| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/28/2009 | CN100456116C Liquid crystal display device and fabricating method thereof |
| 01/28/2009 | CN100456093C Chromatic cholesterol type LCD and method for manufacturing same |
| 01/28/2009 | CN100456089C Pixel structure of LCD array substrate and method for making same |
| 01/28/2009 | CN100456088C LCD adhesion machine and method for producing LCD with the same adhering machine |
| 01/28/2009 | CN100456049C Method for manufacturing two-dimensional photonic crystals and photonic quasicrystalline |
| 01/28/2009 | CN100456024C System and method for preventing mistakes in optical inspection |
| 01/28/2009 | CN100455984C Eddy current sensor |
| 01/28/2009 | CN100455619C Novel siloxane-based resin and interlayer insulating film formed using the same |
| 01/27/2009 | US7484186 Method for designing a system LSI |
| 01/27/2009 | US7484141 Semiconductor device capable of performing test at actual operating frequency |
| 01/27/2009 | US7484135 Semiconductor device having a mode of functional test |
| 01/27/2009 | US7483764 Exposure apparatus and device manufacturing method |
| 01/27/2009 | US7483560 Method for measuring three dimensional shape of a fine pattern |
| 01/27/2009 | US7483291 Magneto-resistance effect element, magnetic memory and magnetic head |
| 01/27/2009 | US7483256 Electrostatic chuck |
| 01/27/2009 | US7483155 Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus |
| 01/27/2009 | US7483123 Substrate conveyor apparatus, substrate conveyance method and exposure apparatus |
| 01/27/2009 | US7483118 Lithographic projection apparatus and device manufacturing method |
| 01/27/2009 | US7483105 Vertically aligned mode liquid crystal display |
| 01/27/2009 | US7483091 Semiconductor display devices |
| 01/27/2009 | US7483089 Semiconductor device having thin film transistor with particular drain electrode |
| 01/27/2009 | US7483001 Active matrix substrate, electro-optical device, and electronic device |
| 01/27/2009 | US7482861 Semiconductor integrated circuit device, and method of manufacturing the same |
| 01/27/2009 | US7482824 Polycrystalline contacting component and test tool having the contacting component |
| 01/27/2009 | US7482821 Probe card and the production method |
| 01/27/2009 | US7482730 High performance MEMS scanner |
| 01/27/2009 | US7482727 Composite material with conductive nanowires |
| 01/27/2009 | US7482702 Semiconductor component sealed on five sides by polymer sealing layer |
| 01/27/2009 | US7482695 Stack MCP and manufacturing method thereof |
| 01/27/2009 | US7482694 Semiconductor device and its manufacturing method |
| 01/27/2009 | US7482693 Top layers of metal for high performance IC's |
| 01/27/2009 | US7482690 Electronic components such as thin array plastic packages and process for fabricating same |
| 01/27/2009 | US7482687 Etch stop in a damascene interconnect structure |
| 01/27/2009 | US7482686 Multipiece apparatus for thermal and electromagnetic interference (EMI) shielding enhancement in die-up array packages and method of making the same |
| 01/27/2009 | US7482681 Semiconductor device package utilizing proud interconnect material |
| 01/27/2009 | US7482677 Dielectric structures having high dielectric constants, and non-volatile semiconductor memory devices having the dielectric structures |
| 01/27/2009 | US7482676 Compositions for preparing low dielectric materials |
| 01/27/2009 | US7482674 Crystalline III-V nitride films on refractory metal substrates |
| 01/27/2009 | US7482671 MOS semiconductor device isolated by a device isolation film |
| 01/27/2009 | US7482662 High voltage semiconductor device utilizing a deep trench structure |
| 01/27/2009 | US7482661 Pattern forming method and semiconductor device manufactured by using said pattern forming method |
| 01/27/2009 | US7482658 Semiconductor device and method of manufacturing the same |
| 01/27/2009 | US7482655 MOSgate driver integrated circuit with adaptive dead time |
| 01/27/2009 | US7482652 Multiwalled carbon nanotube memory device |
| 01/27/2009 | US7482650 Method of manufacturing a semiconductor integrated circuit device having a columnar laminate |
| 01/27/2009 | US7482648 Electronic device and method of manufacturing the same |
| 01/27/2009 | US7482645 Method and structure for making a top-side contact to a substrate |
| 01/27/2009 | US7482644 Integrated semiconductor memory and method for electrically stressing an integrated semiconductor memory |
| 01/27/2009 | US7482638 Package for a semiconductor light emitting device |
| 01/27/2009 | US7482630 NAND memory arrays |
| 01/27/2009 | US7482628 Array substrate for liquid crystal display device and method of fabricating the same |
| 01/27/2009 | US7482627 Semiconductor device, and method of fabricating the same |
| 01/27/2009 | US7482623 Organic semiconductor film and organic semiconductor device |
| 01/27/2009 | US7482622 Dual panel type organic electroluminescent device and method of fabricating the same |
| 01/27/2009 | US7482618 ZnO group epitaxial semiconductor device and its manufacture |
| 01/27/2009 | US7482617 Optical semiconductor device and fabrication method thereof |
| 01/27/2009 | US7482616 Semiconductor devices having phase change memory cells, electronic systems employing the same and methods of fabricating the same |
| 01/27/2009 | US7482611 Lithographic apparatus and device manufacturing method |
| 01/27/2009 | US7482610 Vertical-cavity enhanced resonant thermal emitter |
| 01/27/2009 | US7482570 Solid-state imaging device |
| 01/27/2009 | US7482554 Laser beam processing machine |
| 01/27/2009 | US7482552 Laser crystallizing device and method for crystallizing silicon |
| 01/27/2009 | US7482551 Processing a memory link with a set of at least two laser pulses |
| 01/27/2009 | US7482289 exposing a near-critical or supercritical CO2 containing a tantalum-releasing precursor such as cyclopentadiene Tantalum carbonyl (cp)Ta(CO)4 compound to a wavelength of light preselected to release tantalum from such precursor and deposited on a substrate ( polysiloxane, Cu, organosilicate glass etc.) |
| 01/27/2009 | US7482288 Method for producing a grid cap with a locally increased dielectric constant |
| 01/27/2009 | US7482286 Method for forming dielectric or metallic films |
| 01/27/2009 | US7482285 Dual epitaxial layer for high voltage vertical conduction power MOSFET devices |
| 01/27/2009 | US7482284 Deposition methods for forming silicon oxide layers |
| 01/27/2009 | US7482283 Thin film forming method and thin film forming device |
| 01/27/2009 | US7482282 dissolve and remove silicon oxide and nickel oxide on nickel silicide in two separate steps; lower contact resistance, allowing miniaturization of semiconductor device |
| 01/27/2009 | US7482281 Substrate processing method |
| 01/27/2009 | US7482280 Method for forming a lithography pattern |
| 01/27/2009 | US7482279 Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask |
| 01/27/2009 | US7482278 Key-hole free process for high aspect ratio gap filling with reentrant spacer |
| 01/27/2009 | US7482277 Multilevel fabrication processing by functional regrouping of material deposition, lithography, and etching |
| 01/27/2009 | US7482276 Semiconductor device and method of manufacturing the same |
| 01/27/2009 | US7482275 Plasma treatment method and method of manufacturing semiconductor device |
| 01/27/2009 | US7482274 Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same |
| 01/27/2009 | US7482273 Transmissive dynamic plasma steering method for radiant electromagnetic energy |
| 01/27/2009 | US7482272 Through chip connection |
| 01/27/2009 | US7482271 Manufacturing method for electronic substrate, manufacturing method for electro-optical device, and manufacturing method for electronic device |
| 01/27/2009 | US7482270 Fully and uniformly silicided gate structure and method for forming same |
| 01/27/2009 | US7482269 Method for controlling the step coverage of a ruthenium layer on a patterned substrate |
| 01/27/2009 | US7482268 Top layers of metal for integrated circuits |
| 01/27/2009 | US7482267 Ion implantation of spin on glass materials |
| 01/27/2009 | US7482266 Method of forming composite opening and method of dual damascene process using the same |
| 01/27/2009 | US7482265 irradiating the layer with radiation in 2 steps, having first and second wavelengths, wherein the first wavelength is larger than the second wavelength; plasma enhanced chemical vapor deposition; forming damascene interconnect structure; repairing damage forming silicon-carbon bond; semiconductor |
| 01/27/2009 | US7482264 Method of forming metal line of semiconductor device, and semiconductor device |
| 01/27/2009 | US7482263 Semiconductor device and method for manufacturing the same |
| 01/27/2009 | US7482262 Method of manufacturing semiconductor device |
| 01/27/2009 | US7482261 Interconnect structure for BEOL applications |
| 01/27/2009 | US7482260 System and method for increasing the strength of a bond made by a small diameter wire in ball bonding |
| 01/27/2009 | US7482259 Chip structure and process for forming the same |
| 01/27/2009 | US7482258 Product and method for integration of deep trench mesh and structures under a bond pad |
| 01/27/2009 | US7482257 Method for forming metal contact in semiconductor device |
| 01/27/2009 | US7482256 Semiconductor device and method of manufacturing the same |
| 01/27/2009 | US7482255 Method of ion implantation to reduce transient enhanced diffusion |
| 01/27/2009 | US7482254 Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heating |
| 01/27/2009 | US7482252 Method for reducing floating body effects in SOI semiconductor device without degrading mobility |
| 01/27/2009 | US7482251 Etch before grind for semiconductor die singulation |