Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2008
01/23/2008CN101110347A Double offset frequency plasma body reactor with electrostatic chuck voltage feedback control
01/23/2008CN101110346A Array type electron beam etching device and etching method
01/23/2008CN101110345A Nitrogen protecting cover
01/23/2008CN101110334A Beam stop for an ion implanter
01/23/2008CN101109932A Integrated transportation control for wafer fabrication facility
01/23/2008CN101109910A Inspection method and apparatus, lithographic apparatus, lithographic process line and device manufacturing method
01/23/2008CN101109908A Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor
01/23/2008CN101109907A Photo-etching machine projecting objective coma aberration original position detecting system and method thereof
01/23/2008CN101109905A Electron beam etching device and method thereof
01/23/2008CN101109897A A mask pattern of a semiconductor device and a method for forming the same
01/23/2008CN101109882A Pixel structure and its manufacturing method
01/23/2008CN101109783A Electrical parameter testing circuit for light emitting diode
01/23/2008CN101109768A Improved structure of modularized elastic probe
01/23/2008CN101109767A Improved structure of two sheet type modularized elastic probe
01/23/2008CN101109766A Fixing mechanism of probe card, fixing method of probe card and probe card
01/23/2008CN101109725A Surface-sensitive condenser type gas transducer and manufacturing method thereof
01/23/2008CN101109711A Apparatus and method for inspecting a pattern and method for manufacturing a semiconductor device
01/23/2008CN101109628A Method for measuring thin layers in solid state devices
01/23/2008CN101109450A Vacuum valve and closure disc which can be mounted on a connecting rod
01/23/2008CN101109077A Method of plasma chemistry vapor depositing fluoridation amorphous carbon membrane and membrane layer structure thereof
01/23/2008CN101109065A Method for manufacturing condensed nucleus aromatic organic semiconductor monocrystal nanostructure jointed to substrate
01/23/2008CN101108720A Micro electro mechanical device and manufacturing method thereof
01/23/2008CN101108692A Reserving frame and reserving method
01/23/2008CN101108471A Method monitoring termination detecting state
01/23/2008CN100364140C Precision mask for film forming and its manufacturing method, electroluminescence device and manufacturing method
01/23/2008CN100364125C Light emitting nitride semiconductor device and method of fabricating the same
01/23/2008CN100364118C Light emitting device and method for manufacturing the same
01/23/2008CN100364115C Photoconductive thin film, and photovoltaic device making use of the same
01/23/2008CN100364114C Surface mountable optocoupler package
01/23/2008CN100364113C Semiconductor device
01/23/2008CN100364111C Gunn diode, non-radiation medium wave guide gunn oscillator and its producing method and mounting structure thereof
01/23/2008CN100364109C Field effect transistor and method of manufacturing the same
01/23/2008CN100364108C Sandwith FET containing organic semiconductor and its preparing process
01/23/2008CN100364106C Information processing structure
01/23/2008CN100364105C Active matrix organic electroluminescence device and its simplified manufacture process
01/23/2008CN100364103C Image sensor having holes and method for manufacturing same
01/23/2008CN100364102C Image sensor with light guides and manufacturing method thereof
01/23/2008CN100364101C Image inductor packaging structure and mfg. method thereof
01/23/2008CN100364098C Multi-level memory cell with lateral floating spacers
01/23/2008CN100364096C Semiconductor memory device having pick-up structure
01/23/2008CN100364095C CMOS device, method for fabricating the same and method for generating mask data
01/23/2008CN100364094C Chip integrated by FinFET circuit and nano electromechanical beam and preparing method
01/23/2008CN100364092C Semiconductor device and its producing method
01/23/2008CN100364091C Semiconductor device and its producing method
01/23/2008CN100364090C Light-thin laminated packaged semiconductor device and manufacturing process thereof
01/23/2008CN100364087C Semiconductor device and its mfg. method, circuidboard, electronic device and apparatus for mfg. semiconductor device
01/23/2008CN100364086C Semiconductor device and electronic device, and methods for manufacturing thereof
01/23/2008CN100364076C Bridging chip package structure
01/23/2008CN100364075C Variable electrical risistance device, producing method of variable resistance memory and memory
01/23/2008CN100364074C Method of making a low profile highly-packaged semiconductor device
01/23/2008CN100364073C Welding pad layout method and structure
01/23/2008CN100364072C Motor drive device with power semiconductor module life testing function
01/23/2008CN100364071C Method of preparing electron packaging material using powder injection shaping/pressure fusion dipping method
01/23/2008CN100364070C Semiconductor device and method of making the same
01/23/2008CN100364069C Packaging annealing method based on gallium nitride material
01/23/2008CN100364068C Salicide formation method
01/23/2008CN100364067C Method for forming metal oxide-film
01/23/2008CN100364066C Ono interpoly dielectric for flash memory cells and method for fabricating the same
01/23/2008CN100364065C Strong electrolyte film and its manufacturing method, strong electrolyte capacitor, strong electrolyte memory
01/23/2008CN100364064C Focusing ring and plasma treater
01/23/2008CN100364063C Chemical battery with porous indium phosphide, electrochemical corrosive system and method
01/23/2008CN100364062C Device for two-sided lapping wafer type workpiece simultaneously
01/23/2008CN100364061C Removing agent composition and removing/cleaning method using same
01/23/2008CN100364060C Cleaning method of semiconductor component
01/23/2008CN100364059C Etching method, a method of forming a trench isolation structure, a semiconductor substrate and a semiconductor apparatus
01/23/2008CN100364058C Field effect transistor with electroplated metal gate and method for making said metal gate
01/23/2008CN100364057C Method and system for metal barrier and crystal seed integration
01/23/2008CN100364056C Method for fabricating semiconductor integrated circuit device
01/23/2008CN100364055C Method for implanting a cell channel ion of semiconductor device
01/23/2008CN100364054C 等离子体掺杂方法及等离子体掺杂装置 Plasma doping method and plasma doping device
01/23/2008CN100364053C Method of polycyrstallization, method of manufacturing polysilicon thin film transistor, and laser irradiation device therefor
01/23/2008CN100364052C Formation of lattice-tuning semiconductor substrates
01/23/2008CN100364051C Pendeoepitaxial growth of gallium nitride layers on sapphire substrates
01/23/2008CN100364050C Method for preapring nano size pit on gallium arsenide substrate
01/23/2008CN100364049C Electron beam drawing system, method and program, and method for manufacture of semiconductors by drawing directly
01/23/2008CN100364048C Manufacturing method of metal/insulation layer/metal structure
01/23/2008CN100364047C Substrate treating apparatus
01/23/2008CN100364046C Treating apparatus and method of treating
01/23/2008CN100364045C Semiconductor device manufacturing method
01/23/2008CN100364044C Semiconductor device and manufacturing method thereof, electro-optical device and manufacturing method thereof, and electronic apparatus
01/23/2008CN100364043C Semiconductor device, electrical inspection method thereof, and electronic apparatus including the semiconductor device
01/23/2008CN100364042C Method of manufacturing substrate joint body, substrate joint body and electrooptical device
01/23/2008CN100364041C Wafer inspection device
01/23/2008CN100364040C Device and method for thermal treatment
01/23/2008CN100364039C Vacuum processing device and substrate delievering method
01/23/2008CN100364038C Apparatus and method for reducing stray light in substrate processing chambers
01/23/2008CN100364037C Semiconductor device, annedling method, annealing device and display device
01/23/2008CN100364035C Procedure and device for the production of a plasma
01/23/2008CN100363838C Structure and method of correcting proximity effects in a tri-tone attenuated phase-shifting mask
01/23/2008CN100363830C Tft LCD, laminated capacitor and forming method thereof
01/23/2008CN100363828C Picture element structure and manufacturing method and storage capacitance structure therefor
01/23/2008CN100363805C Substrate for electro-optic device and the manufacturing method thereof, electro-optic device and electronic machine
01/23/2008CN100363795C Method for forming pattern using printing method
01/23/2008CN100363749C Scanning device of boundary
01/23/2008CN100363618C Vacuum exhaust system and monitoring and controlling method thereof
01/23/2008CN100363536C Deposition methods utilizing phased array microwave excitation, and deposition apparatuses
01/23/2008CN100363534C In situ getter pump system and method
01/23/2008CN100363369C Laminated organic-inorganic perofskite with metal defect inorganic frame
01/23/2008CN100363243C Reduced movement wafer box
01/23/2008CN100363152C False making process and grinding pad regulating method for chemomechanical grinding process