| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/03/2009 | US7498226 Method for fabricating semiconductor device with step gated asymmetric recess |
| 03/03/2009 | US7498225 Systems and methods for forming multiple fin structures using metal-induced-crystallization |
| 03/03/2009 | US7498224 Strained silicon forming method with reduction of threading dislocation density |
| 03/03/2009 | US7498223 Semiconductor devices having improved field plates |
| 03/03/2009 | US7498222 Enhanced etching of a high dielectric constant layer |
| 03/03/2009 | US7498221 Method of forming gate of semiconductor device |
| 03/03/2009 | US7498220 Methods of fabricating semiconductor memory devices including different dielectric layers for the cell transistors and refresh transistors thereof |
| 03/03/2009 | US7498219 Methods for reducing capacitor dielectric absorption and voltage coefficient |
| 03/03/2009 | US7498218 Semiconductor device with low contact resistance and method for fabricating the same |
| 03/03/2009 | US7498217 Methods of manufacturing semiconductor memory devices with unit cells having charge trapping layers |
| 03/03/2009 | US7498216 Method of forming high-performance CMOS SOI devices on hybrid crystal-oriented substrates |
| 03/03/2009 | US7498215 Method of producing product including silicon wires |
| 03/03/2009 | US7498214 Semiconductor devices and manufacturing methods of the same |
| 03/03/2009 | US7498213 Methods of fabricating a semiconductor substrate for reducing wafer warpage |
| 03/03/2009 | US7498212 Laser annealing method and semiconductor device fabricating method |
| 03/03/2009 | US7498211 Independently controlled, double gate nanowire memory cell with self-aligned contacts |
| 03/03/2009 | US7498210 LTPS-LCD structure and method for manufacturing the same |
| 03/03/2009 | US7498209 Etching tape and method of fabricating array substrate for liquid crystal display using the same |
| 03/03/2009 | US7498208 Chevron CMOS trigate structure |
| 03/03/2009 | US7498207 Semiconductor memory device and manufacturing method of the same |
| 03/03/2009 | US7498206 Order receiving process for manufacturing a semiconductor display device |
| 03/03/2009 | US7498205 Method for manufacturing substrate with cavity |
| 03/03/2009 | US7498204 Structure and method for improved heat conduction for semiconductor devices |
| 03/03/2009 | US7498203 Thermally enhanced BGA package with ground ring |
| 03/03/2009 | US7498202 Method for die attaching |
| 03/03/2009 | US7498201 Method of forming a multi-die semiconductor package |
| 03/03/2009 | US7498200 Electronic-parts-packaging structure in which a semiconductor chip is mounted on a wiring substrate and buried in an insulation film |
| 03/03/2009 | US7498199 Method for fabricating semiconductor package |
| 03/03/2009 | US7498198 Structure and method for stress reduction in flip chip microelectronic packages using underfill materials with spatially varying properties |
| 03/03/2009 | US7498197 Silica nanoparticles thermoset resin compositions |
| 03/03/2009 | US7498196 Structure and manufacturing method of chip scale package |
| 03/03/2009 | US7498195 Multi-chip semiconductor connector assembly method |
| 03/03/2009 | US7498194 Semiconductor arrangement |
| 03/03/2009 | US7498193 Package with barrier wall and method for manufacturing the same |
| 03/03/2009 | US7498192 Methods of providing a family of related integrated circuits of different sizes |
| 03/03/2009 | US7498191 Semiconductor-on-diamond devices and associated methods |
| 03/03/2009 | US7498190 Method for fabricating a CMOS image sensor |
| 03/03/2009 | US7498189 Method of producing a radiation detector with a polysilicon converting layer |
| 03/03/2009 | US7498188 Contacts for CMOS imagers and method of formation |
| 03/03/2009 | US7498187 Method for producing gallium nitride light emitting diode wafer |
| 03/03/2009 | US7498186 Method for packaging organic light emitting display with frit seal and reinforcing structure |
| 03/03/2009 | US7498185 Light emitting diode and method making the same |
| 03/03/2009 | US7498184 Production method for semiconductor device |
| 03/03/2009 | US7498183 Fabrication of conductive micro traces using a deform and selective removal process |
| 03/03/2009 | US7498182 Method of manufacturing an ultraviolet light emitting AlGaN composition and ultraviolet light emitting device containing same |
| 03/03/2009 | US7498180 Method for manufacturing semiconductor device |
| 03/03/2009 | US7498179 Semiconductor device having ferroelectric material capacitor and method of making the same |
| 03/03/2009 | US7498118 Immersing substrate coated with photoresist in a liquid having a refractive index greater than or equal to 1.4;exposing substrate; removing the liquid from the substrate by rotating the stage and/or substrate at high speed; developing the photoresist |
| 03/03/2009 | US7498106 Method and apparatus for controlling etch processes during fabrication of semiconductor devices |
| 03/03/2009 | US7498076 Forming patterned electrodes on the releasable flat face of two spaced apart support plates; packing a dielectric material between the plates to embed the electrodes; and separating the support plates from the porous dielectric substrate; for manufacturing high-frequency circuit boards |
| 03/03/2009 | US7498060 Method for controlling at nanometric scale the growth of thin films of conjugated organic molecules |
| 03/03/2009 | US7497967 Compositions and methods for polishing copper |
| 03/03/2009 | US7497966 Chemical mechanical polishing slurry composition for shallow trench isolation process of semiconductor |
| 03/03/2009 | US7497964 Plasma igniting method and substrate processing method |
| 03/03/2009 | US7497963 Etching method |
| 03/03/2009 | US7497959 Methods and structures for protecting one area while processing another area on a chip |
| 03/03/2009 | US7497958 Methods of forming capacitors |
| 03/03/2009 | US7497932 Electro-chemical deposition system |
| 03/03/2009 | US7497912 Substrate processing apparatus |
| 03/03/2009 | US7497908 Film coating unit and film coating method |
| 03/03/2009 | US7497905 Ternary nitride-based buffer layer of a nitride-based light-emitting device and a method for manufacturing the same |
| 03/03/2009 | US7497333 Thin plate supporting container |
| 03/03/2009 | US7497221 Method for cleaning deposition chamber |
| 03/03/2009 | US7497095 Method for producing quartz glass jig and quartz glass jig |
| 03/03/2009 | US7497026 Method and system for detection of wafer centering in a track lithography tool |
| 02/26/2009 | WO2009026521A1 Sealing between vacuum chambers |
| 02/26/2009 | WO2009026509A2 Semiconductor package having buss-less substrate |
| 02/26/2009 | WO2009026466A1 Nanostructures having high performance thermoelectric properties |
| 02/26/2009 | WO2009026403A2 Semiconductor device formed with source/drain nitrogen implant |
| 02/26/2009 | WO2009026372A1 Wafer presence detection |
| 02/26/2009 | WO2009026350A2 Semiconductor device source and drain regions formed utilizing dual capping layers and split thermal processes |
| 02/26/2009 | WO2009026324A2 Composition and method for removing ion-implanted photoresist |
| 02/26/2009 | WO2009026298A1 Mask trimming |
| 02/26/2009 | WO2009026297A1 Mask trimming with arl etch |
| 02/26/2009 | WO2009026240A1 Methods for liquid transfer coating of three-dimensional substrates |
| 02/26/2009 | WO2009026174A1 Method and structure for shielded gate trench fet |
| 02/26/2009 | WO2009025986A1 Formation of a slot in a silicon substrate |
| 02/26/2009 | WO2009025961A2 Semiconductor component and method of manufacture |
| 02/26/2009 | WO2009025942A1 Methods of forming through substrate interconnects |
| 02/26/2009 | WO2009025718A1 Krypton sputtering of thin tungsten layer for integrated circuits |
| 02/26/2009 | WO2009025706A1 Mos structures that exhibit lower contact resistance and methods for fabricating the same |
| 02/26/2009 | WO2009025481A1 Method for production of thin film and apparatus for manufacturing the same |
| 02/26/2009 | WO2009025427A1 Probe card |
| 02/26/2009 | WO2009025426A1 Probe block |
| 02/26/2009 | WO2009025410A1 Semiconductor manufacturing apparatus |
| 02/26/2009 | WO2009025409A1 Semiconductor manufacturing apparatus |
| 02/26/2009 | WO2009025408A1 Semiconductor manufacturing apparatus |
| 02/26/2009 | WO2009025403A1 Apparatus for adjusting pitch of buffer tray and apparatus for transferring semiconductor devices using the buffer tray |
| 02/26/2009 | WO2009025383A1 Polishing composition |
| 02/26/2009 | WO2009025368A1 Semiconductor storage device and method for manufacturing semiconductor storage device |
| 02/26/2009 | WO2009025362A1 Vaporizer, material gas supply system including vaporizer and film forming apparatus using such system |
| 02/26/2009 | WO2009025342A1 Silicon single crystal wafer for igbt and method for manufacturing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025341A1 Silicon single crystal wafer for igbt and method for manufacturing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025340A1 Silicon single crystal wafer for igbt and method for manufacturing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025339A1 Silicon single crystal wafer for igbt and method for manufacturing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025338A1 Silicon single crystal wafer for igbt and method for manufacturing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025337A1 Silicon single crystal wafer for igbt, process for producing silicon single crystal wafer for igbt, and method for ensuring electric resistivity of silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025336A1 Silicon single crystal wafer for igbt and process for producing silicon single crystal wafer for igbt |
| 02/26/2009 | WO2009025317A1 Solution for removal of residue after semiconductor dry processing, and residue removal method using the same |
| 02/26/2009 | WO2009025308A1 Horizontal high driving performance semiconductor device using trench structure |