Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2009
03/04/2009CN100466229C Multi-height finfets field effect trabsistor and the production method thereof
03/04/2009CN100466228C Single chip integration making technology for enhanced and consumption-up vertical dual diffusion field effect pipe
03/04/2009CN100466227C Method of manufacturing CMOS image sensor
03/04/2009CN100466226C Method for manufacturing CMOS image sensor
03/04/2009CN100466225C Substrate contact and the production method thereof
03/04/2009CN100466224C Method for manufacturing semiconductor device
03/04/2009CN100466223C Method for forming copper line
03/04/2009CN100466222C Carbon nano tube/copper composite plating membrane and method for preparing electricity interconnecting line
03/04/2009CN100466221C Method for forming landing plug contact in semiconductor device
03/04/2009CN100466220C Method for forming trench
03/04/2009CN100466219C Adjustable self-aligned air gap dielectric for low capacitance wiring
03/04/2009CN100466218C Manufacturing method of semiconductor
03/04/2009CN100466217C Stage, substrate processing apparatus and the control method thereof
03/04/2009CN100466216C Carrying processing device
03/04/2009CN100466215C 超声头 Ultrasound head
03/04/2009CN100466214C Resonator, ultrasonic head, and ultrasonic bonder using the resonator and the ultrasonic head
03/04/2009CN100466213C Semiconductor sealing resin sheet and the production method of semiconductor device using the semiconductor sealing resin sheet
03/04/2009CN100466212C Semiconductor package and the production method thereof
03/04/2009CN100466211C Method for sticking adhesive tape for die bonding and the method for mounting electronic component
03/04/2009CN100466210C Radiating semiconductor packer and the production method thereof
03/04/2009CN100466209C Semiconductor device and the processing and packaging method thereof
03/04/2009CN100466208C Random access memory and the production method thereof
03/04/2009CN100466207C Semiconductor transistor element and the production method thereof
03/04/2009CN100466206C Thin film transistor substrate and the production method thereof
03/04/2009CN100466205C Semiconductor devices and the production method thereof
03/04/2009CN100466204C A prodcution method for nano coulomb structure
03/04/2009CN100466203C Contoured insulator layer on silicon-on-insulator wafers and the production method thereof
03/04/2009CN100466202C Zener diode and the production method thereof
03/04/2009CN100466201C Heat treatment device, heat treatment system and temperature control method for heat treatment apparatus
03/04/2009CN100466200C method for reducing metallic contamination in silicon wafers
03/04/2009CN100466199C Method for cleaning residual metal
03/04/2009CN100466198C Manufacturing method of semiconductor device
03/04/2009CN100466197C Method of manufacturing semiconductor device
03/04/2009CN100466196C Method for manufacturing a thin dielectric layer by using a heat treatment and a semiconductor device
03/04/2009CN100466195C Method for removing clearance wall, metal semiconductor transistor parts and the production method thereof
03/04/2009CN100466194C Dielectric film and the manufacturing process thereof
03/04/2009CN100466193C Plasma processing device and ashing method
03/04/2009CN100466192C Liquid flow control system for wet processing tank, and wet processing system
03/04/2009CN100466191C Polishing device
03/04/2009CN100466190C Substrate processing equipment
03/04/2009CN100466189C Method of separating semiconductor wafer, and separating apparatus using the method
03/04/2009CN100466188C Conductive polishing component used for electrochemical mechanical polishing process
03/04/2009CN100466187C Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
03/04/2009CN100466186C method for producing the transistors with independent gate structures
03/04/2009CN100466185C Laser processing method and object to be processed
03/04/2009CN100466184C Wafer processing method
03/04/2009CN100466183C Method for separating semiconductor wafer from supporting member, and the apparatus using the method
03/04/2009CN100466182C Manufacturing method of plain conductor, electrode and thin-film transistor array substrate
03/04/2009CN100466181C Electromechanical memory array using nanotube ribbons and the production method thereof
03/04/2009CN100466180C Method for fabricating a semiconductor device and apparatus for inspecting a semiconductor
03/04/2009CN100466179C Method for transversely period doping of semiconductor material and the equipment thereof
03/04/2009CN100466178C Method for producing group III nitride crystal, group III nitride crystal obtained by such method, and group III nitride substrate applying the group III nitride crystal
03/04/2009CN100466177C Silicon chip III-family nitride-base semiconductor growing method
03/04/2009CN100466176C Nitride semiconductor single-crystal substrate and the synthesis method thereof
03/04/2009CN100466175C Method of forming freestanding semiconductor layer
03/04/2009CN100466174C Strained-silicon-on-insulator single-and double-gate MOSFET and method for forming the same
03/04/2009CN100466173C Method for producing semiconductor device
03/04/2009CN100466172C Method for forming group-III nitride semiconductor layer and semiconductor device
03/04/2009CN100466171C High depth-width ratio deep sub-micrometer, nanometer metal structure making process based on self-supporting thin film
03/04/2009CN100466170C Mask and the production method for producing compound semiconductor device with the mask
03/04/2009CN100466169C Method for making super thin two-way trigger tube
03/04/2009CN100466168C Method for identifying semiconductor integrated circuit device, the production method thereof and and semiconductor chip
03/04/2009CN100466167C production method of pliable active component array base board
03/04/2009CN100466166C Processing equipment assembly
03/04/2009CN100466165C A marking tool for optical microscope and the application method thereof
03/04/2009CN100466164C Vacuum chamber gas-filling system
03/04/2009CN100466163C Band extending device
03/04/2009CN100466162C Edge flow faceplate used for improving CVD film properties
03/04/2009CN100466161C Gas distribution apparatus used for semiconductor processing
03/04/2009CN100466160C Large-area substrate processing system
03/04/2009CN100466159C High-performance and non-contact support platforms
03/04/2009CN100466153C Method and apparatus for an improved deposition shield in a plasma processing system
03/04/2009CN100466152C Electrode for plasma processes and method for manufacture and application method thereof
03/04/2009CN100466096C Memory architecture with memory cell groups
03/04/2009CN100466095C Magnetoresistive element, magnetic memory cell and magnetic memory device
03/04/2009CN100466094C Reading operation of multi-bit storage unit in resistor-crossed point array
03/04/2009CN100466093C Magnetoresistive storage device with double-tunnel junction
03/04/2009CN100466022C Display device and the method for fabricating the device
03/04/2009CN100466019C Optical property normalization for a transparent electrical device
03/04/2009CN100465798C Method for reducing pattern dimension in photoresist layer
03/04/2009CN100465796C method for calculating the pixel value of the angle formed by the first and the second edge of a polygon
03/04/2009CN100465794C Stepped scanning photoetching machine vibration isolation system analoy experimental apparatus
03/04/2009CN100465793C Proximity type exposure apparatus
03/04/2009CN100465792C Laser drawing device, Laser drawing method and method for preparing optical mask
03/04/2009CN100465791C Exposure apparatus and method
03/04/2009CN100465789C A method and an apparatus thereof for performing placing models of phase-balanced scattering bars by sub-wavelength optical lithography
03/04/2009CN100465788C Lithography equipment
03/04/2009CN100465786C An optical micro-electromechanical component and a manufacturing method thereof
03/04/2009CN100465785C A lithographic apparatus and a manufacturing method of devices
03/04/2009CN100465784C A photosensitive ray composition, a pattern forming method and a manufacturing method of semiconductor devices
03/04/2009CN100465747C LCD device and a manufacturing method thereof
03/04/2009CN100465743C A display component using a laser mask crystal
03/04/2009CN100465742C An active matrix display
03/04/2009CN100465741C A liquid crystal display device and a repairing method and manufacturing method thereof
03/04/2009CN100465740C A display apparatus with improved luminescence propterties
03/04/2009CN100465716C A substrate assembling device and a method thereof
03/04/2009CN100465715C A method for forming pad electrodes and a method for manufacturing liquid crystal display devices
03/04/2009CN100465704C A contact structure and a manufacturing method, a thin film transistor array panel and a manufacturing Method
03/04/2009CN100465702C A manufacturing method of electronic devices and an electronic device
03/04/2009CN100465681C A laser heating device