Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2007
12/04/2007US7303953 Production of an integrated capacitor
12/04/2007US7303952 Method for fabricating doped polysilicon lines
12/04/2007US7303951 Method of manufacturing a trench isolation region in a semiconductor device
12/04/2007US7303950 Semiconductor device, method of manufacturing same and method of designing same
12/04/2007US7303949 High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture
12/04/2007US7303948 Semiconductor device including MOSFET having band-engineered superlattice
12/04/2007US7303947 Source bridge for cooling and/or external connection
12/04/2007US7303946 Method of manufacturing a semiconductor device using an oxidation process
12/04/2007US7303945 Method for forming pattern of stacked film and thin film transistor
12/04/2007US7303944 Microelectronic devices having underfill materials with improved fluxing agents
12/04/2007US7303943 Method of manufacturing electric device
12/04/2007US7303942 Semiconductor device and method for manufacturing the same
12/04/2007US7303941 Methods and apparatus for providing a power signal to an area array package
12/04/2007US7303940 Semiconductor component having at least one organic semiconductor layer and method for fabricating the same
12/04/2007US7303939 Electro- and electroless plating of metal in the manufacture of PCRAM devices
12/04/2007US7303938 Gated isolation structure for imagers
12/04/2007US7303937 Method of manufacturing a quantum-dot element
12/04/2007US7303936 Method for forming anti-stiction bumps on a micro-electro mechanical structure
12/04/2007US7303935 High temperature microelectromechanical (MEM) devices and fabrication method
12/04/2007US7303934 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith
12/04/2007US7303933 Process of manufacturing a semiconductor device
12/04/2007US7303932 Support body for semiconductor element, method for manufacturing the same and semiconductor device
12/04/2007US7303931 Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces
12/04/2007US7303930 Method of fabricating suspended beam in a MEMS process
12/04/2007US7303929 Reloading of die carriers without removal of die carriers from sockets on test boards
12/04/2007US7303928 Process monitor and system for producing semiconductor
12/04/2007US7303927 Three-dimensional ferroelectric capacitor and method for manufacturing thereof as well as semiconductor memory device
12/04/2007US7303859 Photoresist, photolithography method using the same, and method for producing photoresist
12/04/2007US7303844 Marking system for a semiconductor wafer to identify problems in mask layers
12/04/2007US7303843 Faster wafer fabrication without wasting exposure area; simultaneous evaluation
12/04/2007US7303828 Ferroelectric film, method of manufacturing the same, ferroelectric memory and piezoelectric device
12/04/2007US7303819 Surface treatment of nanoparticles to control interfacial properties and method of manufacture
12/04/2007US7303815 Multilayer ribbon; epitaxial deposits; laser ablation
12/04/2007US7303786 Doping inert gas into the substrate to form pores; depositing a buffer layer on the substrate; depositing an amorphous silicon layer on the buffer layer; and heating the amorphous silicon layer (particularly by excimer laser annealing) convert the layer into a polysilicon layer; TFT-LCD manufacturing
12/04/2007US7303785 Antireflective film material, and antireflective film and pattern formation method using the same
12/04/2007US7303691 Polishing method for semiconductor wafer
12/04/2007US7303690 Microlens forming method
12/04/2007US7303662 Contacts for electrochemical processing
12/04/2007US7303648 Via etch process
12/04/2007US7303645 Method and system for hermetically sealing packages for optics
12/04/2007US7303639 Method for producing Z-axis interconnection assembly of printed wiring board elements
12/04/2007US7303637 Method of cleaning semiconductor surfaces
12/04/2007US7303632 Vapor assisted growth of gallium nitride
12/04/2007US7303467 Chemical mechanical polishing apparatus with rotating belt
12/04/2007US7303466 Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones
12/04/2007US7303400 Package of a semiconductor device with a flexible wiring substrate and method for the same
12/04/2007US7303383 Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
12/04/2007US7303244 Method for the printing of homogeneous electronic material with a multi-ejector print head
12/04/2007US7303243 Pattern drawing apparatus and pattern drawing method for forming patterns, that have mirror image relationship to each other with respect to a substrate, on both sides of the substrate, and test apparatus for use in the pattern drawing apparatus
12/04/2007US7303141 Gas supplying apparatus
12/04/2007US7303110 Flange-mounted transducer
12/04/2007US7303109 Stud bumping apparatus
12/04/2007US7302910 Plasma apparatus and production method thereof
11/2007
11/29/2007WO2007137097A2 Single layer carbon nanotube-based structures and methods for removing heat from solid-state devices
11/29/2007WO2007137073A2 Semiconductor device assembly with gap underfill
11/29/2007WO2007137070A2 In-line test circuit and method for determining interconnect electrical properties and integrated circuit incorporating the same
11/29/2007WO2007137058A2 Methods to reduce the minimum pitch in a pattern
11/29/2007WO2007137053A2 Food and beverage preservatives containing d-limonene
11/29/2007WO2007137049A2 Double-sided integrated circuit chips
11/29/2007WO2007137033A1 Bond termination of pores in a porous carbon dielectric material
11/29/2007WO2007136935A1 Semiconductor structure pattern formation
11/29/2007WO2007136928A2 Low profile managed memory component
11/29/2007WO2007136927A2 High density memory card system and method
11/29/2007WO2007136907A2 Compressive nitride film and method of manufacturing thereof
11/29/2007WO2007136887A2 Nanoporous carbon materials, and systems and methods utilizing same
11/29/2007WO2007136884A2 EPI T-GATE STRUCTURE FOR CoSi2 EXTENDIBILITY
11/29/2007WO2007136841A2 Digital alloys and methods for forming the same
11/29/2007WO2007136582A2 Indented structure for encapsulated devices and method of manufacture
11/29/2007WO2007136581A1 System and method for providing access to an encapsulated device
11/29/2007WO2007136519A1 Semiconductor devices including self aligned refractory contacts and methods of fabricating the same
11/29/2007WO2007136515A1 Method and apparatus for providing mask in semiconductor processing
11/29/2007WO2007136461A2 Grown nanofin transistors
11/29/2007WO2007136406A2 Composite conductors with improved structural and electrical properties
11/29/2007WO2007136350A1 Organic memory device and method of its manufacture
11/29/2007WO2007136347A1 Method and apparatus for bump inspection
11/29/2007WO2007136318A1 Method for producing photovoltaic cells and modules from silicon wafers
11/29/2007WO2007136183A1 Method of repairing a polymer mask
11/29/2007WO2007136154A1 Apparatus for eliminating molding compound of semi-conductor and electronic device
11/29/2007WO2007136102A1 Semiconductor device, integrated circuit, and semiconductor manufacturing method
11/29/2007WO2007136098A1 Coating liquid for gate insulating film, gate insulating film and organic transistor
11/29/2007WO2007136089A1 Maintenance method, exposure method and apparatus, and device manufacturing method
11/29/2007WO2007136066A1 Basal plate deformation detecting system and deformation detecting method
11/29/2007WO2007136052A1 Exposure method and apparatus, maintenance method, and device manufacturing method
11/29/2007WO2007136049A1 Method and apparatus for forming silicon oxide film
11/29/2007WO2007136043A1 Planar antenna member and plasma processing deice using same
11/29/2007WO2007136023A1 Wafer holder, method for producing the same and semiconductor production apparatus
11/29/2007WO2007136022A1 Semiconductor device and position detection system using semiconductor device
11/29/2007WO2007135998A1 Holding device and exposure device
11/29/2007WO2007135990A1 Exposure method and apparatus, maintenance method and device manufacturing method
11/29/2007WO2007135940A1 Semiconductor element and method for manufacturing same
11/29/2007WO2007135917A1 Method and apparatus for matching defect distribution pattern
11/29/2007WO2007135906A1 Method for dry-etching interlayer insulating film
11/29/2007WO2007135836A1 Positive resist composition for immersion exposure and method of forming resist pattern
11/29/2007WO2007135834A1 Substrate processing apparatus, device inspecting method, device inspecting program and recording medium having the program recorded therein
11/29/2007WO2007135832A1 Superconducting thin film material and method for producing the same
11/29/2007WO2007135810A1 Optical semiconductor device and method for manufacturing same
11/29/2007WO2007135809A1 Optical semiconductor device and method for manufacturing same
11/29/2007WO2007135794A1 Slurry for chemical mechanical polishing, method of chemical mechanical polishing and process for manufacturing electronic device
11/29/2007WO2007135792A1 Display panel drive circuit and display device
11/29/2007WO2007135710A1 Electronic component testing apparatus
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