| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/29/2008 | US7323729 Methods for improving quality of high temperature oxide (HTO) formed from halogen-containing precursor and products thereof and apparatus therefor |
| 01/29/2008 | US7323727 System with meshed power and signal buses on cell array |
| 01/29/2008 | US7323724 Nitride semiconductor device |
| 01/29/2008 | US7323719 Group III-V nitride series semiconductor substrate and assessment method therefor |
| 01/29/2008 | US7323717 Semiconductor device |
| 01/29/2008 | US7323716 Manufacturing method of thin film transistor substrate |
| 01/29/2008 | US7323715 Semiconductor device and manufacturing method thereof |
| 01/29/2008 | US7323712 Anisotropically conductive connector and production process thereof, and probe member |
| 01/29/2008 | US7323710 Fin field effect transistors having multi-layer fin patterns |
| 01/29/2008 | US7323700 Method and system for controlling beam scanning in an ion implantation device |
| 01/29/2008 | US7323695 Reciprocating drive for scanning a workpiece |
| 01/29/2008 | US7323685 Ion beam processing method |
| 01/29/2008 | US7323684 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 01/29/2008 | US7323661 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer |
| 01/29/2008 | US7323522 Curing agents; curable, colorless; radiation transparent; discoloration inhibition |
| 01/29/2008 | US7323426 High strain point glasses |
| 01/29/2008 | US7323424 Semiconductor constructions comprising cerium oxide and titanium oxide |
| 01/29/2008 | US7323423 Forming high-k dielectric layers on smooth substrates |
| 01/29/2008 | US7323422 Dielectric layers and methods of forming the same |
| 01/29/2008 | US7323421 Silicon wafer etching process and composition |
| 01/29/2008 | US7323420 Method for manufacturing multi-thickness gate dielectric layer of semiconductor device |
| 01/29/2008 | US7323418 Etch-back process for capping a polymer memory device |
| 01/29/2008 | US7323417 Method of forming a recessed structure employing a reverse tone process |
| 01/29/2008 | US7323416 Method and composition for polishing a substrate |
| 01/29/2008 | US7323415 Polishing pad for semiconductor wafer, polishing multilayered body for semiconductor wafer having same, and method for polishing semiconductor wafer |
| 01/29/2008 | US7323414 Method for polishing a substrate surface |
| 01/29/2008 | US7323413 Method for stripping silicon nitride |
| 01/29/2008 | US7323412 Atomic layer deposition methods, and methods of forming materials over semiconductor substrates |
| 01/29/2008 | US7323411 Method of selective tungsten deposition on a silicon surface |
| 01/29/2008 | US7323410 Dry etchback of interconnect contacts |
| 01/29/2008 | US7323409 Method for forming a void free via |
| 01/29/2008 | US7323408 Metal barrier cap fabrication by polymer lift-off |
| 01/29/2008 | US7323407 Method of fabricating dual damascene interconnections of microelectronic device using diffusion barrier layer against base material |
| 01/29/2008 | US7323406 Elevated bond-pad structure for high-density flip-clip packaging and a method of fabricating the structures |
| 01/29/2008 | US7323405 Fine pitch low cost flip chip substrate |
| 01/29/2008 | US7323404 Field effect transistor and method of manufacturing the same |
| 01/29/2008 | US7323403 Multi-step process for patterning a metal gate electrode |
| 01/29/2008 | US7323402 Trench Schottky barrier diode with differential oxide thickness |
| 01/29/2008 | US7323401 Semiconductor substrate process using a low temperature deposited carbon-containing hard mask |
| 01/29/2008 | US7323399 Clean process for an electron beam source |
| 01/29/2008 | US7323398 Method of layer transfer comprising sequential implantations of atomic species |
| 01/29/2008 | US7323397 Method and apparatus of fabricating a semiconductor device by back grinding and dicing |
| 01/29/2008 | US7323396 Signal and/or ground planes with double buried insulator layers and fabrication process |
| 01/29/2008 | US7323395 Manufacture of solid state electronic components |
| 01/29/2008 | US7323394 Method of producing element separation structure |
| 01/29/2008 | US7323393 Method of reducing film stress on overlay mark |
| 01/29/2008 | US7323392 High performance transistor with a highly stressed channel |
| 01/29/2008 | US7323391 Substrate having silicon germanium material and stressed silicon nitride layer |
| 01/29/2008 | US7323390 Semiconductor device and method for production thereof |
| 01/29/2008 | US7323389 Method of forming a FINFET structure |
| 01/29/2008 | US7323388 SONOS memory cells and arrays and method of forming the same |
| 01/29/2008 | US7323387 Method to make nano structure below 25 nanometer with high uniformity on large scale |
| 01/29/2008 | US7323386 Method of fabricating semiconductor device containing dielectrically isolated PN junction for enhanced breakdown characteristics |
| 01/29/2008 | US7323385 Method of fabricating flash memory device |
| 01/29/2008 | US7323384 Method of manufacturing semiconductor device |
| 01/29/2008 | US7323383 Method for fabricating an NROM memory cell arrangement |
| 01/29/2008 | US7323382 Intralevel decoupling capacitor, method of manufacture and testing circuit of the same |
| 01/29/2008 | US7323381 Semiconductor device and manufacturing method thereof |
| 01/29/2008 | US7323380 Single transistor vertical memory gain cell |
| 01/29/2008 | US7323379 Fabrication process for increased capacitance in an embedded DRAM memory |
| 01/29/2008 | US7323378 Method for fabricating CMOS image sensor |
| 01/29/2008 | US7323377 Increasing self-aligned contact areas in integrated circuits using a disposable spacer |
| 01/29/2008 | US7323376 Method for fabricating a semiconductor device including a group III nitride semiconductor |
| 01/29/2008 | US7323375 Fin field effect transistor device and method of fabricating the same |
| 01/29/2008 | US7323374 Dense chevron finFET and method of manufacturing same |
| 01/29/2008 | US7323373 Method of forming a semiconductor device with decreased undercutting of semiconductor material |
| 01/29/2008 | US7323372 Method and process intermediate for electrostatic discharge protection in flat panel imaging detectors |
| 01/29/2008 | US7323371 Deposition method of insulating layers having low dielectric constant of semiconductor device, a thin film transistor substrate using the same and a method of manufacturing the same |
| 01/29/2008 | US7323370 SOI device with reduced junction capacitance |
| 01/29/2008 | US7323369 Fabrication method for thin film transistor array substrate |
| 01/29/2008 | US7323368 Method for manufacturing semiconductor device and heat treatment method |
| 01/29/2008 | US7323367 Diagonal deep well region for routing body-bias voltage for MOSFETS in surface well regions |
| 01/29/2008 | US7323366 Manufacturing method of a semiconductor device |
| 01/29/2008 | US7323365 Semiconductor device manufacturing method and manufacturing apparatus |
| 01/29/2008 | US7323364 Stacked module systems and method |
| 01/29/2008 | US7323363 Contact load profile modification for a compression socketed CPU |
| 01/29/2008 | US7323362 Manufacturing system and apparatus for balanced product flow with application to low-stress underfilling of flip-chip electronic devices |
| 01/29/2008 | US7323361 Packaging system for semiconductor devices |
| 01/29/2008 | US7323360 Electronic assemblies with filled no-flow underfill |
| 01/29/2008 | US7323359 Mounting method for a semiconductor component |
| 01/29/2008 | US7323358 Method and system for sizing a load plate |
| 01/29/2008 | US7323357 Method for manufacturing a resistively switching memory cell and memory device based thereon |
| 01/29/2008 | US7323356 Growing a base thin film on a single-crystal substrate; depositing amorphous or polycrystalline LnCuOX thin film to form laminate; and annealing film at 500 degrees C. or more in a vacuum environment; light-emitting diodes, semiconductor leasers, filed-effect transistors, hetero-bipolar transistors |
| 01/29/2008 | US7323355 Method of forming a microelectronic device |
| 01/29/2008 | US7323354 Method of manufacturing MEMS device |
| 01/29/2008 | US7323353 Resonator for thermo optic device |
| 01/29/2008 | US7323352 Process for making light waveguide element |
| 01/29/2008 | US7323351 Thin film transistor device and method of manufacturing the same |
| 01/29/2008 | US7323350 Method of fabricating thin film calibration features for electron/ion beam image based metrology |
| 01/29/2008 | US7323349 Self-aligned cross point resistor memory array |
| 01/29/2008 | US7323348 Superconducting integrated circuit and method for fabrication thereof |
| 01/29/2008 | US7323292 Coating substrates with polysilanes, then exposing to radiation and etching to form patterns used for masking; electrical and electronic apparatus such as random access or flash memory |
| 01/29/2008 | US7323291 Dual layer workpiece masking and manufacturing process |
| 01/29/2008 | US7323287 Positive type resist composition and resist pattern formation method using same |
| 01/29/2008 | US7323286 Exposure latitude and line-edge roughness |
| 01/29/2008 | US7323284 Useful as chemically amplified photoresist suitable for lithography making use of ultraviolet radiation, x-rays, or charged corpuscular beams; integrated circuits; semiconductors |
| 01/29/2008 | US7323277 Photomask |
| 01/29/2008 | US7323276 Substrate for photomask, photomask blank and photomask |
| 01/29/2008 | US7323257 Complex oxide having an oxygen octahedral structure containing Si and Ge formed by post-annealing the components in a pressurized atmosphere including oxygen or ozone; dielectric capacitors |
| 01/29/2008 | US7323256 Uncut single crystal III-V nitride (optionally doped) having a large area of at least 15 cm2 on a face and a uniformly low dislocation density not exceeding 3x106 dislocations per cm2 of growth surface area on the face; wafers for microelectronic and opto-electronic devices |