Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2009
03/11/2009CN100468675C Method for manufacturing stacked body used for COF substrate,
03/11/2009CN100468674C Semiconductor device and production method therefor, wiring board and production method therefor, semiconductor package and electronic apparatus
03/11/2009CN100468673C 凸块形成方法及焊接凸块 Bumps and solder bump forming method
03/11/2009CN100468672C Apparatus and method for placing electronic components
03/11/2009CN100468671C Method for fabrication of a contact structure
03/11/2009CN100468670C Connection technique for power semiconductors comprising large-area terminals
03/11/2009CN100468669C Method of forming a semiconductor package and leadframe therefor
03/11/2009CN100468668C Method for mounting semiconductor device, circuit board, electrooptic device, and electronic device
03/11/2009CN100468667C Ceramic welding mold for welding and packaging semiconductor chip and lead-out wire
03/11/2009CN100468666C Process for fabricating electronic components using liquid injection molding and electronic components fabricated by the method
03/11/2009CN100468665C Image sensing-detecting chip packing process
03/11/2009CN100468664C Chemical etching method for zinc oxide ultraviolet focal-plane imaging array preparing process
03/11/2009CN100468663C Gate electrode for MOS transistors
03/11/2009CN100468662C Method for growing the ZnO thin film at the SiO2 underlay
03/11/2009CN100468661C Making method for IV-VI semiconductor single crystal film and the heterogeneous structure
03/11/2009CN100468660C Method for producing metal-oxide-semiconductor transistor
03/11/2009CN100468659C Method of manufacturing dielectric film of flash memory device
03/11/2009CN100468658C Method of manufacturing semiconductor device
03/11/2009CN100468657C Solid multi-grid component and its manufacturing method
03/11/2009CN100468656C Semiconductor diode and method therefor
03/11/2009CN100468655C Apparatus and methods for junction formation using optical illumination
03/11/2009CN100468654C Light irradiation heat treatment method and light irradiation heat treatment apparatus
03/11/2009CN100468653C Method for preventing copper diffusion and fabricating method for semiconductor device
03/11/2009CN100468652C Process for removing a residue from a metal structure on a semiconductor substrate
03/11/2009CN100468651C Trend insulation method
03/11/2009CN100468650C Making method of semiconductor memory part
03/11/2009CN100468649C Manufacturing method of opening and contact hole
03/11/2009CN100468648C Atomic layer deposition of high k metal oxide
03/11/2009CN100468647C Grinding agent and grinding method
03/11/2009CN100468646C Chemical-mechanical grinding method
03/11/2009CN100468645C Method for producing semiconductor wafer
03/11/2009CN100468644C Protective layer during scribing
03/11/2009CN100468643C Substrate holding apparatus and polishing apparatus
03/11/2009CN100468642C Method for forming a photoresist pattern
03/11/2009CN100468641C Wafer dividing method and dividing apparatus
03/11/2009CN100468640C Etching method and contact window forming method
03/11/2009CN100468639C Method of room temperature covalent bonding
03/11/2009CN100468638C Method for manufacturing semiconductor elements
03/11/2009CN100468637C Method for producing air bridge of compound semiconductor microwave high power device
03/11/2009CN100468636C Forming method of metal oxide semiconductor device grids structure
03/11/2009CN100468635C Manufacturing method of metal oxide semiconductor device
03/11/2009CN100468634C Semiconductor device making method
03/11/2009CN100468633C Making method for grid structure
03/11/2009CN100468632C Water-cooling plasma shower
03/11/2009CN100468631C Susceptor
03/11/2009CN100468630C Method and equipment for forming crystalline silicon thin film
03/11/2009CN100468629C Vacuum control system
03/11/2009CN100468628C Methods for forming germanium-on-insulator semiconductor structures and semiconductor structures formed by these methods
03/11/2009CN100468627C Method of producing a nitride semiconductor device and nitride semiconductor device
03/11/2009CN100468626C method for manufacturing semiconductor device
03/11/2009CN100468625C Methods of selective deposition of heavily doped epitaxial sige
03/11/2009CN100468624C Exposure method and exposure apparatus, stage unit, and device manufacturing method
03/11/2009CN100468623C Aligning method, alignment checking method and photomask
03/11/2009CN100468622C Analog capacitor having at least three high-k dielectric layers, and method of fabricating the same
03/11/2009CN100468621C Integrated circuit arrangement comprising a capacitor, and production method
03/11/2009CN100468620C Substrate treatment apparatus
03/11/2009CN100468619C Temperature control device of etching equipment and its method for controlling wafer temperature
03/11/2009CN100468618C Making method for semiconductor part removing residual polyester in etching
03/11/2009CN100468617C Simplified wafer alignment
03/11/2009CN100468616C Purging of a wafer conveyance container
03/11/2009CN100468615C Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate
03/11/2009CN100468614C A low thermal resistance device and method of forming the same
03/11/2009CN100468613C Method and apparatus for removing material from a substrate surface
03/11/2009CN100468612C Semiconductor device and method of manufacturing the same
03/11/2009CN100468611C Method and apparatus for cleaning of native oxide with hydrogen-containing radicals
03/11/2009CN100468606C One-dimensional mechanical scaning device of ion implantation apparatus
03/11/2009CN100468605C Adjustable implantation angle workpiece support structure for an ion beam implanter
03/11/2009CN100468604C System and method for removing particles entrained in ion beam
03/11/2009CN100468569C Pump circuits and methods for integrated circuits
03/11/2009CN100468566C Ferroelectric memory device
03/11/2009CN100468565C Magnetic random access memory
03/11/2009CN100468528C Method for producing pattern magnetic-recording medium with continuous inverse-impression direct transfer
03/11/2009CN100468451C Memory card packaging method and structure
03/11/2009CN100468256C Method for automatic configuration of a processing system
03/11/2009CN100468237C Method for ingelligent optimizing procedure of semiconductor packing producing line
03/11/2009CN100468213C Alignment system for photoetching device and stage jointing grating system
03/11/2009CN100468211C Method for reducing pattern dimension in photoresist layer
03/11/2009CN100468210C Method for manufacturing semiconductor device using immersion lithography process
03/11/2009CN100468208C Overload buffer protection device
03/11/2009CN100468207C Method for removing etching residue
03/11/2009CN100468206C Composite vibration damping type photolithography device
03/11/2009CN100468204C Method and apparatus for simulating lithographic process
03/11/2009CN100468203C Aligning position determination method by higher off-axis aligning signal
03/11/2009CN100468202C Accurate adjustable positioning device
03/11/2009CN100468201C Adaptive lithographic critical dimension enhancement
03/11/2009CN100468200C Lithographic apparatus and device manufacturing method
03/11/2009CN100468198C Method for cutting film workpiece
03/11/2009CN100468197C lightscribing device and apparatus manufacturing method
03/11/2009CN100468196C Method and apparatus for providing optical proximity correction features to a reticle pattern for optical lithography
03/11/2009CN100468193C Pattern correction method of exposed mask and manufacturing method for semiconductor device
03/11/2009CN100468125C Light beam honogenizer and laser radiation device and semiconductor device producing method
03/11/2009CN100468102C Solution to thermal budget
03/11/2009CN100468084C Methods of manufacturing microlenses, microlens arrays and image sensors
03/11/2009CN100468065C Sheet probe, manufacturing method and application therefor
03/11/2009CN100468016C Gas flow rate control device verify method
03/11/2009CN100467988C System and method for controlling movement of a workpiece in a thermal processing system
03/11/2009CN100467670C Acid corrosion solution for preparing multicrystal silicon pile surface and its using method
03/11/2009CN100467561C Re-peelable adhesive sheet, semiconductor component using the same and producing method thereof
03/11/2009CN100467541C Porous-film-forming composition, preparation method of the composition, porous film and semiconductor device
03/11/2009CN100467227C Separating collector and collecting method for waste chemico-mechanical polishing liquid