Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2008
05/29/2008WO2008064035A1 Method of forming a structure having a high dielectric constant and a structure having a high dielectric constant
05/29/2008WO2008064027A2 Fast locking feedback control loop
05/29/2008WO2008063836A1 Reducing twisting in ultra-high aspect ratio dielectric etch
05/29/2008WO2008063824A1 Sb-based cmos devices
05/29/2008WO2008063745A1 Method of making a contact on a backside of a die
05/29/2008WO2008063744A1 Method of packaging a device having a keypad switch point
05/29/2008WO2008063704A2 Nanostructured quantum dots or dashes in photovoltaic devices and methods thereof
05/29/2008WO2008063699A2 Method for removing nanoclusters from selected regions
05/29/2008WO2008063653A1 Semiconductor nanocrystals and compositions and devices including same
05/29/2008WO2008063652A1 Blue emitting semiconductor nanocrystals and compositions and devices including same
05/29/2008WO2008063592A2 Circuit configuration and manufacturing processes for vertical transient voltage suppressor (tvs) and emi filter
05/29/2008WO2008063522A1 Flat surface air bearing assembly
05/29/2008WO2008063469A2 Recessed access device for a memory
05/29/2008WO2008063462A1 Composition and method for damascene cmp
05/29/2008WO2008063397A1 Method of construction of cte matching structure with wafer processing and resulting structure
05/29/2008WO2008063357A1 Methods of forming field effect transistors, pluralities of field effect transistors, and dram circuitry comprising a plurality of individual memory cells
05/29/2008WO2008063337A2 Semiconductor-on-diamond devices and associated methods
05/29/2008WO2008063216A2 Light emitting diode assembly and method of fabrication
05/29/2008WO2008062974A1 High density flash memory device and fabricating method thereof
05/29/2008WO2008062968A1 Compound semiconductor substrate and control for electrical property thereof
05/29/2008WO2008062893A1 Thin-film transistor, thin-film transistor manufacturing method, and display
05/29/2008WO2008062888A1 Composition for resist lower layer film formation and method for pattern formation
05/29/2008WO2008062843A1 Electrode coating material, electrode structure and semiconductor device
05/29/2008WO2008062831A1 Air floatation conveyance device and method of conveyance using air
05/29/2008WO2008062826A1 Treatment apparatus, method of treating and recording medium
05/29/2008WO2008062800A1 Semiconductor device and its drive method
05/29/2008WO2008062767A1 Semiconductor chip provided with side surface electrode, method for manufacturing the semiconductor chip, and three-dimensional mounting module wherein the semiconductor chip is laminated
05/29/2008WO2008062686A1 Mram
05/29/2008WO2008062670A1 Electron beam irradiation system
05/29/2008WO2008062663A1 Method for manufacturing solar cell and apparatus for manufacturing solar cell
05/29/2008WO2008062600A1 Silicon structure with opening having high aspect ratio, method for manufacturing the silicon structure, apparatus for manufacturing the silicon structure, program for manufacturing the silicon structure, and method for manufacturing etching mask for the silicon structure
05/29/2008WO2008062564A1 Member arranged in wafer storing container and method for manufacturing the member
05/29/2008WO2008062550A1 Vertical heat treatment boat and semiconductor wafer heat treatment method using the same
05/29/2008WO2008062537A1 Sheet storing carrier system and reticle case making use of the same
05/29/2008WO2008062515A1 Semiconductor manufacturing system
05/29/2008WO2008062513A1 Electron-beam exposing device, and electron-beam exposing method
05/29/2008WO2008061806A1 Method for forming a back-to-back wafer batch to be positioned in a process boot, and handling system for forming the btb wafer batch
05/29/2008WO2008061778A1 Surface treatment and passivation of aigan/gan hemt
05/29/2008WO2008061554A1 Electronic, in particular microelectronic, functional group and method for its production
05/29/2008WO2008061464A1 Ic card manufacturing method by interally sealing the combination of chips and elements by using plastic package technique
05/29/2008WO2008045328A3 Iii-nitride heterojunction semiconductor device and method of fabrication
05/29/2008WO2008042165A3 Transistor surround gate structure with partial silicon-on-insulator for memory cells, memory arrays, memory devices and systems and methods of forming same
05/29/2008WO2008039369A3 Field-effect heterostructure transistors
05/29/2008WO2008033680A9 Method and apparatus for creating rfid devices using masking techniques
05/29/2008WO2008033303A3 Branched nanoscale wires
05/29/2008WO2008008157A3 Electron induced chemical etching for detecting defects
05/29/2008WO2008007256A3 Semiconductor device for low-power applications and a method of manufacturing thereof
05/29/2008WO2008005684A3 Bonding tool with improved finish
05/29/2008WO2008001283A3 Flip-chip interconnection with formed couplings
05/29/2008WO2007011496A3 High performance capacitors in planar back gates cmos
05/29/2008US20080127030 Laser repair system and glass mask used for the same
05/29/2008US20080126894 Semiconductor integrated circuit which properly executes an operational test of a circuit under test in the semiconductor integrated circuit
05/29/2008US20080125903 Semiconductor production system
05/29/2008US20080125899 Device and method for controlling substrate processing apparatus
05/29/2008US20080125017 Polishing composition and polishing method
05/29/2008US20080125016 Method for Producing Polishing Agent, Polishing Agent Produced Thereby and Method for Producing Silicon Wafer
05/29/2008US20080124999 LED illumination device with layered phosphor pattern
05/29/2008US20080124997 Lidquid crystal display device and method for fabricating the same
05/29/2008US20080124947 Manufacturing apparatus for semiconductor device and manufacturing method of semiconductor device
05/29/2008US20080124946 Organosilane compounds for modifying dielectrical properties of silicon oxide and silicon nitride films
05/29/2008US20080124945 Production Method for Semiconductor Device and Substrate Processing Apparatus
05/29/2008US20080124944 Gas baffle and distributor for semiconductor processing chamber
05/29/2008US20080124943 Manufacturing Method of a Semiconductor Device, and Substrate Processing Apparatus
05/29/2008US20080124942 Method for forming thin film heads using a bi-layer anti-reflection coating for photolithographic applications and a device thereof
05/29/2008US20080124941 Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus
05/29/2008US20080124940 Method of forming dielectric layer
05/29/2008US20080124939 Process of etching a titanium/tungsten surface and etchant used therein
05/29/2008US20080124938 Chromium-free etching solution for si-substrates and uses therefor
05/29/2008US20080124937 Selective etching method and apparatus
05/29/2008US20080124936 Manufacturing method of capacitor electrode, manufacturing system of capacitor electrode, and storage medium
05/29/2008US20080124935 Two-step process for manufacturing deep trench
05/29/2008US20080124934 Method of manufacturing a semiconductor device
05/29/2008US20080124933 Fabrication process of a semiconductor device
05/29/2008US20080124932 Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method
05/29/2008US20080124931 Method for forming fine patterns of a semiconductor device using a double patterning process
05/29/2008US20080124930 Methods of recycling a substrate including using a chemical mechanical polishing process
05/29/2008US20080124929 Process for Regenerating Layer Transferred Wafer and Layer Transferred Wafer Regenerated by the Process
05/29/2008US20080124928 Method for decapsulating package
05/29/2008US20080124927 Semiconductor device including a discontinuous film and method for manufacturing the same
05/29/2008US20080124926 Methods for growing low-resistivity tungsten film
05/29/2008US20080124925 Method for improved formation of cobalt silicide contacts in semiconductor devices
05/29/2008US20080124924 Scheme for copper filling in vias and trenches
05/29/2008US20080124923 Fabricating Method of Semiconductor Device
05/29/2008US20080124922 Method for fabricating semiconductor device
05/29/2008US20080124921 Method forming ohmic contact layer and metal wiring in semiconductor device
05/29/2008US20080124920 Fabrication method for an integrated circuit structure
05/29/2008US20080124919 Cleaning processes in the formation of integrated circuit interconnect structures
05/29/2008US20080124918 Chip structure and process for forming the same
05/29/2008US20080124917 Method of manufacturing a semiconductor device having air gaps
05/29/2008US20080124916 Method of Manufacturing Semiconductor Device
05/29/2008US20080124915 Method for manufacturing semiconductor device
05/29/2008US20080124914 Method of fabricating flash memory device
05/29/2008US20080124913 Slurry compositions and CMP methods using the same
05/29/2008US20080124912 Semiconductor methods
05/29/2008US20080124911 Method of forming a pattern and method of manufacturing a capacitor using the same
05/29/2008US20080124910 Method of disposing and arranging dummy patterns
05/29/2008US20080124909 Cleaning structure comprising tungsten silicide with a mixture of ammonium hydroxide, hydrogen peroxide, and deionized water; cleaning with a second solution comprising ozone water or hydrogen fluoride; etching by-products
05/29/2008US20080124908 Hafnium tantalum oxynitride high-k dielectric and metal gates
05/29/2008US20080124907 Hafnium lanthanide oxynitride films
05/29/2008US20080124906 Method for transferring self-assembled dummy pattern to substrate
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