| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/29/2009 | WO2009013905A1 Position measuring system, exposure device, position measuring method, exposure method, device manufacturing method, tool, and measuring method |
| 01/29/2009 | WO2009013903A1 Mobile object driving method, mobile object driving system, pattern forming method and apparatus, exposure method and apparatus and device manufacturing method |
| 01/29/2009 | WO2009013887A1 End section inspecting apparatus |
| 01/29/2009 | WO2009013886A1 Silicon carbide semiconductor device and method for manufacturing the same |
| 01/29/2009 | WO2009013873A1 Laminated film manufacturing method, semiconductor device manufacturing method, semiconductor device and display device |
| 01/29/2009 | WO2009013857A1 Method for measuring rotation angle of bonded wafer |
| 01/29/2009 | WO2009013849A1 Semiconductor device and its manufacturing method |
| 01/29/2009 | WO2009013826A1 Semiconductor device |
| 01/29/2009 | WO2009013811A1 Semiconductor device |
| 01/29/2009 | WO2009013803A1 Method of controlling surface potential of electrostatic chuck |
| 01/29/2009 | WO2009013799A1 Substrate adsorbing stage device |
| 01/29/2009 | WO2009013797A1 Method of treating work and system for treating work |
| 01/29/2009 | WO2009013533A1 Mim capacitor structure and methods of manufacturing the same |
| 01/29/2009 | WO2009013531A2 A method of manufacturing a semiconductor device, and a semiconductor device |
| 01/29/2009 | WO2009013425A2 Substrate for the epitaxial growth of gallium nitride |
| 01/29/2009 | WO2009013409A2 Method for producing a set of chips mechanically interconnected by means of a flexible connection |
| 01/29/2009 | WO2009013315A2 Semiconductor substrate with through-contact and method for production thereof |
| 01/29/2009 | WO2009013268A1 Charge reservoir structure |
| 01/29/2009 | WO2009013242A1 Method for providing a crystalline germanium layer on a substrate |
| 01/29/2009 | WO2009013034A1 Method for providing a crystalline germanium layer on a substrate |
| 01/29/2009 | WO2009012750A2 Method and device for the laser structuring of solar cells |
| 01/29/2009 | WO2009012536A1 Damascene contacts on iii-v cmos devices |
| 01/29/2009 | WO2008150482A3 Diffusion bonded fluid flow apparatus useful in semiconductor manufacturing |
| 01/29/2009 | WO2008150443A3 Method and apparatus for laser oxidation and reduction reactions |
| 01/29/2009 | WO2008147756A3 In-situ photoresist strip during plasma etching of active hard mask |
| 01/29/2009 | WO2008141324A3 Methods for improving the quality of epitaxially-grown semiconductor materials |
| 01/29/2009 | WO2008115606A3 Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment |
| 01/29/2009 | WO2007084907A8 Method for fabricating last level copper-to-c4 connection with interfacial cap structure |
| 01/29/2009 | WO2007019188A3 Manufacture of photovoltaic devices |
| 01/29/2009 | WO2004030036A3 A modular bipolar-cmos-dmos analog integrated circuit and power transistor technology |
| 01/29/2009 | US20090031262 Mask pattern formation method, mask pattern formation apparatus, and lithography mask |
| 01/29/2009 | US20090031261 Characterization and reduction of variation for integrated circuits |
| 01/29/2009 | US20090030547 Calibration of high speed loader to substrate transport system |
| 01/29/2009 | US20090030103 Method of fabricating a thin film transistor substrate and a photosensitive composition used in the thin film transistor substrate |
| 01/29/2009 | US20090029633 Method of polishing a silicon-containing dielectric |
| 01/29/2009 | US20090029630 Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
| 01/29/2009 | US20090029564 Plasma treatment apparatus and plasma treatment method |
| 01/29/2009 | US20090029563 Method and apparatus for manufacturing semiconductor nanoparticles |
| 01/29/2009 | US20090029562 Film formation method and apparatus for semiconductor process |
| 01/29/2009 | US20090029561 Semiconductor processing apparatus |
| 01/29/2009 | US20090029560 Apparatus and method for single substrate processing |
| 01/29/2009 | US20090029559 Photo mask of semiconductor device and method of forming pattern using the same |
| 01/29/2009 | US20090029558 Method of manufacturing semiconductor device |
| 01/29/2009 | US20090029557 Plasma etching method, plasma etching apparatus and storage medium |
| 01/29/2009 | US20090029556 Method for forming a shallow trench isolation |
| 01/29/2009 | US20090029555 Multi-Step selective etching for cross-point memory |
| 01/29/2009 | US20090029554 Method of Batch Integration of Low Dielectric Substrates with MMICs |
| 01/29/2009 | US20090029553 Free radical-forming activator attached to solid and used to enhance CMP formulations |
| 01/29/2009 | US20090029552 Method For Polishing A Substrate Composed Of Semiconductor Material |
| 01/29/2009 | US20090029551 Pad and method for chemical mechanical polishing |
| 01/29/2009 | US20090029550 Method of Manufacturing Nitride Substrate for Semiconductors |
| 01/29/2009 | US20090029549 Method of silicide formation for nano structures |
| 01/29/2009 | US20090029548 Method for removing polymer residue from metal lines of semiconductor device |
| 01/29/2009 | US20090029547 Novel ladder poly etching back process for word line poly planarization |
| 01/29/2009 | US20090029546 Method for forming metal lines of semiconductor device |
| 01/29/2009 | US20090029545 Method of manufacturing semiconductor device |
| 01/29/2009 | US20090029544 Adhesion and minimizing oxidation on electroless co alloy films for integration with low k inter-metal dielectric and etch stop |
| 01/29/2009 | US20090029543 Cleaning process for microelectronic dielectric and metal structures |
| 01/29/2009 | US20090029542 Methods and systems for laser assisted wirebonding |
| 01/29/2009 | US20090029541 Method of fabricating anti-fuse and method of programming anti-fuse |
| 01/29/2009 | US20090029540 Nonvolatile semiconductor memory and manufacturing method thereof |
| 01/29/2009 | US20090029539 Method for fabricating tungsten line and method for fabricating gate of semiconductor device using the same |
| 01/29/2009 | US20090029538 Process for making a semiconductor device using partial etching |
| 01/29/2009 | US20090029537 Method for forming semiconductor package and mold cast used for the same |
| 01/29/2009 | US20090029536 Bipolar transistors with vertical structures |
| 01/29/2009 | US20090029535 Ion implantation method and semiconductor device manufacturing method |
| 01/29/2009 | US20090029534 Liquid phase deposition of contacts in programmable resistance and switching devices |
| 01/29/2009 | US20090029533 Method of controlling film stress in mems devices |
| 01/29/2009 | US20090029532 Method for forming a microcrystalline silicon film |
| 01/29/2009 | US20090029531 Hybrid orientation substrate and method for fabrication thereof |
| 01/29/2009 | US20090029530 Method of manufacturing thin film semiconductor device |
| 01/29/2009 | US20090029529 Method for cleaning semiconductor device |
| 01/29/2009 | US20090029528 Method and apparatus for cleaning a substrate surface |
| 01/29/2009 | US20090029527 Processes for forming backplanes for electro-optic displays |
| 01/29/2009 | US20090029526 Method of Exposing Circuit Lateral Interconnect Contacts by Wafer Saw |
| 01/29/2009 | US20090029525 Manufacturing method of soi substrate |
| 01/29/2009 | US20090029524 Method of manufacturing a semiconductor integrated circuit device having a trench |
| 01/29/2009 | US20090029523 Method of Fabricating Flash Memory Device |
| 01/29/2009 | US20090029522 Method of Forming Isolation Layer of Semiconductor Device |
| 01/29/2009 | US20090029521 Method of forming isolation structure of semiconductor device for preventing excessive loss during recess gate formation |
| 01/29/2009 | US20090029520 Methods of forming semiconductor device |
| 01/29/2009 | US20090029519 Method of manufacturing mim capacitor |
| 01/29/2009 | US20090029518 Method of fabricating schottky barrier diode |
| 01/29/2009 | US20090029517 Method of Making a Semiconductor Device |
| 01/29/2009 | US20090029516 Method to improve transistor tox using high-angle implants with no additional masks |
| 01/29/2009 | US20090029515 Methods for the formation of fully silicided metal gates |
| 01/29/2009 | US20090029514 Method for manufacturing semiconductor device |
| 01/29/2009 | US20090029513 Vertical quadruple conduction channel insulated gate transistor |
| 01/29/2009 | US20090029512 Semiconductor memory having charge trapping memory cells and fabrication method thereof |
| 01/29/2009 | US20090029511 NOR-type channel-program channel-erase contactless flash memory on SOI |
| 01/29/2009 | US20090029510 Multiple doping level bipolar junctions transistors and method for forming |
| 01/29/2009 | US20090029509 Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device |
| 01/29/2009 | US20090029508 Method for manufacturing semiconductor device |
| 01/29/2009 | US20090029507 Dielectric film, its formation method, semiconductor device using the dielectric film and its production method |
| 01/29/2009 | US20090029506 Method of manufacturing semiconductor device |
| 01/29/2009 | US20090029505 Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus |
| 01/29/2009 | US20090029504 Wafer-level aca flip chip package using double-layered aca/nca |
| 01/29/2009 | US20090029501 Process of Forming a Microphone Using Support Member |
| 01/29/2009 | US20090029500 Hermetic pacakging and method of manufacture and use therefore |
| 01/29/2009 | US20090029498 Manufacturing method of display device |