| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/06/2009 | US7473655 Method for silicon based dielectric chemical vapor deposition |
| 01/06/2009 | US7473654 Method of forming an oxide film, an oxide film, a component and an electronic apparatus |
| 01/06/2009 | US7473653 Forming precursor film on substrate, film comprising a porogen and a structure former, wherein the structure former has one or more carbon-carbon double or triple bonds and porogen has at least one bulky organic functional group and porogen precursor is a polyfunctional cyclic non-aromatic compound |
| 01/06/2009 | US7473652 Organic polymers, electronic devices, and methods |
| 01/06/2009 | US7473651 Method of manufacturing carbon nanotube semiconductor device |
| 01/06/2009 | US7473650 Film dielectric itself is photopatternable like photoresist which eliminates several processing steps; hydrolysis and condensation of a fluoralkoxy-trihalosilane; inorganic backbone of silicon oxide three dimensional network with fluoro-organic substituents; low dielectric constant, direct patternability |
| 01/06/2009 | US7473649 Methods for controlling feature dimensions in crystalline substrates |
| 01/06/2009 | US7473648 Double exposure double resist layer process for forming gate patterns |
| 01/06/2009 | US7473647 Method of forming pattern using fine pitch hard mask |
| 01/06/2009 | US7473646 Dry etching method and production method of magnetic memory device |
| 01/06/2009 | US7473645 Method of depositing a layer comprising silicon, carbon, and fluorine onto a semiconductor substrate |
| 01/06/2009 | US7473644 Method for forming controlled geometry hardmasks including subresolution elements |
| 01/06/2009 | US7473643 Dendrite growth control circuit |
| 01/06/2009 | US7473642 Method for fabricating conductive layer |
| 01/06/2009 | US7473641 Method for manufacturing a semiconductor device, method for manufacturing magnetic memory, and the magnetic memory thereof |
| 01/06/2009 | US7473640 Reactive gate electrode conductive barrier |
| 01/06/2009 | US7473639 Method of forming dual damascene pattern |
| 01/06/2009 | US7473638 Plasma-enhanced cyclic layer deposition process for barrier layers |
| 01/06/2009 | US7473637 Depositing titanium nitride by atomic layer deposition onto a substrate surface using a titanium-containing precursor such as tetrakisdiethylamidotitanium followed by a mixture of ammonia and carbon monoxide; low resistivity, smooth topology, high deposition rates, step coverage, electrical continuity |
| 01/06/2009 | US7473636 Method to improve time dependent dielectric breakdown |
| 01/06/2009 | US7473635 Method for manufacturing semiconductor device |
| 01/06/2009 | US7473634 Method for integrated substrate processing in copper metallization |
| 01/06/2009 | US7473633 Method for making integrated circuit chip having carbon nanotube composite interconnection vias |
| 01/06/2009 | US7473632 Semiconductor device with an air gap between lower interconnections and a connection portion to the lower interconnections not formed adjacent to the air gap |
| 01/06/2009 | US7473631 Method of forming contact holes in a semiconductor device having first and second metal layers |
| 01/06/2009 | US7473630 Semiconductor device and method for manufacturing same |
| 01/06/2009 | US7473629 Substrate structure having a solder mask and a process for making the same |
| 01/06/2009 | US7473628 Method of manufacturing semiconductor device and semiconductor device |
| 01/06/2009 | US7473627 Semiconducting device having a structure to improve contact processing margin, and method of fabricating the same |
| 01/06/2009 | US7473626 Control of poly-Si depletion in CMOS via gas phase doping |
| 01/06/2009 | US7473625 LDMOS device and method of fabrication |
| 01/06/2009 | US7473624 Method for manufacturing semiconductor device |
| 01/06/2009 | US7473623 Providing stress uniformity in a semiconductor device |
| 01/06/2009 | US7473622 Laser annealing method and manufacturing method of a semiconductor device |
| 01/06/2009 | US7473621 Producing method for crystalline thin film |
| 01/06/2009 | US7473620 Process for adjusting the strain on the surface or inside a substrate made of a semiconductor material |
| 01/06/2009 | US7473619 Method of fabricating semiconductor device having alignment key and semiconductor device fabricated thereby |
| 01/06/2009 | US7473618 Temporary structure to reduce stress and warpage in a flip chip organic package |
| 01/06/2009 | US7473617 Integrated circuit chip manufacturing method and semiconductor device |
| 01/06/2009 | US7473616 Method and system for wafer bonding of structured substrates for electro-mechanical devices |
| 01/06/2009 | US7473615 Semiconductor processing methods |
| 01/06/2009 | US7473614 Method for manufacturing a silicon-on-insulator (SOI) wafer with an etch stop layer |
| 01/06/2009 | US7473613 Terraced film stack |
| 01/06/2009 | US7473612 Method for fabricating a variable-resistance element including heating a RMCoO3 perovskite structure in an oxygen atmosphere |
| 01/06/2009 | US7473611 Methods of forming non-volatile memory cells including fin structures |
| 01/06/2009 | US7473610 Local collector implant structure for heterojunction bipolar transistors and method of forming the same |
| 01/06/2009 | US7473609 Surface treatment in preparation for contact placement |
| 01/06/2009 | US7473608 N-channel MOSFETs comprising dual stressors, and methods for forming the same |
| 01/06/2009 | US7473607 Method of manufacturing a multi-workfunction gates for a CMOS circuit |
| 01/06/2009 | US7473606 Method for fabricating metal-oxide semiconductor transistors |
| 01/06/2009 | US7473605 Corner dominated trigate field effect transistor |
| 01/06/2009 | US7473604 Low temperature process and structures for polycide power MOSFET with ultra-shallow source |
| 01/06/2009 | US7473603 Method for forming a shielded gate trench FET with the shield and gate electrodes being connected together |
| 01/06/2009 | US7473602 Method of forming source contact of NAND flash memory |
| 01/06/2009 | US7473601 Method of fabricating flash memory device using sidewall process |
| 01/06/2009 | US7473600 Nonvolatile memory device and method of forming the same |
| 01/06/2009 | US7473599 Memory capable of storing information and the method of forming and operating the same |
| 01/06/2009 | US7473598 Method for forming stack capacitor |
| 01/06/2009 | US7473597 Method of forming via structures and method of fabricating phase change memory devices incorporating such via structures |
| 01/06/2009 | US7473596 Methods of forming memory cells |
| 01/06/2009 | US7473595 Method for decreasing PN junction leakage current of dynamic random access memory |
| 01/06/2009 | US7473594 Raised STI structure and superdamascene technique for NMOSFET performance enhancement with embedded silicon carbon |
| 01/06/2009 | US7473593 Semiconductor transistors with expanded top portions of gates |
| 01/06/2009 | US7473592 Method of fabricating a semiconductor device |
| 01/06/2009 | US7473591 Transistor with strain-inducing structure in channel |
| 01/06/2009 | US7473590 Semiconductor device having body contact through gate and method of fabricating the same |
| 01/06/2009 | US7473589 Stacked thin film transistor, non-volatile memory devices and methods for fabricating the same |
| 01/06/2009 | US7473588 Method for insulating patterns formed in a thin film of oxidizable semi-conducting material |
| 01/06/2009 | US7473587 High-quality SGOI by oxidation near the alloy melting temperature |
| 01/06/2009 | US7473586 Method of forming flip-chip bump carrier type package |
| 01/06/2009 | US7473585 Technique for manufacturing an overmolded electronic assembly |
| 01/06/2009 | US7473584 Method for fabricating a fan-in leadframe semiconductor package |
| 01/06/2009 | US7473583 Integrated circuit having a lid and method of employing a lid on an integrated circuit |
| 01/06/2009 | US7473582 Method for fabricating semiconductor component with thinned substrate having pin contacts |
| 01/06/2009 | US7473581 Wafer stacking package method |
| 01/06/2009 | US7473580 Temporary chip attach using injection molded solder |
| 01/06/2009 | US7473579 Self-aligned wafer level integration system |
| 01/06/2009 | US7473578 Encapsulation for particle entrapment |
| 01/06/2009 | US7473577 Integrated chip carrier with compliant interconnect |
| 01/06/2009 | US7473576 Method for making a self-converged void and bottom electrode for memory cell |
| 01/06/2009 | US7473574 Memory element with improved contacts |
| 01/06/2009 | US7473573 Thin film transistor array panel and method for fabricating the same |
| 01/06/2009 | US7473572 Micromechanical sensors and methods of manufacturing same |
| 01/06/2009 | US7473571 Method for manufacturing vertically structured light emitting diode |
| 01/06/2009 | US7473570 Method for forming epitaxial layers of gallium nitride-based compound semiconductors |
| 01/06/2009 | US7473569 Manufacturing method for three-dimensional structural body |
| 01/06/2009 | US7473568 Memory-module manufacturing method with memory-chip burn-in and full functional testing delayed until module burn-in |
| 01/06/2009 | US7473567 Change rate prediction method, storage medium, and substrate processing system |
| 01/06/2009 | US7473566 Method and apparatus for controlling a film formation process with multiple objectives |
| 01/06/2009 | US7473565 Semiconductor device and method of manufacturing the same |
| 01/06/2009 | US7473518 Method of manufacturing a device using a near-field photomask and near-field light |
| 01/06/2009 | US7473500 Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same |
| 01/06/2009 | US7473499 Electroactive polymers for lithography |
| 01/06/2009 | US7473497 Phase shifting mask for manufacturing semiconductor device and method of fabricating the same |
| 01/06/2009 | US7473495 Computer program product configured to store program instructions for execution on a computer system enabling the computer system to perform: inputting a step and managing the step |
| 01/06/2009 | US7473443 Composition for forming silicon film and method for forming silicon film |
| 01/06/2009 | US7473380 Etching liquid |
| 01/06/2009 | US7473377 Plasma processing method |
| 01/06/2009 | US7473332 Method for processing semiconductor |
| 01/06/2009 | US7473319 Apparatus and method for manufacturing semiconductor device incorporating fuse elements |