Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2007
12/25/2007US7313509 Simulation method and apparatus, and computer-readable storage medium
12/25/2007US7313456 Method and apparatus for capturing and using design intent in an integrated circuit fabrication process
12/25/2007US7313452 Substrate transfer controlling apparatus and substrate transferring method
12/25/2007US7313451 Plasma processing method, detecting method of completion of seasoning, plasma processing apparatus and storage medium
12/25/2007US7313262 Apparatus for visualization of process chamber conditions
12/25/2007US7313042 Thin film magnetic memory device having an improved read operation margin
12/25/2007US7313017 Thin film magnetic memory device conducting read operation by a self-reference method
12/25/2007US7313014 Thin film magnetic memory device and semiconductor integrated circuit device including the same as one of circuit blocks
12/25/2007US7313009 Pattern layout of word line transfer transistors in NAND flash memory which executes subblock erase
12/25/2007US7312974 Electrostatic chuck
12/25/2007US7312873 Alignment method and parameter selection method
12/25/2007US7312860 Test pattern, inspection method, and device manufacturing method
12/25/2007US7312850 Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution
12/25/2007US7312849 Substrate alignment apparatus and method, and exposure apparatus
12/25/2007US7312848 Positioning apparatus, exposure apparatus, and device manufacturing method
12/25/2007US7312847 Refractive projection objective for immersion lithography
12/25/2007US7312846 Lithographic apparatus and device manufacturing method
12/25/2007US7312677 Micro-switching element fabrication method and micro-switching element
12/25/2007US7312649 Voltage booster power supply circuit
12/25/2007US7312584 Plasma-generation power-supply device
12/25/2007US7312572 EL display device, driving method thereof, and electronic equipment provided with the EL display device
12/25/2007US7312541 Actuator and bonding apparatus
12/25/2007US7312535 Semiconductor device having an anti-oxidizing layer that inhibits corrosion of an interconnect layer
12/25/2007US7312534 Interlayer dielectric and pre-applied die attach adhesive materials
12/25/2007US7312533 Electronic component with flexible contacting pads and method for producing the electronic component
12/25/2007US7312532 Dual damascene interconnect structure with improved electro migration lifetimes
12/25/2007US7312531 A wiring layer: a catalyst layer of Cobalt and Tungsten, Phosphorus, Boron, Bismuth, or Nickel, overlying a substrate; a dielectric layer overlying the catalyst layer with openings exposing parts of the catalyst, carbon nanotubes on the exposed catalyst layer
12/25/2007US7312530 Semiconductor device with multilayered metal pattern
12/25/2007US7312526 Semiconductor device and method of manufacturing thereof
12/25/2007US7312524 Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made
12/25/2007US7312522 Mounting member of semiconductor device, mounting configuration of semiconductor device, and drive unit of semiconductor device
12/25/2007US7312517 System-in-package type semiconductor device
12/25/2007US7312516 Chip scale package with heat spreader
12/25/2007US7312515 Semiconductor apparatus including a thin-metal-film resistor element and a method of manufacturing the same
12/25/2007US7312514 High-permittivity insulation film, thin film capacity element, thin film multilayer capacitor, and production method of thin film capacity element
12/25/2007US7312509 Digital temperature sensing device using temperature depending characteristic of contact resistance
12/25/2007US7312508 Optical element, and its manufacturing method
12/25/2007US7312505 Semiconductor substrate with interconnections and embedded circuit elements
12/25/2007US7312504 Transistor for memory device and method for manufacturing the same
12/25/2007US7312503 Semiconductor memory device including MOS transistors each having a floating gate and a control gate
12/25/2007US7312502 Multiple dielectric FinFET structure and method
12/25/2007US7312499 Semiconductor storage device and manufacturing method therefor, semiconductor device, portable electronic equipment and IC card
12/25/2007US7312498 Nonvolatile semiconductor memory cell and method of manufacturing the same
12/25/2007US7312497 Fabrication of conductive lines interconnecting first conductive gates in nonvolatile memories having second conductive gates provided by conductive gate lines, wherein the adjacent conductive gate lines for the adjacent columns are spaced from each other, and non-volatile memory structures
12/25/2007US7312496 Semiconductor device including transistor with composite gate structure and transistor with single gate structure, and method for manufacturing the same
12/25/2007US7312494 Lanthanide oxide / hafnium oxide dielectric layers
12/25/2007US7312492 Method for fabricating a DRAM memory cell arrangement having fin field effect transistors and DRAM memory cell
12/25/2007US7312489 Memory cell having bar-shaped storage node contact plugs and methods of fabricating same
12/25/2007US7312485 CMOS fabrication process utilizing special transistor orientation
12/25/2007US7312483 Thin film transistor device and method of manufacturing the same
12/25/2007US7312482 Semiconductor device, power amplifier device and PC card
12/25/2007US7312480 Semiconductor device and method of fabricating the same
12/25/2007US7312473 Display device and electronic device using the same
12/25/2007US7312472 Compound semiconductor element based on Group III element nitride
12/25/2007US7312471 Liquid crystal display device having drive circuit and fabricating method thereof
12/25/2007US7312470 Thin film transistor array panel and method for fabricating the same
12/25/2007US7312464 Ion implantation apparatus
12/25/2007US7312462 Illumination system having a nested collector for annular illumination of an exit pupil
12/25/2007US7312459 Apparatus for evaluating EUV light source, and evaluation method using the same
12/25/2007US7312447 Electron beam depicting method, mother die manufacturing method, mother die, metallic mold manufacturing method, metallic mold and optical element
12/25/2007US7312440 Integrated micro fuel processor and flow delivery infrastructure
12/25/2007US7312418 Semiconductor thin film forming system
12/25/2007US7312415 Plasma method with high input power
12/25/2007US7312287 copolymer of ethylenically unsaturated monomer having one or more fluorine group and a polycyclic unsaturated monomer having one or more ester groups
12/25/2007US7312186 Cleaning solution for semiconductor substrate
12/25/2007US7312165 Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices
12/25/2007US7312164 Selective passivation of exposed silicon
12/25/2007US7312163 Atomic layer deposition methods, and methods of forming materials over semiconductor substrates
12/25/2007US7312162 Low temperature plasma deposition process for carbon layer deposition
12/25/2007US7312160 Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device
12/25/2007US7312159 Compositions for dissolution of low-k dielectric films, and methods of use
12/25/2007US7312157 Methods and apparatus for cleaning semiconductor devices
12/25/2007US7312156 Method and apparatus for supporting a semiconductor wafer during processing
12/25/2007US7312155 Forming self-aligned nano-electrodes
12/25/2007US7312154 Method of polishing a semiconductor-on-insulator structure
12/25/2007US7312153 Treatment of semiconductor wafers
12/25/2007US7312152 Lactate-containing corrosion inhibitor
12/25/2007US7312151 System for ultraviolet atmospheric seed layer remediation
12/25/2007US7312150 Method of forming cobalt disilicide layer and method of manufacturing semiconductor device using the same
12/25/2007US7312149 Copper plating of semiconductor devices using single intermediate low power immersion step
12/25/2007US7312148 Copper barrier reflow process employing high speed optical annealing
12/25/2007US7312147 Method of forming barrier metal in semiconductor device
12/25/2007US7312146 Semiconductor device interconnect fabricating techniques
12/25/2007US7312145 Electronic member, method for making the same, and semiconductor device
12/25/2007US7312144 Unitary interconnection structures integral with a dielectric layer and fabrication methods thereof
12/25/2007US7312142 Method for making cable with a conductive bump array, and method for connecting the cable to a task object
12/25/2007US7312141 Shapes-based migration of aluminum designs to copper damascene
12/25/2007US7312140 Film forming method
12/25/2007US7312139 Method of fabricating nitrogen-containing gate dielectric layer and semiconductor device
12/25/2007US7312138 Semiconductor device and method of manufacture thereof
12/25/2007US7312137 Transistor with shallow germanium implantation region in channel
12/25/2007US7312136 Method of fabricating a wafer with strained channel layers for increased electron and hole mobility for improving device performance
12/25/2007US7312135 Laser processing apparatus
12/25/2007US7312134 Dual stressed SOI substrates
12/25/2007US7312133 Method of manufacturing semiconductor device
12/25/2007US7312132 Field insulator FET device and fabrication method thereof
12/25/2007US7312131 Method for forming multilayer electrode capacitor
12/25/2007US7312130 Methods of forming capacitor structures including L-shaped cavities
12/25/2007US7312129 Method for producing two gates controlling the same channel
12/25/2007US7312128 Selective epitaxy process with alternating gas supply
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