Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2009
03/05/2009WO2009008605A3 Maskless exposure method
03/05/2009WO2009007928A3 Methods for manufacturing integrated circuits
03/05/2009WO2009007907A3 Single crystal growth on a mis-matched substrate
03/05/2009WO2009006151A3 Arrays of inductive elements for minimizing radial non-uniformity in plasma
03/05/2009WO2009006072A3 Methods and arrangements for plasma processing system with tunable capacitance
03/05/2009WO2009005257A3 Method for manufacturing led package
03/05/2009WO2009000921A3 Semiconductor structure for the production of a carrier wafer contact in a trench-insulated soi disk
03/05/2009WO2008153770A3 Inspection system using back side illuminated linear sensor
03/05/2009WO2008151095A3 Vacuum substrate storage
03/05/2009WO2008150140A3 Optofluidic maskless lithography system
03/05/2009WO2008145930A3 Method for assembling a member of a holder by sintering a conducting powder mass
03/05/2009WO2008112096A3 Thick nitride semiconductor structures with interlayer structures and methods of fabricating thick nitride semiconductor structures
03/05/2009WO2008102060A3 High silicon content siloxane polymers for integrated circuits
03/05/2009WO2008045202A3 Method to deposit conformal low temperature sio2
03/05/2009WO2006049886A3 Euv collector debris management
03/05/2009WO2005080645A3 Diamond structure separation
03/05/2009WO2005078772A3 Method and apparatus for making a mems scanner
03/05/2009US20090064083 Computer automated method for designing an integrated circuit, a computer automated system for designing an integrated circuit, and a method of manufacturing an integrated circuit
03/05/2009US20090064066 Method and apparatus for designing semiconductor integrated circuit
03/05/2009US20090062959 Method and apparatus for robot calibrations with a calibrating device
03/05/2009US20090061748 Substrate holding apparatus
03/05/2009US20090061745 Polishing head using zone control
03/05/2009US20090061734 Endpoint detection system for wafer polishing
03/05/2009US20090061721 Method for manufacturing semiconductor device
03/05/2009US20090061651 Substrate processing apparatus and method for manufacturing semiconductor device
03/05/2009US20090061650 Sacrificial nitride and gate replacement
03/05/2009US20090061649 LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT
03/05/2009US20090061648 Method of manufacturing semiconductor device and substrate processing apparatus
03/05/2009US20090061647 Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp ii process
03/05/2009US20090061646 Vapor based combinatorial processing
03/05/2009US20090061645 semiconductor device including field effect transistors laterally enclosed by interlayer dielectric material having increased intrinsic stress
03/05/2009US20090061644 Vapor based combinatorial processing
03/05/2009US20090061643 Substrate processing method and recording medium
03/05/2009US20090061642 Nozzle assembly, apparatus for supplying processing solutions having the same and method of supplying processing solutions using the same
03/05/2009US20090061641 Method of forming a micro pattern of a semiconductor device
03/05/2009US20090061640 Alternate gas delivery and evacuation system for plasma processing apparatuses
03/05/2009US20090061639 Method for fabricating semiconductor device
03/05/2009US20090061638 Method for fabricating micropattern of semiconductor device
03/05/2009US20090061637 Manufacturing method for semiconductor device
03/05/2009US20090061636 Etching method for nitride semiconductor
03/05/2009US20090061635 Method for forming micro-patterns
03/05/2009US20090061634 Method for metallizing a pattern in a dielectric film
03/05/2009US20090061633 Method of manufacturing semiconductor device
03/05/2009US20090061632 Methods for cleaning etch residue deposited by wet etch processes for high-k dielectrics
03/05/2009US20090061631 Gate replacement with top oxide regrowth for the top oxide improvement
03/05/2009US20090061630 Method for Chemical Mechanical Planarization of A Metal-containing Substrate
03/05/2009US20090061629 Method of forming a metal directly on a conductive barrier layer by electrochemical deposition using an oxygen-depleted ambient
03/05/2009US20090061628 Laser trimming problem suppressing semiconductor device manufacturing apparatus and method
03/05/2009US20090061627 Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell
03/05/2009US20090061626 Method of manunfacturing semiconductor device
03/05/2009US20090061625 Lcd driver ic and method for manufacturing the same
03/05/2009US20090061624 Method of fabricating integrated circuit with small pitch
03/05/2009US20090061623 Method of forming electrical connection structure
03/05/2009US20090061622 Method for manufacturing semiconductor device capable of preventing lifting of amorphous carbon layer for hard mask
03/05/2009US20090061621 Method of forming a metal directly on a conductive barrier layer by electrochemical deposition using an oxygen-depleted ambient
03/05/2009US20090061620 Method of manufacturing a semiconductor device
03/05/2009US20090061619 Method of fabricating metal line
03/05/2009US20090061618 Method of Manufacturing Metal Interconnection
03/05/2009US20090061617 Edge bead removal process with ecmp technology
03/05/2009US20090061616 Method for fabricating semiconductor device
03/05/2009US20090061615 Method for forming contact in semiconductor device
03/05/2009US20090061614 Method for forming bumps on under bump metallurgy
03/05/2009US20090061613 Method of forming aluminum oxide layer and method of manufacturing charge trap memory device using the same
03/05/2009US20090061612 Nonvolatile memory device and method for fabricating the same
03/05/2009US20090061611 Fabricating dual layer gate electrodes having polysilicon and a workfunction metal
03/05/2009US20090061610 Semiconductor device and method of manufacturing the same
03/05/2009US20090061609 Methods of forming nitride read only memory and word lines thereof
03/05/2009US20090061608 Method of forming a semiconductor device having a silicon dioxide layer
03/05/2009US20090061607 Method of manufacturing photomask and method of manufacturing semiconductor device
03/05/2009US20090061606 Method for reducing dislocation threading using a suppression implant
03/05/2009US20090061605 Profile adjustment in plasma ion implanter
03/05/2009US20090061604 Germanium substrate-type materials and approach therefor
03/05/2009US20090061603 Method of crystallizing semiconductor film
03/05/2009US20090061602 Method for doping polysilicon and method for fabricating a dual poly gate using the same
03/05/2009US20090061601 Method and apparatus for improved pumping medium for electro-osmotic pumps
03/05/2009US20090061600 Method for reuse of wafers for growth of vertically-aligned wire arrays
03/05/2009US20090061599 Semiconductor wafer processing method
03/05/2009US20090061598 Wafer-level packaging cutting method capable of protecting contact pads
03/05/2009US20090061597 Singulator method and apparatus
03/05/2009US20090061596 Expanding tool, expanding method, and manufacturing method of unit elements
03/05/2009US20090061595 Method for dividing a semiconductor substrate and a method for producing a semiconductor circuit arrangement
03/05/2009US20090061594 Method of detaching a thin film by melting precipitates
03/05/2009US20090061593 Semiconductor Wafer Re-Use in an Exfoliation Process Using Heat Treatment
03/05/2009US20090061592 Semiconductor device and manufacturing method thereof
03/05/2009US20090061591 Method for manufacturing soi substrate
03/05/2009US20090061590 Method for manufacturing semiconductor device
03/05/2009US20090061589 Method of manufacturing semiconductor device having cylinder-type capacitor structure
03/05/2009US20090061588 Method for fabricating dynamic random access memory
03/05/2009US20090061587 Method for fabricating capacitor in semiconductor device
03/05/2009US20090061586 Strained Channel Transistor
03/05/2009US20090061585 High-voltage vertical transistor with a multi-gradient drain doping profile
03/05/2009US20090061584 Semiconductor Process for Trench Power MOSFET
03/05/2009US20090061583 Method for preparing dynamic random access memory structure
03/05/2009US20090061582 Manufacturing method of non-volatile memory
03/05/2009US20090061581 Method for manufacturing trench isolation structure and non-volatile memory
03/05/2009US20090061580 Method of forming finfet device
03/05/2009US20090061579 Layout method of semiconductor device with junction diode for preventing damage due to plasma charge
03/05/2009US20090061578 Method of Manufacturing a Semiconductor Microstructure
03/05/2009US20090061577 Method of producing product including silicon wires
03/05/2009US20090061576 Manufacturing method for compound semiconductor device and etching solution
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