silver interconnects produced by a damascene process
06/12/2007US7229923 Multi-step process for forming a barrier film for use in copper layer formation
06/12/2007US7229922 Method for making a semiconductor device having increased conductive material reliability
06/12/2007US7229921 Semiconductor device and manufacturing method for the same
06/12/2007US7229920 Method of fabricating metal silicide layer
06/12/2007US7229919 Semiconductor device having a random grained polysilicon layer and a method for its manufacture
06/12/2007US7229918 Nitrogen rich barrier layers and methods of fabrication thereof
06/12/2007US7229917 Film formation method and apparatus for semiconductor process
06/12/2007US7229916 Method of manufacturing a semiconductor device
06/12/2007US7229915 Method for manufacturing semiconductor device
06/12/2007US7229914 Wiring layer structure for ferroelectric capacitor
06/12/2007US7229913 Stitched micro-via to enhance adhesion and mechanical strength
06/12/2007US7229912 Method for forming passivation film of semiconductor device and structure of passivation film of semiconductor device
06/12/2007US7229911 Adhesion improvement for low k dielectrics to conductive materials
06/12/2007US7229910 Method of producing a semiconductor device having a multi-layered insulation film
06/12/2007US7229909 Integrated circuit chip utilizing dielectric layer having oriented cylindrical voids formed from carbon nanotubes
06/12/2007US7229908 System and method for manufacturing an out of plane integrated circuit inductor
06/12/2007US7229907 Method of forming a damascene structure with integrated planar dielectric layers
06/12/2007US7229906 Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
06/12/2007US7229905 Alignment and orientation features for a semiconductor package
06/12/2007US7229904 Method for forming landing plug contacts in semiconductor device
06/12/2007US7229903 Recessed semiconductor device
06/12/2007US7229902 Method for making a semiconductor device including a superlattice with regions defining a semiconductor junction
06/12/2007US7229901 Fabrication of strained heterojunction structures
06/12/2007US7229900 Semiconductor device, method of manufacturing thereof, and method of manufacturing base material
06/12/2007US7229899 Process for the transfer of a thin film
06/12/2007US7229898 Methods for fabricating a germanium on insulator wafer
06/12/2007US7229897 Method for producing a stacked structure
06/12/2007US7229896 STI process for eliminating silicon nitride liner induced defects
06/12/2007US7229895 Memory array buried digit line
06/12/2007US7229894 Active cell isolation body of a semiconductor device and method for forming the same
06/12/2007US7229893 Method and apparatus for a semiconductor device with a high-k gate dielectric
06/12/2007US7229892 Semiconductor device and method of manufacturing the same
06/12/2007US7229891 Fabrication method for silicon-on defect layer in field-effect and bipolar transistor devices
06/12/2007US7229890 Forming integrated circuits using selective deposition of undoped silicon film seeded in chlorine and hydride gas
06/12/2007US7229889 Methods for metal plating of gate conductors and semiconductors formed thereby
06/12/2007US7229888 Capacitor with hafnium oxide and aluminum oxide alloyed dielectric layer and method for fabricating the same
06/12/2007US7229887 Method to selectively remove one side of a conductive bottom electrode of a phase-change memory cell and structure obtained thereby
06/12/2007US7229886 Method of forming an integrated circuit incorporating higher voltage devices and low voltage devices therein
06/12/2007US7229885 Formation of a disposable spacer to post dope a gate conductor
06/12/2007US7229884 Phosphorous doping methods of manufacturing field effect transistors having multiple stacked channels
06/12/2007US7229883 Phase change memory device and method of manufacture thereof
06/12/2007US7229882 Method of manufacturing a field effect semiconductor device having a stacked gate insulation film and a gate electrode
06/12/2007US7229881 Dynamic random access memory of semiconductor device and method for manufacturing the same
06/12/2007US7229880 Precision creation of inter-gates insulator
06/12/2007US7229879 Metal-insulator-metal (MIM) capacitor structure formed with dual damascene structure
06/12/2007US7229878 Phototransistor of CMOS image sensor and method for fabricating the same
06/12/2007US7229877 Trench capacitor with hybrid surface orientation substrate
06/12/2007US7229876 Method of fabricating memory
06/12/2007US7229875 Integrated circuit capacitor structure
06/12/2007US7229874 Method and apparatus for allowing formation of self-aligned base contacts
06/12/2007US7229873 Process for manufacturing dual work function metal gates in a microelectronics device
06/12/2007US7229872 Low voltage power MOSFET device and process for its manufacture
06/12/2007US7229871 Integrated circuit containing polysilicon gate transistors and fully silicidized metal gate transistors
06/12/2007US7229870 Methods of fabricating semiconductor devices
06/12/2007US7229869 Method for manufacturing a semiconductor device using a sidewall spacer etchback
06/12/2007US7229868 Organic field-effect transistor, method for structuring an OFET and integrated circuit
06/12/2007US7229867 Process for producing a field-effect transistor and transistor thus obtained
06/12/2007US7229866 Non-activated guard ring for semiconductor devices
06/12/2007US7229865 Methods of making semiconductor-on-insulator thin film transistor constructions
06/12/2007US7229864 Method of manufacturing a semiconductor device
06/12/2007US7229863 Method for fabricating thin film transistors
06/12/2007US7229862 Method for manufacturing semiconductor device
06/12/2007US7229861 Method for producing semiconductor device
06/12/2007US7229860 Method for manufacturing a thin film transistor using poly silicon
06/12/2007US7229859 Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device
06/12/2007US7229858 Semiconductor wafer and semiconductor device manufacturing method using the same
06/12/2007US7229857 Method for producing a protection for chip edges and system for the protection of chip edges
06/12/2007US7229856 Method of manufacturing electronic part packaging structure
06/12/2007US7229855 Process for assembling a double-sided circuit component
06/12/2007US7229854 Electronic component mounting method and apparatus and ultrasonic bonding head
06/12/2007US7229853 Method of making a semiconductor chip assembly using multiple etch steps to form a pillar after forming a routing line
06/12/2007US7229852 Manufacturing method of semiconductor wafer having lid part and manufacturing method of semiconductor device
06/12/2007US7229851 Semiconductor chip stack
06/12/2007US7229850 Method of making assemblies having stacked semiconductor chips
06/12/2007US7229849 Method for packaging a semiconductor device
06/12/2007US7229848 Method and apparatus for fabricating self-assembling microstructures
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