| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/11/2007 | US7307008 Methods of forming integrated circuit devices including a multi-layer poly film cell pad contact hole |
| 12/11/2007 | US7307007 Semiconductor device |
| 12/11/2007 | US7307006 Method of manufacturing semiconductor device |
| 12/11/2007 | US7307005 Wafer bonding with highly compliant plate having filler material enclosed hollow core |
| 12/11/2007 | US7307004 Method with mechanically strained silicon for enhancing speed of integrated circuits or devices |
| 12/11/2007 | US7307003 Method of forming a multi-layer semiconductor structure incorporating a processing handle member |
| 12/11/2007 | US7307002 Non-critical complementary masking method for poly-1 definition in flash memory device fabrication |
| 12/11/2007 | US7307001 Wafer repair method using direct-writing |
| 12/11/2007 | US7307000 Method of fabricating a capacitor for a semiconductor device |
| 12/11/2007 | US7306999 High voltage sensor device and method therefor |
| 12/11/2007 | US7306998 Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect |
| 12/11/2007 | US7306997 Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor |
| 12/11/2007 | US7306996 Methods of fabricating a semiconductor device having a metal gate pattern |
| 12/11/2007 | US7306995 Reduced hydrogen sidewall spacer oxide |
| 12/11/2007 | US7306994 Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof |
| 12/11/2007 | US7306993 Method for fabricating semiconductor device with recessed channel |
| 12/11/2007 | US7306992 Flash memory device and method of fabricating the same |
| 12/11/2007 | US7306991 Stepped gate configuration for non-volatile memory |
| 12/11/2007 | US7306990 Information storage element, manufacturing method thereof, and memory array |
| 12/11/2007 | US7306989 Fabricating method of semiconductor device |
| 12/11/2007 | US7306988 Memory cell and method of making the memory cell |
| 12/11/2007 | US7306987 Capacitor and method for fabricating the same |
| 12/11/2007 | US7306986 Method of making a semiconductor device, and semiconductor device made thereby |
| 12/11/2007 | US7306985 Method for manufacturing semiconductor device including heat treating with a flash lamp |
| 12/11/2007 | US7306984 Method of manufacture of a semiconductor integrated circuit device including a plurality of columnar laminates having different spacing in different directions |
| 12/11/2007 | US7306983 Method for forming dual etch stop liner and protective layer in a semiconductor device |
| 12/11/2007 | US7306982 Method of manufacturing a semiconductor device |
| 12/11/2007 | US7306981 Semiconductor manufacturing method |
| 12/11/2007 | US7306980 Method for fabricating thin film transistor |
| 12/11/2007 | US7306979 Method of fabricating thin film transistor substrate for display device |
| 12/11/2007 | US7306978 Light emitting device and method of manufacturing thereof |
| 12/11/2007 | US7306977 Method and apparatus for facilitating signal routing within a programmable logic device |
| 12/11/2007 | US7306976 Technique for enhancing thermal and mechanical characteristics of an underfill material of a substrate/die assembly |
| 12/11/2007 | US7306975 Semiconductor wafer cutting blade and method |
| 12/11/2007 | US7306974 Microelectronic devices and methods for manufacturing and operating packaged microelectronic device assemblies |
| 12/11/2007 | US7306973 Method for making a semiconductor multipackage module including a processor and memory package assemblies |
| 12/11/2007 | US7306972 Semiconductor device and manufacturing method of the same |
| 12/11/2007 | US7306971 Semiconductor chip packaging method with individually placed film adhesive pieces |
| 12/11/2007 | US7306968 Method for treating a photovoltaic active layer and organic photovoltaic element |
| 12/11/2007 | US7306967 Method of forming high temperature thermistors |
| 12/11/2007 | US7306966 Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor |
| 12/11/2007 | US7306965 Oxygen ion conductor device, method for fabricating oxygen ion conductor device, and oxygen concentration control system |
| 12/11/2007 | US7306964 Method of manufacturing a vertically-structured GaN-based light emitting diode |
| 12/11/2007 | US7306963 Precision synthesis of quantum dot nanostructures for fluorescent and optoelectronic devices |
| 12/11/2007 | US7306962 Electroformed metallization |
| 12/11/2007 | US7306961 Optical device, surface emitting type device and method for manufacturing the same |
| 12/11/2007 | US7306960 High radiance LED chip and a method for producing same |
| 12/11/2007 | US7306959 Methods of fabricating integrated optoelectronic devices |
| 12/11/2007 | US7306957 Fabrication method of semiconductor integrated circuit device |
| 12/11/2007 | US7306956 Variable temperature and dose atomic layer deposition |
| 12/11/2007 | US7306955 Method of performing a double-sided process |
| 12/11/2007 | US7306954 Process flow for building MRAM structures |
| 12/11/2007 | US7306892 Undercoating containing chromogen; covering with photoresist which forms images when exposured to radiation wavelengths |
| 12/11/2007 | US7306882 Quartz substrate with a partially dug main surface covered with a Cr film; dug portion has an undercut so that Cr film partially serves as an eaves; a subopening exposes an end of the dug portion; allows an eaves to be directly, accurately measured |
| 12/11/2007 | US7306853 Ultra-large scale integrated interconnect structures; forming via and/or line patterns in a curable caged polysilsesquioxane, curing and filling the patterns with a conductor; combines the functions of a photoresist and a conventional low-k dielectric into a single material |
| 12/11/2007 | US7306829 RF plasma reactor having a distribution chamber with at least one grid |
| 12/11/2007 | US7306747 Use of fluorinated additives in the etching or polishing of integrated circuits |
| 12/11/2007 | US7306746 Critical dimension control in a semiconductor fabrication process |
| 12/11/2007 | US7306745 Method and apparatus for stabilizing a plasma |
| 12/11/2007 | US7306742 Patterning method, patterning apparatus, patterning template, and method for manufacturing the patterning template |
| 12/11/2007 | US7306696 Interferometric endpoint determination in a substrate etching process |
| 12/11/2007 | US7306695 Apparatus and method for picking up semiconductor chip |
| 12/11/2007 | US7306685 Mounting device and method thereof |
| 12/11/2007 | US7306681 Method of cleaning a semiconductor substrate |
| 12/11/2007 | US7306680 Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus |
| 12/11/2007 | US7306675 Method for manufacturing semiconductor substrate |
| 12/11/2007 | US7306637 Chemical-mechanical polishing systems; particles are electrostatically associated with the polyelectrolyte, have a negative zeta potential, and are obtained by treating particles having a positive zeta potential with a charge-reversing agent. |
| 12/11/2007 | US7306552 Semiconductor device having load resistor and method of fabricating the same |
| 12/11/2007 | US7306510 Method of adhering polishing pads and jig for adhering the same |
| 12/11/2007 | US7306509 Processing device, processing method and method of manufacturing semiconductor device |
| 12/11/2007 | US7306508 Multi-wire saw |
| 12/11/2007 | US7306506 In-situ chemical-mechanical planarization pad metrology using ultrasonic imaging |
| 12/11/2007 | US7306423 Linear moving mechanism and transfer robot using the same |
| 12/11/2007 | US7306132 Bonding apparatus |
| 12/11/2007 | US7306114 Non-dripping nozzle apparatus |
| 12/11/2007 | US7306003 Collapsible structures |
| 12/11/2007 | US7306002 System and method for wet cleaning a semiconductor wafer |
| 12/11/2007 | US7305999 Centrifugal spray processor and retrofit kit |
| 12/11/2007 | US7305935 Slotted antenna waveguide plasma source |
| 12/11/2007 | US7305934 Plasma treatment apparatus and plasma generation method |
| 12/11/2007 | US7305761 Method for manufacturing wiring substrate |
| 12/11/2007 | US7305757 Die ejector system using linear motor |
| 12/11/2007 | CA2278308C Semiconductor diodes having low forward conduction voltage drop and low reverse current leakage |
| 12/06/2007 | WO2007140455A2 System and method for semiconductor processing |
| 12/06/2007 | WO2007140424A2 Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen |
| 12/06/2007 | WO2007140377A2 A novel deposition-plasma cure cycle process to enhance film quality of silicon dioxide |
| 12/06/2007 | WO2007140376A2 A method for depositing and curing low-k films for gapfill and conformal film applications |
| 12/06/2007 | WO2007140375A2 Methods and systems for selectively depositing si-containing films using chloropolysilanes |
| 12/06/2007 | WO2007140360A1 Dual poly deposition and through gate oxide implants |
| 12/06/2007 | WO2007140288A2 Formation of improved soi substrates using bulk semiconductor wafers |
| 12/06/2007 | WO2007140193A1 Selective tantalum carbide etchant, methods of production and uses thereof |
| 12/06/2007 | WO2007140190A1 Laser processing of workpieces containing low-k dielectric material |
| 12/06/2007 | WO2007140149A1 Ultrashort laser pulse wafer scribing |
| 12/06/2007 | WO2007140049A2 Contact surrounded by passivation and polymide and method therefor |
| 12/06/2007 | WO2007140037A2 Method of forming a semiconductor device having an interlayer and structure thereof |
| 12/06/2007 | WO2007139981A2 Linearly distributed semiconductor workpiece processing tool |
| 12/06/2007 | WO2007139896A2 Substrate processing apparatus |
| 12/06/2007 | WO2007139765A2 Semiconductor-on-diamond devices and associated methods |
| 12/06/2007 | WO2007139730A2 Semiconductor input control device |
| 12/06/2007 | WO2007139695A2 Force input control device and method of fabrication |