Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2007
07/12/2007DE10047346B4 Verfahren zur Herstellung eines Siliciumwafers zur Abscheidung einer Epitaxieschicht und Epitaxiewafer A process for producing a silicon wafer for the deposition of an epitaxial layer and epitaxial wafer
07/12/2007DE10039672B4 Substratverarbeitungsvorrichtung und Verfahren zum Bearbeiten eines Substrats Substrate processing apparatus and method for processing a substrate
07/12/2007DE10003703B4 Steuerbares, auf einem Isolationsmaterial gebildetes Halbleiterschaltelement Taxable, formed on an insulating material semiconductor switching element
07/11/2007EP1806828A1 Linear motor, stage apparatus and exposure apparatus
07/11/2007EP1806790A2 Light-emitting diode having a silver-based electrode and method for manufacturing the same
07/11/2007EP1806788A2 Semiconductor memory device and method for producing the same
07/11/2007EP1806781A1 Conductive interconnect with a localized overhanging dielectric barrier
07/11/2007EP1806780A2 Robust shallow trench isolation structures and a method for forming shallow trench isolation structures
07/11/2007EP1806779A2 Method for fabricating a MESFET and a MESFET
07/11/2007EP1806778A1 Annealed wafer manufacturing method and annealed wafer
07/11/2007EP1806777A1 Vertical boat for heat treatment and heat treatment method
07/11/2007EP1806776A1 Plasma film forming method and plasma film forming device
07/11/2007EP1806775A1 Process for producing semiconductor substrate, semiconductor substrate for solar application and etching solution
07/11/2007EP1806774A1 Reticle protective member, reticle carrying apparatus, exposure device, and reticle carrying method
07/11/2007EP1806773A1 Exposure device, exposure method, and device manufacturing method
07/11/2007EP1806772A1 Exposure apparatus and device manufacturing method
07/11/2007EP1806771A1 Exposure device and device manufacturing method
07/11/2007EP1806770A1 Gallium nitride wafer
07/11/2007EP1806769A1 Soi wafer manufacturing method and soi wafer
07/11/2007EP1806768A1 Process for producing semiconductor substrate and semiconductor substrate
07/11/2007EP1806767A1 Substrate transfer apparatus, substrate transfer method and exposure apparatus
07/11/2007EP1806619A1 Resist composition, method for forming resist pattern, and compound
07/11/2007EP1806610A1 Optical system, lens barrel, exposure system, and production method for device
07/11/2007EP1806589A1 Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment
07/11/2007EP1806370A1 Copolymer and upper film-forming composition
07/11/2007EP1806036A1 Packaging and manufacturing of an integrated circuit
07/11/2007EP1805802A2 Poly-silicon-germanium gate stack and method for forming the same
07/11/2007EP1805799A1 Substrate with electric contacts and method of manufacturing the same
07/11/2007EP1805798A2 Gate stacks
07/11/2007EP1805796A1 Strained channel fet using sacrificial spacer
07/11/2007EP1805795A2 Planar substrate devices integrated with finfets and method of manufacture
07/11/2007EP1805794A1 Semiconductor integrated circuit and designing method of the same, and electronic apparatus using the same
07/11/2007EP1805793A1 Electromigration control
07/11/2007EP1805792A1 Substrate processing apparatus
07/11/2007EP1805791A1 Metal-oxide-semiconductor device with a doped titanate body
07/11/2007EP1805790A2 Hemt device and method of making
07/11/2007EP1805789A2 Asymetric layout structures for transistors and methods of fabricating the same
07/11/2007EP1805548A1 Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same
07/11/2007EP1741143A4 Backside thinning of image array devices
07/11/2007EP1732999B1 Dispersion for the chemical-mechanical polishing of metal surfaces containing metal oxide particles and a cationic polymer
07/11/2007EP1661442B1 Electronic component mounting apparatus and method of mounting electronic components
07/11/2007EP1602266B1 Method and device for the extraction of electronic components from tubes
07/11/2007EP1474796A4 Plasma display panel having trench discharge cell and method of fabricating the same
07/11/2007EP1467840B1 Process control in electro-chemical mechanical polishing
07/11/2007EP1200991B1 Semiconductor capacitor with a diffusion barrier
07/11/2007CN2922122Y Internal memory radiating clip and assembly clamp tool
07/11/2007CN2922120Y Wafer supporting rotary disc module
07/11/2007CN2922119Y 晶圆片承载模组 Wafer carrier module
07/11/2007CN2922118Y Electrostatic chuck used for chip clamping
07/11/2007CN2922117Y Crystal chip platform angle adjusting device
07/11/2007CN2922116Y Solar wafer stand
07/11/2007CN2922115Y Long-life ion source heating electronic gun filament fixing device
07/11/2007CN2922114Y Filament lead-out rod isolating structure
07/11/2007CN1998272A Plasma processing equipment
07/11/2007CN1998099A High efficiency organic photovoltaic cells employing hybridized mixed-planar heterojunctions
07/11/2007CN1998095A Arrayed ultrasonic transducer
07/11/2007CN1998087A 非晶形氧化物和薄膜晶体管 Amorphous oxide and a thin film transistor
07/11/2007CN1998085A Methods of fabricating nitride-based transistors having regrown ohmic contact regions and nitride-based transistors having regrown ohmic contact regions
07/11/2007CN1998083A Active matrix electronic array device
07/11/2007CN1998082A Polymer dielectrics for memory element array interconnect
07/11/2007CN1998081A Carrier for multilayer semiconductor device and method for manufacturing multilayer semiconductor device
07/11/2007CN1998079A Module integration integrated circuits
07/11/2007CN1998078A Single row bond pad arrangement of an integrated circuit chip
07/11/2007CN1998077A Semiconductor device manufacturing method and semiconductor device
07/11/2007CN1998075A Test apparatus
07/11/2007CN1998074A Semiconductor assembly having substrate with electroplated contact pads
07/11/2007CN1998073A System for and method of ensuring accurate shadow mask-to-substrate registration in a deposition process
07/11/2007CN1998072A Method of semiconductor fabrication incorporating disposable spacer into elevated source/drain processing
07/11/2007CN1998071A Method for producing a multilayer structure comprising a separating layer
07/11/2007CN1998070A Apparatus and methods for junction formation using optical illumination
07/11/2007CN1998069A Method of plasma etch endpoint detection using a V-I probe diagnostics
07/11/2007CN1998068A Copper doped magnetic semiconductors
07/11/2007CN1998067A Activation of carbon nanotubes for field emission applications
07/11/2007CN1998066A Structure formation
07/11/2007CN1998065A Method of fabricating vertical structure compound semiconductor devices
07/11/2007CN1998062A Methods for stable and repeatable plasma ion implantation
07/11/2007CN1998036A Adhesive label, adhesive label roll, photosensitive web unit, and apparatus for and method of manufacturing photosensitive laminated body
07/11/2007CN1997944A Pattern forming method
07/11/2007CN1997939A Method of forming resist pattern, positive resist composition, and layered product
07/11/2007CN1997929A Lens array and method of making same
07/11/2007CN1997878A Method for correcting critical dimension variations in photomasks
07/11/2007CN1997771A Methods for the optimization of substrate etching in a plasma processing system
07/11/2007CN1997576A Levitation transportation device and levitation transportation method
07/11/2007CN1997495A Method and device for controllable encapsulation of electronic components
07/11/2007CN1997255A Making method of the paste macromolecule ESD dual-channel integrated prevention parts
07/11/2007CN1997254A Base plate plasma static-removing technology
07/11/2007CN1996686A Laser package adaptor
07/11/2007CN1996630A Light-emitting diode and method for manufacturing the same, its uses in electronic apparatus
07/11/2007CN1996624A Light-emitting diode-LED and its encapsulation method and application
07/11/2007CN1996617A Semiconductor device and method of manufacturing the same
07/11/2007CN1996616A Thick-bar high-voltage P type MOS tube and its preparing method
07/11/2007CN1996615A 半导体装置及其制造方法 Semiconductor device and manufacturing method
07/11/2007CN1996614A Semiconductor device and method of manufacturing the same
07/11/2007CN1996613A Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices
07/11/2007CN1996612A Display device and manufacturing method of the same
07/11/2007CN1996611A Organic electroluminescent devices and fabrication methods thereof
07/11/2007CN1996610A Thin film transistor array panel and manufacturing thereof
07/11/2007CN1996605A Complementary metal oxide semiconductor image sensor and method for fabricating the same
07/11/2007CN1996604A Electro-optic device, method for fabricating the same, and electronic apparatus
07/11/2007CN1996603A Pixel structure of a thin film transistor LCD and its making method