Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2009
03/10/2009US7501229 Anti-reflective coating containing sulfur atom
03/10/2009US7501221 Positive type resist composition and resist pattern formation method using same
03/10/2009US7501220 Resist composition
03/10/2009US7501214 Semiconductor device fabrication method and fabrication apparatus using a stencil mask
03/10/2009US7501211 Mask having first to fourth blocks on the substrate, each block having a periodic pattern including transmitting regions and a blocking region; used for forming a polycrystalline silicon thin film
03/10/2009US7501191 Atomic layer deposition; for use in semiconductors, dynamic random access memory (DRAM)
03/10/2009US7501161 Placing a substrate on a substrate holder of a plasma chamber; positioning a cover frame adjacent and below a perimeter of the substrate; employing the cover frame to reduce arcing during plasma processing within the plasma chamber; display and/or semiconductor device manufacturing
03/10/2009US7501156 Pattern formation substrate and method for pattern formation
03/10/2009US7501154 Surface modification of CVD polymer films
03/10/2009US7501086 Encapsulation method for leadless semiconductor packages
03/10/2009US7501072 Etching solution comprising hydrofluoric acid
03/10/2009US7501071 Method of forming a patterned conductive structure
03/10/2009US7501035 Method of manufacturing replica diffraction grating
03/10/2009US7500894 Method for manufacturing plasma display panels with consistent panel substrate characteristics
03/10/2009US7500502 Inspection apparatus and method for film carrier tapes for mounting electronic components and semiconductor devices
03/10/2009US7500445 Method and apparatus for cleaning a CVD chamber
03/10/2009US7500397 Activated chemical process for enhancing material properties of dielectric films
03/10/2009US7500308 Method of detaching electronic component from printed circuit board
03/10/2009US7500305 Placement system for populating a substrate with electronic components
03/05/2009WO2009029954A2 Improved solution deposition assembly
03/05/2009WO2009029942A2 Mechanically integrated and closely coupled print head and mist source
03/05/2009WO2009029939A2 Aerosol jet® printing system for photovoltaic applications
03/05/2009WO2009029938A2 Apparatus for anisotropic focusing
03/05/2009WO2009029902A1 Photovoltaic production line
03/05/2009WO2009029901A1 Production line module for forming multiple sized photovoltaic devices
03/05/2009WO2009029851A2 Apparatus and methods for predicting a semiconductor parameter across an area of a wafer
03/05/2009WO2009029607A1 Gate replacement with top oxide regrowth for the top oxide improvement
03/05/2009WO2009029532A2 Thermocouple
03/05/2009WO2009029455A1 Wafer boat for semiconductor testing
03/05/2009WO2009029441A1 Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp ii process
03/05/2009WO2009029431A1 Process of forming an electronic device including depositing layers within openings
03/05/2009WO2009029329A1 High temperature ion implantation of nitride based hemts
03/05/2009WO2009029264A1 Semiconductor wafer re-use in an exfoliation process using heat treatment
03/05/2009WO2009029246A1 Reduced residual formation in etched multi-layer stacks
03/05/2009WO2009029104A1 Rapid thermal processing by stamping
03/05/2009WO2009029045A1 A method of manufacturing an organic electronic or optoelectronic device
03/05/2009WO2009028890A2 Chamber cover
03/05/2009WO2009028843A2 Method of fabricating solar cell using microwave and apparatus for the same
03/05/2009WO2009028827A2 Method and device for chemical mechanical polishing of metal layer with supercritical fluid
03/05/2009WO2009028756A1 Supporting plate for slicing silicon ingot
03/05/2009WO2009028753A1 Semiconductor manufacturing apparatus
03/05/2009WO2009028743A1 Real time chamber monitoring method using intelligence algorithm
03/05/2009WO2009028658A1 Silicon single crystal wafer for igbt, method for manufacturing silicon single crystal wafer for igbt and method for assuring resistivity of silicon single crystal wafer for igbt
03/05/2009WO2009028619A1 Treating-gas supply system and treating apparatus
03/05/2009WO2009028595A1 Substrate processing apparatus
03/05/2009WO2009028538A1 Semiconductor element and method for manufacturing the same
03/05/2009WO2009028537A1 Manufacturing equipment, information processing method, and program
03/05/2009WO2009028536A1 ZnO THIN FILM AND SEMICONDUCTOR ELEMENT
03/05/2009WO2009028527A1 Stage apparatus
03/05/2009WO2009028526A1 Stage apparatus
03/05/2009WO2009028525A1 Stage apparatus assembling method
03/05/2009WO2009028506A1 Plasma processing apparatus, plasma processing method and end point detecting method
03/05/2009WO2009028494A1 Position detecting apparatus, position detecting method, exposure apparatus and device manufacturing method
03/05/2009WO2009028484A1 Adhesive sheet for manufacturing semiconductor device, and semiconductor device manufacturing method using the sheet
03/05/2009WO2009028480A1 Semiconductor device manufacturing method
03/05/2009WO2009028471A1 Polishing composition
03/05/2009WO2009028458A1 Mounting table structure, and treating apparatus
03/05/2009WO2009028453A1 Thin film transistor
03/05/2009WO2009028452A1 Method for producing metal oxide semiconductor and thin film transistor using oxide semiconductor thin film produced by the method
03/05/2009WO2009028399A1 Semiconductor wafer and method for manufacturing the same
03/05/2009WO2009028376A1 Top panel and plasma processing apparatus
03/05/2009WO2009028375A1 Semiconductor device and method for manufacturing the same
03/05/2009WO2009028365A1 Dicing apparatus
03/05/2009WO2009028364A1 Dicing apparatus
03/05/2009WO2009028360A1 Photosensitive composition, cured film formed therefrom, and device having cured film
03/05/2009WO2009028314A1 Semiconductor device manufacturing method
03/05/2009WO2009028308A1 Diamond thin-film laminate
03/05/2009WO2009028297A1 Electronic circuit
03/05/2009WO2009028279A1 Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same
03/05/2009WO2009028256A1 Set for preparation of aqueous dispersion for chemical mechanical polishing and method for preparing aqueous dispersion for chemical mechanical polishing
03/05/2009WO2009028239A1 Structure for mounting semiconductor device and method for mounting semiconductor device
03/05/2009WO2009028219A1 Bonding device and bonding method
03/05/2009WO2009028191A1 Apparatus and method for plasma doping treatment
03/05/2009WO2009028188A1 Selective film manufacturing method
03/05/2009WO2009028178A1 Industrial robot
03/05/2009WO2009028157A1 Moving body driving method, moving body driving system, pattern forming method, and pattern forming device
03/05/2009WO2009028145A1 High-intensity light-emitting diode manufacturing method, light-emitting element substrate and high intensity light-emitting diode
03/05/2009WO2009028130A1 D/a converter, differential switch, semiconductor integrated circuit, video device, and communication device
03/05/2009WO2009028114A1 Etching system
03/05/2009WO2009028087A1 High-density group ii-vi compound semiconductor molding and process for producing the same
03/05/2009WO2009028084A1 Apparatus for generating dielectric barrier discharge gas
03/05/2009WO2009028068A1 Pressure sensitive adhesive sheet and process for manufacturing electronic part
03/05/2009WO2009028065A1 Ion implantation device, substrate clamping mechanism, and ion implantation method
03/05/2009WO2009027888A2 Solderable structure
03/05/2009WO2009027765A1 High-k heterostructure
03/05/2009WO2009027627A1 Electronic device with self-aligned electrodes fabricated using additive liquid deposition
03/05/2009WO2009027517A1 Apparatus and method for detecting semiconductor substrate anomalies
03/05/2009WO2009027200A2 Method for purifying polycrystalline silicon
03/05/2009WO2009027198A1 Formation of solder bumps
03/05/2009WO2009027194A1 Apparatus for wet treatment of plate-like articles
03/05/2009WO2009027142A1 Transfer chuck for transferring flat materials, particularly wafers
03/05/2009WO2009026765A1 Method and apparatus for thermal treatment of semiconductor workpieces
03/05/2009WO2009026748A1 Gallium nitride light-emitting device with ultra-high reverse breakdown voltage
03/05/2009WO2009026661A1 Photovoltaic cell manufacturing
03/05/2009WO2009011834A3 Microalignment using laser-softened glass bumps
03/05/2009WO2009009436A3 Packaged semiconductor assemblies and methods for manufacturing such assemblies
03/05/2009WO2009009380A3 Normally-off integrated jfet power switches in wide bandgap semiconductors and methods of making
03/05/2009WO2009009272A3 Conformal doping using high neutral plasma implant
03/05/2009WO2009008673A3 Substrate heating apparatus
03/05/2009WO2009008626A3 Ion implanter, internal structure of ion implanter and method of forming a coating layer in the ion implanter
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