| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/05/2008 | US7326599 Gate material for semiconductor device fabrication |
| 02/05/2008 | US7326598 Method of fabricating polycrystalline silicon |
| 02/05/2008 | US7326597 Gettering using voids formed by surface transformation |
| 02/05/2008 | US7326596 High voltage power device with low diffusion pipe resistance |
| 02/05/2008 | US7326595 Semiconductor integrated circuit and method of redesigning same |
| 02/05/2008 | US7326594 Connecting a plurality of bond pads and/or inner leads with a single bond wire |
| 02/05/2008 | US7326593 Method of producing a package for semiconductor chips |
| 02/05/2008 | US7326592 Stacked die package |
| 02/05/2008 | US7326591 Interconnecting substrates for microelectronic dies, methods for forming vias in such substrates, and methods for packaging microelectronic devices |
| 02/05/2008 | US7326590 Method for manufacturing ball grid array package |
| 02/05/2008 | US7326589 Method for producing a TFA image sensor and one such TFA image sensor |
| 02/05/2008 | US7326588 Image sensor with light guides |
| 02/05/2008 | US7326587 Semiconductor memory device having capacitor and method of forming the same |
| 02/05/2008 | US7326586 Method for manufacturing semiconductor physical quantity sensor |
| 02/05/2008 | US7326585 Forming process of thin film pattern and manufacturing process of device, electro-optical apparatus and electronic apparatus |
| 02/05/2008 | US7326583 Methods for packaging of a semiconductor light emitting device |
| 02/05/2008 | US7326582 Optical isolator device, and method of making same |
| 02/05/2008 | US7326581 System, method and apparatus for automatic control of an RF generator for maximum efficiency |
| 02/05/2008 | US7326580 Method of observing monolayer ultraviolet decomposition process, method of controlling degree of surface decomposition, and patterning method |
| 02/05/2008 | US7326516 Coating photoresist containing a polydihydroxyadamantyl (meth)acrylate resin, a photoacid generator; and a mixed solvent of an alkylene glycol alkyl ether carboxylate and a propylene glycol monomethyl ether; improved wear resistance, depth of focus and profile properties |
| 02/05/2008 | US7326515 Mixture of acid generator and unsaturated acrylated ester nonmer; surface and edge smoothness |
| 02/05/2008 | US7326513 Positive working resist composition |
| 02/05/2008 | US7326512 A monomeric unit having an alicyclic group at a side chain, alicyclic group is highly fluorinated; has transparency to light of 157 nanometer wavelength, represented by an adsorption coefficient equal to or less than 3.0 mu m-1 |
| 02/05/2008 | US7326511 chemically amplified photoresist comprising compounds which cures upon the action of an acid or whose solubility is increased upon the action of an acid and photosensitive acid generators; give high resolution with good resist profile |
| 02/05/2008 | US7326505 Conveying the substrate to an exposing position of a lithographic apparatus, exposing the substrate at the exposing position to a beam of radiation, conveying the exposed substrate from the exposing position toward a processing position |
| 02/05/2008 | US7326465 Metal multilayer system includes a high-melting metal layer, a metal separating layer, a catalyst layer, and a metal separating layer; high-melting metal layer is of tantalum, molybdenum, and tungsten; metal separating layer is composed of aluminum, gold, or silver |
| 02/05/2008 | US7326460 Device, method of manufacturing the same, electro-optic device, and electronic equipment |
| 02/05/2008 | US7326457 Substrate holding device including adhesive face with hexagons defined by convex portions |
| 02/05/2008 | US7326446 Method for coating metal surfaces and substrate having a coated metal surface |
| 02/05/2008 | US7326438 Depositing a silicon nitride film with a different thickness for each region of the film from ammonia and silane using a single chamber-type apparatus; first and second nitride films deposited together have a greater thickness at the upper region as compared to the side regions and the lower region |
| 02/05/2008 | US7326437 Method and system for coating polymer solution on a substrate in a solvent saturated chamber |
| 02/05/2008 | US7326305 System and method for decapsulating an encapsulated object |
| 02/05/2008 | US7326299 Process liquid supply nozzle, process liquid supply device and nozzle cleaning method |
| 02/05/2008 | US7326297 Device for the production of crystal rods having a defined cross-section and column-shaped polycrystallization structure by means of floating-zone continuous crystallization |
| 02/05/2008 | US7326295 Fabrication method for polycrystalline silicon thin film and apparatus using the same |
| 02/05/2008 | US7326292 Quality evaluation method for single crystal ingot |
| 02/05/2008 | US7326284 Contamination control system and air-conditioning system of a substrate processing apparatus using the same |
| 02/05/2008 | US7326103 Vertically adjustable chemical mechanical polishing head and method for use thereof |
| 02/05/2008 | US7326041 Lead frame, resin sealing mold and method for manufacturing a semiconductor device using the same |
| 02/05/2008 | US7326025 System for detecting warped carriers and associated methods |
| 02/05/2008 | US7326021 Device for loading and unloading silicon wafers in an oven from a multiple-cassette station |
| 02/05/2008 | US7325716 Dense intermetallic compound layer |
| 02/05/2008 | US7325698 Wafer container door with particulate collecting structure |
| 02/05/2008 | US7325693 Wafer container and door with cam latching mechanism |
| 02/05/2008 | US7325692 Cassette having separation plates for storing a plurality of semiconductor wafers |
| 02/05/2008 | US7325685 Secondary latchkey mechanism and method for reticle SMIF pods |
| 02/05/2008 | US7325560 In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration |
| 02/05/2008 | US7325511 Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
| 02/05/2008 | US7325404 Exposure apparatus |
| 02/05/2008 | US7325304 Method of connecting probe pin to circuit board and method of manufacturing probe card |
| 02/05/2008 | US7325302 Method of forming an interconnection element |
| 02/05/2008 | US7325301 Method of manufacturing a wiring board |
| 02/05/2008 | US7325299 Method of making a circuitized substrate |
| 01/31/2008 | WO2008014506A2 Dual inductor circuit for multi-band wireless communication device |
| 01/31/2008 | WO2008014449A2 Seed holder for crystal growth reactors |
| 01/31/2008 | WO2008014446A2 Sintered metal components for crystal growth reactors |
| 01/31/2008 | WO2008014434A2 Crystal growth method and reactor design |
| 01/31/2008 | WO2008014391A2 Avalanche protection for wide bandgap devices |
| 01/31/2008 | WO2008014339A2 Method and system for continuous large-area scanning implantation process |
| 01/31/2008 | WO2008014228A2 Raised sti structure and superdamascene technique for nmosfet performance enhancement with embedded silicon carbon |
| 01/31/2008 | WO2008014193A2 Electrically inactive via for electromigration reliability improvement |
| 01/31/2008 | WO2008014136A2 Octagon transfer chamber |
| 01/31/2008 | WO2008014079A1 Strained layers within semiconductor buffer structures |
| 01/31/2008 | WO2008014038A1 Fully silicided gate electrodes and method of making the same |
| 01/31/2008 | WO2008014031A2 Transistor with asymmetry for data storage circuitry |
| 01/31/2008 | WO2008013959A2 Methods and devices for forming nanostructure monolayers and devices including such monolayers |
| 01/31/2008 | WO2008013931A2 Bottom source ldmosfet structure and method |
| 01/31/2008 | WO2008013923A1 Probes and methods for semiconductor wafer analysis |
| 01/31/2008 | WO2008013919A2 Sidewall tracing nanoprobes, method for making the same, and method for use |
| 01/31/2008 | WO2008013820A2 Buried circumferential electrode microcavity plasma device arrays, electrical interconnects, and formation method |
| 01/31/2008 | WO2008013675A2 Precursors for atomic layer deposition |
| 01/31/2008 | WO2008013659A2 Single precursors for atomic layer deposition |
| 01/31/2008 | WO2008013563A2 Nanotube circuit analysis system and method |
| 01/31/2008 | WO2008013508A1 Method of aligning nanotubes |
| 01/31/2008 | WO2008013358A1 Optical device including gate insulator with modulated thickness |
| 01/31/2008 | WO2008013357A1 Optical device including gate insulating layer having edge effect |
| 01/31/2008 | WO2008013343A1 Diamond/carbon nano-materials hybrid film and the fabrication method thereof |
| 01/31/2008 | WO2008013341A1 Alignment of semiconducting nanowires on metal electrodes |
| 01/31/2008 | WO2008013330A1 Platen driving system of chemical mechanical polishing equipment for wafer |
| 01/31/2008 | WO2008013327A1 Apparatus for recycling the disposed slurry produced in the manufacturing process of the silicon wafer |
| 01/31/2008 | WO2008013310A1 Substrate processing method, program, computer-readable storage medium and substrate processing system |
| 01/31/2008 | WO2008013256A1 End point detectable plasma etching method and plasma etching apparatus |
| 01/31/2008 | WO2008013226A1 Polishing composition |
| 01/31/2008 | WO2008013211A1 Substrate processing method, program, computer-readable recording medium, and substrate processing system |
| 01/31/2008 | WO2008013153A1 Wafer container provided with cushion sheet |
| 01/31/2008 | WO2008013145A1 Ceramic member, probe holder, and method for producing ceramic member |
| 01/31/2008 | WO2008013134A1 Method of machining work |
| 01/31/2008 | WO2008013125A1 Semiconductor device and method for manufacturing same |
| 01/31/2008 | WO2008013118A1 Liquid treatment device and liquid treatment method |
| 01/31/2008 | WO2008013112A1 Microwave plasma source and plasma processing apparatus |
| 01/31/2008 | WO2008013108A1 Process for producing single-crystal substrate with off angle |
| 01/31/2008 | WO2008013098A1 Semiconductor integrated circuit, program converting apparatus and mapping apparatus |
| 01/31/2008 | WO2008013087A1 Standing wave measuring unit in waveguide and standing wave measuring method, electromagnetic wave using device, plasma processing device, and plasma processing method |
| 01/31/2008 | WO2008013035A1 Coating method and coater |
| 01/31/2008 | WO2008013032A1 Method for manufacturing semiconductor substrate |
| 01/31/2008 | WO2008013030A1 Compound, acid generator, resist composition and method for forming resist pattern |
| 01/31/2008 | WO2008013019A1 Method for producing spacer tape and spacer tape |
| 01/31/2008 | WO2008012999A1 Positive resist composition and method of forming resist pattern |
| 01/31/2008 | WO2008012937A1 Wafer bonding method, thinning method and detaching method |
| 01/31/2008 | WO2008012909A1 Interpenetrating polymer network structure and polishing pad and processes for producing them |