Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2007
07/05/2007US20070155182 Manufacturing method of semiconductor device
07/05/2007US20070155181 Method and system for etching high-k dielectric materials
07/05/2007US20070155180 Thin film etching method
07/05/2007US20070155179 Method to define a pattern having shrunk critical dimension
07/05/2007US20070155178 Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
07/05/2007US20070155177 Method for fabricating semiconductor device
07/05/2007US20070155176 Interconnect circuitry, multichip module, and methods of manufacturing thereof
07/05/2007US20070155175 Semiconductor device
07/05/2007US20070155174 Circuit substrate and method for fabricating the same
07/05/2007US20070155173 Nanowires and method for making the same
07/05/2007US20070155172 Manufacturing Method for Phase Change RAM with Electrode Layer Process
07/05/2007US20070155171 Metal interconnection of semiconductor device and method for forming the same
07/05/2007US20070155170 Method for forming a damascene pattern of a copper metallization layer
07/05/2007US20070155169 Method of fabricating a thin film and metal wiring in a semiconductor device
07/05/2007US20070155168 Method for forming a conductive plug of a semiconductor device
07/05/2007US20070155167 Method for forming metal interconnection in image sensor
07/05/2007US20070155166 Method and apparatus for depositing copper wiring
07/05/2007US20070155165 Methods for forming damascene wiring structures having line and plug conductors formed from different materials
07/05/2007US20070155164 Metal seed layer deposition
07/05/2007US20070155163 Method for fabricating a thin film and a metal line of a semiconductor device
07/05/2007US20070155162 Method for forming a dual interlayer dielectric layer of a semiconductor device
07/05/2007US20070155161 Selective removal of sacrificial light absorbing material over porous dielectric
07/05/2007US20070155160 Method and apparatus for redirecting void diffusion away from vias in an integrated circuit design
07/05/2007US20070155159 Method for forming under a thin layer of a first material portions of another material and/ or empty areas
07/05/2007US20070155158 Carbon nanotube interconnect structures
07/05/2007US20070155157 Structure of Metal Interconnect and Fabrication Method Thereof
07/05/2007US20070155156 Bonding pad structure for a display device and fabrication method thereof
07/05/2007US20070155155 Manufacturing method for semiconductor device and semiconductor device
07/05/2007US20070155154 System and method for solder bumping using a disposable mask and a barrier layer
07/05/2007US20070155153 Semiconductor device having electrode and manufacturing method thereof
07/05/2007US20070155152 Method of manufacturing a copper inductor
07/05/2007US20070155151 Semiconductor device and a manufacturing method
07/05/2007US20070155150 Method of forming a semiconductor device having an etch stop layer and related device
07/05/2007US20070155149 Methods and structures for electrically coupling a conductor and a conductive element comprising a dissimilar material
07/05/2007US20070155148 Method for forming semiconductor device having fin structure
07/05/2007US20070155147 Semiconductor device and method for fabricating the same
07/05/2007US20070155146 Method for forming semiconductor wafer having insulator
07/05/2007US20070155145 Method for forming a copper metal interconnection of a semiconductor device using two seed layers
07/05/2007US20070155144 Semiconductor device exhibiting a high breakdown voltage and the method of manufacturing the same
07/05/2007US20070155143 High voltage semiconductor transistor device
07/05/2007US20070155142 Abrupt junction formation by atomic layer epitaxy of in situ delta doped dopant diffusion barriers
07/05/2007US20070155140 Manufacturing method of semiconductor film and image display device
07/05/2007US20070155139 Method for fabricating an integrated circuit on a semiconductor substrate
07/05/2007US20070155138 Apparatus and method for depositing silicon germanium films
07/05/2007US20070155137 High density plasma non-stoichiometric SiOxNy films
07/05/2007US20070155136 Carbon nanotube and metal thermal interface material, process of making same, packages containing same, and systems containing same
07/05/2007US20070155135 Method of fabricating a polysilicon layer and a thin film transistor
07/05/2007US20070155134 Annealed wafer and manufacturing method of annealed wafer
07/05/2007US20070155133 Method of reducing contamination by providing an etch stop layer at the substrate edge
07/05/2007US20070155132 Method of manufacture for a component including at least one single-crystal layer on a substrate
07/05/2007US20070155131 Method of singulating a microelectronic wafer
07/05/2007US20070155130 STRAINED Si MOSFET ON TENSILE-STRAINED SiGe-ON-INSULATOR (SGOI)
07/05/2007US20070155129 Combination of a substrate and a wafer
07/05/2007US20070155128 Method for forming trench
07/05/2007US20070155127 Image sensor and method of fabricating the same
07/05/2007US20070155126 Method for manufacturing semiconductor device with overlay vernier
07/05/2007US20070155125 Method for forming shallow trench isolation of semiconductor device
07/05/2007US20070155124 Method of manufacturing semiconductor device
07/05/2007US20070155123 Method of manufacturing semiconductor device
07/05/2007US20070155122 Trench isolation structure having different stress
07/05/2007US20070155121 Technique for forming an isolation trench as a stress source for strain engineering
07/05/2007US20070155120 Trench isolation structure for a semiconductor device with reduced sidewall stress and a method of manufacturing the same
07/05/2007US20070155119 Method of manufacturing a field effect transistor device with recessed channel and corner gate device
07/05/2007US20070155118 Method for forming a notched gate insulator for advanced MIS semiconductor devices and devices thus obtained
07/05/2007US20070155117 Phase change memory and method therefor
07/05/2007US20070155116 Method of measuring shifted epitaxy layer by buried layer
07/05/2007US20070155115 Semiconductor device having capacitor large in capacitance and high in reliability and method of manufacturing the same
07/05/2007US20070155114 Method for manufacturing semiconductor device
07/05/2007US20070155113 Thin-film capacitor with a field modification layer and methods for forming the same
07/05/2007US20070155112 Mom capacitor
07/05/2007US20070155111 Method of fabricating a semiconductor device having a pre metal dielectric liner
07/05/2007US20070155110 Method for manufacturing semiconductor device
07/05/2007US20070155109 Method for fabricating a semiconductor device
07/05/2007US20070155108 Doping mask and methods of manufacturing charge transfer image and microelectronic device using the same
07/05/2007US20070155107 High-voltage semiconductor device and method of manufacturing the same
07/05/2007US20070155106 Method of manufacturing cmos image sensor
07/05/2007US20070155105 Method for forming transistor of semiconductor device
07/05/2007US20070155104 Power device utilizing chemical mechanical planarization
07/05/2007US20070155103 Semiconductor integrated circuit device and a method of manufacturing the same
07/05/2007US20070155102 Method of fabricating an integrated circuit
07/05/2007US20070155101 Method for forming a semiconductor device having recess channel
07/05/2007US20070155100 Non-volatile memory device having a nitride barrier to reduce the fast erase effect
07/05/2007US20070155099 Nonvolatile semiconductor memory device having excellent charge retention and manufacturing process of the same
07/05/2007US20070155098 Method of manufacturing NAND flash memory device
07/05/2007US20070155097 Method for fabricating flash memory device
07/05/2007US20070155096 Nonvolatile semiconductor memory and method of manufacturing the same
07/05/2007US20070155095 Method for manufacturing flash memory cell
07/05/2007US20070155094 Method of manufacturing a semiconductor device
07/05/2007US20070155093 Multi-bit phase-change random access memory (PRAM) with diameter-controlled contacts and methods of fabricating and programming the same
07/05/2007US20070155092 Method for forming a tip
07/05/2007US20070155091 Semiconductor Device With Capacitor and Method for Fabricating the Same
07/05/2007US20070155090 Corresponding capacitor arrangement and method for making the same
07/05/2007US20070155089 Method of manufacturing a capacitor deep trench and of etching a deep trench opening
07/05/2007US20070155088 Semiconductor device and method of manufacturing the same
07/05/2007US20070155087 Method of manufacturing split gate flash memory
07/05/2007US20070155086 Cmos image sensor and method for manufacturing the same
07/05/2007US20070155085 Methods of fabricating static random access memories (SRAMS) having vertical transistors
07/05/2007US20070155084 CMOS image sensor and method of manufacturing the same
07/05/2007US20070155083 CMOS Image Sensor and Method for Manufacturing the Same
07/05/2007US20070155082 Method for Fabricating CMOS Image Sensor