| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/04/2009 | CN100465649C A semiconductor device, a manufacturing method, a device forming substrate and a wiring connection testing method |
| 03/04/2009 | CN100465627C A scanning probe inspection apparatus |
| 03/04/2009 | CN100465625C A viewing method and a system of chip figures |
| 03/04/2009 | CN100465612C Defect detection method |
| 03/04/2009 | CN100465450C A composite dry vacuum pump with roots rotors and screw rotors |
| 03/04/2009 | CN100465356C A GaN wafer with high surface quality and a production method thereof |
| 03/04/2009 | CN100465352C An integrated plating and planarization method and an apparatus thereof |
| 03/04/2009 | CN100465335C A flexible composite ferroelectric film and a preparation method thereof |
| 03/04/2009 | CN100464928C A bonding device and a bonding tool |
| 03/04/2009 | CN100464927C A method and a system used for the temperature control of a substrate |
| 03/04/2009 | CN100464873C A slit nozzle |
| 03/03/2009 | US7500219 Exposure data generator and method thereof |
| 03/03/2009 | US7500206 Delay time verifying method with less processing load |
| 03/03/2009 | US7500163 Method and apparatus for selectively compacting test responses |
| 03/03/2009 | US7499582 Method for inspecting a defect in a photomask, method for manufacturing a semiconductor device and method for producing a photomask |
| 03/03/2009 | US7499259 Capacitor with hafnium, lanthanum and oxygen mixed dielectric and method for fabricating the same |
| 03/03/2009 | US7499180 Alignment stage, exposure apparatus, and semiconductor device manufacturing method |
| 03/03/2009 | US7499157 System for monitoring foreign particles, process processing apparatus and method of electronic commerce |
| 03/03/2009 | US7499149 Holographic mask for lithographic apparatus and device manufacturing method |
| 03/03/2009 | US7499148 Polarizer, projection lens system, exposure apparatus and exposing method |
| 03/03/2009 | US7499145 Illumination optical system and exposure apparatus having the same |
| 03/03/2009 | US7499122 Thin film transistor array substrate and repairing method of the same |
| 03/03/2009 | US7499117 Liquid crystal display device and manufacturing method thereof |
| 03/03/2009 | US7498679 Package substrate and semiconductor package using the same |
| 03/03/2009 | US7498678 Electronic assemblies and systems with filled no-flow underfill |
| 03/03/2009 | US7498675 Semiconductor component having plate, stacked dice and conductive vias |
| 03/03/2009 | US7498670 Semiconductor structures having electrophoretically insulated vias |
| 03/03/2009 | US7498665 Integrated circuit leadless package system |
| 03/03/2009 | US7498663 Semiconductor integrated circuit |
| 03/03/2009 | US7498661 Manufacturing method for semiconductor device, semiconductor device, and electronic apparatus |
| 03/03/2009 | US7498659 Semiconductor device, method of manufacturing the same, and phase shift mask |
| 03/03/2009 | US7498658 Trench gate type insulated gate bipolar transistor |
| 03/03/2009 | US7498652 Non-uniformly doped high voltage drain-extended transistor and method of manufacture thereof |
| 03/03/2009 | US7498649 Electro-optical device and electronic apparatus |
| 03/03/2009 | US7498647 Packaged microelectronic imagers and methods of packaging microelectronic imagers |
| 03/03/2009 | US7498645 Extreme ultraviolet (EUV) detectors based upon aluminum nitride (ALN) wide bandgap semiconductors |
| 03/03/2009 | US7498641 Partial replacement silicide gate |
| 03/03/2009 | US7498640 Self-aligned silicide process for silicon sidewall source and drain contacts and structure formed thereby |
| 03/03/2009 | US7498637 Semiconductor memory |
| 03/03/2009 | US7498635 Field effect transistor and application device thereof |
| 03/03/2009 | US7498631 Sensing memory device |
| 03/03/2009 | US7498630 Nonvolatile semiconductor memory |
| 03/03/2009 | US7498629 Stud electrode and process for making same |
| 03/03/2009 | US7498628 Capacitor for a semiconductor device and manufacturing method thereof |
| 03/03/2009 | US7498627 Semiconductor device including a TCAM having a storage element formed with a DRAM |
| 03/03/2009 | US7498625 Semiconductor device and manufacturing method thereof |
| 03/03/2009 | US7498619 Power electronic device of multi-drain type integrated on a semiconductor substrate and relative manufacturing process |
| 03/03/2009 | US7498608 Nitride-composite semiconductor laser element, its manufacturing method, and semiconductor optical device |
| 03/03/2009 | US7498604 Deposition stop time detection apparatus and methods for fabricating copper using the same |
| 03/03/2009 | US7498602 Protecting silicon germanium sidewall with silicon for strained silicon/silicon mosfets |
| 03/03/2009 | US7498596 Exposure method that obtains, prior to exposure, reticle surface form data and measurement position error, for scanning control |
| 03/03/2009 | US7498549 Selective layer millimeter-wave surface-heating system and method |
| 03/03/2009 | US7498520 Semiconductor multilayer wiring board and method of forming the same |
| 03/03/2009 | US7498294 organic polymer particles (A) having a crosslinked structure and a surfactant (B) and is used after chemical mechanical polishing. The cleaning method of a semiconductor substrate is a method for cleaning semiconductor substrates |
| 03/03/2009 | US7498273 Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II—remote plasma enhanced deposition processes |
| 03/03/2009 | US7498272 Method of depositing rare earth oxide thin films |
| 03/03/2009 | US7498271 Nitrogen based plasma process for metal gate MOS device |
| 03/03/2009 | US7498270 Method of forming a silicon oxynitride film with tensile stress |
| 03/03/2009 | US7498269 Contacting the surface with a solution of isopropyl alcohol and deionized water; contacting with ammonium fluoride, hydrogen peroxide, acetic acid, optionally ammonium acetate, anddeionized water; and finally contacting the silicon surface with deionized water |
| 03/03/2009 | US7498268 Gas delivery system for semiconductor processing |
| 03/03/2009 | US7498267 Method for forming semiconductor memory capacitor without cell-to-cell bridges |
| 03/03/2009 | US7498266 Method for structuring of silicon substrates for microsystem technological device elements and associated silicon substrate |
| 03/03/2009 | US7498265 Epitaxial silicon growth |
| 03/03/2009 | US7498264 Method to obtain fully silicided poly gate |
| 03/03/2009 | US7498263 Method of planarizing an inter-metal insulation film |
| 03/03/2009 | US7498262 Method of fabricating a thin film and metal wiring in a semiconductor device |
| 03/03/2009 | US7498261 Method and apparatus for forming metal film |
| 03/03/2009 | US7498260 Pass through via technology for use during the manufacture of a semiconductor device |
| 03/03/2009 | US7498259 Through electrode and method for forming the same |
| 03/03/2009 | US7498258 Through-hole conductors for semiconductor substrates and method for making same |
| 03/03/2009 | US7498257 Methods for metal ARC layer formation |
| 03/03/2009 | US7498256 Copper contact via structure using hybrid barrier layer |
| 03/03/2009 | US7498255 Post passivation interconnection schemes on top of the IC chips |
| 03/03/2009 | US7498254 Plating seed layer including an oxygen/nitrogen transition region for barrier enhancement |
| 03/03/2009 | US7498253 Local interconnection method and structure for use in semiconductor device |
| 03/03/2009 | US7498252 Dual layer dielectric stack for microelectronics having thick metal lines |
| 03/03/2009 | US7498250 Shapes-based migration of aluminum designs to copper damascene |
| 03/03/2009 | US7498249 Method of forming a connecting conductor and wirings of a semiconductor chip |
| 03/03/2009 | US7498248 Methods of compensating for an alignment error during fabrication of structures on semiconductor substrates |
| 03/03/2009 | US7498247 Atomic layer deposition of Hf3N4/HfO2 films as gate dielectrics |
| 03/03/2009 | US7498246 Method of manufacturing a semiconductor device having a stepped gate structure |
| 03/03/2009 | US7498245 Embrittled substrate and method for making same |
| 03/03/2009 | US7498244 Method for fabricating GaN-based nitride layer |
| 03/03/2009 | US7498243 Crystalline-type device and approach therefor |
| 03/03/2009 | US7498242 Plasma pre-treating surfaces for atomic layer deposition |
| 03/03/2009 | US7498241 Semiconductor manufacturing method of die pick-up from wafer |
| 03/03/2009 | US7498240 Microfeature workpieces, carriers, and associated methods |
| 03/03/2009 | US7498239 Wafer processing method |
| 03/03/2009 | US7498238 Chip and method for dicing wafer into chips |
| 03/03/2009 | US7498237 Method of manufacturing devices, positioning method, dicing method and dicing apparatus |
| 03/03/2009 | US7498236 Silicon wafer thinning end point method |
| 03/03/2009 | US7498235 Method for fabricating SiGe-on-insulator (SGOI) and Ge-on-insulator (GOI) substrates |
| 03/03/2009 | US7498234 Method of producing a thin layer of semiconductor material |
| 03/03/2009 | US7498233 Method of forming an insulation layer structure having a concave surface and method of manufacturing a memory device using the same |
| 03/03/2009 | US7498232 Semiconductor devices and methods of manufacture thereof |
| 03/03/2009 | US7498231 Multiple data state memory cell |
| 03/03/2009 | US7498230 Magnesium-doped zinc oxide structures and methods |
| 03/03/2009 | US7498229 Transistor and in-situ fabrication process |
| 03/03/2009 | US7498228 Method for fabricating SONOS a memory |
| 03/03/2009 | US7498227 Method for manufacturing a non-volatile memory device |