| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/12/2009 | DE102007043182A1 Thick strip conductor producing method for e.g. LED, involves providing openings such that upper side of carrier is exposed in openings, and introducing conductor material containing electrically conductive particles in openings |
| 03/12/2009 | DE102007043100A1 Integrated circuit e.g. logic circuit, for e.g. volatile memory device, manufacturing method, involves forming dopant implantation regions by implanting material e.g. boron, and by performing thermal treatment |
| 03/12/2009 | DE102007043001A1 Bandverfahren für elektronische Bauelemente, Module und LED-Anwendungen Band method for electronic components, modules and LED applications |
| 03/12/2009 | DE102007041124A1 Thyristor mit verbessertem Einschaltverhalten, Thyristoranordnung mit einem Thyristor, Verfahren zur Herstellung eines Thyristors und einer Thyristoranordnung Thyristor having an improved switch-on, thyristor having a thyristor, method for producing a thyristor and a thyristor |
| 03/12/2009 | DE102007035833B3 Fortgeschrittene automatische Abscheideprofilzielsteuerung und Kontrolle durch Anwendung von fortgeschrittener Polierendpunktsystemrückkopplung Advanced automatic Abscheideprofilzielsteuerung and control through the application of advanced polishing endpoint system feedback |
| 03/12/2009 | DE102007001722B4 Vorrichtung zum Aufnehmen, Transportieren und Sortieren von elektronischen Bauelementen Apparatus for receiving, transporting and sorting electronic components |
| 03/12/2009 | DE102006056597B4 Verfahren und System zum Steuern der Substrathandhabung in Substratpuffern von Prozessanlagensystemen durch Unterbrechen von Prozessaufgaben in Abhängigkeit von der Aufgabenpriorität Method and system for controlling the substrate handling in substrate buffering process plant systems by interrupting process tasks depending on the task priority |
| 03/12/2009 | DE102004041679B4 Verfahren zur lithgraphischen Herstellung einer Struktur in einer strahlungsempfindlichen Schicht und ein strukturiertes Halbleitersubstrat mit Oberflächenstruktur A process for producing a structure lithgraphischen in a radiation sensitive layer and a patterned semiconductor substrate having a surface structure |
| 03/12/2009 | DE102004031606B4 Integrierte Schaltungsanordnung mit pin-Diode und Herstellungsverfahren Integrated circuit arrangement with pin diode and manufacturing processes |
| 03/12/2009 | DE10163345B4 Verfahren zur Herstellung eines Kondensators in einem Halbleiterbauelement A method for manufacturing a capacitor in a semiconductor device |
| 03/12/2009 | DE10064067B4 Verfahren zur Herstellung eines Kondensators einer Halbleitereinrichtung A method for manufacturing a capacitor of a semiconductor device |
| 03/12/2009 | CA2697732A1 Mounting device for disk-shaped substrates such as solar wafers |
| 03/11/2009 | EP2034518A2 Electronic devices comprising HV transistors and LV transistors, with salicided junctions |
| 03/11/2009 | EP2034517A1 Semiconductor device and semiconductor device manufacturing method |
| 03/11/2009 | EP2034516A1 Method for producing solid phase sheet and solar cell utilizing solid phase sheet |
| 03/11/2009 | EP2034515A1 Maintenance method, exposure method and apparatus, and device manufacturing method |
| 03/11/2009 | EP2034514A1 Exposure method and apparatus, maintenance method, and device manufacturing method |
| 03/11/2009 | EP2034513A1 Holding device and exposure device |
| 03/11/2009 | EP2034512A1 Server device, and program |
| 03/11/2009 | EP2034504A1 Diamond electron radiation cathode, electron source, electron microscope, and electron beam exposer |
| 03/11/2009 | EP2034490A1 High efficiency collector for laser plasma EUV source |
| 03/11/2009 | EP2034365A2 Microelectronic cleaning compositions containing oxidizers and organic solvents |
| 03/11/2009 | EP2034359A2 Non absorbing reticle and method of making same |
| 03/11/2009 | EP2034048A1 Heating apparatus |
| 03/11/2009 | EP2034047A1 Vaporizer/supplier of material and automatic pressure regulator for use therein |
| 03/11/2009 | EP2034040A2 Perovskite type oxide, ferroelectric film, process for producing same, ferroelectric device, and liquid discharge apparatus |
| 03/11/2009 | EP2033997A1 Method for manufacturing multilayer film |
| 03/11/2009 | EP2033745A2 Industrial robot |
| 03/11/2009 | EP2033739A1 Method for producing wafer |
| 03/11/2009 | EP2033226A1 Schottky diode with incorporated pn- junctions |
| 03/11/2009 | EP2033218A1 Methods for contact resistance reduction of advanced cmos devices |
| 03/11/2009 | EP2033217A2 Ic germanium on insulator substrate and method of manufacture of ic substrate |
| 03/11/2009 | EP2033216A2 Electroadhesion |
| 03/11/2009 | EP2033215A1 Device for the transport, storage and transfer of substrates |
| 03/11/2009 | EP2033214A2 A method for depositing and curing low-k films for gapfill and conformal film applications |
| 03/11/2009 | EP2033213A2 Compressive nitride film and method of manufacturing thereof |
| 03/11/2009 | EP2033212A2 Silicon carbide switching devices including p-type channels and methods of forming the same |
| 03/11/2009 | EP2033211A2 Low power rf tuning using optical and non-reflected power methods |
| 03/11/2009 | EP2033210A2 Semiconductor having improved gate-to-drain breakdown voltage |
| 03/11/2009 | EP2033207A1 Apparatus and method for cleaning, etching, activation and subsequent treatment of glass surfaces, glass surfaces coated by metal oxides, and surfaces of other sio2-coated materials |
| 03/11/2009 | EP2032974A1 Method and apparatus for optically characterizing the doping of a substrate |
| 03/11/2009 | EP2032744A2 System and method for semiconductor processing |
| 03/11/2009 | EP2031971A2 Rapid thermal firing ir conveyor furnace having high intensity heating section |
| 03/11/2009 | EP1856724A4 Method of making a nitrided gate dielectric |
| 03/11/2009 | EP1815515A4 Semiconductor device package with bump overlying a polymer layer |
| 03/11/2009 | EP1661171A4 Multiple frequency plasma etch reactor |
| 03/11/2009 | EP1646700B1 Method for producing cerium oxide abrasives upon setting the firing temperature of cerium carbonate |
| 03/11/2009 | EP1629549A4 Method of producing membrane electrode assemblies for use in proton exchange membrane and direct methanol fuel cells |
| 03/11/2009 | EP1546803A4 Wet-developable anti-reflective compositions |
| 03/11/2009 | EP1493177A4 Improved method for etching vias |
| 03/11/2009 | EP1485945A4 Power semiconductor device having a voltage sustaining region that includes doped columns formed with a single ion implantation step |
| 03/11/2009 | EP1451862B1 Methods of forming capacitors and methods of forming capcitor dielectric layers |
| 03/11/2009 | EP1447811B1 Ferroelectric storage device, drive method and drive circuit thereof |
| 03/11/2009 | EP1433200A4 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands |
| 03/11/2009 | EP1402560B1 Configurable plasma volume etch chamber |
| 03/11/2009 | EP1397830A4 Copper vias in low-k technology |
| 03/11/2009 | EP1320879A4 System and method for cleaning semiconductor fabrication equipment parts |
| 03/11/2009 | EP1290719B1 Halo-free non-rectifying contact on chip with halo diffusion |
| 03/11/2009 | EP1242165B1 Gas purification system with an integrated hydrogen sorption and filter assembly |
| 03/11/2009 | EP1090159B1 Deposition of coatings using an atmospheric pressure plasma jet |
| 03/11/2009 | EP1027583B1 Structure equipped with electric contacts formed through said structure substrate and method for obtaining said structure |
| 03/11/2009 | CN201207393Y Large power self-cooling thyratron transistor valve and vehicle for mounting |
| 03/11/2009 | CN201207385Y Water mounting and dismounting platform and wafer coating device comprising the same |
| 03/11/2009 | CN201207384Y Block board preventing heat dissipation and diffusion furnace using the board |
| 03/11/2009 | CN101385402A Circuit board and process for producing the same |
| 03/11/2009 | CN101385154A Switching device, rewritable logic integrated circuit, and memory device |
| 03/11/2009 | CN101385146A Schottky junction type semiconductor element and method for manufacturing same |
| 03/11/2009 | CN101385141A Semiconductor alignment aid |
| 03/11/2009 | CN101385138A Method of fabricating a semiconductor on insulator device having a frontside substrate contact |
| 03/11/2009 | CN101385137A Space transformer, manufacturing method of the space transformer and probe card having the space transformer |
| 03/11/2009 | CN101385136A Non-conductive planarization of substrate surface for mold cap |
| 03/11/2009 | CN101385135A Process for producing semiconductor device |
| 03/11/2009 | CN101385134A Flip chip mlp with conductive ink |
| 03/11/2009 | CN101385133A Method of forming a semiconductor device having asymmetric dielectric regions and structure thereof |
| 03/11/2009 | CN101385132A Semiconductor device |
| 03/11/2009 | CN101385131A Methods and apparatuses for high pressure gas annealing |
| 03/11/2009 | CN101385130A Semiconductor device and manufacturing method thereof |
| 03/11/2009 | CN101385129A Microwave plasma source and plasma processing apparatus |
| 03/11/2009 | CN101385128A Substrate processing apparatus, substrate processing method and recording medium |
| 03/11/2009 | CN101385127A Sealed elastomer bonded si electrodes and the like for reduced particle contamination in dielectric etch |
| 03/11/2009 | CN101385126A Devices including graphene layers epitaxially grown on single crystal substrates |
| 03/11/2009 | CN101385125A Exposure method and apparatus, maintenance method, and device manufacturing method |
| 03/11/2009 | CN101385124A Maintenance method, exposure method and apparatus, and device manufacturing method |
| 03/11/2009 | CN101385123A Projection optical system, exposure device, exposure method, display manufacturing method, mask, and mask manufacturing method |
| 03/11/2009 | CN101385122A Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method and device manufacturing method |
| 03/11/2009 | CN101385121A Pattern forming apparatus, pattern forming method, mobile object driving system, mobile body driving method, exposure apparatus, exposure method and device manufacturing method |
| 03/11/2009 | CN101385120A Measuring device and method, processing device and method, pattern forming device and method, exposing device and method, and device fabricating method |
| 03/11/2009 | CN101385119A Low-noise semiconductor photodetectors |
| 03/11/2009 | CN101385113A Ion implanting apparatus |
| 03/11/2009 | CN101385087A SONOS memory device with reduced short-channel effects |
| 03/11/2009 | CN101384969A Processing liquid for resist substrate and method of processing resist substrate using the same |
| 03/11/2009 | CN101384949A Active matrix substrate, display, television receiver, method for producing active matrix substrate and method for forming gate insulation film |
| 03/11/2009 | CN101384756A Process for producing zno single crystal according to method of liquid phase growth |
| 03/11/2009 | CN101384694A Stabilized, non-aqueous cleaning compositions for microelectronics substrates |
| 03/11/2009 | CN101384506A Silicon-germanium hydrides and methods for making and using same |
| 03/11/2009 | CN101384419A Wire embedded bridge |
| 03/11/2009 | CN101384128A Lower electrode assembly for processing substrates |
| 03/11/2009 | CN101383480A Method for preparing P type electrode of gallium nitride based semiconductor laser device |
| 03/11/2009 | CN101383381A Semiconductor device and method of fabricating the same |
| 03/11/2009 | CN101383379A Nanocrystalline floating gate memory of multi-medium composite tunnel layer and manufacturing method |