Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2007
11/07/2007CN100346943C Device for handling flat panels in a vacuum
11/07/2007CN100346926C Method and apparatus for polishing outer peripheral chamfered part of wafer
11/07/2007CN100346887C Removal of particle contamination on patterned slilicon/silicon dioxide using supercritical carbon dioxide/chemical formulations
11/07/2007CN100346884C Production apparatus and method for producing laminescent device by the same production apparatus
11/06/2007USRE39913 Providing a reticle that includes a pattern of lines having a line width greater than target width; coating wiht photoresist; exposing photoresist layer to an image projected from reticle; developing photoresist layer, trimming pattern, etching
11/06/2007US7292909 Substrate processing apparatus and management method
11/06/2007US7292906 Formula-based run-to-run control
11/06/2007US7292472 Memory device capable of stable data writing
11/06/2007US7292471 Semiconductor memory device having a voltage-controlled-oscillator-based readout circuit
11/06/2007US7292455 Multilayered power supply line for semiconductor integrated circuit and layout method thereof
11/06/2007US7292427 Pin lift chuck assembly for warped substrates
11/06/2007US7292426 Substrate holding system and exposure apparatus using the same
11/06/2007US7292388 Lens made of a crystalline material
11/06/2007US7292351 Method for determining a map, device manufacturing method, and lithographic apparatus
11/06/2007US7292327 Circuit-pattern inspection apparatus
11/06/2007US7292320 Laser crystallization apparatus and laser crystallization method
11/06/2007US7292316 Illumination optical system and exposure apparatus having the same
11/06/2007US7292315 Optimized polarization illumination
11/06/2007US7292311 Scanning exposure technique
11/06/2007US7292309 Exposure apparatus and device manufacturing method
11/06/2007US7292308 System and method for patterning a flexible substrate in a lithography tool
11/06/2007US7292307 Cooling apparatus, optical element having the same, and exposure apparatus
11/06/2007US7292305 Method of fabricating liquid crystal display device
11/06/2007US7292303 Liquid crystal display and panel therefor including regular and successive regular domain defining members
11/06/2007US7292288 Liquid crystal display device and a manufacturing method of the same
11/06/2007US7292278 System and method for recording management data for management of solid-state electronic image sensing device, and system and method for sensing management data
11/06/2007US7292088 Gate driver output stage with bias circuit for high and wide operating voltage range
11/06/2007US7292057 Probe station thermal chuck with shielding for capacitive current
11/06/2007US7291972 Dual panel type organic electroluminescent display device and method of fabricating the same
11/06/2007US7291968 Active matrix electroluminescent display devices, and their manufacture
11/06/2007US7291920 Semiconductor structures
11/06/2007US7291919 Three-dimensionally polymerized polymer, formed by polymerizing first cross-linking a three-dimensional molecule containing an adamantine ring in its backbone, and second, two-dimensional cross-linking molecules; pores formed by the polymerization of the first and second cross-linking molecules
11/06/2007US7291917 Integrated circuitry
11/06/2007US7291911 Semiconductor device and manufacturing method thereof
11/06/2007US7291910 Semiconductor chip assemblies, methods of making same and components for same
11/06/2007US7291906 Stack package and fabricating method thereof
11/06/2007US7291905 Lead frame, semiconductor device produced by using the same and method of producing the semiconductor device
11/06/2007US7291901 Packaging method, packaging structure and package substrate for electronic parts
11/06/2007US7291898 Selective and non-selective epitaxy for base integration in a BiCMOS process and related structure
11/06/2007US7291897 One mask high density capacitor for integrated circuits
11/06/2007US7291895 Integrated circuitry
11/06/2007US7291890 Gate dielectric and method
11/06/2007US7291889 Basic cells configurable into different types of semiconductor integrated circuits
11/06/2007US7291886 Hybrid substrate technology for high-mobility planar and multiple-gate MOSFETs
11/06/2007US7291884 Trench MIS device having implanted drain-drift region and thick bottom oxide
11/06/2007US7291882 Programmable and erasable digital switch device and fabrication method and operating method thereof
11/06/2007US7291881 Bit line structure and method of fabrication
11/06/2007US7291880 Transistor assembly
11/06/2007US7291878 Ultra low-cost solid-state memory
11/06/2007US7291877 Integrated circuit arrangement with capacitor
11/06/2007US7291874 Laser dicing apparatus for a gallium arsenide wafer and method thereof
11/06/2007US7291873 High electron mobility epitaxial substrate
11/06/2007US7291868 Light-emitting semiconductor device and a method of manufacturing it
11/06/2007US7291849 Calibration standard for transmission electron microscopy
11/06/2007US7291569 Fluids for immersion lithography systems
11/06/2007US7291568 Method for fabricating a nitrided silicon-oxide gate dielectric
11/06/2007US7291567 Silica-based film, method of forming the same, composition for forming insulating film for semiconductor device, interconnect structure, and semiconductor device
11/06/2007US7291566 Barrier layer for a processing element and a method of forming the same
11/06/2007US7291565 Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
11/06/2007US7291564 Method and structure for facilitating etching
11/06/2007US7291563 Method of etching a substrate; method of forming a feature on a substrate; and method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate
11/06/2007US7291562 Method to form topography in a deposited layer above a substrate
11/06/2007US7291561 MEMS device integrated chip package, and method of making same
11/06/2007US7291560 Method of production pitch fractionizations in semiconductor technology
11/06/2007US7291559 Etching method, gate etching method, and method of manufacturing semiconductor devices
11/06/2007US7291558 Copper interconnect wiring and method of forming thereof
11/06/2007US7291557 Method for forming an interconnection structure for ic metallization
11/06/2007US7291556 Method for forming small features in microelectronic devices using sacrificial layers
11/06/2007US7291555 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon
11/06/2007US7291554 Method for forming semiconductor device
11/06/2007US7291553 Method for forming dual damascene with improved etch profiles
11/06/2007US7291552 Multi-layer film stack for extinction of substrate reflections during patterning
11/06/2007US7291551 Sub-milliohm on-chip interconnection
11/06/2007US7291550 Method to form a contact hole
11/06/2007US7291549 Method and structure to reduce risk of gold embrittlement in solder joints
11/06/2007US7291548 Stress-relief layers and stress-compensation collars with low-temperature solders for board-level joints, and processes of making same
11/06/2007US7291547 Filter device and method for fabricating filter devices
11/06/2007US7291546 Method and apparatus for reducing charge loss in a nonvolatile memory cell
11/06/2007US7291545 Plasma immersion ion implantation process using a capacitively couple plasma source having low dissociation and low minimum plasma voltage
11/06/2007US7291544 Homoepitaxial gallium nitride based photodetector and method of producing
11/06/2007US7291543 Thin flip-chip method
11/06/2007US7291542 Semiconductor wafer and manufacturing method thereof
11/06/2007US7291541 System and method for providing improved trench isolation of semiconductor devices
11/06/2007US7291540 Method of forming an implantable electronic device chip level hermetic and biocompatible electronics package using SOI wafers
11/06/2007US7291539 Amorphization/templated recrystallization method for hybrid orientation substrates
11/06/2007US7291538 Semiconductor memory device and manufacturing method of the same
11/06/2007US7291537 Method for producing solid electrolytic capacitor
11/06/2007US7291536 Fabricating a self-aligned bipolar transistor having increased manufacturability
11/06/2007US7291535 Method and apparatus for fabricating semiconductor device
11/06/2007US7291534 Method of manufacturing semiconductor device
11/06/2007US7291533 Method for production of trench DRAM cells and a trench DRAM cell array with fin field-effect transistors with a curved channel (CFET—curved fets)
11/06/2007US7291532 Low resistance contact in a semiconductor device
11/06/2007US7291531 Method of fabricating semiconductor device having capacitor
11/06/2007US7291530 Semiconductor storage device and method of manufacturing the same
11/06/2007US7291529 Methods of processing semiconductor wafer backsides having light emitting devices (LEDs) thereon
11/06/2007US7291528 Method of making strained semiconductor transistors having lattice-mismatched semiconductor regions underlying source and drain regions
11/06/2007US7291527 Work function control of metals
11/06/2007US7291526 Semiconductor device and method of manufacture thereof
11/06/2007US7291525 System and method for manufacturing thin film resistors using a trench and chemical mechanical polishing
11/06/2007US7291524 Schottky-barrier mosfet manufacturing method using isotropic etch process
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