Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2008
01/15/2008US7319065 Semiconductor component and method of manufacture
01/15/2008US7319064 Nitride based semiconductor device and process for preparing the same
01/15/2008US7319063 Fin field effect transistor and method for manufacturing fin field effect transistor
01/15/2008US7319062 Trench isolation method with an epitaxially grown capping layer
01/15/2008US7319061 Method for fabricating electronic device
01/15/2008US7319060 Semiconductor device and method of manufacturing the semiconductor device
01/15/2008US7319059 High density FET with self-aligned source atop the trench
01/15/2008US7319058 Fabrication method of a non-volatile memory
01/15/2008US7319057 Phase change material memory device
01/15/2008US7319056 Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification
01/15/2008US7319055 Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam
01/15/2008US7319054 Method of fabricating liquid crystal display device
01/15/2008US7319053 Vertically stacked field programmable nonvolatile memory and method of fabrication
01/15/2008US7319052 Alloying method, and wiring forming method, display device forming method, and image display unit fabricating method
01/15/2008US7319051 Thermally enhanced metal capped BGA package
01/15/2008US7319050 Wafer level chip scale packaging structure and method of fabricating the same
01/15/2008US7319049 Method of manufacturing an electronic parts packaging structure
01/15/2008US7319048 Electronic assemblies having a low processing temperature
01/15/2008US7319047 Thermo-optical device
01/15/2008US7319046 Integrated optoelectronic silicon biosensor for the detection of biomolecules labeled with chromophore groups or nanoparticles
01/15/2008US7319045 Gallium-nitride based light emitting diode structure and fabrication thereof
01/15/2008US7319044 Nitride semiconductor light emitting device and method for manufacturing the same
01/15/2008US7319043 Method and system of trace pull test
01/15/2008US7319042 Method and apparatus for manufacture and inspection of semiconductor device
01/15/2008US7318997 Forming fine patterns of a semiconductor using an electric field to infiltrate an acid produced when a photoresist film is exposed into non-exposure regions
01/15/2008US7318993 Doping selected regions of a semiconductor mask layer formed on a carrier with a hard mask layer with a selective ion implantation (direct lithographic writing); wet chemical removal of a doped region to form a semiconductor mask; patterning the carrier using the mask (anisotropic etch); high precision
01/15/2008US7318879 Apparatus to manufacture semiconductor
01/15/2008US7318870 Method of cleaning semiconductor substrate
01/15/2008US7318869 Variable gas conductance control for a process chamber
01/15/2008US7318866 Systems and methods for inducing crystallization of thin films using multiple optical paths
01/15/2008US7318865 Crystallization apparatus and method; manufacturing method of electronic device, electronic device, and optical modulation element
01/15/2008US7318844 Laser-irradiated metallized electroceramic
01/15/2008US7318729 Sheet-form connector and production method and application therefor
01/15/2008US7318697 Universal reticle transfer system
01/15/2008US7318653 Multiple function wall cover plate
01/15/2008US7318517 Process system and device for transporting substrates
01/15/2008US7318337 Method and apparatus for measuring frequency characteristics of acceleration sensor
01/15/2008CA2350705C Non-contact data carrier and ic chip
01/15/2008CA2350653C Process for electrostatic stabilization and device for implementing the said process
01/15/2008CA2320798C Advanced active devices and methods for molecular biological analysis and diagnostics
01/15/2008CA2238754C Method of mounting a chip on a flexible foil substrate for positioning on a capsule
01/10/2008WO2008006060A1 Electrical insulation of devices with thin layers
01/10/2008WO2008005979A1 Method of temporarily attaching a rigid carrier to a substrate
01/10/2008WO2008005916A2 Method for making planar nanowire surround gate mosfet
01/10/2008WO2008005773A2 Cluster tool for advanced front-end processing
01/10/2008WO2008005716A2 Wafer platform
01/10/2008WO2008005682A1 Attachment for socket and semiconductor device-testing unit having the same
01/10/2008WO2008005630A2 Methods for minimizing mask undercuts and notches for plasma processing system
01/10/2008WO2008005614A2 Chip module for complete power train
01/10/2008WO2008005521A1 Wafer processing apparatus and method
01/10/2008WO2008005517A1 Processing chamber having labyrinth seal
01/10/2008WO2008005399A1 Applications of smart polymer composites to integrated circuit packaging
01/10/2008WO2008005164A1 Silicon oxide polishing method utilizing colloidal silica
01/10/2008WO2008005092A2 Silicon carbide switching devices including p-type channels and methods of forming the same
01/10/2008WO2008005087A2 A nano imprint technique with increased flexibility with respect to alignment and feature shaping
01/10/2008WO2008005083A1 Providing stress uniformity in a semiconductor device
01/10/2008WO2008005026A1 Method and apparatus for improving integrate circuit device performance using hydrid crystal orientations
01/10/2008WO2008004792A1 Multiple nozzle evaporator for vacuum thermal evaporation
01/10/2008WO2008004778A1 Pick-and-place apparatus
01/10/2008WO2008004777A1 Nanodevice structure and fabricating method thereof
01/10/2008WO2008004664A1 Micro actuator, optical unit, exposure device, and device manufacturing method
01/10/2008WO2008004657A1 p-TYPE ZINC OXIDE THIN FILM AND METHOD FOR FORMING THE SAME
01/10/2008WO2008004654A1 Illuminating optical apparatus, exposure apparatus and device manufacturing method
01/10/2008WO2008004591A1 Method for producing bonded wafer
01/10/2008WO2008004584A1 Aftertreatment method for amorphous carbon film
01/10/2008WO2008004581A1 Annealing apparatus and annealing method
01/10/2008WO2008004579A1 Polishing liquid for cmp and polishing method
01/10/2008WO2008004571A1 Ferroelectric thin film forming method and ferroelectric memory
01/10/2008WO2008004555A1 Surface inspection device
01/10/2008WO2008004534A1 Polishing liquid for cmp
01/10/2008WO2008004528A1 Plasma abnormal discharge diagnosis method, plasma abnormal discharge diagnosis system, and computer program
01/10/2008WO2008004513A1 Precision processing method and precision processing apparatus
01/10/2008WO2008004501A1 Gas supply unit
01/10/2008WO2008004424A1 PROCESS FOR PRODUCING SUBSTRATE OF AlN CRYSTAL, METHOD OF GROWING AlN CRYSTAL, AND SUBSTRATE OF AlN CRYSTAL
01/10/2008WO2008004414A1 Semiconductor device having defect detecting function
01/10/2008WO2008004405A1 ZnO-BASED SEMICONDUCTOR ELEMENT
01/10/2008WO2008004395A1 Laser processing method
01/10/2008WO2008004394A1 Laser working method
01/10/2008WO2008004379A1 Silicon wafer manufacturing method
01/10/2008WO2008004365A1 Dicing apparatus and dicing method
01/10/2008WO2008004352A1 Liquid ejection method and apparatus for temperature control unit
01/10/2008WO2008004346A1 Method and device for designing semiconductor integrated circuit hierarchy
01/10/2008WO2008004320A1 Silicon wafer polishing composition and method of polishing silicon wafer
01/10/2008WO2008004297A1 Semiconductor device comprising capacitor and method for manufacturing same
01/10/2008WO2008004270A1 Method of pickup and pickup apparatus
01/10/2008WO2008003374A1 Method and device for machining workpieces
01/10/2008WO2008003308A1 Method for attaching electronic components to a support by means of pressure sintering and circuit arrangement
01/10/2008WO2008003167A1 Lighting device package
01/10/2008WO2007136907A3 Compressive nitride film and method of manufacturing thereof
01/10/2008WO2007133440A3 Recessed workfunction metal in cmos transistor gates
01/10/2008WO2007131040A3 Method and apparatus for photo-excitation of chemicals for atomic layer deposition of dielectric film
01/10/2008WO2007129261A3 Trench field effect transistors
01/10/2008WO2007125510A3 Electric device comprising an improved electrode with a pillar having protrusions or scores for enhanced stability
01/10/2008WO2007122561A3 Adjustible resistor for use in a resistive divider circuit and method for manufacturing
01/10/2008WO2007118026A3 Step coverage and pattern loading for dielectric films
01/10/2008WO2007117989A3 Method of forming mixed rare earth oxynitride and aluminum oxynitride films by atomic layer deposition
01/10/2008WO2007112180A3 Semiconductor processing system with wireless sensor network monitoring system incorporated therewith
01/10/2008WO2007110515A3 Method of detaching a thin film by melting precipitates
01/10/2008WO2007101207A3 Process chambers for substrate vacuum processing tool
01/10/2008WO2007093290A3 Method for producing a layer on a moulding and use thereof