Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2009
01/07/2009CN100449702C Board cleaning apparatus, board cleaning method, and medium with recorded program to be used for the method
01/07/2009CN100449701C Peeling device and peeling method
01/07/2009CN100449700C Steam drying system and its water draining device and method
01/07/2009CN100449699C Ultrasonic assisted etch using corrosive liquids
01/07/2009CN100449698C Exhaust control apparatus for gumming machine
01/07/2009CN100449697C Method of forming wiring pattern
01/07/2009CN100449696C Micro-hole plating and gold bump fabrication method, semiconductor device and semiconductor device fabrication method
01/07/2009CN100449695C Method for manufacturing semiconductor device
01/07/2009CN100449694C 氮化物半导体装置 The nitride semiconductor device
01/07/2009CN100449693C Method for eliminating transverse concave groove with nitrogen
01/07/2009CN100449692C Silicon extension of re-doped arsenic substrate
01/07/2009CN100449691C Method of three-dimensional microfabrication and high-density three-dimensional fine structure
01/07/2009CN100449690C Multilayer mirror, method for manufacturing the same, and exposure equipment
01/07/2009CN100449689C A method of forming a teos cap layer at low temperature and reduced deposition rate
01/07/2009CN100449688C Method for fabricating ferroelectric capacitor
01/07/2009CN100449687C Method of manufacturing patterned ferroelectric media
01/07/2009CN100449686C Manufacturing method of power semi-conductor discrete device first floor photolithography para-position making
01/07/2009CN100449685C Ferroelectric capacitor and its manufacturing method, and ferroelectric memory device
01/07/2009CN100449684C Barrier layers for microelectromechanical systems
01/07/2009CN100449683C Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
01/07/2009CN100449682C Substrate transport container
01/07/2009CN100449650C Test structure for a single-sided buried strap dram memory cell data array
01/07/2009CN100449643C Reference voltage generating circuit and internal voltage generating circuit for controlling internal voltage level
01/07/2009CN100449640C Ferroelectric or electret memory circuit
01/07/2009CN100449638C MTJ MRAM parallel-parallel architecture
01/07/2009CN100449556C Circuit unit of integrated circuit and related technology and method
01/07/2009CN100449551C Agent-based control architecture
01/07/2009CN100449408C Substrate processing apparatus and substrate positioning device
01/07/2009CN100449407C Optimized modules' proximity correction
01/07/2009CN100449405C Electronic beam exposure method
01/07/2009CN100449388C Liquid crystal display device and method for fabricating the same
01/07/2009CN100449368C LCD equipment
01/07/2009CN100449365C Manufacturing method for reflection mirror of silicon-based LCD device
01/07/2009CN100449351C Variable optical arrays and variable manufacturing methods
01/07/2009CN100449340C Three-dimensional photonic crystal waveguide structure
01/07/2009CN100449149C Micro machined vortex type compressor and relevant technology
01/07/2009CN100448941C Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor
01/07/2009CN100448933C Polysulfone compositions exhibiting very low color and high light transmittance properties and articles made therefrom
01/07/2009CN100448920C Method for preparing low dielectric constant high polymer nanometer fiber membrane using electric spinning method
01/07/2009CN100448632C Manipulator device
01/07/2009CN100448593C Laser machining method
01/06/2009US7475380 Generating mask patterns for alternating phase-shift mask lithography
01/06/2009US7475306 Scan test method, integrated circuit, and scan test circuit
01/06/2009US7475305 Method of high speed data rate testing
01/06/2009US7474993 Selection of wavelengths for integrated circuit optical metrology
01/06/2009US7474986 Defect analyzer
01/06/2009US7474550 Dynamic RAM-and semiconductor device
01/06/2009US7474420 In-die optical metrology
01/06/2009US7474417 Method for estimating at least one component placement position on a substrate as well as a device for carrying out such a method
01/06/2009US7474409 Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof
01/06/2009US7474394 Apparatus of inspecting defect in semiconductor and method of the same
01/06/2009US7474386 Wafer flatness evaluation method, wafer flatness evaluation apparatus carrying out the evaluation method, wafer manufacturing method using the evaluation method, wafer quality assurance method using the evaluation method, semiconductor device manufacturing method using the evaluation method and semiconductor device manufacturing method using a wafer evaluated by the evaluation method
01/06/2009US7474382 Method for determining focus deviation amount in pattern exposure and pattern exposure method
01/06/2009US7474378 Assembly, a lithographic apparatus, and a device manufacturing method
01/06/2009US7474290 Semiconductor device and testing method thereof
01/06/2009US7474139 Semiconductor integrated circuit device and frequency modulation device
01/06/2009US7474008 Semiconductor device with reduced electromigration
01/06/2009US7474004 Three dimensional structure memory
01/06/2009US7474003 Semiconductor integrated circuit device
01/06/2009US7474002 Semiconductor device having dielectric film having aperture portion
01/06/2009US7474001 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing
01/06/2009US7474000 High density contact to relaxed geometry layers
01/06/2009US7473999 Semiconductor chip and process for forming the same
01/06/2009US7473998 Method for forming bump protective collars on a bumped wafer
01/06/2009US7473997 Method for forming robust solder interconnect structures by reducing effects of seed layer underetching
01/06/2009US7473996 Signal transfer film, display apparatus having the same and method of manufacturing the same
01/06/2009US7473995 Integrated heat spreader, heat sink or heat pipe with pre-attached phase change thermal interface material and method of making an electronic assembly
01/06/2009US7473994 Method of producing insulator thin film, insulator thin film, method of manufacturing semiconductor device, and semiconductor device
01/06/2009US7473992 Multi-layer interconnection circuit module and manufacturing method thereof
01/06/2009US7473981 Electronic component
01/06/2009US7473980 Semiconductor device and method for fabricating the same
01/06/2009US7473974 Semiconductor circuit device including a protection circuit
01/06/2009US7473971 Method of fabricating a semiconductor device
01/06/2009US7473970 Concurrent fin-fet and thick body device fabrication
01/06/2009US7473968 Semiconductor device including a thin film transistor and a storage capacitor
01/06/2009US7473967 Strained channel finFET device
01/06/2009US7473963 Metal oxide semiconductor (MOS) transistors having three dimensional channels
01/06/2009US7473957 Floating gate non-volatile memory
01/06/2009US7473956 Atomic layer deposition of metal oxide and/or low assymmetrical tunnel barrier interpoly insulators
01/06/2009US7473954 Bitline of semiconductor device having stud type capping layer and method for fabricating the same
01/06/2009US7473953 Method for fabricating metallic bit-line contacts
01/06/2009US7473951 Magnetic random access memory (MRAM) having a magnetic tunneling junction (MTJ) layer including a tunneling film of uniform thickness and method of manufacturing the same
01/06/2009US7473950 Nitrogenated carbon electrode for chalcogenide device and method of making same
01/06/2009US7473949 Ferroelectric capacitor and method of manufacturing the same
01/06/2009US7473947 Process for ultra-thin body SOI devices that incorporate EPI silicon tips and article made thereby
01/06/2009US7473946 CMOS structure and method including multiple crystallographic planes
01/06/2009US7473938 Robust Group III light emitting diode for high reliability in standard packaging applications
01/06/2009US7473929 Semiconductor device and method for fabricating the same
01/06/2009US7473928 EL display device and a method of manufacturing the same
01/06/2009US7473926 Array substrate for liquid crystal display device and method of fabricating the same
01/06/2009US7473925 P-type group II-VI semiconductor compounds
01/06/2009US7473915 System and method to pattern an object through control of a radiation source
01/06/2009US7473911 Specimen current mapper
01/06/2009US7473910 Electron beam lithography apparatus
01/06/2009US7473903 Method and apparatus for deposited hermetic cover for digital X-ray panel
01/06/2009US7473866 Laser processing apparatus
01/06/2009US7473845 Structural unit and method for the production of a structural unit
01/06/2009US7473662 Yttrium metal-doped aluminum oxide consisting of yttrium, aluminum, and oxygen; mole ratio of the yttrium to aluminum is 1:99 to 10:90; semiconductor substrate; formed by chemical vapor deposition or atomic layer deposition
01/06/2009US7473657 Laser irradiation method and apparatus for forming a polycrystalline silicon film
01/06/2009US7473656 Method for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks